摘要:
A method of forming a low dielectric constant silicate material for use in integrated circuit fabrication processes is disclosed. The low dielectric constant silicate material is formed by reacting by reacting a gas mixture comprising an organosilane compound, an oxygen source, and an inert gas. Thereafter, a silicon carbide cap layer is formed on the silicate material by reacting a gas mixture comprising a silicon source and a carbon source. The silicon carbide cap layer protects the underlying organosilicate layer from cracking and peeling when it is hardened during a subsequent annealing step.
摘要:
A method of forming a low dielectric constant silicate material for use in integrated circuit fabrication processes is disclosed. The low dielectric constant silicate material is formed by reacting by reacting a gas mixture comprising an organosilane compound, an oxygen source, and an inert gas. Thereafter, a silicon carbide cap layer is formed on the silicate material by reacting a gas mixture comprising a silicon source and a carbon source. The silicon carbide cap layer protects the underlying organosilicate layer from cracking and peeling when it is hardened during a subsequent annealing step.
摘要:
A method and apparatus for processing a substrate to form a feature in low k dielectric materials. One aspect of the invention provides a method for processing a substrate including forming a feature definition in a dielectric material deposited on a surface of a substrate, depositing one or more conductive materials to fill at least a portion of the feature definition, planarizing the substrate surface to expose the dielectric material, removing at least a portion of the dielectric material, and depositing a low k dielectric material.
摘要:
A method of forming an organosilicate layer is disclosed. The organosilicate layer is formed by applying an electric field to a gas mixture comprising an organosilane compound and an oxygen-containing gas. The organosilicate layer is compatible with integrated circuit fabrication processes. In one integrated circuit fabrication process, the organosilicate layer is used as an intermetal dielectric layer. In another integrated circuit fabrication process, the organosilicate layer is incorporated into a damascene structure.
摘要:
A diagnostic system and method for an electric power steering system are provided. The diagnostic system includes a first microprocessor that determines a first relative position value indicating the relative rotational position of the rotatable shaft at the first time based on the signals from first and second position sensors. A second microprocessor determines a second relative position value indicating the relative rotational position of the rotatable shaft at the first time based on the signals from third and fourth position sensors. The first microprocessor determines whether the first relative position value is an acceptable value based on a difference between the first relative position value and the second relative position value.
摘要:
An electrode composition comprises a silicon powder comprising non-crystalline and crystalline silicon, where the crystalline silicon is present in the silicon powder at a concentration of no more than about 20 wt. %. An electrode for an electrochemical cell comprises an electrochemically active material comprising non-crystalline silicon and crystalline silicon, where the non-crystalline silicon and the crystalline silicon are present prior to cycling of the electrode. A method of controlling the crystallinity of a silicon powder includes heating a reactor to a temperature of no more than 650° C. and flowing a feed gas comprising silane and a carrier gas into the reactor while maintaining an internal reactor pressure of about 2 atm or less. The silane decomposes to form a silicon powder having a controlled crystallinity and comprising non-crystalline silicon.
摘要:
The present invention provides solid oxide fuel cells, solid oxide electrolyzer cells, solid oxide sensors, components of any of the foregoing, and methods of making and using the same. In some embodiments, a solid oxide fuel cell comprises an air electrode (or cathode), a fuel electrode (or anode), an electrolyte interposed between the air electrode and the fuel electrode, and at least one electrode-electrolyte transition layer. Other embodiments provide novel methods of producing nano-scale films and/or surface modifications comprising one or more metal oxides to form ultra-thin (yet fully-dense) electrolyte layers and electrode coatings. Such layers and coatings may provide greater ionic conductivity and increased operating efficiency, which may lead to lower manufacturing costs, less-expensive materials, lower operating temperatures, smaller-sized fuel cells, electrolyzer cells, and sensors, and a greater number of applications.
摘要:
The invention relates to the mda-7 gene, its encoded protein and fragments of the protein. Several of these fragments of the MDA-7 protein exhibit antiproliferative activity and/or inhibited the activity of intact MDA-7. Accordingly, the invention provides, among other things, for methods and compositions that may be used in the treatment of disorders of cell proliferation, including cancer.
摘要:
Many variables in processes such as those using turbocompressors and turbines must be limited or constrained. Limit control loops are provided for the purpose of limiting these variables. By using a combination of closed loop and open loop limit control schemes, excursions into unfavorable operation can be more effectively avoided. Transition between open loop and closed loop may be enhanced by testing the direction and magnitude of the rate at which the limit variable is changing. If the rate of change indicates recovery is imminent, control is passed back to the closed loop limit control function.
摘要:
An in-tank fuel supply unit self cleans the mesh filter of the primary fuel pump, thereby permitting smaller mesh sizes to decrease pump wear and increase the life of the pump. Generally, the in-tank fuel supply unit includes a reservoir, an auxiliary fuel pump, a primary fuel pump and a filter. Fuel exiting the auxiliary fuel pump outlet is directed towards the filter to wash debris from the filter. Preferably a swirling flow is generated within the reservoir, or the system in run in an overflow condition to assist in the self cleaning of the fuel filter.