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    Line narrowing unit with flexural grating mount
    1.
    发明授权
    Line narrowing unit with flexural grating mount 有权
    带有弯曲光栅安装的线窄变单元

    公开(公告)号：US06496528B2

    公开(公告)日：2002-12-17

    申请号：US09895664

    申请日：2001-06-29

    申请人： Clay C. Titus ,  William G. Hulburd ,  Raymond F. Cybulski ,  John M. Algots ,  Michael S. Lysik

    发明人： Clay C. Titus ,  William G. Hulburd ,  Raymond F. Cybulski ,  John M. Algots ,  Michael S. Lysik

    IPC分类号： H01S308

    CPC分类号： H01S3/036 ,  G03F7/70025 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/034 ,  H01S3/0401 ,  H01S3/08009 ,  H01S3/08059 ,  H01S3/0812 ,  H01S3/086 ,  H01S3/13 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/225 ,  H01S3/2256

    摘要： A grating based line narrowing device for line narrowing lasers producing high energy laser beams. Techniques are provided for minimizing adverse effects of heat produced by the laser beam inside the line narrowing device. A flexural grating mount is provided which virtually eliminates stress on the grating caused by differential thermal expansion between the grating and the LNP housing structure. In a preferred embodiment the grating which is comprised of a very thin lined aluminum surface on a thick ultra low expansion glass substrate is attached to an aluminum housing structure using a flexural grating mount. At least one flexure joint is provided in the grating mount which permits thermal expansion and contraction of the aluminum housing without producing undesirable mechanical stresses in the glass substrate of the grating. In some embodiments the mount comprises a metal plate and the flexure joint is a H-Flex joint which is machined into the metal plate. In another embodiment two H-Flex joints are provided. In other embodiments, the flexure joint is a dovetail joint permitting one end of the mount to slip relative to the other. In another preferred embodiments a stream of gas is directed across the face of the grating. In other embodiments the effect of a hot gas layer on the face of the grating is reduced with the use of helium as a purge gas and in other embodiments the purge gas pressure is reduced to reduce the optical effects of the hot gas layer.

    摘要翻译： 用于生产高能量激光束的线窄激光器的基于光栅的线窄化装置。 提供了用于最小化由线束变窄装置内部的激光束产生的热的不利影响的技术。提供了一种弯曲光栅安装件，其实际上消除了由光栅和LNP壳体结构之间的差分热膨胀引起的对光栅的应力。 在优选实施例中，由厚的超低膨胀玻璃基板上的非常薄的衬里的铝表面组成的光栅使用弯曲光栅安装件附接到铝外壳结构。 在光栅安装件中提供至少一个弯曲接头，其允许铝外壳的热膨胀和收缩，而不会在光栅的玻璃基板中产生不期望的机械应力。 在一些实施例中，安装件包括金属板，并且挠曲接头是被加工成金属板的H-Flex接头。 在另一个实施例中，提供了两个H-Flex接头。 在其它实施例中，挠曲接头是燕尾接头，允许安装座的一端相对于另一端滑动。在另一优选实施例中，气流被引导穿过光栅的表面。 在其他实施例中，使用氦气作为净化气体来减少热气体层在光栅表面上的影响，并且在其它实施例中，减少吹扫气体压力以减少热气体层的光学效应。

    Wavelength reference for laser
    4.
    发明授权
    Wavelength reference for laser 有权
    激光波长参考

    公开(公告)号：US06396582B1

    公开(公告)日：2002-05-28

    申请号：US09206526

    申请日：1998-12-07

    申请人： Jesse D. Buck ,  Raymond F. Cybulski ,  Peter C. Newman ,  Palash P. Das

    发明人： Jesse D. Buck ,  Raymond F. Cybulski ,  Peter C. Newman ,  Palash P. Das

    IPC分类号： G01J328

    CPC分类号： H01S3/1303 ,  G01J9/00 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/03 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/225

    摘要： The present invention includes a system and method for characterizing the wavelength of a beam of radiation using a known reference transition. The invention comprises a vapor including a material having a transition which absorbs radiation of a known wavelength, the vapor being contained in a container. The container includes an optical path along which the beam of radiation can propagate through the vapor. A dispersive optical element is aligned along the optical path. A detector is aligned along the optical path after the dispersive element. Wavelength information about the beam of radiation is determined from the position of a dip in the detector signal that is correlated to the known reference transition. This method is most useful when the laser bandwidth substantially exceeds the transition bandwidth.

    摘要翻译： 本发明包括使用已知参考转变来表征辐射束的波长的系统和方法。 本发明包括一种蒸汽，其包括具有吸收已知波长的辐射的过渡物质，该蒸气被包含在容器中。 容器包括一个光路，辐射束沿着该光路传播通过蒸汽。 色散光学元件沿光路对准。 在分散元件之后，检测器沿光路对齐。 关于辐射束的波长信息根据与已知参考转变相关的检测器信号中的倾角的位置来确定。 当激光带宽基本上超过转换带宽时，该方法是最有用的。

    Gas discharge laser line narrowing module
    7.
    发明授权
    Gas discharge laser line narrowing module 有权
    气体放电激光线变窄模块

    公开(公告)号：US08379687B2

    公开(公告)日：2013-02-19

    申请号：US11173955

    申请日：2005-06-30

    申请人： Raymond F. Cybulski ,  Robert A. Bergstedt ,  William N. Partlo ,  Richard L. Sandstrom ,  Gon Wang

    发明人： Raymond F. Cybulski ,  Robert A. Bergstedt ,  William N. Partlo ,  Richard L. Sandstrom ,  Gon Wang

    IPC分类号： H01S3/08

    CPC分类号： H01S3/03 ,  H01S3/034 ,  H01S3/036 ,  H01S3/1055 ,  H01S3/225

    摘要： A line narrowed gas discharge laser system and method of operating same is disclosed which may comprise a dispersive center wavelength selective element; a beam expander comprising a plurality of refractive elements; a refractive element positioning mechanism positioning at least one of the refractive elements to modify an angle of incidence of a laser light beam on the dispersive center wavelength selection element; each of the dispersive center wavelength selection element and the beam expander being aligned with each other and with a housing containing at least the dispersive center wavelength selection element; a housing positioning mechanism positioning the housing with respect to an optical axis of the gas discharge laser system. The dispersive element may comprise a grating and the beam expander may comprise a plurality of prisms. The housing may contain the dispersive center wavelength selective element and the beam expander. The housing positioning element may comprise a position locking mechanism.

    摘要翻译： 公开了一种窄气体放电激光系统及其操作方法，其可以包括分散中心波长选择元件; 包括多个折射元件的光束扩展器; 折射元件定位机构，其定位折射元件中的至少一个，以改变激光束在分散中心波长选择元件上的入射角; 分散中心波长选择元件和扩束器中的每一个彼此对准并且至少包含分散中心波长选择元件的壳体; 壳体定位机构相对于气体放电激光系统的光轴定位壳体。 色散元件可以包括光栅，并且光束扩展器可以包括多个棱镜。 壳体可以包含分散中心波长选择元件和扩束器。 壳体定位元件可以包括位置锁定机构。