公开(公告)号：US08118940B2

公开(公告)日：2012-02-21

申请号：US12027767

申请日：2008-02-07

申请人： Akira Shimizu ,  Akira Watanabe

发明人： Akira Shimizu ,  Akira Watanabe

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/45544 ,  C23C16/4585 ,  H01L21/68721

摘要： A clamping mechanism for a semiconductor substrate includes: a C-shaped pickup plate; a susceptor top plate having a periphery adapted to receive and support an inner periphery portion of the C-shaped pickup plate thereon; and a clamp comprising (i) a top ring portion for clamping the substrate by sandwiching a periphery of the substrate between the top ring portion and the susceptor top plate and (ii) a pickup plate supporting portion adapted to support an outer periphery portion of the C-shaped pickup plate, wherein the C-shaped pickup plate is movable between the top ring portion and the pickup plate supporting portion, and the clamp is movable upward together with the C-shaped pickup plate and the susceptor top plate.

摘要翻译： 一种用于半导体衬底的夹持机构包括：C形拾取板; 感受器顶板，其具有适于在其上容纳和支撑C形拾取板的内周部分的周边; 以及夹具，其包括（i）顶环部分，用于通过将所述基板的周边夹在所述顶环部分和所述基座顶板之间来夹持所述基板，以及（ii）拾取板支撑部分，其适于支撑所述基板的外周部分 C形拾取板，其中C形拾取板可在顶环部分和拾取板支撑部分之间移动，并且夹具可与C形拾取板和基座顶板一起向上移动。

公开(公告)号：US09025928B2

公开(公告)日：2015-05-05

申请号：US11824800

申请日：2007-07-02

申请人： Akira Watanabe

发明人： Akira Watanabe

IPC分类号： H04N5/931 ,  H04N5/76 ,  H04N5/907 ,  G11B20/18 ,  G11B27/30 ,  H04N9/82

CPC分类号： H04N5/76 ,  G11B20/18 ,  G11B27/3036 ,  G11B2020/1823 ,  H04N5/907 ,  H04N9/8205 ,  H04N21/41407 ,  H04N21/4312 ,  H04N21/4334 ,  H04N21/44209 ,  H04N21/8547

摘要： In a portable terminal apparatus, a CPU determines receiving condition of broadcast data received by a television broadcast receiving unit, while recording the received data, and records information indicating receiving condition according to the determination result. The CPU obtains information indicating recording condition of the recorded broadcast data based on information indicating receiving condition, and displays the obtained information on a main display unit. Specifically, the CPU sequentially receives time stamps synchronous with broadcast data while receiving and recording the broadcast data, and records them in time series as information indicating receiving condition. The CPU determines whether time stamps recorded in time series are temporally continuous, and specifies any error portion where the recorded broadcast data has not been received normally, according to the determination result. The CPU displays a bar chart showing distribution of error portions in the total broadcast data recorded, as information indicating recording condition.

摘要翻译： 在便携式终端装置中，CPU在记录接收到的数据的同时，确定由电视广播接收单元接收到的广播数据的接收状况，并根据确定结果记录表示接收条件的信息。 CPU根据表示接收条件的信息，获取指示记录广播数据的记录条件的信息，并将获得的信息显示在主显示单元上。 具体地，CPU在接收和记录广播数据的同时顺序地接收与广播数据同步的时间戳，并将它们作为指示接收条件的信息以时间序列记录。 CPU确定时间序列中记录的时间戳是否是时间上连续的，并且根据确定结果指定记录的广播数据未被正常接收的任何错误部分。 CPU显示表示记录的总广播数据中的错误部分的分布的条形图，作为指示记录条件的信息。

公开(公告)号：US08634153B2

公开(公告)日：2014-01-21

申请号：US13351167

申请日：2012-01-16

申请人： Tomoyuki Maeda ,  Yousuke Isowaki ,  Akira Watanabe

发明人： Tomoyuki Maeda ,  Yousuke Isowaki ,  Akira Watanabe

IPC分类号： G11B5/09 ,  G11B5/82 ,  G11B5/65 ,  G11B5/66

CPC分类号： G11B5/7325 ,  G11B5/746 ,  G11B5/855

摘要： According to one embodiment, a magnetic recording medium includes a substrate, an auxiliary layer formed on the substrate, and at least one perpendicular magnetic recording layer formed on the auxiliary layer. The perpendicular magnetic recording layer includes a magnetic dot pattern. The perpendicular magnetic recording layer is made of an alloy material containing one element selected from iron and cobalt, and one element selected from platinum and palladium. This alloy material has the L10 structure, and is (001)-oriented. The auxiliary layer includes a dot-like first region covered with the magnetic dot pattern, and a second region not covered with the magnetic dot pattern. The first region is made of one metal selected from (100)-oriented nickel and (100)-oriented iron. The second region contains an oxide of the metal used in the first region.

摘要翻译： 根据一个实施例，磁记录介质包括基板，形成在基板上的辅助层以及形成在辅助层上的至少一个垂直磁记录层。 垂直磁记录层包括磁点图形。 垂直磁记录层由含有选自铁和钴的一种元素的合金材料和选自铂和钯的一种元素制成。 该合金材料具有L10结构，为（001）取向。 辅助层包括用磁点图案覆盖的点状第一区域和未被磁点图案覆盖的第二区域。 第一区域由选自（100）取向的镍和（100）取向的铁中的一种金属制成。 第二区域包含在第一区域中使用的金属的氧化物。

公开(公告)号：US08575249B2

公开(公告)日：2013-11-05

申请号：US13579188

申请日：2011-02-16

申请人： Takehiro Nagasawa ,  Akira Watanabe ,  Tokuji Miyashita

发明人： Takehiro Nagasawa ,  Akira Watanabe ,  Tokuji Miyashita

IPC分类号： C07F7/30 ,  C08K5/56

CPC分类号： C07F7/30 ,  C08G79/00 ,  C08G79/14 ,  C08L85/00 ,  C09D133/08

摘要： There is provided a polygermane compound forming a film having a high refractive index and thermal stability, and containing a sulfur atom-containing organic group as a group bonded to a germanium atom. A polygermane compound comprising a sulfur atom-containing organic group as a group bonded to a germanium atom, in which the sulfur atom-containing organic group is a group of Formula [1]: -L-Z  [1] where L is a single bond, a C1-6 alkylene group, or a C4-20 arylene group optionally substituted with a C1-6 alkyl group; and Z is a C1-20 sulfide group, a C1-14 cyclic sulfide group optionally substituted with a C1-6 alkyl group, a C2-20 alkyl group containing a sulfide bond, or a C5-20 aralkyl group containing a sulfide bond, with a proviso that when L is a single bond, Z is not a C1-20 sulfide group.

摘要翻译： 提供了形成具有高折射率和热稳定性并且含有作为与锗原子键合的基团的含硫原子的有机基团的膜的聚锗烷化合物。 包含含硫原子的有机基团作为与锗原子键合的基团的多锗烷化合物，其中含硫原子的有机基团是式[1]的基团：-LZ [1]，其中L是单键， C 1-6亚烷基或任选被C 1-6烷基取代的C 4-20亚芳基; Z为碳原子数为20-20的硫基，可以被C 1-6烷基取代的C 1-14环硫醚基，含硫醚键的碳原子数为20-20的烷基或含有硫醚键的碳原子数为5〜20的芳烷基， 条件是当L是单键时，Z不是C1-20硫醚基团。

公开(公告)号：US20120067843A1

公开(公告)日：2012-03-22

申请号：US13064301

申请日：2011-03-16

申请人： Akira Watanabe ,  Kaori Kimura ,  Yousuke Isowaki ,  Yoshiyuki Kamata ,  Naoko Kihara ,  Akira Kikitsu

发明人： Akira Watanabe ,  Kaori Kimura ,  Yousuke Isowaki ,  Yoshiyuki Kamata ,  Naoko Kihara ,  Akira Kikitsu

IPC分类号： C23F1/02

CPC分类号： H01L21/3086 ,  B82Y10/00 ,  G03F7/0002 ,  G03F7/165 ,  G03F7/168 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/3081

摘要： A method of forming a fine pattern according to an embodiment includes: forming a hard mask on a substrate; forming a mask reinforcing member on the hard mask; forming a di-block copolymer layer on the mask reinforcing member, the di-block copolymer layer comprising a sea-island structure; forming a pattern comprising a concave-convex structure in the di-block copolymer layer, with island portions of the sea-island structure being convex portions; and transferring the pattern onto the hard mask by performing etching on the mask reinforcing member and the hard mask, with a mask being the pattern formed in the di-block copolymer layer. The mask reinforcing member is comprised of a material having an etching speed that is higher than an etching speed for the hard mask and is lower than an etching speed for sea portions of the sea-island structure of the di-block copolymer layer.

摘要翻译： 根据实施例的形成精细图案的方法包括：在基底上形成硬掩模; 在所述硬掩模上形成掩模加强部件; 在掩模加强部件上形成二嵌段共聚物层，二嵌段共聚物层包含海岛结构体; 在所述二嵌段共聚物层中形成包括凹凸结构的图案，所述海岛结构的岛部是凸部; 并通过在掩模增强部件和硬掩模上进行蚀刻将图案转印到硬掩模上，其中掩模是在二嵌段共聚物层中形成的图案。 掩模加强部件由蚀刻速度高于硬掩模的蚀刻速度的材料构成，并且低于二嵌段共聚物层的海岛结构的海水部分的蚀刻速度。

公开(公告)号：US20110281090A1

公开(公告)日：2011-11-17

申请号：US13127180

申请日：2009-11-11

申请人： Akira Watanabe ,  Tokuji Miyashita ,  Takehiro Nagasawa ,  Akira Hirooka ,  Makoto Hirooka ,  Eiko Hirooka

发明人： Akira Watanabe ,  Tokuji Miyashita ,  Takehiro Nagasawa ,  Akira Hirooka ,  Makoto Hirooka ,  Eiko Hirooka

IPC分类号： C08G79/00

CPC分类号： G02B1/10 ,  C07F7/30 ,  C08G79/00 ,  C09D185/00 ,  G02B1/00 ,  G02B1/118 ,  Y10T428/24942

摘要： There is provided a high refractive-index coating film and a production method of the high refractive-index coating film. The production method comprises producing a coating film containing a germanium compound containing a Ge—Ge bond as a backbone thereof, and baking the coating film under vacuum or in an inert gas atmosphere. The high refractive-index coating film produced by the method is soluble in a solvent and has a high moldability and film-formation property, and has a high refractive index of 1.8 or more and further 2.3 or more, and is chemically stable.

摘要翻译： 提供高折射率涂膜和高折射率涂膜的制造方法。 该制造方法包括制造含有Ge-Ge键的锗化合物作为其主链的涂膜，并在真空或惰性气体气氛下烘烤该涂膜。 通过该方法制造的高折射率涂膜可溶于溶剂，成型性和成膜性高，折射率高1.8以上2.3以上，化学稳定。

公开(公告)号：US20100272980A1

公开(公告)日：2010-10-28

申请号：US12809863

申请日：2008-12-19

申请人： Sachiko Kowata ,  Akira Watanabe ,  Hideko Akai

发明人： Sachiko Kowata ,  Akira Watanabe ,  Hideko Akai

IPC分类号： B32B5/02 ,  B32B5/00 ,  C09K3/00

CPC分类号： B29B15/08 ,  C08B11/02 ,  C08J5/045 ,  Y10T428/249924 ,  Y10T428/24994 ,  Y10T428/26 ,  Y10T428/2913 ,  Y10T428/2965 ,  Y10T428/2982

摘要： To provide a cellulose fiber composite having high transparency, low water absorption and low coefficient of linear thermal expansion.A fiber composite which comprises fibers having an average fiber diameter of at most 30 nm and a matrix material and which has a haze of at most 5 according to JIS K-7136 when the fiber composite has a thickness of 100 μm.

摘要翻译： 提供具有高透明度，低吸水性和低线性热膨胀系数的纤维素纤维复合材料。 纤维复合材料，当纤维复合材料的厚度为100μm时，包含平均纤维直径为30nm以下的纤维和基体材料，根据JIS K-7136，其雾度为5以下。

公开(公告)号：US20100272550A1

公开(公告)日：2010-10-28

申请号：US12681018

申请日：2008-09-29

申请人： Shinichiro Ishihara ,  Hajime Ashida ,  Akira Watanabe

发明人： Shinichiro Ishihara ,  Hajime Ashida ,  Akira Watanabe

IPC分类号： B65G47/24 ,  B66C1/10 ,  B65G49/06

CPC分类号： H01L21/67236 ,  B65G49/063 ,  B65G49/064 ,  B65G49/067 ,  B65G2249/02 ,  H01L21/67706 ,  H01L21/67712 ,  H01L21/67718 ,  H01L21/67748 ,  H01L21/67751

摘要： The present invention provides a substrate holding mechanism capable of assuredly holding a substrate and delivering/receiving it: a substrate holding mechanism including a substrate holding unit for holding a rectangular substrate, comprising: a plurality of substrate holding rollers provided at positions corresponding to two opposite sides of the substrate on the substrate holding unit and pivotally supported by the substrate holding unit; and a roller driver for rotating the substrate holding rollers, wherein: the substrate holding roller comprises a cylinder part and a holding flange provided along a portion of a circumference of each end of the cylinder part; and each of the substrate holding rollers is rotated by the roller driver so that a state of holding edges of the substrate by the holding flange and a state of releasing the edges can be switched in accordance with a rotation angle of the substrate holding rollers.

摘要翻译： 本发明提供一种能够可靠地保持基板并输送/接收基板的基板保持机构：具有保持矩形基板的基板保持单元的基板保持机构，包括：多个基板保持辊，设置在对应于两个相对的位置的位置 基板保持单元上的基板的侧面，并被基板保持单元枢转地支撑; 以及用于旋转所述基板保持辊的滚子驱动器，其中：所述基板保持辊包括沿着所述圆筒部分的每个端部的圆周的一部分设置的圆筒部分和保持凸缘; 并且每个基板保持辊由辊驱动器旋转，使得可以根据基板保持辊的旋转角度来切换由保持凸缘保持基板的保持边缘和释放边缘的状态的状态。

公开(公告)号：US20100263797A1

公开(公告)日：2010-10-21

申请号：US12742604

申请日：2008-11-12

申请人： Yuichi Setsuhara ,  Akinori Ebe ,  Eiji Ino ,  Shinichiro Ishihara ,  Hajime Ashida ,  Akira Watanabe

发明人： Yuichi Setsuhara ,  Akinori Ebe ,  Eiji Ino ,  Shinichiro Ishihara ,  Hajime Ashida ,  Akira Watanabe

IPC分类号： H01L31/18 ,  C23C16/00 ,  C23C16/505 ,  C23F1/08

CPC分类号： C23C16/503 ,  C03C17/22 ,  C03C2217/28 ,  C03C2218/153 ,  C23C16/24 ,  C23C16/509 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/32715

摘要： The present invention aims at providing a plasma processing apparatus for performing a plasma processing on a planar substrate body to be processed, the apparatus being capable of generating the plasma with good uniformity and efficiently using the plasma, and having a high productivity. That is, the plasma processing apparatus according to the present invention includes: a vacuum chamber; one or plural antenna supporters (plasma generator supporters) projecting into the internal space of the vacuum chamber; radio-frequency antennas (plasma generators) attached to each antenna supporter; and a pair of substrate body holders provided across the antenna supporter in the vacuum chamber, for holding a planar substrate body to be processed.

摘要翻译： 本发明的目的在于提供一种等离子体处理装置，用于对待处理的平面基板主体进行等离子体处理，该装置能够产生均匀性均匀且有效地使用等离子体的等离子体，并且具有高生产率。 也就是说，根据本发明的等离子体处理装置包括：真空室; 一个或多个天线支撑器（等离子体发生器支撑器）突出到真空室的内部空间中; 连接到每个天线支架的射频天线（等离子体发生器）; 以及设置在真空室中的天线支撑体两侧的一对基板主体保持件，用于保持待处理的平面基板主体。

公开(公告)号：US20100243163A1

公开(公告)日：2010-09-30

申请号：US12682641

申请日：2008-09-29

申请人： Eiji Ino ,  Akira Watanabe ,  Hajime Ashida

发明人： Eiji Ino ,  Akira Watanabe ,  Hajime Ashida

IPC分类号： H01L21/306

CPC分类号： C23C16/54 ,  B65G49/061 ,  B65G49/063 ,  B65G49/068 ,  B65G2249/02 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67706 ,  H01L21/67712 ,  H01L21/67718 ,  H01L21/67724 ,  H01L21/67751 ,  H01L21/67757 ,  H01L21/6776

摘要： Disclosed is a substrate processing apparatus for carrying a substrate W in a standing position and performing a predetermined process to the substrate W, including: a plurality of substrate processing chambers; and a common carrying delivery chamber for carrying a substrate to each of the substrate processing chambers, where: at least one of the substrate processing chambers is provided above or below the common carrying delivery chamber; and a substrate passage opening through which the substrate W can pass is provided at the boundaries between the processing chambers and the carrying chamber.

摘要翻译： 公开了一种基板处理装置，用于将基板W承载在竖立位置并对基板W执行预定的处理，包括：多个基板处理室; 以及用于将基板输送到每个基板处理室的公共搬运室，其中：至少一个基板处理室设置在公共搬运输送室的上方或下方; 并且在处理室和搬送室之间的边界处设置有衬底W可以通过的衬底通道开口。