INTEGRATED CIRCUIT INCLUDING SWITCH CELL AREA

    公开(公告)号:US20240234294A1

    公开(公告)日:2024-07-11

    申请号:US18393092

    申请日:2023-12-21

    摘要: An integrated circuit includes: a plurality of first power rails extending in a first horizontal direction and configured to provide a first power supply voltage that is applied thereto; a plurality of second power rails extending in the first horizontal direction and configured to provide a second power supply voltage that is applied thereto; and a power line in a switch cell area and extending in the first horizontal direction the power line being configured to provide a global power supply voltage that is applied thereto, wherein the plurality of first power rails and the plurality of second power rails are alternately arranged in a second horizontal direction vertical to the first horizontal direction, wherein the plurality of first power rails, the plurality of second power rails, and the power line form a front-side pattern on a same layer, and wherein the power line is provided between two second power rails adjacent to each other in the first horizontal direction, among the plurality of second power rails.

    SEMICONDUCTOR DEVICE
    90.
    发明公开

    公开(公告)号:US20240222450A1

    公开(公告)日:2024-07-04

    申请号:US18221479

    申请日:2023-07-13

    摘要: A semiconductor device includes a fin-shaped pattern, a field insulating film covering a sidewall of the fin-shaped pattern, a source/drain pattern disposed on an upper surface of the fin-shaped pattern, a source/drain etch stop film extending along an upper surface of the field insulating film and a sidewall of the source/drain pattern, a source/drain contact connected to the source/drain pattern, a buried conductive pattern penetrating through a substrate and connected to the source/drain contact, a portion of the buried conductive pattern being disposed within the field insulating film, and a rear wiring line connected to the buried conductive pattern. The field insulating film includes a first field filling film and a first field stop film. The first field stop film is disposed between the first field filling film and the substrate. The first field stop film includes a material having etch selectivity with respect to the first field filling film.