公开(公告)号：US07223691B2

公开(公告)日：2007-05-29

申请号：US10965031

申请日：2004-10-14

申请人： Cyril Cabral, Jr. ,  Lawrence A. Clevenger ,  Timothy J. Dalton ,  Patrick W. DeHaven ,  Chester T. Dziobkowski ,  Sunfei Fang ,  Terry A. Spooner ,  Tsong-Lin L. Tai ,  Kwong Hon Wong ,  Chin-Chao Yang

发明人： Cyril Cabral, Jr. ,  Lawrence A. Clevenger ,  Timothy J. Dalton ,  Patrick W. DeHaven ,  Chester T. Dziobkowski ,  Sunfei Fang ,  Terry A. Spooner ,  Tsong-Lin L. Tai ,  Kwong Hon Wong ,  Chin-Chao Yang

IPC分类号： H01L21/44

CPC分类号： H01L21/76843 ,  H01L21/76849 ,  H01L21/76867 ,  H01L21/76888

摘要： A novel interlevel contact via structure having low contact resistance and improved reliability, and method of forming the contact via. The method comprises steps of: etching an opening through an interlevel dielectric layer to expose an underlying metal (Copper) layer surface; and, performing a low energy ion implant of an inert gas (Nitrogen) into the exposed metal underneath; and, depositing a refractory liner into the walls and bottom via structure which will have a lower contact resistance due to the presence of the proceeding inert gas implantation. Preferably, the inert Nitrogen gas reacts with the underlying exposed Copper metal to form a thin layer of CuN.

摘要翻译： 具有低接触电阻和改进的可靠性的新颖的层间接触通孔结构以及形成接触通孔的方法。 该方法包括以下步骤：通过层间电介质层蚀刻开口以暴露下面的金属（铜）层表面; 并且将惰性气体（氮气）的低能量离子注入进入下面暴露的金属; 并且将耐火衬垫沉积到壁和底部通孔结构中，由于进行的惰性气体注入的存在而将具有较低的接触电阻。 优选地，惰性氮气与下面暴露的铜金属反应形成一层薄的CuN。

公开(公告)号：US06909145B2

公开(公告)日：2005-06-21

申请号：US10252661

申请日：2002-09-23

申请人： Cyril Cabral, Jr. ,  Lawrence A. Clevenger ,  Louis L. Hsu ,  Joseph F. Shepard, Jr. ,  Kwong Hon Wong

发明人： Cyril Cabral, Jr. ,  Lawrence A. Clevenger ,  Louis L. Hsu ,  Joseph F. Shepard, Jr. ,  Kwong Hon Wong

IPC分类号： H01L21/28 ,  H01L21/336 ,  H01L29/423 ,  H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

CPC分类号： H01L29/6653 ,  H01L21/28061 ,  H01L21/28114 ,  H01L29/42376 ,  H01L29/6659

摘要： A method and structure for a metal oxide semiconductor transistor having a substrate, a well region in the substrate, source and drain regions on opposite sides of the well region in the substrate, a gate insulator over the well region of the substrate, a polysilicon gate conductor over the gate insulator, and metallic spacers on sides of the gate conductor.

摘要翻译： 一种金属氧化物半导体晶体管的方法和结构，其具有衬底，衬底中的阱区，衬底中的阱区的相对侧上的源极和漏极区，衬底的阱区上的栅极绝缘体，多晶硅栅极 栅极绝缘体上的导体，以及栅极导体侧面的金属间隔物。

公开(公告)号：US20080318415A1

公开(公告)日：2008-12-25

申请号：US12199407

申请日：2008-08-27

申请人： Kwong Hon Wong ,  Louis C. Hsu ,  Timothy J. Dalton ,  Carl Radens ,  Chih-Chao Yang ,  Lawrence A. Clevenger ,  Theodorus E. Standaert

发明人： Kwong Hon Wong ,  Louis C. Hsu ,  Timothy J. Dalton ,  Carl Radens ,  Chih-Chao Yang ,  Lawrence A. Clevenger ,  Theodorus E. Standaert

IPC分类号： H01L21/4763

CPC分类号： H01L21/76852 ,  H01L21/288 ,  H01L21/2885 ,  H01L21/76885 ,  H01L23/5226 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of making an interconnect comprising: providing an interconnect structure in a dielectric material, recessing the dielectric material such that a portion of the interconnect structure extends above an upper surface of the dielectric; and depositing an encasing cap over the extended portion of the interconnect structure.

摘要翻译： 一种制造互连的方法，包括：在介电材料中提供互连结构，使所述电介质材料凹陷，使得所述互连结构的一部分在所述电介质的上表面上方延伸; 以及在所述互连结构的延伸部分上沉积封装盖。

公开(公告)号：US08304912B2

公开(公告)日：2012-11-06

申请号：US12054644

申请日：2008-03-25

申请人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Louis C. Hsu ,  Carl Radens ,  Kwong Hon Wong ,  Chih-Chao Yang

发明人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Louis C. Hsu ,  Carl Radens ,  Kwong Hon Wong ,  Chih-Chao Yang

IPC分类号： H01L23/48

CPC分类号： H01L27/1203 ,  H01L21/28114 ,  H01L21/823456 ,  H01L21/84 ,  H01L29/42376 ,  H01L2924/0002 ,  H01L2924/00

摘要： A transistor device and method of forming the same comprises a substrate; a first gate electrode over the substrate; a second gate electrode over the substrate; and a landing pad comprising a pair of flanged ends overlapping the second gate electrode, wherein the structure of the second gate electrode is discontinuous with the structure of the landing pad.

摘要翻译： 晶体管器件及其形成方法包括：衬底; 衬底上的第一栅电极; 在所述衬底上方的第二栅电极; 以及着陆垫，其包括与所述第二栅电极重叠的一对凸缘端，其中所述第二栅极的结构与所述着陆焊盘的结构不连续。

公开(公告)号：US07488677B2

公开(公告)日：2009-02-10

申请号：US11503259

申请日：2006-08-14

申请人： Kwong Hon Wong ,  Louis C. Hsu ,  Timothy J. Dalton ,  Carol Radens ,  Chih-Chao Yang ,  Lawrence A. Clevenger ,  Theodorus E. Standaert

发明人： Kwong Hon Wong ,  Louis C. Hsu ,  Timothy J. Dalton ,  Carol Radens ,  Chih-Chao Yang ,  Lawrence A. Clevenger ,  Theodorus E. Standaert

IPC分类号： H01L21/4763

CPC分类号： H01L21/76852 ,  H01L21/288 ,  H01L21/2885 ,  H01L21/76885 ,  H01L23/5226 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of making an interconnect that includes providing an interconnect structure in a dielectric material, recessing the dielectric material such that a portion of the interconnect structure extends above an upper surface of the dielectric; and depositing an encasing cap over the extended portion of the interconnect structure.

摘要翻译： 一种制造互连的方法，包括在电介质材料中提供互连结构，使电介质材料凹陷，使得互连结构的一部分在电介质的上表面上方延伸; 以及在所述互连结构的延伸部分上沉积封装盖。

公开(公告)号：US20080164525A1

公开(公告)日：2008-07-10

申请号：US12054644

申请日：2008-03-25

申请人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Louis C. Hsu ,  Carl Radens ,  Kwong Hon Wong ,  Chih-Chao Yang

发明人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Louis C. Hsu ,  Carl Radens ,  Kwong Hon Wong ,  Chih-Chao Yang

IPC分类号： H01L27/12 ,  H01L21/782

CPC分类号： H01L27/1203 ,  H01L21/28114 ,  H01L21/823456 ,  H01L21/84 ,  H01L29/42376 ,  H01L2924/0002 ,  H01L2924/00

摘要： A transistor device and method of forming the same comprises a substrate; a first gate electrode over the substrate; a second gate electrode over the substrate; and a landing pad comprising a pair of flanged ends overlapping the second gate electrode, wherein the structure of the second gate electrode is discontinuous with the structure of the landing pad.

摘要翻译： 晶体管器件及其形成方法包括：衬底; 衬底上的第一栅电极; 在所述衬底上方的第二栅电极; 以及着陆垫，其包括与所述第二栅电极重叠的一对凸缘端，其中所述第二栅极的结构与所述着陆焊盘的结构不连续。

公开(公告)号：US06388327B1

公开(公告)日：2002-05-14

申请号：US09756938

申请日：2001-01-09

申请人： Kenneth J. Giewont ,  Stephen Bruce Brodsky ,  Cyril Cabral, Jr. ,  Anthony G. Domenicucci ,  Craig Mitchell Ransom ,  Yun-Yu Wang ,  Horatio S. Wildman ,  Kwong Hon Wong

发明人： Kenneth J. Giewont ,  Stephen Bruce Brodsky ,  Cyril Cabral, Jr. ,  Anthony G. Domenicucci ,  Craig Mitchell Ransom ,  Yun-Yu Wang ,  Horatio S. Wildman ,  Kwong Hon Wong

IPC分类号： H01L2348

CPC分类号： C23C14/0094 ,  C23C14/0641 ,  H01L21/28052 ,  H01L21/28518 ,  H01L21/2855

摘要： A capping layer for a semiconductor structure is described. The capping layer is deposited over a silicide-forming metal and has a composition such that nitrogen diffusion therefrom is insufficient to cause formation of an oxynitride from an oxide layer on the underlying silicon. The capping layer may be a metal layer from which no N diffusion occurs, or one or more layers including Ti and/or TiN arranged so that N atoms do not reach the oxide layer. A method is also described for forming the Ti and TiN layers. It is advantageous to deposit non-stoichiometric TiN deficient in N, by sputtering from a Ti target in a nitrogen flow insufficient to cause formation of a nitride on the target.

摘要翻译： 描述了半导体结构的覆盖层。 覆盖层沉积在硅化物形成金属上，并且具有使得其中的氮扩散不足以引起下层硅上的氧化物层形成氧氮化物的组成。 覆盖层可以是不发生N扩散的金属层，或者包括Ti和/或TiN的一个或多个层，以使得N原子不到达氧化物层。 还描述了形成Ti和TiN层的方法。 通过在不足以引起目标上形成氮化物的氮气流中从Ti靶溅射而在N中沉积非化学计量的TiN是有利的。

公开(公告)号：US06180521B2

公开(公告)日：2001-01-30

申请号：US09225598

申请日：1999-01-06

申请人： Patrick W. DeHaven ,  Anthony G. Domenicucci ,  Lynne M. Gignac ,  Glen L. Miles ,  Prabhat Tiwari ,  Yun-Yu Wang ,  Horatio S. Wildman ,  Kwong Hon Wong

发明人： Patrick W. DeHaven ,  Anthony G. Domenicucci ,  Lynne M. Gignac ,  Glen L. Miles ,  Prabhat Tiwari ,  Yun-Yu Wang ,  Horatio S. Wildman ,  Kwong Hon Wong

IPC分类号： H01L2128

CPC分类号： H01L21/76846 ,  H01L21/28518 ,  H01L21/76855 ,  H01L21/76856 ,  H01L21/76864

摘要： A process for forming a conductive contact having a flat interface. A layer containing niobium and titanium is deposited on a silicon substrate and the resulting structure is annealed in a nitrogen-containing atmosphere at about 500° C. to about 700° C. By this process, a flatter interface between silicide and silicon, which is less likely to cause junction leakage, is formed on annealing. The step of annealing also produces a more uniform bilayer, which is a better barrier against tungsten encroachment during subsequent tungsten deposition. Larger silicide grains are also formed so that fewer grain boundaries are produced, reducing metal diffusion in grain boundaries. The process can be used to form contacts for very small devices and shallow junctions, such as are required for current and future semiconductor devices.

摘要翻译： 一种用于形成具有平坦界面的导电触头的工艺。 将含有铌和钛的层沉积在硅衬底上，所得结构在约500℃至约700℃的含氮气氛中退火。通过该过程，硅化物和硅之间的平坦界面是 在退火时形成不太可能导致结漏电。 退火步骤还产生更均匀的双层，这是在随后的钨沉积期间防止钨侵蚀的更好的屏障。 还形成更大的硅化物晶粒，使得产生更少的晶界，减少晶界中的金属扩散。 该过程可用于形成非常小的器件和浅结的接触，例如当前和未来的半导体器件所需要的。

公开(公告)号：US06509265B1

公开(公告)日：2003-01-21

申请号：US09666240

申请日：2000-09-21

申请人： Patrick W. DeHaven ,  Anthony G. Domenicucci ,  Lynne M. Gignac ,  Glen L. Miles ,  Prabhat Tiwari ,  Yun-Yu Wang ,  Horatio S. Wildman ,  Kwong Hon Wong

发明人： Patrick W. DeHaven ,  Anthony G. Domenicucci ,  Lynne M. Gignac ,  Glen L. Miles ,  Prabhat Tiwari ,  Yun-Yu Wang ,  Horatio S. Wildman ,  Kwong Hon Wong

IPC分类号： H01L214763

CPC分类号： H01L21/76846 ,  H01L21/28518 ,  H01L21/76855 ,  H01L21/76856 ,  H01L21/76864

摘要： A process for forming a conductive contact having a flat interface. A layer containing niobium and titanium is deposited on a silicon substrate and the resulting structure is annealed in a nitrogen-containing atmosphere at about 500° C. to about 700° C. By this process, a flatter interface between silicide and silicon, which is less likely to cause junction leakage, is formed on annealing. The step of annealing also produces a more uniform bilayer, which is a better barrier against tungsten encroachment during subsequent tungsten deposition. Larger silicide grains are also formed so that fewer grain boundaries are produced, reducing metal diffusion in grain boundaries. The process can be used to form contacts for very small devices and shallow junctions, such as are required for current and future semiconductor devices.

摘要翻译： 一种用于形成具有平坦界面的导电触头的工艺。 将含有铌和钛的层沉积在硅衬底上，所得结构在约500℃至约700℃的含氮气氛中退火。通过该过程，硅化物和硅之间的平坦界面是 在退火时形成不太可能导致结漏电。 退火步骤还产生更均匀的双层，这是在随后的钨沉积期间防止钨侵蚀的更好的屏障。 还形成更大的硅化物晶粒，使得产生更少的晶界，减少晶界中的金属扩散。 该过程可用于形成非常小的器件和浅结的接触，例如当前和未来的半导体器件所需要的。

公开(公告)号：US07041552B2

公开(公告)日：2006-05-09

申请号：US10787487

申请日：2004-02-26

申请人： Lawrence A. Clevenger ,  Louis L. Hsu ,  Kwong Hon Wong

发明人： Lawrence A. Clevenger ,  Louis L. Hsu ,  Kwong Hon Wong

IPC分类号： H01L21/8242

CPC分类号： H01L21/28194 ,  H01L21/28079 ,  H01L21/28088 ,  H01L21/28114 ,  H01L27/0629 ,  H01L27/10805 ,  H01L27/1085 ,  H01L27/10885 ,  H01L29/42376 ,  H01L29/495 ,  H01L29/4958 ,  H01L29/4966 ,  H01L29/51 ,  H01L29/517 ,  H01L29/66545

摘要： An integrated circuit structure is disclosed that comprises a pair of capacitors, each having metal plates separated by an insulator, and metal gate semiconductor transistors electrically connected to the capacitors. The metal gate of the transistors and one of the metal plates of each of the capacitors comprise the same metal level in the integrated circuit structure. More specifically, each of the capacitors comprise a vertical capacitor having an upper metal plate vertically over a lower metal plate and each metal gate of the transistors and each upper metal plate of the capacitors comprise the same metal level in the integrated circuit structure.

摘要翻译： 公开了一种集成电路结构，其包括一对电容器，每个电容器具有由绝缘体分隔的金属板和与电容器电连接的金属栅极半导体晶体管。 晶体管的金属栅极和每个电容器的金属板之一在集成电路结构中包括相同的金属电平。 更具体地，每个电容器包括垂直电容器，其具有垂直于下金属板上的上金属板，并且晶体管的每个金属栅极和电容器的每个上金属板在集成电路结构中包括相同的金属电平。