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61 条记录 (耗时 0.071 秒)

    Rotating substrate support and methods of use
    1.
    发明申请
    Rotating substrate support and methods of use 审中-公开
    旋转基板支撑和使用方法

    公开(公告)号：US20060281310A1

    公开(公告)日：2006-12-14

    申请号：US11147938

    申请日：2005-06-08

    申请人： Jacob Smith ,  Alexander Tam ,  R. Iyer ,  Sean Seutter ,  Binh Tran ,  Nir Merry ,  Adam Brailove ,  Robert Shydo ,  Robert Andrews ,  Frank Roberts ,  Theodore Smick ,  Geoffrey Ryding

    发明人： Jacob Smith ,  Alexander Tam ,  R. Iyer ,  Sean Seutter ,  Binh Tran ,  Nir Merry ,  Adam Brailove ,  Robert Shydo ,  Robert Andrews ,  Frank Roberts ,  Theodore Smick ,  Geoffrey Ryding

    IPC分类号： H01L21/44 ,  C23C16/00

    CPC分类号： H01L21/68792 ,  C23C16/4584 ,  H01L21/67126 ,  H01L21/68742

    摘要： A method and apparatus for processing a substrate utilizing a rotating substrate support are disclosed herein. In one embodiment, an apparatus for processing a substrate includes a chamber having a substrate support assembly disposed within the chamber. The substrate support assembly includes a substrate support having a support surface and a heater disposed beneath the support surface. A shaft is coupled to the substrate support and a motor is coupled to the shaft through a rotor to provide rotary movement to the substrate support. A seal block is disposed around the rotor and forms a seal therewith. The seal block has at least one seal and at least one channel disposed along the interface between the seal block and the shaft. A port is coupled to each channel for connecting to a pump. A lift mechanism is coupled to the shaft for raising and lowering the substrate support.

    摘要翻译： 本文公开了一种利用旋转衬底支撑件来处理衬底的方法和装置。 在一个实施例中，用于处理衬底的装置包括具有设置在腔室内的衬底支撑组件的室。 衬底支撑组件包括具有支撑表面的衬底支撑件和设置在支撑表面下方的加热器。 轴联接到基板支撑件，并且电机通过转子联接到轴，以向基板支撑件提供旋转运动。 密封块设置在转子周围并与其形成密封。 密封块具有至少一个密封件和沿密封块和轴之间的界面设置的至少一个通道。 端口连接到每个通道以连接到泵。 升降机构联接到轴上以升高和降低基板支撑。

    Auto-stereoscopic volumetric imaging system and method
    9.
    发明申请
    Auto-stereoscopic volumetric imaging system and method 审中-公开
    自动立体积成像系统及方法

    公开(公告)号：US20060152580A1

    公开(公告)日：2006-07-13

    申请号：US11286224

    申请日：2005-11-23

    申请人： Robert Andrews

    发明人： Robert Andrews

    IPC分类号： H04N13/04 ,  H04N15/00 ,  H04N9/47

    CPC分类号： G02B27/225 ,  H04N13/302 ,  H04N13/388

    摘要： A system for auto-stereoscopic presentation of stereo-image pairs that uses volumetric imaging elements so that a viewer may experience a 3-D illusion that appears to be located in a space free of system components. A reflecting optical element produces a real image of part of the auto-stereoscopic imaging system, in a position that is indicative of where a viewer must place their eyes in order to see the 2-D stereo images so that stereopsis may occur, and a 3-D image perceived. A viewer can clearly see where to place there eyes, and without any actual physical elements of the imaging system in, or around, the region where the 3-D image is perceived to be, allowing the viewer to touch the images being observed. Furthermore, in such a system, real objects may be located along side the 3-D images, further enhancing the stereoscopic 3-D illusion by providing additional depth cues.

    摘要翻译： 用于立体图像对的自动立体呈现的系统，其使用体积成像元件，使得观看者可能经历看起来位于没有系统组件的空间中的3-D幻觉。 反射光学元件产生自动立体成像系统的一部分的真实图像，该位置指示观看者必须放置眼睛的位置，以便观看2-D立体图像以使立体视觉可能发生，并且 3-D图像感知。 观众可以清楚地看到眼睛放置在哪里，并且在三维图像被感知的区域内或周围没有成像系统的任何实际物理元素，允许观看者触摸观察到的图像。 此外，在这样的系统中，真实物体可以沿着3D图像的侧面定位，通过提供附加的深度线索来进一步增强立体3-D幻觉。

    Methods and systems of span design
    10.
    发明申请
    Methods and systems of span design 审中-公开
    跨度设计方法与系统

    公开(公告)号：US20050131720A1

    公开(公告)日：2005-06-16

    申请号：US10738370

    申请日：2003-12-15

    申请人： Robert Andrews ,  Terry Rann ,  Mark Hildebrand ,  Mary Roth ,  Marian Meyers ,  Joseph Upshaw ,  Ramesh Movva

    发明人： Robert Andrews ,  Terry Rann ,  Mark Hildebrand ,  Mary Roth ,  Marian Meyers ,  Joseph Upshaw ,  Ramesh Movva

    IPC分类号： G06Q10/00 ,  G06F17/60

    CPC分类号： G06Q10/087 ,  G06Q10/103

    摘要： Span design based on the organization of telecommunications components into a hierarchy of elements, segments, and/or architectures, the use of templates representing the hierarchy of components, and the conformity of the components to rules. In response to receipt of an order for digital services, the order data is used to obtain an assignment of components for the digital services. The order data and the assignment of components are used to obtain equipment data. The order data, the assignment of components and the equipment data are used to create the span design based on the templates.

    摘要翻译： 基于将电信组件组织为元素，段和/或架构的层次结构的跨度设计，表示组件层次结构的模板的使用以及组件与规则的一致性。 响应于接收到数字服务的订单，订单数据用于获得用于数字服务的组件的分配。 订单数据和组件的分配用于获取设备数据。 订单数据，组件分配和设备数据用于根据模板创建跨度设计。