公开(公告)号：US20050006984A1

公开(公告)日：2005-01-13

申请号：US10814120

申请日：2004-04-01

申请人： Eiju Komuro ,  Hisatoshi Saitou ,  Yoshinari Yamashita

发明人： Eiju Komuro ,  Hisatoshi Saitou ,  Yoshinari Yamashita

IPC分类号： H01L41/09 ,  H01L41/04 ,  H01L41/08 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H01L41/337 ,  H03H3/02 ,  H03H9/02 ,  H03H9/17

CPC分类号： H03H9/175 ,  H03H3/02 ,  H03H9/174

摘要： A thin-film bulk acoustic oscillator comprises: a base; a barrier layer disposed on the base; a lower electrode disposed on the barrier layer; a piezoelectric thin film disposed on the lower electrode; and an upper electrode disposed on the piezoelectric thin film. The piezoelectric thin film includes a columnar crystal that extends in the direction intersecting the film surface. The top surface of the piezoelectric thin film is flattened by polishing so as to have a root mean square roughness of 2 nm or smaller.

摘要翻译： 薄膜体声波振荡器包括：基座; 设置在基座上的阻挡层; 设置在阻挡层上的下电极; 设置在下电极上的压电薄膜; 以及设置在压电薄膜上的上电极。 压电薄膜包括在与膜表面相交的方向上延伸的柱状晶体。 压电薄膜的上表面通过抛光而平坦化，使得均方根粗糙度为2nm以下。

公开(公告)号：US07109637B2

公开(公告)日：2006-09-19

申请号：US10814120

申请日：2004-04-01

申请人： Eiju Komuro ,  Hisatoshi Saitou ,  Yoshinari Yamashita

发明人： Eiju Komuro ,  Hisatoshi Saitou ,  Yoshinari Yamashita

IPC分类号： H01L41/04 ,  H03H9/15

CPC分类号： H03H9/175 ,  H03H3/02 ,  H03H9/174

摘要： A thin-film bulk acoustic oscillator comprises: a base; a barrier layer disposed on the base; a lower electrode disposed on the barrier layer; a piezoelectric thin film disposed on the lower electrode; and an upper electrode disposed on the piezoelectric thin film. The piezoelectric thin film includes a columnar crystal that extends in the direction intersecting the film surface. The top surface of the piezoelectric thin film is flattened by polishing so as to have a root mean square roughness of 2 nm or smaller.

摘要翻译： 薄膜体声波振荡器包括：基座; 设置在基座上的阻挡层; 设置在阻挡层上的下电极; 设置在下电极上的压电薄膜; 和设置在压电薄膜上的上电极。 压电薄膜包括在与膜表面相交的方向上延伸的柱状晶体。 压电薄膜的上表面通过抛光而平坦化，使得均方根粗糙度为2nm以下。

公开(公告)号：US20050090033A1

公开(公告)日：2005-04-28

申请号：US10968976

申请日：2004-10-21

申请人： Masaaki Imuri ,  Kenji Inoue ,  Eiju Komuro ,  Hisatoshi Saitou

发明人： Masaaki Imuri ,  Kenji Inoue ,  Eiju Komuro ,  Hisatoshi Saitou

IPC分类号： H01L41/22 ,  H01L21/00 ,  H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H01L41/253 ,  H01L41/29 ,  H03H3/02 ,  H03H3/04 ,  H03H9/56

CPC分类号： H03H9/564 ,  H03H3/04 ,  H03H2003/0428 ,  H03H2003/0471 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A method for manufacturing a piezo-resonator including: a first step of forming an upper electrode layer 20 on the piezoelectric film 14, a second step of coating the upper electrode layer 20 with a resist 21 and of performing patterning on the resist so as to have a shape of the upper electrode, a third step of masking the patterned resist 21 and removing the upper electrode layer 20 other than masked portions and forming two or more first upper electrodes 15a, a fourth step of removing the resist 21, a fifth step of coating the first upper electrodes 15a with a resist and performing patterning on the resist so that the first upper electrodes 15a are partially exposed, a sixth step of etching each of the exposed first upper electrodes 15a by a specified thickness to form a second upper electrode 15b, and a seventh step of removing the resist 22.

摘要翻译： 一种制造压电谐振器的方法，包括：在压电膜14上形成上电极层20的第一步骤，用抗蚀剂21涂覆上电极层20并在抗蚀剂上进行图案化的第二步骤，以便 具有上电极的形状，除了掩模部分之外掩蔽图案化抗蚀剂21和除去上电极层20并形成两个或更多个第一上电极15A的第三步骤，去除抗蚀剂21的第四步骤，第五步 使用抗蚀剂涂覆第一上电极15a并在抗蚀剂上进行图案化以使第一上电极15a部分暴露的步骤;将暴露的第一上电极15a的每一个蚀刻一定厚度以形成第六步骤 第二上电极15b，以及除去抗蚀剂22的第七步骤。

公开(公告)号：US07003875B2

公开(公告)日：2006-02-28

申请号：US10968976

申请日：2004-10-21

申请人： Masaaki Imura ,  Kenji Inoue ,  Eiju Komuro ,  Hisatoshi Saitou

发明人： Masaaki Imura ,  Kenji Inoue ,  Eiju Komuro ,  Hisatoshi Saitou

IPC分类号： H05K3/02 ,  B44C1/22 ,  H01L4/04

CPC分类号： H03H9/564 ,  H03H3/04 ,  H03H2003/0428 ,  H03H2003/0471 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A method for manufacturing a piezo-resonator including: a first step of forming an upper electrode layer 20 on the piezoelectric film 14, a second step of coating the upper electrode layer 20 with a resist 21 and of performing patterning on the resist so as to have a shape of the upper electrode, a third step of masking the patterned resist 21 and removing the upper electrode layer 20 other than masked portions and forming two or more first upper electrodes 15a, a fourth step of removing the resist 21, a fifth step of coating the first upper electrodes 15a with a resist and performing patterning on the resist so that the first upper electrodes 15a are partially exposed, a sixth step of etching each of the exposed first upper electrodes 15a by a specified thickness to form a second upper electrode 15b, and a seventh step of removing the resist 22.

摘要翻译： 一种制造压电谐振器的方法，包括：在压电膜14上形成上电极层20的第一步骤，用抗蚀剂21涂覆上电极层20并在抗蚀剂上进行图案化的第二步骤，以便 具有上电极的形状，除了掩模部分之外掩蔽图案化抗蚀剂21和除去上电极层20并形成两个或更多个第一上电极15A的第三步骤，去除抗蚀剂21的第四步骤，第五步 使用抗蚀剂涂覆第一上电极15a并在抗蚀剂上进行图案化以使第一上电极15a部分暴露的步骤;将暴露的第一上电极15a的每一个蚀刻一定厚度以形成第六步骤 第二上电极15b，以及除去抗蚀剂22的第七步骤。

公开(公告)号：US07239067B2

公开(公告)日：2007-07-03

申请号：US10811812

申请日：2004-03-30

申请人： Eiju Komuro ,  Hisatoshi Saitou ,  Takao Noguchi ,  Masaaki Imura

发明人： Eiju Komuro ,  Hisatoshi Saitou ,  Takao Noguchi ,  Masaaki Imura

IPC分类号： H01L41/00 ,  H02N2/00 ,  H01B13/00

CPC分类号： H03H9/564 ,  H03H3/02

摘要： A method of manufacturing a piezoelectric thin film resonator forms, after forming a piezoelectric film on a substrate so as to cover a lower electrode formed on the substrate, an electrode material layer for forming an upper electrode above the piezoelectric film, forms a mask of a predetermined form on the electrode material layer, and then etches the electrode material layer to form the upper electrode. Before a step of forming the electrode material layer, a protective layer for protecting the piezoelectric film during etching of the electrode material layer is formed so as to cover at least a part of the piezoelectric film where the upper electrode is not formed, and the electrode material layer is then formed so as to cover the protective layer.

摘要翻译： 一种制造压电薄膜谐振器的方法，在基板上形成压电膜以覆盖形成在基板上的下电极之后，形成用于在压电膜上形成上电极的电极材料层，形成 在电极材料层上形成预定形状，然后蚀刻电极材料层以形成上部电极。 在形成电极材料层的步骤之前，形成用于在蚀刻电极材料层期间保护压电膜的保护层，以覆盖不形成上部电极的压电膜的至少一部分，并且电极 然后形成材料层以覆盖保护层。

公开(公告)号：US06989723B2

公开(公告)日：2006-01-24

申请号：US10731157

申请日：2003-12-10

申请人： Eiju Komuro ,  Hisatoshi Saitou ,  Takao Noguchi ,  Hidenori Abe

发明人： Eiju Komuro ,  Hisatoshi Saitou ,  Takao Noguchi ,  Hidenori Abe

IPC分类号： H03H9/54 ,  H03H9/70

CPC分类号： H03H9/175 ,  H03H3/04 ,  H03H9/02102 ,  H03H9/02149 ,  H03H9/174 ,  H03H9/605 ,  H03H9/706 ,  H03H2003/0407

摘要： A piezoelectric resonant filter includes a group of series resonators and a group of parallel resonators for forming a ladder-type filter circuit. Each of the resonators has a piezoelectric thin film having piezoelectric characteristic, and lower and upper electrodes disposed on opposite surfaces of the piezoelectric thin film for applying an excitation voltage to the piezoelectric thin film. The group of the parallel resonators exhibits a low frequency side attenuation extremum in the filter whereas the group of the series resonators exhibits a high frequency side attenuation extremum in the filter. At least one of the group of the series resonators and the group of the parallel resonators has a temperature compensating layer for bringing the temperature coefficient of the resonant frequency close to zero.

摘要翻译： 压电谐振滤波器包括一组串联谐振器和一组用于形成梯形滤波器电路的并联谐振器。 每个谐振器具有压电薄膜，压电薄膜具有压电薄膜，并且压电薄膜的相对表面上设置有用于向压电薄膜施加激励电压的下电极和上电极。 并联谐振器组在滤波器中表现出低频侧衰减极值，而串联谐振器组在滤波器中表现出高频侧衰减极值。 串联谐振器组和并联谐振器组中的至少一个具有用于使共振频​​率的温度系数接近零的温度补偿层。

公开(公告)号：US06954117B2

公开(公告)日：2005-10-11

申请号：US10806378

申请日：2004-03-23

申请人： Eiju Komuro ,  Toshiyuki Nagatsuka ,  Tsutomu Yasui

发明人： Eiju Komuro ,  Toshiyuki Nagatsuka ,  Tsutomu Yasui

IPC分类号： H01L41/09 ,  H01L41/08 ,  H01L41/18 ,  H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/17 ,  H03H9/52 ,  H03H9/54 ,  H03H9/70

CPC分类号： H03H9/1014 ,  H01L2224/16225 ,  H03H9/0514 ,  H03H9/175 ,  H03H9/706

摘要： In an electronic component having a piezo-electric resonator 10 formed on an element substrate 11 and obtaining a signal having a predetermined resonant frequency by a bulk wave propagating within a piezo-electric film 15, a mounting substrate 19 on which the piezo-electric resonator 10 is mounted by face-down bonding through N bumps 18, when a maximum diameter of said N bumps 18 is defined as D μm, die shear strength of said N bumps 18 is not smaller than ND/6 (g), preferably, not smaller than ND/3.6 (g).

摘要翻译： 在具有形成在元件基板11上的压电谐振器10并通过在压电薄膜15内传播的体波获得具有预定谐振频率的信号的电子部件中，安装基板19，压电谐振器 如图10所示，当N个凸块18的最大直径被定义为D mum时，所述N个凸起18的冲模剪切强度不小于ND / 6（g），优选地不是 小于ND / 3.6（g）。

公开(公告)号：US07187254B2

公开(公告)日：2007-03-06

申请号：US10380985

申请日：2001-07-11

申请人： Qingxin Su ,  Paul B. Kirby ,  Eiju Komuro ,  Masaaki Imura ,  Roger W. Whatmore

发明人： Qingxin Su ,  Paul B. Kirby ,  Eiju Komuro ,  Masaaki Imura ,  Roger W. Whatmore

IPC分类号： H03H9/54

CPC分类号： H03H3/04 ,  H03H9/174 ,  H03H9/568

摘要： Multiple thin film bulk acoustic resonators (10, 11) configured in series (10) and parallel (11) within a coplanar waveguide line structure provides a compact ladder filter. The resonators (10, 11) are formed over an opening (28) in a substrate (20) and connected to associated circuitry by one or more transmission lines formed on the substrate (20). The arrangement of the resonators (10, 11) between the ground and signal lines of a coplanar line structure provides a means of minimising the area of the filter. Embedding a ladder filter within the coplanar transmission line structure eliminates the need for wire bonds, thus simplifying fabrication. Embodiments for 2×2, and hither order filters are described.

摘要翻译： 在共面波导线结构内串联（10）和平行（11）配置的多个薄膜体声波谐振器（10,11）提供了紧凑的梯形滤波器。 谐振器（10,11）形成在衬底（20）中的开口（28）上，并通过形成在衬底（20）上的一个或多个传输线连接到相关联的电路。 在共面线结构的接地和信号线之间的谐振器（10,11）的布置提供了使滤波器的面积最小化的手段。 在共面传输线结构内嵌入梯形滤波器消除了对引线键合的需要，从而简化了制造。 描述了2x2的实施例和两个阶次滤波器。

公开(公告)号：US07046103B2

公开(公告)日：2006-05-16

申请号：US10031239

申请日：2001-05-23

申请人： Roger W. Whatmore ,  Paul B. Kirby ,  Qingxin Su ,  Eiju Komuro

发明人： Roger W. Whatmore ,  Paul B. Kirby ,  Qingxin Su ,  Eiju Komuro

IPC分类号： H01P3/08

CPC分类号： H03H9/02094 ,  H03H3/04 ,  H03H9/605 ,  H03H2003/0435 ,  H03H2003/0457

摘要： An electric filter comprises a plurality of thin film bulk acoustic resonants (10, 11) arranged in series and in parallel which have electrodes (24, 25) of different working area (L) and optionally a piezoelectric layer (23) of different thickness (T).

摘要翻译： 电滤波器包括串联并联布置的多个薄膜体声共振器（10,11），其具有不同工作区域（L）的电极（24,25）和可选地具有不同厚度的压电层（23） T）。

公开(公告)号：US06251297B1

公开(公告)日：2001-06-26

申请号：US09207659

申请日：1998-12-09

申请人： Eiju Komuro ,  Tohru Kineri

发明人： Eiju Komuro ,  Tohru Kineri

IPC分类号： G02B530

CPC分类号： G02B5/3058 ,  G02B5/1809 ,  G02B5/204

摘要： A method of manufacturing a polarizing plate of a resonance absorption effect type wherein plural bar-like polarizing members are arranged in a light-transmittable polarizing matrix layer with major axes thereof orienting in a constant direction. The method includes a preparing process of a forming die for preparing a forming die having a concavoconvex pattern corresponding to a layout pattern of the bar-like polarizing members, a forming process of a concavoconvex pattern on a resin layer for forming a resin layer directly or indirectly on a substrate and pressing the forming die onto the resin layer so as to form a concavoconvex pattern on the resin layer, a forming process of bar-like polarizing members for forming the bar-like polarizing members in the foregoing layout pattern using the concavoconvex pattern of the resin layer, and a forming process of a polarizing matrix layer for forming the light-transmittable polarizing matrix layer so as to bury the formed bar-like polarizing members. Accordingly, the polarizing plate of the resonance absorption effect type can be obtained, which is low in price, massproducible, high in extinction ratio, high in performance and high in reliability.

摘要翻译： 制造共振吸收效果型的偏振片的方法，其中多个棒状偏振构件布置在其可沿着恒定方向取向的长轴的透光偏振矩阵层中。 该方法包括用于制备具有对应于棒状偏振构件的布局图案的凹凸图案的成形模具的成形模具的制备方法，用于直接形成树脂层的树脂层上的凹凸图案的形成工艺 间接地在基板上并将成形模挤压到树脂层上，以在树脂层上形成凹凸图案，使用凹凸形状在上述布局图案中形成棒状偏振构件的棒状偏振构件的形成工艺 树脂层的图案，以及用于形成可透光偏振矩阵层的偏振矩阵层的形成工艺，以便掩埋形成的棒状偏振构件。 因此，可以获得价格低廉，生产量大，消光比高，性能高，可靠性高的共振吸收效果型偏振片。