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公开(公告)号：US11448826B2
公开(公告)日：2022-09-20
申请号：US17305347
申请日：2021-07-06
发明人： Cyrielle Monpeurt , Salim Boutami
摘要： A wavelength demultiplexing device configured so as to spatially distributing the spectral contributions of an incident light beam, when in use, and which includes a linear waveguide and a planar waveguide, formed in a coplanar way and adapted to be optically coupled with one another along a coupling line, by evanescent coupling. Such a device may further include diffraction gratings located in the planar waveguide, to extract light out of the latter.
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公开(公告)号：US11002664B2
公开(公告)日：2021-05-11
申请号：US16322254
申请日：2017-08-03
发明人： Salim Boutami , Mathieu Dupoy , Boris Taurel
IPC分类号： G01N21/01 , G01N21/3504 , G01N21/03
摘要： An optical device for a biological or chemical sensor includes: an absorption cavity configured to receive a biological or chemical medium; an injection waveguide to inject an analysis light beam into the absorption cavity; and an extraction waveguide to extract a measurement light beam, corresponding to the analysis light beam after transit through the absorption cavity. The absorption cavity has a shape of a right cylinder with an elliptical base. One end of the injection waveguide is placed at a first focus of the ellipse and one and of the extraction waveguide is placed at a second focus of the ellipse. A core of the injection waveguide and a core of the extraction waveguide each have a tip-shaped end, with a constant height in a plane parallel to the generatrix of the right cylinder and a tip-shaped cross section in planes parallel to the base of the right cylinder.
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公开(公告)号：US10950739B2
公开(公告)日：2021-03-16
申请号：US15952683
申请日：2018-04-13
发明人： Karim Hassan , Salim Boutami , Christophe Kopp
IPC分类号： H01L31/0232 , G02B6/12 , H01L31/0224 , H01L31/105 , G02B6/13 , H01L31/18
摘要： A photodiode which includes a core of a first waveguide that terminates in a tapered termination that extends above a core, made of germanium or of SiGe, of a second waveguide, a matching strip that extends opposite the tapered termination on one side and opposite the core of the second waveguide on the opposite side, this matching strip being coupled optically to the core of the second waveguide by an evanescent coupling and including a first zone inside which its effective propagation index is equal to the effective propagation index of a second zone of the tapered termination, these first and second zones optically coupling the tapered termination to the matching strip through a modal coupling, and a low-index layer that extends between the matching strip and the tapered termination.
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公开(公告)号：US10409094B2
公开(公告)日：2019-09-10
申请号：US16031572
申请日：2018-07-10
发明人： Karim Hassan , Salim Boutami , Thomas Anfray
摘要： The object of the invention is a phase modulator including a modulation guide intended to guide die propagation of a light flow, said guide comprising a PN junction extending mainly along the main axis of propagation according to an oscillating continuous function. Advantageously, the oscillating continuous function is defined in such a way that the PN junction covers at least 50% of the light flow between the input and the output of the modulation guide. According to one possibility, the continuous function is sinusoidal. The object of the invention is also a switch and an intensity modulator each comprising a phase modulator.
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公开(公告)号：US20190097391A1
公开(公告)日：2019-03-28
申请号：US16145471
申请日：2018-09-28
发明人： Vincent Reboud , Salim Boutami
摘要： A laser source including a germanium-based semiconductor layer, including a suspended membrane formed of a tensilely stressed central portion and including an optical amplification section, and a plurality of tensioning arms. It includes an integrated waveguide, which participates in forming an optical cavity and which is located level with the carrier layer and at distance from the suspended membrane, the waveguide including a coupling section located facing the optical application section, which is suitable for allowing evanescent-wave optical coupling to the latter, and at least one curved section, which extends the coupling section, and which is arranged so that the integrated waveguide is placed at distance, in orthogonal projection, from the tensioning arms.
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公开(公告)号：US10211162B2
公开(公告)日：2019-02-19
申请号：US15879577
申请日：2018-01-25
IPC分类号： H01L21/00 , H01L23/544 , G03F1/78 , G03F1/84 , G03F7/20 , G01B11/27 , H01J37/317 , H01L21/67 , H01L21/68 , H01L21/66 , G01N21/552
摘要： This method for measuring the misalignment between a first and a second etching zone includes: producing a plasmonic antenna including a first and a second element that are separate and each delineate a cavity on one respective side, all of the elements of the plasmonic antenna that are situated on a first side of a separating plane being produced entirely inside the first zone and all of the elements of the plasmonic antenna that are situated on the second side of the separating plane being produced entirely inside the second zone, and after the production of the plasmonic antenna, the method includes: measuring the absorption rate of the plasmonic antenna, and determining the magnitude of the misalignment between the first and second zones on the basis of the measured absorption rate and of a predicted value for this absorption rate in the absence of a misalignment.
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公开(公告)号：US20190018263A1
公开(公告)日：2019-01-17
申请号：US16031572
申请日：2018-07-10
发明人： Karim Hassan , Salim Boutami , Thomas Anfray
CPC分类号： G02F1/01708 , G02F1/025 , G02F1/2257 , G02F2001/0175
摘要： The object of the invention is a phase modulator including a modulation guide intended to guide die propagation of a light flow, said guide comprising a PN junction extending mainly along the main axis of propagation according to an oscillating continuous function. Advantageously, the oscillating continuous function is defined in such a way that the PN junction covers at least 50% of the light flow between the input and the output of the modulation guide. According to one possibility, the continuous function is sinusoidal. The object of the invention is also a switch and an intensity modulator each comprising a phase modulator.
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公开(公告)号：US20180233456A1
公开(公告)日：2018-08-16
申请号：US15879577
申请日：2018-01-25
IPC分类号： H01L23/544 , H01L21/66 , H01L21/68 , H01L21/67 , H01J37/317 , G01B11/27
CPC分类号： H01L23/544 , G01B11/272 , G01N21/554 , G03F1/78 , G03F1/84 , G03F7/70633 , G03F7/70683 , H01J37/3174 , H01J2237/31798 , H01L21/67259 , H01L21/68 , H01L22/10 , H01L2223/5442 , H01L2223/54426
摘要： This method for measuring the misalignment between a first and a second etching zone includes: producing a plasmonic antenna including a first and a second element that are separate and each delineate a cavity on one respective side, all of the elements of the plasmonic antenna that are situated on a first side of a separating plane being produced entirely inside the first zone and all of the elements of the plasmonic antenna that are situated on the second side of the separating plane being produced entirely inside the second zone, and after the production of the plasmonic antenna, the method includes: measuring the absorption rate of the plasmonic antenna, and determining the magnitude of the misalignment between the first and second zones on the basis of the measured absorption rate and of a predicted value for this absorption rate in the absence of a misalignment.
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公开(公告)号：US09401377B2
公开(公告)日：2016-07-26
申请号：US14354750
申请日：2012-11-23
CPC分类号： H01L27/1446 , G01J5/02 , G01J5/024 , G01J5/08 , G01J5/0806 , G01J5/20 , H01L31/08 , H01L31/18
摘要： An array bolometric detector for detecting an electromagnetic radiation in a predetermined infrared or terahertz wavelength range, including a substrate, and an array of bolometric microplates for the detection of the radiation, suspended above the substrate by support elements. The detector includes a membrane arranged above each microplate, and having patterns having a refractive index smaller than that of the membrane formed therein. The patterns are placed periodically along at least one axis of the membrane, according to a period shorter than or equal to λ n , where λ is a wavelength to be detected and n is the average refractive index of the medium separating the microplate from the membrane. The width of the patterns along the axis increases from a central location of the membrane towards the periphery thereof.
摘要翻译： 一种用于检测预定的红外线或太赫兹波长范围内的电磁辐射的阵列辐射检测器，包括基底，以及通过支撑元件悬挂在基底上方的用于检测辐射的测温微阵列阵列。 检测器包括布置在每个微板上方的膜，并且具有折射率小于其中形成的膜的折射率的图案。 根据小于或等于λn的周期，沿着膜的至少一个轴周期性地排列图案，其中λ是待检测的波长，n是将微孔板与膜分离的介质的平均折射率 。 沿着轴的图案的宽度从膜的中心位置朝向其周边增加。
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公开(公告)号：US09335259B2
公开(公告)日：2016-05-10
申请号：US14677222
申请日：2015-04-02
发明人： Alain Gliere , Salim Boutami , Mickael Brun , Pierre Labeye , Sergio Nicoletti , Justin Rouxel
IPC分类号： G01N21/00 , G01N21/3504 , G01N21/03 , H01S5/026 , G01N29/036 , G01N29/22 , G01N29/24 , G01N21/17
CPC分类号： G01N21/3504 , G01N21/03 , G01N21/0303 , G01N21/1702 , G01N29/036 , G01N29/222 , G01N29/2425 , G01N2021/1704 , G01N2021/1708 , G01N2201/06113 , G01N2201/0612 , G01N2201/08 , G01N2291/021 , H01S5/026
摘要： Microelectronic photoacoustic detection device comprising: a substrate comprising cavities forming a Helmholtz differential acoustic resonator; acoustic detectors coupled to the chambers of the resonator; a light source; a waveguide comprising a first end coupled to the light source and a second end coupled to a first chamber; in which the second end comprises, at the interface with the first chamber, a width greater than that of the first end and that of the given wavelength, and/or in which the device comprises a diffraction grating arranged in the second end and capable of diffracting a first part of the beam towards a lower reflective layer arranged under the second end and a second part of the beam towards an upper reflective layer arranged at an upper wall of the first chamber.
摘要翻译： 微电子光声检测装置，包括：衬底，其包括形成亥姆霍兹差分声谐振器的空腔; 耦合到谐振器的腔室的声学检测器; 光源; 波导，包括耦合到所述光源的第一端和耦合到第一室的第二端; 其中所述第二端在与所述第一室的界面处包括大于所述第一端和所述给定波长的宽度的宽度和/或所述装置包括布置在所述第二端中的衍射光栅，并且能够 将光束的第一部分朝向布置在第二端下方的下反射层衍射，并且将光束的第二部分朝向布置在第一室的上壁处的上反射层衍射。
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