公开(公告)号：US20090008781A1

公开(公告)日：2009-01-08

申请号：US12211068

申请日：2008-09-15

申请人： Bai-rou Ni ,  Fang-Yu Yeh ,  Yueh-Chuan Lee

发明人： Bai-rou Ni ,  Fang-Yu Yeh ,  Yueh-Chuan Lee

IPC分类号： H01L29/51

CPC分类号： H01L21/28061 ,  H01L21/823443 ,  H01L21/82345 ,  H01L21/823835 ,  H01L21/823842 ,  H01L29/51 ,  H01L29/66583

摘要： A semiconductor device structure includes a substrate, a first conductive layer over the substrate, a second conductive layer between the first conductive layer and the substrate and extending over the sidewalls of the first conductive layer, a dielectric layer between the second conductive layer and the substrate, a cap layer over the first conductive layer and the second conductive layer, and a liner layer on the sidewalls of the second conductive layer.

摘要翻译： 半导体器件结构包括衬底，在衬底上的第一导电层，在第一导电层和衬底之间并在第一导电层的侧壁上延伸的第二导电层，在第二导电层和衬底之间的介电层 ，在第一导电层和第二导电层之上的覆盖层，以及在第二导电层的侧壁上的衬层。

公开(公告)号：US20060017165A1

公开(公告)日：2006-01-26

申请号：US11163121

申请日：2005-10-05

申请人： Bai-rou Ni ,  Fang-Yu Yeh ,  Yueh-Chuan Lee

发明人： Bai-rou Ni ,  Fang-Yu Yeh ,  Yueh-Chuan Lee

IPC分类号： H01L21/4763 ,  H01L21/44 ,  H01L23/48

CPC分类号： H01L21/28061 ,  H01L21/823443 ,  H01L21/82345 ,  H01L21/823835 ,  H01L21/823842 ,  H01L29/51 ,  H01L29/66583

摘要： A method of manufacturing a semiconductor device comprises the steps as follow. After forming an insulating layer with opening therein over a substrate, a polysilicon layer that partially fills the opening is formed over the substrate and then a refractory metal silicide layer that completely fills the opening is formed over the substrate. Thereafter, the polysilicon layer and the refractory metal silicide layer outside the opening are removed to expose the insulating layer. A portion of the polysilicon layer and the refractory metal silicide layer are etched back so that the surface of the polysilicon layer and the refractory metal silicide layer are below the surface of the insulating layer. After forming a cap layer over the polysilicon layer and the refractory metal silicide layer, the insulating layer is removed and then a liner layer is formed on the sidewalls of the polysilicon layer.

摘要翻译： 制造半导体器件的方法包括以下步骤。 在衬底上形成开口的绝缘层之后，在衬底上形成部分填充开口的多晶硅层，然后在衬底上形成完全填充开口的难熔金属硅化物层。 此后，去除开口外部的多晶硅层和难熔金属硅化物层，露出绝缘层。 多晶硅层和难熔金属硅化物层的一部分被回蚀刻，使得多晶硅层和难熔金属硅化物层的表面在绝缘层的表面之下。 在多晶硅层和难熔金属硅化物层上形成覆盖层之后，去除绝缘层，然后在多晶硅层的侧壁上形成衬层。

公开(公告)号：US20050106844A1

公开(公告)日：2005-05-19

申请号：US10788807

申请日：2004-02-27

申请人： Ming-Sheng Tung ,  Yueh-Chuan Lee ,  Fang-Yu Yeh ,  Chi Lin

发明人： Ming-Sheng Tung ,  Yueh-Chuan Lee ,  Fang-Yu Yeh ,  Chi Lin

IPC分类号： H01L21/336 ,  H01L29/10

CPC分类号： H01L29/6653 ,  H01L29/1045 ,  H01L29/6659 ,  H01L29/66659

摘要： Ions are implanted into a substrate, using a gate and its sidewall liner on the substrate as the mask, to form a source/drain region in the substrate beneath the liner and adjacent to the two sides of the gate. The liner is etched to reduce its thickness. Then, ions are implanted into the substrate to form a halo doped region surrounding the source/drain region. The halo doped region is closer to the MOSFET channel region and overlaps less with the source/drain region. Therefore, the device threshold voltage can be sustained and the junction leakage can also be minimized.

摘要翻译： 将离子以植入基板上的栅极及其侧壁衬垫作为掩模注入到衬底中，以在衬底下面形成源极/漏极区域，并且邻近栅极的两侧。 蚀刻衬里以减小其厚度。 然后，将离子注入到衬底中以形成围绕源/漏区的卤素掺杂区。 卤素掺杂区域更靠近MOSFET沟道区域，并且与源极/漏极区域重叠较小。 因此，可以维持器件阈值电压，也可以最小化结漏电。

公开(公告)号：US20060128157A1

公开(公告)日：2006-06-15

申请号：US11338679

申请日：2006-01-25

申请人： Yueh-Chuan Lee ,  Ming-Sheng Tung

发明人： Yueh-Chuan Lee ,  Ming-Sheng Tung

IPC分类号： H01L21/311 ,  H01L21/461 ,  H01L21/302

CPC分类号： H01L21/76897 ,  H01L21/28052 ,  H01L21/28061 ,  H01L21/28114 ,  H01L21/823425 ,  H01L21/823456 ,  H01L29/42376

摘要： A semiconductor structure with partially etched gate and method of fabricating the same. A semiconductor structure with a single-sided or dual-sided partially etched gate comprises a gate dielectric layer, a gate conductive layer and a cap layer sequentially stacked on a substrate to form a gate structure, and a lining layer disposed on sidewalls of the gate structure, wherein the lining layer is partially etched to expose the adjacent gate structure. In addition, an inter-layer dielectric layer covers the gate structure and a contact is formed in the inter-layer dielectric layer, exposing the substrate and a portion of the gate structure therein, wherein the lining layer of the exposed portion of the gate structure is partially removed.

摘要翻译： 具有部分蚀刻栅极的半导体结构及其制造方法。 具有单面或双面部分蚀刻栅极的半导体结构包括依次层叠在衬底上以形成栅极结构的栅介质层，栅极导电层和覆盖层，以及设置在栅极侧壁上的衬层 结构，其中衬里层被部分蚀刻以暴露相邻的栅极结构。 此外，层间电介质层覆盖栅极结构，并且在层间电介质层中形成接触，将衬底和栅极结构的一部分暴露于其中，其中栅极结构的暴露部分的衬层 被部分删除。

公开(公告)号：US06821842B1

公开(公告)日：2004-11-23

申请号：US10708227

申请日：2004-02-18

申请人： Yueh-Chuan Lee ,  Shih-Lung Chen

发明人： Yueh-Chuan Lee ,  Shih-Lung Chen

IPC分类号： H01L218242

CPC分类号： H01L27/10861 ,  H01L27/10829 ,  H01L27/10873 ,  H01L29/66181 ,  H01L29/945

摘要： A dynamic random access memory (DRAM) structure and a fabricating process thereof are provided. In the fabricating process, a channel region is formed with a doped region having identical conductivity as the substrate in a section adjacent to an isolation structure. The doped region is formed in a self-aligned process by conducting a tilt implantation implanting ions into the substrate through the upper portion of the capacitor trench adjacent to the channel region after forming the trench but before the definition of the active region.

摘要翻译： 提供了一种动态随机存取存储器（DRAM）结构及其制造方法。 在制造过程中，在与隔离结构相邻的部分中，沟道区域形成有与衬底相同的导电性的掺杂区域。 通过在形成沟槽之后但在有源区的定义之前，通过在邻近沟道区的电容器沟槽的上部通过进行倾斜注入而将离子注入到衬底中来形成掺杂区。

公开(公告)号：US06680237B2

公开(公告)日：2004-01-20

申请号：US09967709

申请日：2001-09-27

申请人： Shih-Lung Chen ,  Hsiao-Lei Wang ,  Hwei-Lin Chuang ,  Yueh-Chuan Lee

发明人： Shih-Lung Chen ,  Hsiao-Lei Wang ,  Hwei-Lin Chuang ,  Yueh-Chuan Lee

IPC分类号： H01L2120

CPC分类号： H01L27/10867

摘要： A method of manufacturing a deep trench capacitor. A deep trench is formed in a substrate. A conformal capacitor dielectric layer and a first conductive layer are sequentially formed, completely filling the deep trench. The first conductive layer has a seam. The first conductive layer is etched to open up the seam. A collar oxide layer is formed over the interior surface of the deep trench. A collar liner layer is formed over the collar oxide layer inside the deep trench. Using the collar liner layer as a mask, the collar oxide material above the first conductive layer and within the seam is removed. The collar liner layer is removed. Finally, a second conductive layer and a third conductive layer are sequentially formed inside the deep trench.

摘要翻译： 一种制造深沟槽电容器的方法。 在衬底中形成深沟槽。 依次形成保形电容器电介质层和第一导电层，完全填充深沟槽。 第一导电层具有接缝。 蚀刻第一导电层以打开接缝。 在深沟槽的内表面上形成环状氧化物层。 在深沟槽内部的轴环氧化物层上方形成轴环衬层。 使用套环内层作为掩模，去除第一导电层上方和接缝内的环氧化物材料。 衣领衬里层被去除。 最后，在深沟槽内依次形成第二导电层和第三导电层。

公开(公告)号：US07320912B2

公开(公告)日：2008-01-22

申请号：US11125676

申请日：2005-05-10

申请人： Yueh-Chuan Lee ,  Ming-Sheng Tung

发明人： Yueh-Chuan Lee ,  Ming-Sheng Tung

IPC分类号： H01L21/8242

CPC分类号： H01L29/945 ,  H01L27/1087

摘要： A method for forming a trench capacitor includes: removing a portion of the substrate to form a trench within the substrate; forming at a buried isolation layer within the substrate; forming in the substrate a first electrode of the trench capacitor at least in areas surrounding a lower portion of the trench; forming a dielectric layer of the trench capacitor; and forming a second electrode of the trench capacitor in the trench. The buried isolation layer intersects with the trench and has one or more gaps for providing body contact between a first substrate area above the buried isolation layer and a second substrate area below the buried isolation layer.

摘要翻译： 形成沟槽电容器的方法包括：去除衬底的一部分以在衬底内形成沟槽; 在衬底内的掩埋隔离层处形成; 在所述衬底中至少在围绕所述沟槽的下部的区域中在所述沟槽电容器中形成第一电极; 形成沟槽电容器的电介质层; 以及在所述沟槽中形成所述沟槽电容器的第二电极。 掩埋隔离层与沟槽相交并且具有一个或多个间隙，用于在掩埋隔离层之上的第一衬底区域和掩埋隔离层下面的第二衬底区域之间提供身体接触。

公开(公告)号：US06903029B2

公开(公告)日：2005-06-07

申请号：US10893263

申请日：2004-07-19

申请人： Ching-Fa Yeh ,  Yueh-Chuan Lee ,  Chih-Chuan Hsu ,  Kwo-Hau Wu ,  Shuo-Cheng Wang

发明人： Ching-Fa Yeh ,  Yueh-Chuan Lee ,  Chih-Chuan Hsu ,  Kwo-Hau Wu ,  Shuo-Cheng Wang

IPC分类号： H01L21/312 ,  H01L21/316 ,  H01L21/31 ,  H01L21/469

CPC分类号： H01L21/76801 ,  H01L21/02131 ,  H01L21/02137 ,  H01L21/022 ,  H01L21/02282 ,  H01L21/02332 ,  H01L21/0234 ,  H01L21/3122 ,  H01L21/316 ,  H01L21/31629 ,  H01L21/76826 ,  H01L21/76828 ,  H01L21/76829 ,  Y10T428/265

摘要： The present invention provides a technique to reduce a stress of thick spin-on dielectric layer by forming a sandwich dielectric structure, wherein a first dielectric layer is formed on a substrate by spin coating, a liquid phase deposited (LPD) silica layer is formed the first dielectric layer, and a second dielectric layer is formed on the LPD silica layer by spin coating. The LPD silica layer can be further subjected to a nitrogen plasma treatment to enhance its thermal stability and anti-water penetration ability.

摘要翻译： 本发明提供一种通过形成夹层电介质结构来减小厚的自旋电介质层的应力的技术，其中通过旋涂形成在基板上的第一介电层，形成液相沉积（LPD）二氧化硅层 第一电介质层，并且通过旋涂在LPD二氧化硅层上形成第二电介质层。 可以进一步对LPD二氧化硅层进行氮等离子体处理，以提高其热稳定性和抗水渗透能力。

公开(公告)号：US20050062089A1

公开(公告)日：2005-03-24

申请号：US10711623

申请日：2004-09-29

申请人： Yueh-Chuan Lee ,  Shih-Lung Chen

发明人： Yueh-Chuan Lee ,  Shih-Lung Chen

IPC分类号： H01L21/334 ,  H01L21/8242 ,  H01L27/108 ,  H01L29/76 ,  H01L29/94

CPC分类号： H01L27/10861 ,  H01L27/10829 ,  H01L27/10873 ,  H01L29/66181 ,  H01L29/945

摘要： A dynamic random access memory (DRAM) structure and a fabricating process thereof are provided. In the fabricating process, a channel region is formed with a doped region having identical conductivity as the substrate in a section adjacent to an isolation structure. The doped region is formed in a self-aligned process by conducting a tilt implantation implanting ions into the substrate through the upper portion of the capacitor trench adjacent to the channel region after forming the trench but before the definition of the active region.

摘要翻译： 提供了一种动态随机存取存储器（DRAM）结构及其制造方法。 在制造过程中，在与隔离结构相邻的部分中，沟道区域形成有与衬底相同的导电性的掺杂区域。 通过在形成沟槽之后但在有源区的定义之前，通过在邻近沟道区的电容器沟槽的上部通过进行倾斜注入而将离子注入到衬底中来形成掺杂区。

公开(公告)号：US06486057B1

公开(公告)日：2002-11-26

申请号：US10107146

申请日：2002-03-28

申请人： Ching-Fa Yeh ,  Yueh-Chuan Lee ,  Chien-Hsing Lin

发明人： Ching-Fa Yeh ,  Yueh-Chuan Lee ,  Chien-Hsing Lin

IPC分类号： H01L214763

CPC分类号： H01L21/76831 ,  H01L21/76826 ,  H01L21/76834

摘要： The present invention discloses a technique of enhancing adhesion between a passivation layer and a low-K dielectric layer, in which a SiO2 layer as the passivation formed on the low-K dielectric layer is subjected to N2O plasma annealing. This technique is useful in improving the yield of a process for preparing Cu damascene interconnection.

摘要翻译： 本发明公开了一种增强钝化层和低K电介质层之间的粘附性的技术，其中在低K电介质层上形成的钝化层的SiO2层进行N2O等离子体退火。 该技术可用于提高制备Cu镶嵌互连的方法的产率。