公开(公告)号：US11988810B2

公开(公告)日：2024-05-21

申请号：US16505627

申请日：2019-07-08

Applicant: Applied Materials, Inc.

Inventor： Manivannan Thothadri ,  Harvey You ,  Neil Morrison ,  Daniel Paul Forster

IPC: G02B1/14 ,  G02B1/18 ,  H10K50/844 ,  H10K102/00

CPC classification number: G02B1/14 ,  G02B1/18 ,  H10K50/844 ,  B32B2307/412 ,  B32B2457/208 ,  H10K2102/311

Abstract: Implementations described herein generally relate to flexible display devices, and more specifically to flexible cover lens films. The flexible cover lens film has improved strength, elasticity, optical transmission, and anti-abrasion properties. The flexible cover lens film comprises a multi-layer hardcoat disposed on a substrate layer. The substrate layer has a thickness between 2 μm to 100 μm, and the multi-layer hardcoat has a thickness between 1 μm to 10 μm. The multi-layer hardcoat comprises a first layer deposited using a wet deposition process, a second layer deposited using a dry deposition process, and one or more adhesion promotion layers. In terms of optical properties, the multi-layer hardcoat has a total transmission greater than 88%, a haze of about 1% or less, and a yellowness index of b*

公开(公告)号：US11940682B2

公开(公告)日：2024-03-26

申请号：US16902388

申请日：2020-06-16

Applicant: Applied Materials, Inc.

Inventor： Manivannan Thothadri ,  Harvey You ,  Helinda Nominanda ,  Neil Morrison ,  Daniel Paul Forster ,  Arvinder Chadha

IPC: G02F1/1333 ,  G02B1/11 ,  G02B1/14

CPC classification number: G02F1/133331 ,  G02B1/11 ,  G02B1/14 ,  G02F1/133305 ,  G02F2201/50 ,  G02F2202/28

Abstract: Embodiments described and discussed herein generally relate to flexible or foldable display devices, and more specifically to flexible cover lens assemblies. In one or more embodiments, a flexible cover lens assembly contains a glass layer, an adhesion promotion layer on the glass layer, an anti-reflectance layer disposed on the adhesion promotion layer, a dry hardcoat layer having a nano-indentation hardness in a range from about 1 GPa to about 5 GPa and disposed on the anti-reflectance layer, and an anti-fingerprint coating layer disposed on the dry hardcoat layer.

公开(公告)号：US11789300B2

公开(公告)日：2023-10-17

申请号：US16902395

申请日：2020-06-16

Applicant: Applied Materials, Inc.

Inventor： Manivannan Thothadri ,  Harvey You ,  Helinda Nominanda ,  Neil Morrison ,  Daniel Paul Forster ,  Arvinder Chadha

IPC: G02F1/1333 ,  G02B1/14 ,  G02B1/11

CPC classification number: G02F1/133331 ,  G02B1/11 ,  G02B1/14 ,  G02F1/133305 ,  G02F2201/50 ,  G02F2202/28

Abstract: Embodiments described and discussed herein generally relate to flexible or foldable display devices, and more specifically to flexible cover lens assemblies. In one or more embodiments, a flexible cover lens assembly contains a glass layer, an impact absorption layer disposed on the glass layer, a moisture barrier layer disposed on the impact absorption layer, a substrate disposed on the moisture barrier layer, a wet hardcoat layer having a nano-indentation hardness in a range from about 0.4 GPa to about 1.5 GPa and disposed on the substrate, an adhesion promotion layer disposed on the wet hardcoat layer, an anti-reflectance layer disposed on the adhesion promotion layer, a dry hardcoat layer having a nano-indentation hardness in a range from about 1 GPa to about 5 GPa and disposed on the anti-reflectance layer, and an anti-fingerprint coating layer disposed on the dry hardcoat layer.

公开(公告)号：US11934056B2

公开(公告)日：2024-03-19

申请号：US16902392

申请日：2020-06-16

Applicant: Applied Materials, Inc.

Inventor： Manivannan Thothadri ,  Harvey You ,  Helinda Nominanda ,  Neil Morrison ,  Daniel Paul Forster ,  Arvinder Chadha

IPC: G02F1/1333 ,  G02B1/11 ,  G02B1/14

CPC classification number: G02F1/133331 ,  G02B1/11 ,  G02B1/14 ,  G02F1/133305 ,  G02F2201/50 ,  G02F2202/28

Abstract: Embodiments described and discussed herein generally relate to flexible or foldable display devices, and more specifically to flexible cover lens assemblies. In one or more embodiments, a flexible cover lens assembly contains a glass layer, an adhesion promotion layer disposed on the glass layer, a dry hardcoat layer having a nano-indentation hardness in a range from about 1 GPa to about 5 GPa and disposed on the adhesion promotion layer and an anti-fingerprint coating layer disposed on the dry hardcoat layer.

公开(公告)号：US09652055B2

公开(公告)日：2017-05-16

申请号：US14142036

申请日：2013-12-27

Applicant: APPLIED MATERIALS, INC.

Inventor： Neil Morrison ,  Thomas Deppisch ,  Hans-Georg Lotz

IPC: H05K1/03 ,  G06F3/044 ,  G06F3/0354 ,  G06F3/041 ,  H05K1/02

CPC classification number: G06F3/03547 ,  G06F3/041 ,  G06F3/044 ,  G06F2203/04103 ,  H05K1/0274 ,  H05K1/0306 ,  H05K2201/0137 ,  H05K2201/0145

Abstract: A layer stack for a touch panel is described. The layer stack includes a substrate including a polymer for depositing one or more layers on the substrate; a patterned transparent conductive oxide (TCO) layer provided over the substrate, which comprises areas of TCO and gaps between the areas of TCO; a first dielectric material provided in the gaps of the patterned TCO layer and a dielectric layer being deposited directly on the TCO areas of the TCO layer and directly on the first dielectric material. Further, a touch panel including a layer stack and a method for forming a layer stack for a touch panel is described.

公开(公告)号：US11940683B2

公开(公告)日：2024-03-26

申请号：US16902394

申请日：2020-06-16

Applicant: Applied Materials, Inc.

Inventor： Manivannan Thothadri ,  Harvey You ,  Helinda Nominanda ,  Neil Morrison ,  Daniel Paul Forster ,  Arvinder Chadha

IPC: G02F1/1333 ,  G02B1/11 ,  G02B1/14

CPC classification number: G02F1/133331 ,  G02B1/11 ,  G02B1/14 ,  G02F1/133305 ,  G02F2201/50 ,  G02F2202/28

Abstract: Embodiments described and discussed herein generally relate to flexible or foldable display devices, and more specifically to flexible cover lens assemblies. In one or more embodiments, a flexible cover lens assembly contains a substrate, an anti-fingerprint coating layer, and an adhesion promotion layer disposed between the substrate and the anti-fingerprint coating layer.

公开(公告)号：US09920421B2

公开(公告)日：2018-03-20

申请号：US14101032

申请日：2013-12-09

Applicant: APPLIED MATERIALS, INC.

Inventor： Hans-Georg Lotz ,  Neil Morrison ,  Thomas Deppisch

IPC: C23C14/08 ,  C23C14/14 ,  C23C14/34 ,  C23C14/56 ,  C23C14/58 ,  H01J37/34 ,  G06F3/044 ,  G06F3/041 ,  G03F9/00 ,  C23C14/35 ,  H05K1/02 ,  H05K3/00 ,  H05K1/03

CPC classification number: C23C14/562 ,  C23C14/086 ,  C23C14/14 ,  C23C14/3464 ,  C23C14/35 ,  C23C14/5873 ,  G03F9/7042 ,  G06F3/041 ,  G06F3/044 ,  G06F2203/04103 ,  H01J37/3405 ,  H05K1/028 ,  H05K1/0393 ,  H05K3/00 ,  H05K2201/0108 ,  H05K2201/0145 ,  H05K2201/0326 ,  H05K2201/10128

Abstract: A process for manufacturing a transparent body for a touch screen panel is described. The process includes: depositing a first transparent layer stack over a flexible transparent substrate, wherein said first transparent layer stack includes at least a first dielectric film with a first refractive index, and a second dielectric film with a second refractive index different from the first refractive index; providing a transparent conductive film over the first transparent layer stack; depositing a layer of a conductive material over the transparent conductive film; providing a polymer layer over the layer of a conductive material; imprinting a pattern, e.g. a 3D pattern, on the polymer layer; etching the layer of the conductive material based upon the pattern to form conductive paths for the touch screen panel; and etching the transparent conductive film based upon the pattern to form a structured transparent conductive pattern for touch detection.

公开(公告)号：US09873945B2

公开(公告)日：2018-01-23

申请号：US13871899

申请日：2013-04-26

Applicant: Applied Materials, Inc.

Inventor： Neil Morrison ,  Jose Manuel Dieguez-Campo ,  Heike Landgraf ,  Tobias Stolley ,  Stefan Hein ,  Florian Ries ,  Wolfgang Buschbeck

IPC: C23C16/509 ,  C23C16/54 ,  H01J37/32 ,  C23C16/455 ,  C23C16/50

CPC classification number: C23C16/545 ,  C23C16/45517 ,  C23C16/45519 ,  C23C16/50 ,  H01J37/32449 ,  H01J37/32513 ,  H01J37/32568 ,  H01J37/32752 ,  H01J37/32761 ,  H01J37/3277

Abstract: An apparatus includes a substrate support having an outer surface for guiding the substrate through a first vacuum processing region and at least one second vacuum processing region. First and second deposition sources correspond to the first processing region and at least one second deposition source corresponds to the at least one second vacuum processing region, wherein at least the first deposition source includes an electrode having a surface that opposes the substrate support. A processing gas inlet and a processing gas outlet are arranged at opposing sides of the surface of the electrode. At least one separation gas inlet how one or more openings, wherein the one or more openings are at least provided at one of opposing sides of the electrode surface such that the processing gas inlet and/or the processing gas outlet are provided between the one or more openings and the surface of the electrode.

公开(公告)号：US20180100236A1

公开(公告)日：2018-04-12

申请号：US15837893

申请日：2017-12-11

Applicant: Applied Materials, Inc.

Inventor： Neil Morrison ,  Jose Manuel DIEGUEZ-CAMPO ,  Heike LANDGRAF ,  Tobias STOLLEY ,  Stefan HEIN ,  Florian RIES ,  Wolfgang BUSCHBECK

IPC: C23C16/54 ,  H01J37/32 ,  C23C16/455 ,  C23C16/50

Abstract: An apparatus for depositing a thin film on a substrate is described. The apparatus includes a substrate support having an outer surface for guiding the substrate along a surface of the substrate support through a first vacuum processing region and at least one second vacuum processing region, a first deposition sources corresponding to the first processing region and at least one second deposition source corresponding to the at least one second vacuum processing region. The apparatus further includes one or more vacuum flanges providing at least a further gas outlet between the first deposition source and the at least one second deposition source.

公开(公告)号：US09534294B2

公开(公告)日：2017-01-03

申请号：US13965968

申请日：2013-08-13

Applicant: Applied Materials, Inc.

Inventor： Florian Ries ,  Stefan Hein ,  Stefan Lorenz ,  Neil Morrison ,  Tobias Stolley

IPC: C25F1/00 ,  C23C16/44 ,  H01J37/32

CPC classification number: C23C16/4405 ,  H01J37/3277 ,  H01J37/32862 ,  Y10T428/18 ,  Y10T428/192

Abstract: According to the present disclosure, a method for cleaning the processing chamber of a flexible substrate processing apparatus without breaking the vacuum in the processing chamber is provided. The method for cleaning the processing chamber includes guiding a sacrificial foil into the processing chamber; initiating a first pump process in the processing chamber; plasma cleaning the processing chamber while the sacrificial foil is provided in the processing chamber; initiating a second pump process in the processing chamber; and guiding a flexible substrate into the processing chamber.

Abstract translation: 根据本公开，提供了一种用于清洁柔性基板处理设备的处理室而不破坏处理室中的真空的方法。 用于清洁处理室的方法包括将牺牲箔引导到处理室中; 在处理室中启动第一泵过程; 等离子体清洁处理室，同时牺牲箔设置在处理室中; 在处理室中启动第二泵过程; 并将柔性基板引导到处理室中。