摘要:
A plasma reactor for diamond synthesis includes a microwave generator, a waveguide connected to the microwave generator, an antenna disposed within the waveguide to direct the microwaves propagated along the waveguide toward the interior of a reaction chamber, a microwave window provided above the upper wall of the waveguide, a reaction chamber defined by (a) a cylindrical bottom member hermetically joined to the microwave window and the waveguide, (b) a reaction gas inlet port and a gas outlet port in the side wall thereof, and (c) a substrate holder disposed within the reaction chamber in facing opposition to the microwave window so as to be moved toward and away from the microwave window to adjust the distance between the microwave window and the substrate holder to generate a desired microwave resonance mode. A plasma is produced only in the central portion of the reaction chamber, so that the etching of the microwave window and the resulting contamination of the diamond film by impurities produced by etching the microwave window are prevented. The plasma reactor for diamond synthesis is capable of forming a high-quality diamond film on a large surface of a substrate at a high growth rate in a range of 1 to 2 .mu.m/hr.
摘要:
A converged ion beam apparatus wherein a very small beam spot can be formed with a high energy ion beam after passing a reduced route in which a type of the ion beam is classified. The device is incorporated in an apparatus wherein an ion beam from an accelerator is introduced in a spot to a specimen by way of an ion type classifying device, an objective collimator and a beam collector to perform reforming of a surface or an analysis of physical properties and/or composition or the like of a small area of the specimen. The objective collimator is disposed just on the downstream of the accelerator, and an analyzing component for analyzing an ion type and energy of a beam is interposed in a drift space in an object distance between the objective collimator and a quadruple pole magnetic lens. Several components of the apparatus are also improved including the quadruple pole magnetic lens, an objective slit device and a specimen chamber.
摘要:
A charged particle accelerator capable of accelerating arbitrarily charged particles to an arbitrary energy level and resonating at a low frequency suitable for accelerating heavy ions, including quadruple electrodes which are supplied with high frequency power and disposed in the direction of the center axis of a cylinder-shaped container and a resonant circuit having a capacitor and an inductor for supplying a voltage to the quadruple electrodes. The capacitor is composed of a plurality of metallic plates provided along the center axis at specified intervals in the vicinity of the quadruple electrodes, and a plurality of conductive supports supporting the metallic plates which are directly connected to the container together with the supports and the container form the inductor. Since the metallic plates and the quadruple electrodes are electrically directly connected to each other, an arbitrary resonant frequency can be obtained by adjusting the intervals between the plurality of metallic plates with a position adjusting mechanism. In one embodiment, flat electrodes are protruded from opposite sides of the inner wall of the container and are disposed in parallel to the center axis and close to each other to constitute a capacitor, which makes it possible to have a resonant frequency in a low frequency range. To obtain a large Q value, the surface current resistance is lowered by covering the inner wall of the container and the surfaces of the flat plate electrodes with a superconductive material.
摘要:
A wood type club is provided. A toe-side part and a heel-side part located between the crown part and the sole part of the head are provided with at least one concave groove opened outward in a horizontal direction and extending from the face part to the back part in a longitudinal direction to guide an air stream to the head in a swing action; and a whole or part of the concave groove has a curved part bulging outwardly so that an angle in which a concave groove bottom formed from an inlet of the concave groove to an inside thereof is inclined inward with respect to a line perpendicular to the face part is smaller than an angle in which a line connecting an inlet of the concave groove bottom and an outlet thereof is inclined inward with respect to the line perpendicular to the face part.
摘要:
In addition to microwave and excitation light, bias light as well is irradiated upon a surface of a semiconductor sample that is passivated using a solution which contains an electrolyte. Irradiation of the bias light increases the quantity of ionic substances that exist in the solution, largely changes a surface potential of the semiconductor sample, and suppresses surface recombination. This makes it possible to measure the lifetime of carriers which exist within the semiconductor sample at a high accuracy, without influenced by surface recombination.
摘要:
A carbon dioxide clathrate having a lump diameter enough to precipitate on a desired abyssal position of the sea without being drifted by a seawater flow of the abyss can be produced by bringing an aqueous solution into contact with carbon dioxide with the interposition of an interface in a reactor and retaining this contact; adjusting the pressure in the reactor to 13 atm or more, the temperature of the aqueous solution to a level of more than 5.degree. C. to 10.degree. C., the temperature of the interface to a level of more than 10.degree. C. to 15.degree. C. and the temperature of a lug inserted into the aqueous solution to a level of more than 0.degree. C. to 5.degree. C.; producing/growing the carbon dioxide clathrate on the lug; and then heating the lug to a temperature of more than 10.degree. C. to 30.degree. C. to separate/drop the carbon dioxide clathrate therefrom.
摘要:
There are provided a thermal barrier coating material and a thermal barrier coating member that can suppress spalling when used at a high temperature and have a high thermal barrier effect, a method for producing the same, a turbine member coated with a thermal barrier coating, and a gas turbine. The thermal barrier coating member comprises a heat resistant substrate, a bond coat layer formed thereon, and a ceramic layer formed further thereon, wherein the ceramic layer comprises an oxide which consists of an oxide represented by the general formula A2Zr2O7 doped with a predetermined amount of CaO or MgO and has 10 volume % or more of a pyrochlore type crystal structure, where A represents any of La, Nd, Sm, Gd, and Dy.
摘要:
An apparatus for measuring the life time of minority carriers includes a light source for irradiating a first region of a semiconductor wafer, a microwave generator for generating microwaves, a transmission line for transmitting a first part of the generated mark raised to the region of the semiconductor wafer that is radiated by the excitation light and a second portion of the generated microwave to a region of the semiconductor wafer that is not radiated by the excitation light. The intensity of the microwave signals reflected from the semiconductor wafer are detected and the life time of the minority carriers is calculated based upon the detected intensities.
摘要:
In order to realize a stable decrease in NOx, a gas turbine combustor is supplied which can reduce combustion vibration. A combustor (3) is provided with a first box body (30), which is installed outside an object body (20) such as a combustor basket (6), a transition piece (7) or a bypass duct (11) so as to form a first internal space (31) having a predetermined capacity; and a first throat (32) having a predetermined length which has one end (32a) open to a side wall (20a) of the object body (20) and has the other end (32b) open to a first internal space (31); wherein, a first resistive element (33) having a multiple number of through-holes is inserted and engaged to one end (32a). Fluid particles serving as vibration elements of combustion vibration caused in a combustion region are effectively trapped by the first resistive element (33) and at the same time resonate with the air of the first internal space (31) being connected through the first throat (32) and vibrate in the neighborhood of the first resistive element (33), thereby damping vibration amplitude thereof.
摘要:
In order to realize a stable decrease in NOx, a gas turbine combustor is supplied which can reduce combustion vibration. A combustor (3) is provided with a first box body (30), which is installed outside an object body (20) such as a combustor basket (6), a transition piece (7) or a bypass duct (11) so as to form a first internal space (31) having a predetermined capacity; and a first throat (32) having a predetermined length which has one end (32a) open to a side wall (20a) of the object body (20) and has the other end (32b) open to a first internal space (31); wherein, a first resistive element (33) having a multiple number of through-holes is inserted and engaged to one end (32a). Fluid particles serving as vibration elements of combustion vibration caused in a combustion region are effectively trapped by the first resistive element (33) and at the same time resonate with the air of the first internal space (31) being connected through the first throat (32) and vibrate in the neighborhood of the first resistive element (33), thereby damping vibration amplitude thereof.