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    Plasma reactor for diamond synthesis
    1.
    发明授权
    Plasma reactor for diamond synthesis 失效
    用于金刚石合成的等离子体反应器

    公开(公告)号：US4940015A

    公开(公告)日：1990-07-10

    申请号：US379586

    申请日：1989-07-13

    申请人： Koji Kobashi ,  Kozo Nishimura ,  Koichi Miyata ,  Yoshio Kawate ,  Kazuo Kumagai ,  Norio Suzuki ,  Yutaka Kawata ,  Kiyotaka Ishibashi

    发明人： Koji Kobashi ,  Kozo Nishimura ,  Koichi Miyata ,  Yoshio Kawate ,  Kazuo Kumagai ,  Norio Suzuki ,  Yutaka Kawata ,  Kiyotaka Ishibashi

    IPC分类号： C23C16/26 ,  C23C16/27 ,  C23C16/50 ,  C23C16/511 ,  C30B25/10 ,  C30B29/04 ,  H01J37/32

    CPC分类号： C23C16/274 ,  C23C16/26 ,  C23C16/277 ,  C23C16/511 ,  C30B25/105 ,  H01J37/32192 ,  H01J37/32284 ,  H01J37/32733 ,  H01J2237/339

    摘要： A plasma reactor for diamond synthesis includes a microwave generator, a waveguide connected to the microwave generator, an antenna disposed within the waveguide to direct the microwaves propagated along the waveguide toward the interior of a reaction chamber, a microwave window provided above the upper wall of the waveguide, a reaction chamber defined by (a) a cylindrical bottom member hermetically joined to the microwave window and the waveguide, (b) a reaction gas inlet port and a gas outlet port in the side wall thereof, and (c) a substrate holder disposed within the reaction chamber in facing opposition to the microwave window so as to be moved toward and away from the microwave window to adjust the distance between the microwave window and the substrate holder to generate a desired microwave resonance mode. A plasma is produced only in the central portion of the reaction chamber, so that the etching of the microwave window and the resulting contamination of the diamond film by impurities produced by etching the microwave window are prevented. The plasma reactor for diamond synthesis is capable of forming a high-quality diamond film on a large surface of a substrate at a high growth rate in a range of 1 to 2 .mu.m/hr.

    摘要翻译： 用于金刚石合成的等离子体反应器包括微波发生器，连接到微波发生器的波导，设置在波导内的天线，以将沿波导传播的微波导向反应室的内部，设置在反应室的上壁上方的微波窗口 波导，由（a）气密地接合到微波窗口和波导的圆柱形底部构件限定的反应室，（b）侧壁中的反应气体入口和气体出口，以及（c）基板 保持器设置在与微波窗口相对的反应室内，以便朝向和远离微波窗口移动，以调节微波窗口和衬底保持器之间的距离以产生所需的微波谐振模式。 仅在反应室的中心部分产生等离子体，从而防止了通过蚀刻微波窗口产生的杂质对微波窗口的蚀刻和金刚石膜的污染。 用于金刚石合成的等离子体反应器能够以1至2μm/ hr的高生长速率在基板的大表面上形成高质量的金刚石膜。

    Probe and a system for detecting wear of refractory wall
    3.
    发明授权
    Probe and a system for detecting wear of refractory wall 失效
    探测器和检测耐火墙磨损的系统

    公开(公告)号：US4442706A

    公开(公告)日：1984-04-17

    申请号：US353101

    申请日：1982-03-01

    申请人： Yoshio Kawate ,  Nobuyuki Nagai ,  Takefumi Horiuchi ,  Saburo Tsurutani ,  Minoru Kitamura ,  Shuzo Ito ,  Masahiko Ohgami ,  Kenichi Tochimori ,  Toshio Inoue

    发明人： Yoshio Kawate ,  Nobuyuki Nagai ,  Takefumi Horiuchi ,  Saburo Tsurutani ,  Minoru Kitamura ,  Shuzo Ito ,  Masahiko Ohgami ,  Kenichi Tochimori ,  Toshio Inoue

    IPC分类号： C21B7/06 ,  C21B7/24 ,  C21C5/46 ,  C21C5/48 ,  F27D21/00 ,  G01N17/00

    CPC分类号： C21B7/06 ,  C21B7/24 ,  C21C5/4673 ,  C21C5/48 ,  F27D21/0021

    摘要： A probe for detecting wear of a refractory wall, including plural sheathed probe elements of different lengths each consisting of a pair of high melting point wires disposed in parallel and insulated from each other except at least the fore end portions of the wires which form a normally closed or normally open sensing point, a sheath enclosure accommodating the probe elements such that the sensing points of the respective probe elements are located at different positions along the length of the sheath enclosure and holding the probe elements in parallel relation and out of contact with each other, and a number of dummy elements formed of a material similar to the probe elements and connected to the fore ends thereof in a manner to complement the lengths of the shorter of the probe elements. There is also disclosed a detection circuit for monitoring wear of a refractory wall in a molten metal processing apparatus in a simple and accurate manner by the use of the probe.

    摘要翻译： 用于检测耐火壁的磨损的探针，包括不同长度的多个护套探针元件，每个由不同长度的护套组成的高熔点丝线彼此平行布置且绝缘，除了形成正常的线的至少前端部分 闭合或常开感测点，护套外壳容纳探针元件，使得相应探针元件的感测点位于沿着护套外壳的长度的不同位置处，并且保持探针元件平行关系并且与每个探针元件不接触 以及多个由与探针元件类似的材料形成的虚拟元件，并且以与补充探针元件较短的长度的方式连接到其前端。 还公开了一种检测电路，用于通过使用探针以简单且准确的方式监测熔融金属加工设备中耐火壁的磨损。

    Thermal sensor for detecting temperature distribution
    5.
    发明授权
    Thermal sensor for detecting temperature distribution 失效
    用于检测温度分布的热传感器

    公开(公告)号：US4412090A

    公开(公告)日：1983-10-25

    申请号：US318401

    申请日：1981-11-05

    申请人： Yoshio Kawate ,  Nobuyuki Nagai ,  Takefumi Horiuchi ,  Teruhisa Uehara ,  Susumu Hachiya

    发明人： Yoshio Kawate ,  Nobuyuki Nagai ,  Takefumi Horiuchi ,  Teruhisa Uehara ,  Susumu Hachiya

    IPC分类号： G01K7/02 ,  G01K1/08 ,  G01K1/14 ,  G01K1/16 ,  G01K7/16 ,  H01L35/02

    CPC分类号： G01K1/08 ,  G01K1/14 ,  G01K1/16

    摘要： A thermal sensor for detecting temperature distribution in a deposit layer on the refractory walls of a blast furnace or the like, including a temperature probe assembly having temperature sensing areas at different points along the length thereof, an outer protective casing for accommodating the probe assembly, a number of annular fin members fitted on the temperature sensing areas of the probe assembly and secured to the outer protective casing, and an insulating material filled between the outer protective casing and the probe assembly for thermally insulating the fine members from each other.

    摘要翻译： 一种用于检测高炉等的耐火壁上的沉积层中的温度分布的热传感器，包括温度探测器组件，其温度感测区域沿其长度的不同点，用于容纳探针组件的外部保护壳体， 安装在探针组件的温度感测区域上并固定到外部保护壳体上的多个环形翅片构件，以及填充在外部保护壳体和探针组件之间的绝缘材料，用于将精细构件彼此热绝缘。

    Method of monitoring the wear of refractory walls of a blast furnace and temperature probe used for the method
    6.
    发明授权
    Method of monitoring the wear of refractory walls of a blast furnace and temperature probe used for the method 失效
    监测高炉耐火墙磨损情况的方法和用于该方法的温度探头

    公开(公告)号：US4358953A

    公开(公告)日：1982-11-16

    申请号：US183452

    申请日：1980-09-02

    申请人： Takefumi Horiuchi ,  Yoshio Kawate ,  Masami Konishi ,  Nobuyuki Nagai

    发明人： Takefumi Horiuchi ,  Yoshio Kawate ,  Masami Konishi ,  Nobuyuki Nagai

    IPC分类号： C21B7/06 ,  C21B7/24 ,  G01B7/06 ,  G01K3/14 ,  G01K7/02 ,  G01N17/00 ,  G01K1/02

    CPC分类号： C21B7/24 ,  C21B7/06 ,  G01B7/06 ,  G01K3/14 ,  G01K7/02 ,  G01N17/00

    摘要： A method of monitoring the wear of refractor walls of a blast furnace wherein temperature is sensed at different points across the thickness of the furnace walls and various electric representations of the internal phenomena of the blast furnace are derived as trigger signals. Analysis is carried out as to the correlation between the trigger signals and variations in the temperatures at the furnace walls in terms of the time delay, thus predicting the present status of the wear of the furnace walls. A temperature probe assembly is also disclosed which is useful in sensing the temperature distribution of the refractory walls. The temperature probe assembly includes a plurality of parallel sheath type thermocouples or thermometers.

    摘要翻译： 监测高炉的折射壁的磨损的方法，其中在炉壁的厚度不同的点处感测温度，并且将高炉的内部现象的各种电表示作为触发信号导出。 对于触发信号与炉壁温度随时间延迟的变化的关系进行分析，从而预测了炉壁磨损的现状。 还公开了一种温度探测器组件，其可用于感测耐火壁的温度分布。 温度探针组件包括多个平行的鞘型热电偶或温度计。