Slot-Shielded Coplanar Strip-line Compatible with CMOS Processes
    9.
    发明申请
    Slot-Shielded Coplanar Strip-line Compatible with CMOS Processes 有权
    Slot-Shielded Coplanar Strip-line兼容CMOS工艺

    公开(公告)号:US20120104575A1

    公开(公告)日:2012-05-03

    申请号:US12917285

    申请日:2010-11-01

    IPC分类号: H01L23/14

    摘要: A strip-line includes a ground plane extending through a plurality of dielectric layers over a substrate; a signal line over the substrate and on a side of the ground plane; a first plurality of metal strips under the signal line and in a first metal layer, wherein the first plurality of metal strips is parallel to each other, and is spaced apart from each other by spaces; and a second plurality of metal strips under the signal line and in a second metal layer over the first metal layer. The second plurality of metal strips vertically overlaps the spaces. The first plurality of metal strips is electrically coupled to the second plurality of metal strips through the ground plane, and no via physically contacts the first plurality of metal strips and the second plurality of metal strips.

    摘要翻译: 带状线包括在衬底上延伸穿过多个电介质层的接地平面; 在基板上并在接地平面的一侧的信号线; 在信号线下方和第一金属层中的第一多个金属条,其中所述第一多个金属条彼此平行并且彼此间隔开; 以及信号线下方的第二多个金属条,并且在第一金属层上方的第二金属层中。 第二多个金属带垂直地与空间重叠。 第一多个金属条通过接地平面电耦合到第二多个金属条,并且不通过物理地接触第一多个金属条和第二多个金属条。