公开(公告)号：US08755227B2

公开(公告)日：2014-06-17

申请号：US13361916

申请日：2012-01-30

申请人： Wei Lin ,  Riichiro Shirota ,  Nina Mitiukhina ,  Tsai-Hao Kuo

发明人： Wei Lin ,  Riichiro Shirota ,  Nina Mitiukhina ,  Tsai-Hao Kuo

IPC分类号： G11C16/00 ,  G11C16/04 ,  G11C16/10 ,  G11C16/14

CPC分类号： G11C16/0483 ,  G11C16/10 ,  G11C16/14 ,  H01L27/1157 ,  H01L27/11578

摘要： A NAND flash memory unit is described, including a string of memory cells connected in series, S/D regions coupled to two terminals of the string, at least one select transistor couple between a terminal of the string and an S/D region, and at least one erase transistor couple between the at least one select transistor and an S/D region. The select transistor is for selecting the string of memory cells. The erase transistor is for reducing Vt-shift of the select transistor.

摘要翻译： 描述了NAND​​闪存单元，其包括串联连接的一串存储器单元，耦合到串的两个端子的S / D区，串的端子与S / D区之间的至少一个选择晶体管耦合，以及 所述至少一个擦除晶体管耦合在所述至少一个选择晶体管和S / D区之间。 选择晶体管用于选择存储单元串。 擦除晶体管用于减小选择晶体管的Vt-偏移。

公开(公告)号：US08637915B2

公开(公告)日：2014-01-28

申请号：US13007258

申请日：2011-01-14

申请人： Masayuki Ichige ,  Fumitaka Arai ,  Riichiro Shirota ,  Toshitake Yaegashi ,  Yoshio Ozawa ,  Akihito Yamamoto ,  Ichiro Mizushima ,  Yoshihiko Saito

发明人： Masayuki Ichige ,  Fumitaka Arai ,  Riichiro Shirota ,  Toshitake Yaegashi ,  Yoshio Ozawa ,  Akihito Yamamoto ,  Ichiro Mizushima ,  Yoshihiko Saito

IPC分类号： H01L29/788

CPC分类号： H01L29/42336 ,  H01L21/28273 ,  H01L27/0207 ,  H01L27/115 ,  H01L27/11521 ,  H01L27/11524 ,  H01L29/42324 ,  H01L29/7881

摘要： A nonvolatile semiconductor memory includes first and second memory cells having a floating gate and a control gate. The floating gate of the first and second memory cells is comprised a first part, and a second part arranged on the first part, and a width of the second part in an extending direction of the control gate is narrower than that of the first part. A first space between the first parts of the first and second memory cells is filled with one kind of an insulator. The control gate is arranged at a second space between the second parts of the first and second memory cells.

摘要翻译： 非易失性半导体存储器包括具有浮动栅极和控制栅极的第一和第二存储单元。 第一和第二存储单元的浮动栅极包括第一部分和布置在第一部分上的第二部分，并且第二部分在控制栅极的延伸方向上的宽度比第一部分的宽度窄。 第一和第二存储单元的第一部分之间的第一空间填充有一种绝缘体。 控制栅极被布置在第一和第二存储单元的第二部分之间的第二空间处。

公开(公告)号：US08421143B2

公开(公告)日：2013-04-16

申请号：US13421248

申请日：2012-03-15

申请人： Michiharu Matsui ,  Seiichi Mori ,  Riichiro Shirota ,  Yuji Takeuchi ,  Takeshi Kamigaichi

发明人： Michiharu Matsui ,  Seiichi Mori ,  Riichiro Shirota ,  Yuji Takeuchi ,  Takeshi Kamigaichi

IPC分类号： H01L29/788

CPC分类号： H01L27/11548 ,  H01L27/115 ,  H01L27/11519 ,  H01L27/11526 ,  H01L27/11529 ,  H01L29/788

摘要： Disclosure is semiconductor device of a selective gate region, comprising a semiconductor layer, a first insulating film formed on the semiconductor layer, a first electrode layer formed on the first insulating layer, an element isolating region comprising an element isolating insulating film formed to extend through the first electrode layer and the first insulating film to reach an inner region of the semiconductor layer, the element isolating region isolating a element region and being self-aligned with the first electrode layer, a second insulating film formed on the first electrode layer and the element isolating region, an open portion exposing a surface of the first electrode layer being formed in the second insulating film, and a second electrode layer formed on the second insulating film and the exposed surface of the first electrode layer, the second electrode layer being electronically connected to the first electrode layer via the open portion.

公开(公告)号：US08324679B2

公开(公告)日：2012-12-04

申请号：US13430153

申请日：2012-03-26

申请人： Masayuki Ichige ,  Fumitaka Arai ,  Riichiro Shirota ,  Toshitake Yaegashi ,  Yoshio Ozawa ,  Akihito Yamamoto ,  Ichiro Mizushima ,  Yoshihiko Saito

发明人： Masayuki Ichige ,  Fumitaka Arai ,  Riichiro Shirota ,  Toshitake Yaegashi ,  Yoshio Ozawa ,  Akihito Yamamoto ,  Ichiro Mizushima ,  Yoshihiko Saito

IPC分类号： H01L29/788

CPC分类号： H01L29/42336 ,  H01L21/28273 ,  H01L27/0207 ,  H01L27/115 ,  H01L27/11521 ,  H01L27/11524 ,  H01L29/42324 ,  H01L29/7881

摘要： A nonvolatile semiconductor memory includes first and second memory cells having a floating gate and a control gate. The floating gate of the first and second memory cells is comprised a first part, and a second part arranged on the first part, and a width of the second part in an extending direction of the control gate is narrower than that of the first part. A first space between the first parts of the first and second memory cells is filled with one kind of an insulator. The control gate is arranged at a second space between the second parts of the first and second memory cells.

摘要翻译： 非易失性半导体存储器包括具有浮动栅极和控制栅极的第一和第二存储单元。 第一和第二存储单元的浮动栅极包括第一部分和布置在第一部分上的第二部分，并且第二部分在控制栅极的延伸方向上的宽度比第一部分的宽度窄。 第一和第二存储单元的第一部分之间的第一空间填充有一种绝缘体。 控制栅极被布置在第一和第二存储单元的第二部分之间的第二空间处。

公开(公告)号：US20110267886A1

公开(公告)日：2011-11-03

申请号：US13179714

申请日：2011-07-11

申请人： Tomoharu Tanaka ,  Hiroshi Nakamura ,  Ken Takeuchi ,  Riichiro Shirota ,  Fumitaka Arai ,  Susumu Fujimura

发明人： Tomoharu Tanaka ,  Hiroshi Nakamura ,  Ken Takeuchi ,  Riichiro Shirota ,  Fumitaka Arai ,  Susumu Fujimura

IPC分类号： G11C16/04

CPC分类号： G11C16/0483 ,  G11C11/5621 ,  G11C11/5628 ,  G11C11/5635 ,  G11C16/3404 ,  G11C16/3409 ,  G11C16/344 ,  G11C16/3445 ,  G11C16/345 ,  G11C16/3454 ,  G11C16/3459 ,  G11C16/3463 ,  G11C2211/5621

摘要： A NAND cell unit includes memory cells which are connected in series. An erase operation is effected on all memory cells. Then, a soft-program voltage, which is opposite in polarity to the erase voltage applied in an erase operation, is applied to all memory cells, thereby setting all memory cells out of an over-erased state. Thereafter, a program voltage of 20V is applied to the control gate of a selected memory cell, 0V is applied to the control gates of the two memory cells provided adjacent to the selected memory cell, and 11V is applied to the control gates of the remaining memory cells. Data is thereby programmed into the selected memory cell. The time for which the program voltage is applied to the selected memory cell is adjusted in accordance with the data to be programmed into the selected memory cell. Hence, data “0” can be correctly programmed into the selected memory cell, multi-value data can be read from any selected memory cell at high speed.

摘要翻译： NAND单元单元包括串联连接的存储单元。 对所有存储单元进行擦除操作。 然后，将与擦除操作中施加的擦除电压极性相反的软编程电压施加到所有存储单元，从而将所有存储单元设置为过擦除状态。 此后，将20V的编程电压施加到所选择的存储单元的控制栅极，将0V施加到与所选存储单元相邻设置的两个存储单元的控制栅极，并且将11V施加到其余的控制栅极 记忆细胞 因此数据被编程到所选择的存储单元中。 根据要编程到所选择的存储单元中的数据来调整对所选存储单元施加编程电压的时间。 因此，可以将数据“0”正确地编程到所选择的存储单元中，可以从任何选择的存储单元高速读取多值数据。

公开(公告)号：US08048741B2

公开(公告)日：2011-11-01

申请号：US12715964

申请日：2010-03-02

申请人： Fumitaka Arai ,  Riichiro Shirota ,  Makoto Mizukami

发明人： Fumitaka Arai ,  Riichiro Shirota ,  Makoto Mizukami

IPC分类号： H01L21/336

CPC分类号： H01L29/792 ,  G11C16/0483 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11551 ,  H01L27/11556 ,  H01L27/11568 ,  H01L27/11578 ,  H01L27/11582 ,  H01L29/4234 ,  H01L29/66833 ,  H01L29/7926

摘要： A semiconductor memory device includes: a semiconductor substrate, on which an impurity diffusion layer is formed in a cell array area; a gate wiring stack body formed on the cell array area, in which multiple gate wirings are stacked and separated from each other with insulating films; a gate insulating film formed on the side surface of the gate wiring stack body, in which an insulating charge storage layer is contained; pillar-shaped semiconductor layers arranged along the gate wiring stack body, one side surfaces of which are opposed to the gate wiring stack body via the gate insulating film, each pillar-shaped semiconductor layer having the same conductivity type as the impurity diffusion layer; and data lines formed to be in contact with the upper surfaces of the pillar-shaped semiconductor layers and intersect the gate wirings.

摘要翻译： 半导体存储器件包括：在单元阵列区域中形成有杂质扩散层的半导体衬底; 形成在电池阵列区域上的栅极布线堆叠体，其中多个栅极布线彼此堆叠并且用绝缘膜分离; 形成在栅极布线堆叠体的侧表面上的栅极绝缘膜，其中包含绝缘电荷存储层; 沿着栅极布线堆叠体排列的柱状半导体层，其一个侧表面经由栅极绝缘膜与栅极布线堆叠体相对，每个柱状半导体层具有与杂质扩散层相同的导电类型; 以及形成为与柱状半导体层的上表面接触并与栅极布线相交的数据线。

公开(公告)号：US07939406B2

公开(公告)日：2011-05-10

申请号：US12435842

申请日：2009-05-05

申请人： Michiharu Matsui ,  Seiichi Mori ,  Riichiro Shirota ,  Yuji Takeuchi ,  Takeshi Kamigaichi

发明人： Michiharu Matsui ,  Seiichi Mori ,  Riichiro Shirota ,  Yuji Takeuchi ,  Takeshi Kamigaichi

IPC分类号： H01L21/336

CPC分类号： H01L27/11526 ,  H01L21/76229 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11519 ,  H01L27/11521 ,  H01L27/11524 ,  H01L27/11529 ,  H01L27/11531 ,  H01L27/11543 ,  H01L29/7887

摘要： Disclosure is semiconductor device of a selective gate region, comprising a semiconductor layer, a first insulating film formed on the semiconductor layer, a first electrode layer formed on the first insulating layer, an element isolating region comprising an element isolating insulating film formed to extend through the first electrode layer and the first insulating film to reach an inner region of the semiconductor layer, the element isolating region isolating a element region and being self-aligned with the first electrode layer, a second insulating film formed on the first electrode layer and the element isolating region, an open portion exposing a surface of the first electrode layer being formed in the second insulating film, and a second electrode layer formed on the second insulating film and the exposed surface of the first electrode layer, the second electrode layer being electronically connected to the first electrode layer via the open portion.

摘要翻译： 公开是选择性栅极区域的半导体器件，包括半导体层，形成在半导体层上的第一绝缘膜，形成在第一绝缘层上的第一电极层，元件隔离区域，其包括形成为延伸穿过的元件隔离绝缘膜 所述第一电极层和所述第一绝缘膜到达所述半导体层的内部区域，所述元件隔离区域隔离元件区域并且与所述第一电极层自对准;第二绝缘膜，形成在所述第一电极层上， 元件隔离区域，暴露在第二绝缘膜中形成的第一电极层的表面的开口部分和形成在第二绝缘膜和第一电极层的暴露表面上的第二电极层，第二电极层是电子 经由开口部与第一电极层连接。

公开(公告)号：US07888730B2

公开(公告)日：2011-02-15

申请号：US11687758

申请日：2007-03-19

申请人： Masayuki Ichige ,  Fumitaka Arai ,  Riichiro Shirota ,  Toshitake Yaegashi ,  Yoshio Ozawa ,  Akihito Yamamoto ,  Ichiro Mizushima ,  Yoshihiko Saito

发明人： Masayuki Ichige ,  Fumitaka Arai ,  Riichiro Shirota ,  Toshitake Yaegashi ,  Yoshio Ozawa ,  Akihito Yamamoto ,  Ichiro Mizushima ,  Yoshihiko Saito

IPC分类号： H01L29/788

摘要： A nonvolatile semiconductor memory includes first and second memory cells having a floating gate and a control gate. The floating gate of the first and second memory cells is comprised a first part, and a second part arranged on the first part, and a width of the second part in an extending direction of the control gate is narrower than that of the first part. A first space between the first parts of the first and second memory cells is filled with one kind of an insulator. The control gate is arranged at a second space between the second parts of the first and second memory cells.

公开(公告)号：US07884422B2

公开(公告)日：2011-02-08

申请号：US11841257

申请日：2007-08-20

申请人： Makoto Mizukami ,  Riichiro Shirota ,  Fumitaka Arai

发明人： Makoto Mizukami ,  Riichiro Shirota ,  Fumitaka Arai

IPC分类号： H01L27/12

CPC分类号： H01L27/11524 ,  H01L21/84 ,  H01L27/115 ,  H01L27/11521 ,  H01L27/1203

摘要： A semiconductor memory including a plurality of cell units arranged in a row direction, each of the cell units includes: a semiconductor region; a first buried insulating film provided on the semiconductor region; a second buried insulating film provided on the first buried insulating film, which has higher dielectric constant than the first buried insulating film; a semiconductor layer provided on the second buried insulating film; and a plurality of memory cell transistors arranged in a column direction, each of the memory cell transistors having a source region, a drain region and a channel region defined in the semiconductor layer.

摘要翻译： 一种半导体存储器，包括沿行方向布置的多个单元单元，每个单元单元包括：半导体区域; 设置在半导体区域上的第一掩埋绝缘膜; 设置在第一掩埋绝缘膜上的第二掩埋绝缘膜，其具有比第一掩埋绝缘膜更高的介电常数; 设置在所述第二掩埋绝缘膜上的半导体层; 以及沿列方向布置的多个存储单元晶体管，每个存储单元晶体管具有限定在半导体层中的源极区，漏极区和沟道区。

公开(公告)号：US07875922B2

公开(公告)日：2011-01-25

申请号：US11961211

申请日：2007-12-20

申请人： Fumitaka Arai ,  Riichiro Shirota

发明人： Fumitaka Arai ,  Riichiro Shirota

IPC分类号： H01L29/00 ,  H01L21/336

CPC分类号： H01L29/792 ,  G11C16/0483 ,  H01L27/11524 ,  H01L27/11529 ,  H01L27/11556 ,  H01L29/7926

摘要： A nonvolatile semiconductor memory of an aspect of the present invention comprises a semiconductor substrate, a pillar-shaped semiconductor layer extending in the vertical direction with respect to the surface of the semiconductor substrate, a plurality of memory cells arranged in the vertical direction on the side surface of the semiconductor layer and having a charge storage layer and a control gate electrode, a first select gate transistor arranged on the semiconductor layer at an end of the memory cells on the side of the semiconductor substrate, and a second select gate transistor arranged on the semiconductor layer on the other end of the memory cells opposite to the side of the semiconductor substrate, wherein the first select gate transistor includes a diffusion layer in the semiconductor substrate and is electrically connected to the pillar-shaped semiconductor layer by way of the diffusion layer that serves as the drain region.

摘要翻译： 本发明的一个方面的非易失性半导体存储器包括半导体衬底，相对于半导体衬底的表面在垂直方向上延伸的柱状半导体层，沿着垂直方向排列的多个存储单元 具有电荷存储层和控制栅电极的第一选择栅晶体管，布置在半导体衬底侧的存储单元的端部的半导体层上的第一选择栅极晶体管和布置在半导体层上的第二选择栅晶体管 存储单元的与半导体衬底侧相对的另一端的半导体层，其中第一选择栅晶体管包括在半导体衬底中的扩散层，并通过扩散电连接到柱状半导体层 作为漏极区域的层。