Apparatus and method for fabricating epi wafer and epi wafer
    2.
    发明授权
    Apparatus and method for fabricating epi wafer and epi wafer 有权
    用于制造epi晶片和epi晶片的装置和方法

    公开(公告)号:US09559031B2

    公开(公告)日:2017-01-31

    申请号:US14354058

    申请日:2012-10-24

    Inventor: Min Young Hwang

    Abstract: A method for fabricating an epi wafer according to the embodiment comprises depositing an epi layer on a wafer in a first chamber; transferring the wafer to a second chamber connected to the first chamber; forming a protective layer on the wafer in the second chamber; and cooling the wafer in the second chamber.Further, an apparatus for fabricating an epi wafer according to the embodiment comprises a first chamber comprising an epi deposition part; a second chamber comprising a protective layer forming part and a cooling part; and a wafer transfer apparatus connected to lower portions of the first chamber and the second chamber.

    Abstract translation: 此外,根据实施例的用于制造外延晶片的装置包括:第一室,包括外延沉积部分; 第二室,包括保护层形成部分和冷却部分; 以及连接到第一室和第二室的下部的晶片传送装置。

    Circuit board
    5.
    发明授权

    公开(公告)号:US11974388B2

    公开(公告)日:2024-04-30

    申请号:US17310657

    申请日:2020-02-13

    Abstract: A circuit board, according to an embodiment, comprises: a first insulating layer; a second insulating layer disposed on one surface of the first insulating layer; and a third insulating layer disposed on the other surface of the first insulating layer. A circuit pattern is disposed on at least one insulating layer from among the first to third insulating layers, at least one insulating layer from among the first to third insulating layers comprises glass fiber, at least one insulating layer from among the first to third insulating layers does not comprise glass fiber, and the thicknesses of the first to third insulating layers are different from each other.

    APPARATUS AND METHOD FOR FABRICATING EPI WAFER AND EPI WAFER
    7.
    发明申请
    APPARATUS AND METHOD FOR FABRICATING EPI WAFER AND EPI WAFER 有权
    EPI WAFER和EPI WAFER的装置和方法

    公开(公告)号:US20140319544A1

    公开(公告)日:2014-10-30

    申请号:US14354058

    申请日:2012-10-24

    Inventor: Min Young Hwang

    Abstract: A method for fabricating an epi wafer according to the embodiment comprises depositing an epi layer on a wafer in a first chamber; transferring the wafer to a second chamber connected to the first chamber; forming a protective layer on the wafer in the second chamber; and cooling the wafer in the second chamber.Further, an apparatus for fabricating an epi wafer according to the embodiment comprises a first chamber comprising an epi deposition part; a second chamber comprising a protective layer forming part and a cooling part; and a wafer transfer apparatus connected to lower portions of the first chamber and the second chamber.

    Abstract translation: 根据实施例的用于制造外延晶片的方法包括在第一室中的晶片上沉积外延层; 将晶片转移到连接到第一室的第二室; 在所述第二室中在所述晶片上形成保护层; 并在第二室中冷却晶片。 此外,根据实施例的用于制造外延晶片的装置包括:第一室,包括外延沉积部分; 第二室,包括保护层形成部分和冷却部分; 以及连接到第一室和第二室的下部的晶片传送装置。

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