VERTICAL GATE ALL-AROUND TRANSISTOR
    7.
    发明申请
    VERTICAL GATE ALL-AROUND TRANSISTOR 审中-公开
    垂直门环绕晶体管

    公开(公告)号:US20160190312A1

    公开(公告)日:2016-06-30

    申请号:US14588337

    申请日:2014-12-31

    Abstract: Vertical GAA FET structures are disclosed in which a current-carrying nanowire is oriented substantially perpendicular to the surface of a silicon substrate. The vertical GAA FET is intended to meet design and performance criteria for the 7 nm technology generation. In some embodiments, electrical contacts to the drain and gate terminals of the vertically oriented GAA FET can be made via the backside of the substrate. Examples are disclosed in which various n-type and p-type transistor designs have different contact configurations. In one example, a backside gate contact extends through the isolation region between adjacent devices. Other embodiments feature dual gate contacts for circuit design flexibility. The different contact configurations can be used to adjust metal pattern density.

    Abstract translation: 公开了垂直GAA FET结构,其中载流纳米线基本上垂直于硅衬底的表面取向。 垂直GAA FET旨在满足7 nm技术生成的设计和性能标准。 在一些实施例中,可以经由衬底的背面制造垂直取向的GAA FET的漏极和栅极端子的电接触。 公开了各种n型和p型晶体管设计具有不同接触构造的实例。 在一个示例中,背面栅极触点延伸穿过相邻器件之间的隔离区域。 其他实施例具有用于电路设计灵活性的双栅极触点。 可以使用不同的接触配置来调整金属图案密度。

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