Method for producing electronic components
    5.
    发明申请
    Method for producing electronic components 失效
    电子部件的制造方法

    公开(公告)号:US20070063202A1

    公开(公告)日:2007-03-22

    申请号:US11603388

    申请日:2006-11-22

    IPC分类号: H01L33/00 G02B26/00 H01L27/15

    摘要: In order to achieve an integration of functional structures into the housing of electronic components, provision is made of a method for producing an electronic component comprising at least one semiconductor element having at least one sensor-technologically active and/or emitting device on at least one side, the method comprising the following steps: provision of at least one die on a wafer, production of at least one patterned support having at least one structure which is functional for the sensor-technologically active and/or emitting device, joining together of the wafer with the at least one support, so that that side of the die which has the sensor-technologically active and/or emitting device faces the support, separation of the die.

    摘要翻译: 为了实现将功能结构集成到电子部件的壳体中,提供了一种用于制造电子部件的方法,所述电子部件包括至少一个半导体元件,所述至少一个半导体元件具有至少一个传感器技术活动和/或发射装置 该方法包括以下步骤:在晶片上设置至少一个管芯,生产至少一个图案化支架,其具有至少一个对传感器技术活动和/或发射器件有功能的结构, 具有至少一个支撑件的晶片,使得具有传感器技术活动和/或发射装置的模具的侧面朝向支撑件,模具的分离。

    Process for producing microelectromechanical components and a housed microelectromechanical component
    8.
    发明申请
    Process for producing microelectromechanical components and a housed microelectromechanical component 失效
    用于生产微电子机械部件和容纳的微机电部件的方法

    公开(公告)号:US20050064644A1

    公开(公告)日:2005-03-24

    申请号:US10994659

    申请日:2004-11-22

    摘要: A process produces microelectromechanical components from a substrate that has a first side and a second side which is substantially opposite from the first side, and at least the first side has at least one microelectromechanical element. The process includes the step of providing at least one conductive passage into the substrate, connecting the first side to the second side, and securing at least one support to the first side of the substrate, with the at least one electrically conductive passage uncovered by thinning the substrate material with the mechanical stability being ensured by the support.

    摘要翻译: 一种方法从基板产生微电子机械部件,该基板具有与第一侧基本相反的第一侧和第二侧,并且至少第一侧具有至少一个微机电元件。 该方法包括以下步骤:将至少一个导电通道提供到衬底中,将第一侧连接到第二侧,以及将至少一个支撑件固定到衬底的第一侧,其中至少一个导电通道被薄化覆盖 具有机械稳定性的基板材料由支撑件确保。