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公开(公告)号：US08058179B1
公开(公告)日：2011-11-15
申请号：US12343102
申请日：2008-12-23
申请人： Nerissa Draeger , Harald te Nijenhuis , Henner Meinhold , Bart van Schravendijk , Lakshmi Nittala
发明人： Nerissa Draeger , Harald te Nijenhuis , Henner Meinhold , Bart van Schravendijk , Lakshmi Nittala
IPC分类号： H01L21/302
CPC分类号： H01L21/31116 , H01L21/02164 , H01L21/02271 , H01L21/02274 , H01L21/02337 , H01L21/76837
摘要： Higher overall etch rate and throughput for atomic layer removal (ALR) is achieved. The reaction is a self-limiting process, thus limiting the total amount of material that may be etched per cycle. By pumping down the process station between reacting operations, the reaction is partially “reset.” A higher overall etch rate is achieved by a multiple exposure with pump down ALR process.
摘要翻译： 实现更高的总体蚀刻速率和原子层去除（ALR）的吞吐量。 反应是一种自限制过程，因此限制了每个循环可蚀刻的材料的总量。 通过在反应操作之间泵送工艺站，反应部分地“重新设置”。通过多次曝光通过泵浦ALR工艺实现更高的总体蚀刻速率。
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公开(公告)号：US20140049162A1
公开(公告)日：2014-02-20
申请号：US13586790
申请日：2012-08-15
发明人： George Thomas , Bart van Schravendijk , Harald Te Nijenhuis , Shawn Hamilton , Konstantin Makhratchev
IPC分类号： H05H1/24
CPC分类号： H05H1/24 , C23C16/0245 , C23C16/50 , H01J37/32853 , H01J37/32871
摘要： Methods and apparatus to reduce particle-induced defects on a substrate are provided. In certain embodiments, the methods involve decreasing plasma spread prior to extinguishing the plasma. The plasma is maintained at the decreased plasma spread while particles are evacuated from the processing chamber. In certain embodiments, the methods involve decreasing plasma power prior to extinguishing the plasma. The low-power plasma is maintained while particles are evacuated from the processing chamber.
摘要翻译： 提供了减少基板上的颗粒引起的缺陷的方法和装置。 在某些实施方案中，所述方法涉及在扑灭血浆之前降低血浆扩散。 等离子体保持在降低的等离子体扩散，而颗粒从处理室抽空。 在某些实施例中，该方法包括在熄灭等离子体之前降低等离子体功率。 当从处理室排出颗粒时，保持低功率等离子体。
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公开(公告)号：US07981763B1
公开(公告)日：2011-07-19
申请号：US12341943
申请日：2008-12-22
IPC分类号： H01L21/76
CPC分类号： H01L21/76837 , H01L21/02274 , H01L21/31116 , H01L21/76224
摘要： Methods of filling high aspect ratio, narrow width (e.g., sub-50 nm) gaps on a substrate are provided. The methods provide gap fill with little or no incidence of voids, seams or weak spots. According to various embodiments, the methods depositing dielectric material in the gaps to partially fill the gaps, then performing multi-step atomic layer removal process to selectively etch unwanted material deposited on the sidewalls of the gaps. The multi-step atomic layer removal process involves a performing one or more initial atomic layer removal operations to remove unwanted material deposited at the top of the gap, followed by one or more subsequent atomic layer removal operations to remove unwanted material deposited on the sidewalls of the gap. Each atomic layer removal operation involves selectively chemically reacting a portion of the fill material with one or more reactants to form a solid reaction product, which is then removed.
摘要翻译： 提供填充高纵横比，衬底上的窄宽度（例如，小于50nm）间隙的方法。 这些方法提供空隙填充，空隙，接缝或弱点几乎没有或没有发生。 根据各种实施例，在间隙中沉积介电材料以部分地填充间隙的方法，然后执行多步骤原子层去除工艺以选择性地蚀刻沉积在间隙的侧壁上的不需要的材料。 多步骤原子层去除过程涉及执行一个或多个初始原子层去除操作以去除在间隙的顶部沉积的不需要的材料，随后进行一个或多个后续的原子层去除操作以去除沉积在侧壁上的不需要的材料 差距。 每个原子层去除操作涉及使填充材料的一部分与一种或多种反应物选择性地化学反应以形成固体反应产物，然后将其去除。
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公开(公告)号：US08133797B2
公开(公告)日：2012-03-13
申请号：US12122614
申请日：2008-05-16
IPC分类号： H01L21/76
CPC分类号： H01L21/76224 , C23C16/045 , C23C16/401 , H01L21/76801
摘要： In-situ semiconductor process that can fill high aspect ratio (typically at least 6:1, for example 7:1 or higher), narrow width (typically sub 0.13 micron, for example 0.1 micron or less) gaps without damaging underlying features and little or no incidence of voids or weak spots is provided. A protective layer is deposited to protect underlying features in regions of the substrate having lower feature density so that unwanted material may be removed from regions of the substrate having higher feature density. This protective layer may deposits thicker on a low density feature than on a high density feature and may be deposited using a PECVD process or low sputter/deposition ratio HDP CVD process. This protective layer may also be a metallic oxide layer that is resistant to fluorine etching, such as zirconium oxide (ZrO2) or aluminum oxide (Al2O3).
摘要翻译： 可以填充高纵横比（通常至少6:1，例如7:1或更高），窄宽度（通常为0.13微米，例如0.1微米或更小）的间隙的原位半导体工艺，而不损坏底层特征和少量 或者不提供空隙或弱点的发生。 沉积保护层以保护具有较低特征密度的衬底区域中的底层特征，使得可以从具有较高特征密度的衬底的区域去除不需要的材料。 该保护层可以在低密度特征上比在高密度特征上沉积更厚，并且可以使用PECVD工艺或低溅射/沉积比HDP CVD工艺沉积。 该保护层也可以是耐氟蚀刻的金属氧化物层，例如氧化锆（ZrO 2）或氧化铝（Al 2 O 3）。
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公开(公告)号：US20090286381A1
公开(公告)日：2009-11-19
申请号：US12122614
申请日：2008-05-16
IPC分类号： H01L21/762
CPC分类号： H01L21/76224 , C23C16/045 , C23C16/401 , H01L21/76801
摘要： In-situ semiconductor process that can fill high aspect ratio (typically at least 6:1, for example 7:1 or higher), narrow width (typically sub 0.13 micron, for example 0.1 micron or less) gaps without damaging underlying features and little or no incidence of voids or weak spots is provided. A protective layer is deposited to protect underlying features in regions of the substrate having lower feature density so that unwanted material may be removed from regions of the substrate having higher feature density. This protective layer may deposits thicker on a low density feature than on a high density feature and may be deposited using a PECVD process or low sputter/deposition ratio HDP CVD process. This protective layer may also be a metallic oxide layer that is resistant to fluorine etching, such as zirconium oxide (ZrO2) or aluminum oxide (Al2O3).
摘要翻译： 可以填充高纵横比（通常至少6:1，例如7:1或更高），窄宽度（通常为0.13微米，例如0.1微米或更小）的间隙的原位半导体工艺，而不损坏底层特征和少量 或者不提供空隙或弱点的发生。 沉积保护层以保护具有较低特征密度的衬底区域中的底层特征，使得可以从具有较高特征密度的衬底的区域去除不需要的材料。 该保护层可以在低密度特征上比在高密度特征上沉积更厚，并且可以使用PECVD工艺或低溅射/沉积比HDP CVD工艺沉积。 该保护层也可以是耐氟蚀刻的金属氧化物层，例如氧化锆（ZrO 2）或氧化铝（Al 2 O 3）。
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公开(公告)号：US08592328B2
公开(公告)日：2013-11-26
申请号：US13414619
申请日：2012-03-07
IPC分类号： H01L21/471 , H05H1/24
CPC分类号： C23C16/345 , C23C16/45542 , C23C16/45544 , C23C16/45557 , C23C16/505 , C23C16/52 , C23C16/54 , H01L21/0217 , H01L21/02219 , H01L21/02274 , H01L21/0228 , H01L29/7843
摘要： Described are methods of making silicon nitride (SiN) materials on substrates. Improved SiN films made by the methods are also included. One aspect relates to depositing chlorine (Cl)-free conformal SiN films. In some embodiments, the SiN films are Cl-free and carbon (C)-free. Another aspect relates to methods of tuning the stress and/or wet etch rate of conformal SiN films. Another aspect relates to low-temperature methods of depositing high quality conformal SiN films. In some embodiments, the methods involve using trisilylamine (TSA) as a silicon-containing precursor.
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公开(公告)号：US08298936B1
公开(公告)日：2012-10-30
申请号：US12699738
申请日：2010-02-03
IPC分类号： H01L21/283 , H01L21/67
CPC分类号： H01L21/76843 , C23C14/046 , C23C14/5826 , C23C14/584 , H01L21/2855 , H01L21/76862 , H01L21/76865 , H01L21/76873
摘要： Metal seed layers are deposited on a semiconductor substrate having recessed features by a method that involves at least three operations. In this method, a first layer of metal is deposited onto the substrate to cover at least the bottom portions of the recessed features. The first layer of metal is subsequently redistributed to improve sidewall coverage of the recessed features. Next, a second layer of metal is deposited on at least the field region of the substrate and on the bottom portions of the recessed features. The method can be implemented using a PVD apparatus that allows deposition and resputtering operations. This sequence of operations can afford seed layers with improved step coverage. It also leads to decreased formation of voids in interconnects, and to improved resistance characteristics of formed IC devices.
摘要翻译： 通过涉及至少三个操作的方法将金属种子层沉积在具有凹陷特征的半导体衬底上。 在该方法中，第一金属层沉积在基底上以至少覆盖凹陷特征的底部。 随后重新分布第一金属层以改善凹陷特征的侧壁覆盖。 接下来，在衬底的至少场区域和凹陷特征的底部上沉积第二层金属。 该方法可以使用允许沉积和重新溅射操作的PVD装置来实现。 这种操作顺序可以提供具有改进的台阶覆盖率的种子层。 它还导致互连中空隙的形成减少，并改善形成的IC器件的电阻特性。
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8.发明授权Protection of Cu damascene interconnects by formation of a self-aligned buffer layer 有权通过形成自对准缓冲层来保护铜镶嵌互连公开(公告)号：US08030777B1
公开(公告)日：2011-10-04
申请号：US11671161
申请日：2007-02-05
IPC分类号： H01L23/48
CPC分类号： H01L21/76849 , H01L21/76831 , H01L21/76834 , H01L21/76846 , H01L21/76856 , H01L21/76867 , H01L21/76886
摘要： Methods of protecting exposed metal damascene interconnect surfaces in a process for making electronic components and the electronic components made according to such methods. An integrated circuit structure having damascene regions with exposed metal surfaces is provided into a closed processing chamber, whereby a first reactant is contacted to the exposed metal surfaces to transform a top portion of the metal layer into a protective self-aligned buffer layer. Reacting molecules of the first reactant with metal atoms of this metal layer forms the protective self-aligned buffer layer entirely within such metal layer. Alternatively, adsorbing surface-active reactant molecules onto the exposed metal surface forms the protective self-aligned buffer layer. A second reactant may be contacted to the protective self-aligned buffer layer to form a self-aligned dielectric cap layer directly over the protective self-aligned buffer layer.
摘要翻译： 在制造电子部件的方法和根据这些方法制造的电子部件的过程中保护暴露的金属镶嵌互连表面的方法。 具有暴露的金属表面的镶嵌区域的集成电路结构被提供到封闭处理室中，由此第一反应物与暴露的金属表面接触以将金属层的顶部部分转变成保护性自对准缓冲层。 使第一反应物与该金属层的金属原子反应的分子在该金属层内完全形成保护性自对准缓冲层。 或者，将表面活性反应物分子吸附到暴露的金属表面上形成保护性自对准缓冲层。 可以将第二反应物与保护性自对准缓冲层接触以在保护性自对准缓冲层上直接形成自对准电介质盖层。
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公开(公告)号：US20110151678A1
公开(公告)日：2011-06-23
申请号：US12964110
申请日：2010-12-09
申请人： Kaihan Ashtiani , Michael Wood , John Drewery , Naohiro Shoda , Bart van Schravendijk , Lakshminarayana Nittala , Nerissa Draeger
发明人： Kaihan Ashtiani , Michael Wood , John Drewery , Naohiro Shoda , Bart van Schravendijk , Lakshminarayana Nittala , Nerissa Draeger
IPC分类号： H01L21/31
CPC分类号： H01L21/02274 , H01L21/0214 , H01L21/02164 , H01L21/0217 , H01L21/02208 , H01L21/76224
摘要： Novel gap fill schemes involving depositing both flowable oxide films and high density plasma chemical vapor deposition oxide (HDP oxide) films are provided. According to various embodiments, the flowable oxide films may be used as a sacrificial layer and/or as a material for bottom up gap fill. In certain embodiments, the top surface of the filled gap is an HDP oxide film. The resulting filled gap may be filled only with HDP oxide film or a combination of HDP oxide and flowable oxide films. The methods provide improved top hat reduction and avoid clipping of the structures defining the gaps.
摘要翻译： 提供了包括沉积可流动氧化物膜和高密度等离子体化学气相沉积氧化物（HDP氧化物）膜的新型间隙填充方案。 根据各种实施方案，可流动的氧化物膜可以用作牺牲层和/或用作自底向上间隙填充的材料。 在某些实施例中，填充间隙的顶表面是HDP氧化物膜。 所得到的填充间隙可以仅用HDP氧化物膜或HDP氧化物和可流动氧化物膜的组合填充。 这些方法提供了改进的顶帽减少并且避免了限定间隙的结构的限制。
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10.发明申请公开(公告)号：US20110117678A1
公开(公告)日：2011-05-19
申请号：US12973549
申请日：2010-12-20
IPC分类号： H01L21/268 , H01L21/306 , B01J19/12
CPC分类号： H01L21/3105 , H01L21/67115 , H01L21/76813 , H01L21/76814 , H01L21/76825
摘要： A method for the ultraviolet (UV) treatment of carbon-containing low-k dielectric and associated apparatus enables process induced damage repair. The methods of the invention are particularly applicable in the context of damascene processing to recover lost low-k property of a dielectric damaged during processing, either pre-metallization, post-planarization, or both. UV treatments can include an exposure of the subject low-k dielectric to a constrained UV spectral profile and/or chemical silylating agent, or both.
摘要翻译： 一种用于含碳低k电介质和相关装置的紫外（UV）处理方法使得能够进行过程诱导的损伤修复。 本发明的方法特别适用于在镶嵌处理中恢复在加工期间损坏的电介质损失的低k特性，预金属化，后平面化或两者。 UV处理可以包括将受试者低k电介质暴露于约束的紫外光谱分布和/或化学甲硅烷基化试剂，或两者。
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