公开(公告)号：US20120307217A1

公开(公告)日：2012-12-06

申请号：US13587512

申请日：2012-08-16

申请人： Dong Ho Kim ,  Jinyoung Choi ,  Jaeseung Go ,  Soomin Hwang

发明人： Dong Ho Kim ,  Jinyoung Choi ,  Jaeseung Go ,  Soomin Hwang

IPC分类号： G03B27/52

CPC分类号： H01L21/67225 ,  G03F7/7075 ,  G03F7/70991 ,  H01L21/67213

摘要： A method and system for treating a substrate are provided. The system includes a coating unit, a pre/post-exposure treatment unit, and a developing unit. Each of the units includes a load port and an index module. The pre/post-exposure treatment unit includes first and second modules that are arranged in different layers. The first module performs a process for coating a protective layer on the wafer before an exposure process. The second module performs a process for cleaning the wafer and a post-exposure bake process after the exposure process.

摘要翻译： 提供了一种处理基板的方法和系统。 该系统包括涂覆单元，曝光前/曝光后处理单元和显影单元。 每个单元包括负载端口和索引模块。 前/后曝光处理单元包括布置在不同层中的第一和第二模块。 第一模块在曝光处理之前执行在晶片上涂覆保护层的工艺。 第二模块执行清洁晶片的处理和曝光处理之后的曝光后烘烤处理。

公开(公告)号：US20100195066A1

公开(公告)日：2010-08-05

申请号：US12656425

申请日：2010-01-29

申请人： Dong Ho Kim ,  Jinyoung Choi ,  Jaeseung Go ,  Soomin Hwang

发明人： Dong Ho Kim ,  Jinyoung Choi ,  Jaeseung Go ,  Soomin Hwang

IPC分类号： G03B27/42

CPC分类号： H01L21/67225 ,  G03F7/7075 ,  G03F7/70991 ,  H01L21/67213

摘要： A method and system for treating a substrate are provided. The system includes a coating unit, a pre/post-exposure treatment unit, and a developing unit. Each of the units includes a load port and an index module. The pre/post-exposure treatment unit includes first and second modules that are arranged in different layers. The first module performs a process for coating a protective layer on the wafer before an exposure process. The second module performs a process for cleaning the wafer and a post-exposure bake process after the exposure process.

摘要翻译： 提供了一种处理基板的方法和系统。 该系统包括涂覆单元，曝光前/曝光后处理单元和显影单元。 每个单元包括负载端口和索引模块。 前/后曝光处理单元包括布置在不同层中的第一和第二模块。 第一模块在曝光处理之前执行在晶片上涂覆保护层的工艺。 第二模块执行清洁晶片的处理和曝光处理之后的曝光后烘烤处理。

公开(公告)号：US09059224B2

公开(公告)日：2015-06-16

申请号：US13587512

申请日：2012-08-16

申请人： Dong Ho Kim ,  Jinyoung Choi ,  Jaeseung Go ,  Soomin Hwang

发明人： Dong Ho Kim ,  Jinyoung Choi ,  Jaeseung Go ,  Soomin Hwang

IPC分类号： G03B27/32 ,  B05C13/02 ,  G03D5/00 ,  H01L21/67 ,  G03F7/20

CPC分类号： H01L21/67225 ,  G03F7/7075 ,  G03F7/70991 ,  H01L21/67213

摘要： A method and system for treating a substrate are provided. The system includes a coating unit, a pre/post-exposure treatment unit, and a developing unit. Each of the units includes a load port and an index module. The pre/post-exposure treatment unit includes first and second modules that are arranged in different layers. The first module performs a process for coating a protective layer on the wafer before an exposure process. The second module performs a process for cleaning the wafer and a post-exposure bake process after the exposure process.

摘要翻译： 提供了一种处理基板的方法和系统。 该系统包括涂覆单元，曝光前/曝光后处理单元和显影单元。 每个单元包括负载端口和索引模块。 前/后曝光处理单元包括以不同层布置的第一和第二模块。 第一模块在曝光处理之前执行在晶片上涂覆保护层的工艺。 第二模块执行清洁晶片的处理和曝光处理之后的曝光后烘烤处理。

公开(公告)号：US08289496B2

公开(公告)日：2012-10-16

申请号：US12656425

申请日：2010-01-29

申请人： Dong Ho Kim ,  Jinyoung Choi ,  Jaeseung Go ,  Soomin Hwang

发明人： Dong Ho Kim ,  Jinyoung Choi ,  Jaeseung Go ,  Soomin Hwang

IPC分类号： G03B27/32 ,  B05C13/02 ,  G03D5/00

CPC分类号： H01L21/67225 ,  G03F7/7075 ,  G03F7/70991 ,  H01L21/67213

摘要： A method and system for treating a substrate are provided. The system includes a coating unit, a pre/post-exposure treatment unit, and a developing unit. Each of the units includes a load port and an index module. The pre/post-exposure treatment unit includes first and second modules that are arranged in different layers. The first module performs a process for coating a protective layer on the wafer before an exposure process. The second module performs a process for cleaning the wafer and a post-exposure bake process after the exposure process.

摘要翻译： 提供了一种处理基板的方法和系统。 该系统包括涂覆单元，曝光前/曝光后处理单元和显影单元。 每个单元包括负载端口和索引模块。 前/后曝光处理单元包括布置在不同层中的第一和第二模块。 第一模块在曝光处理之前执行在晶片上涂覆保护层的工艺。 第二模块执行清洁晶片的处理和曝光处理之后的曝光后烘烤处理。

公开(公告)号：US20100192844A1

公开(公告)日：2010-08-05

申请号：US12656449

申请日：2010-01-29

申请人： Dong Ho Kim ,  Jinyoung Choi ,  Jaeseung Go ,  Hyoung Rae Noh

发明人： Dong Ho Kim ,  Jinyoung Choi ,  Jaeseung Go ,  Hyoung Rae Noh

IPC分类号： B05C9/12 ,  B05C13/00 ,  B05C9/10 ,  B05C9/14

CPC分类号： H01L21/67225 ,  G03F7/70341 ,  G03F7/7075 ,  G03F7/70808 ,  G03F7/70991 ,  H01L21/6715 ,  H01L21/67178 ,  H01L21/67184

摘要： An apparatus and method for treating a substrate are provided. The apparatus includes a load port, an index module, a first buffer module, a coating/developing module, a second buffer module, a pre/post-exposure treatment module, and an interface module, which are sequentially arranged in a direction. The coating/developing module includes a coating module and a developing module, which are arranged in different layers. The pre/post-exposure treatment module includes a pre-treatment module and a post-treatment module, which are disposed at different layers. The pre-treatment module coats a protective layer on the wafer before an exposure process. The post-treatment module performs a wafer cleaning process and a post-exposure bake process after the exposure process. A robot for transferring the wafer is disposed in each of the pre-treatment and post-treatment modules.

摘要翻译： 提供了一种用于处理基板的设备和方法。 该装置包括顺序地沿一个方向布置的装载端口，索引模块，第一缓冲模块，涂覆/显影模块，第二缓冲模块，曝光前/曝光后处理模块和接口模块。 涂布/显影模块包括布置在不同层中的涂布模块和显影模块。 预处理/曝光后处理模块包括预处理模块和后处理模块，它们设置在不同的层。 预处理模块在曝光过程之前在晶片上涂覆保护层。 后处理模块在曝光处理之后执行晶片清洁处理和曝光后烘烤处理。 用于转移晶片的机器人设置在每个预处理和后处理模块中。

公开(公告)号：US09373484B2

公开(公告)日：2016-06-21

申请号：US14241223

申请日：2012-08-10

申请人： Kee-Seok Nam ,  Jung-Dae Kwon ,  Yong Soo Jeong ,  Gun Hwan Lee ,  Jung Heum Yoon ,  Sung Hun Lee ,  Dong Ho Kim ,  Jae Wook Kang ,  Sung Gyu Park ,  Chang Su Kim

发明人： Kee-Seok Nam ,  Jung-Dae Kwon ,  Yong Soo Jeong ,  Gun Hwan Lee ,  Jung Heum Yoon ,  Sung Hun Lee ,  Dong Ho Kim ,  Jae Wook Kang ,  Sung Gyu Park ,  Chang Su Kim

IPC分类号： H01J37/32 ,  C23C16/509 ,  H05H1/24 ,  H01J9/02 ,  C23C16/503 ,  H05H1/48

CPC分类号： H01J37/32541 ,  C23C16/503 ,  C23C16/509 ,  H01J9/022 ,  H01J37/32559 ,  H01J37/32568 ,  H01J37/32825 ,  H01J2237/327 ,  H05H1/2406 ,  H05H2001/2431 ,  H05H2001/485 ,  H05H2001/486

摘要： A plasma generator according to an embodiment of the present invention is provided to generate a high density and stable plasma at near atmospheric pressure by preventing a transition of plasma to arc. The plasma generator includes a plate-shaped lower electrode for seating a substrate; and a cylindrical rotating electrode on the plate-shaped lower electrode, wherein the cylindrical rotating electrode includes an electrically conductive body that is connected to a power supply and includes a plurality of capillary units on an outer circumferential surface of the electrically conductive body; and an insulation shield layer that is made of an insulation material or a dielectric material, exposes a lower surface of the plurality of capillary units, and shields other parts.

摘要翻译： 提供根据本发明实施例的等离子体发生器，以通过防止等离子体转换为电弧而在接近大气压下产生高密度和稳定的等离子体。 等离子体发生器包括用于安置基板的板状下电极; 以及在所述板状下部电极上的圆筒状的旋转电极，其中，所述圆筒状的旋转电极包括与所述导电体的外周面连接的电力供给体的多个毛细管单元的导电体， 以及由绝缘材料或电介质材料制成的绝缘屏蔽层，露出多个毛细管单元的下表面并屏蔽其它部分。

公开(公告)号：US08107979B2

公开(公告)日：2012-01-31

申请号：US12348474

申请日：2009-01-05

申请人： Dong Ho Kim ,  Young Wan Lim ,  Il Won

发明人： Dong Ho Kim ,  Young Wan Lim ,  Il Won

IPC分类号： H04W4/00

CPC分类号： H04L67/24 ,  H04L51/043 ,  H04L51/38 ,  H04L67/04 ,  H04L67/306 ,  H04M1/72552 ,  Y02D70/00 ,  Y02D70/1222 ,  Y02D70/1242 ,  Y02D70/1244 ,  Y02D70/1262 ,  Y02D70/142 ,  Y02D70/144 ,  Y02D70/146 ,  Y02D70/162 ,  Y02D70/164 ,  Y02D70/166 ,  Y02D70/168

摘要： A method of executing an instant messaging service using a wireless terminal in a wireless communication system includes associating at least one user as a messenger group, activating messenger communication with a server, transmitting a messenger group status activation message to the server, receiving status data associated with the messenger group, and displaying information representing an updated status of the at least one user of the messenger group based on the status data.

摘要翻译： 一种在无线通信系统中使用无线终端执行即时消息收发服务的方法包括将至少一个用户与消息组相关联，激活与服务器的信使通信，向服务器发送消息组状态激活消息，接收与之相关联的状态数据 并且基于状态数据显示表示消息组的至少一个用户的更新状态的信息。

公开(公告)号：US20100033178A1

公开(公告)日：2010-02-11

申请号：US12538084

申请日：2009-08-07

申请人： Wangjoo LEE ,  Dong Ho Kim ,  Jeong Ho Ju ,  Jae Ick Choi

发明人： Wangjoo LEE ,  Dong Ho Kim ,  Jeong Ho Ju ,  Jae Ick Choi

IPC分类号： G01R33/44

CPC分类号： G01R33/341 ,  G01R33/34007 ,  G01R33/3642

摘要： An apparatus for detecting a magnetic field includes a coil type magnetic resonator having a resonant frequency with respect to a magnetic field varying at a particular frequency and a loop antenna inductively coupled to the coil type magnetic resonator.

摘要翻译： 用于检测磁场的装置包括：线圈型磁共振器，其具有相对于以特定频率变化的磁场的谐振频率和感应耦合到线圈型磁共振器的环形天线。

公开(公告)号：US5982433A

公开(公告)日：1999-11-09

申请号：US859085

申请日：1997-05-20

申请人： Dong Ho Kim

发明人： Dong Ho Kim

IPC分类号： H04N11/04 ,  H04N19/423 ,  H04N19/50 ,  H04N19/587 ,  H04N19/59 ,  H04N7/24

CPC分类号： H04N19/186 ,  H04N19/59 ,  H04N19/593

摘要： A data compression and display memory apparatus which is capable of obtaining a better compression efficiency by using a DPCM and a line interpolation technique and providing a simple hardware construction. The apparatus includes a DPCM and quantization unit for quantizing 8-bit luminance signal Y and chrominance signal C, which is an ODD field signal, in accordance with a clock signal CK1 from the control signal generator for thus outputting 4-bit luminance signal Y and chrominance signal C, a bit converter for converting quantized 4-bit luminance signal Y and chrominance signal into 8-bit, respectively, a memory for storing an output from the bit converter in accordance with read/write signals RD and WR from the control signal generator, a bit converter for converting 8-bit luminance signal Y and chrominance signal C from the memory into 4-bit, respectively, a reverse DPCM and dequantization unit for reverse-DPCM-processing and dequantizing an output from the bit converter in accordance with the clock signal CK1 and outputting an ODD field signal, an interpolation unit for generating an EVEN field signal from the ODD field signal from the reverse DPCM and dequantization unit in accordance with the clock signal CK1, and a multiplexor for multiplexing the ODD field signal and EVEN field signal in accordance with a control signal CT from the control signal generator and outputting 8-bit luminance signal Y and chrominance signal C.

摘要翻译： 一种数据压缩和显示存储装置，其能够通过使用DPCM和线插入技术获得更好的压缩效率并提供简单的硬件结构。 该装置包括用于根据来自控制信号发生器的时钟信号CK1量化作为ODD场信号的8位亮度信号Y和色度信号C的DPCM和量化单元，从而输出4位亮度信号Y和 色度信号C是用于将量化的4位亮度信号Y和色度信号分别转换成8位的位转换器，用于根据来自控制信号的读/写信号RD和WR存储来自位转换器的输出的存储器 发生器，用于将8位亮度信号Y和色度信号C从存储器转换成4位的位转换器，反向DPCM和反量化单元，用于根据比特转换器的反向DPCM处理和去量化位转换器的输出 时钟信号CK1并输出ODD场信号，用于从来自反向DPCM的ODD场信号产生一个EVEN场信号的内插单元和协调的反量化单元 ce和时钟信号CK1，以及多路复用器，用于根据来自控制信号发生器的控制信号CT复用ODD场信号和EVEN场信号，并输出8位亮度信号Y和色度信号C.

公开(公告)号：US09313550B2

公开(公告)日：2016-04-12

申请号：US13985688

申请日：2012-02-03

申请人： Dong Ho Kim

发明人： Dong Ho Kim

IPC分类号： G06F3/00 ,  G06F13/00 ,  H04N5/445 ,  H04N21/482 ,  H04N21/432 ,  H04N21/436 ,  H04N21/472 ,  H04N21/462 ,  H04N21/61 ,  H04N21/433

CPC分类号： H04N21/482 ,  H04N21/4325 ,  H04N21/4334 ,  H04N21/43615 ,  H04N21/4622 ,  H04N21/47214 ,  H04N21/4821 ,  H04N21/4826 ,  H04N21/6125

摘要： Disclosed are a method for providing a content management list which enables integrated management for the use of various contents and an apparatus for performing the same. The method for providing the content management list in a content management list provision apparatus which can be connected to a plurality of contents through a network includes the steps of: displaying the content management list including electronic program guide information of a broadcasting program; and displaying information of reserved playback contents corresponding to the reservation time of a time axis which is additionally displayed in the content management list according to an event signal for indicating a content playback reservation. Accordingly, the method enables a user to easily determine the reserved states of all available contents, and enables the user to efficiently make plans to use the various contents therethrough.

摘要翻译： 公开了一种用于提供内容管理列表的方法，该内容管理列表使得能够集成管理各种内容的使用以及用于执行其的设备。 在通过网络连接到多个内容的内容管理列表提供装置中提供内容管理列表的方法包括以下步骤：显示包括广播节目的电子节目指南信息的内容管理列表; 以及根据用于指示内容回放预约的事件信号，显示与内容管理列表中另外显示的时间轴的预约时间相对应的预约播放内容的信息。 因此，该方法使得用户能够容易地确定所有可用内容的保留状态，并且使得用户能够有效地制定使用各种内容的计划。