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公开(公告)号:US11950514B2
公开(公告)日:2024-04-02
申请号:US17362322
申请日:2021-06-29
发明人: Jun Liu , Gurtej Sandhu
CPC分类号: H10N50/10 , G11C11/161 , H10N50/01 , H10N50/80 , H10N50/85
摘要: Techniques for reducing damage in memory cells are provided. Memory cell structures are typically formed using dry etch and/or planarization processes which damage certain regions of the memory cell structure. In one or more embodiments, certain regions of the cell structure may be sensitive to damage. For example, the free magnetic region in magnetic memory cell structures may be susceptible to demagnetization. Such regions may be substantially confined by barrier materials during the formation of the memory cell structure, such that the edges of such regions are protected from damaging processes. Furthermore, in some embodiments, a memory cell structure is formed and confined within a recess in dielectric material.
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公开(公告)号:US11282894B2
公开(公告)日:2022-03-22
申请号:US16390996
申请日:2019-04-22
发明人: Jun Liu
摘要: Some embodiments include a memory device having first structures arranged in a first direction and second structures arranged in a second direction. At least one structure among the first and second structures includes a semiconductor material. The second structures contact the first structures at contact locations. A region at each of the contact locations is configured as memory element to store information based on a resistance of the region. The structures can include nanowires. Other embodiments are described.
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公开(公告)号:US20210193916A1
公开(公告)日:2021-06-24
申请号:US17135102
申请日:2020-12-28
发明人: Jun Liu , Michael P. Violette
IPC分类号: H01L45/00
摘要: Some embodiments include methods of forming memory cells. Such methods can include forming a first electrode, a second electrode, and a memory element directly contacting the first and second electrodes. Forming the memory element can include forming a programmable portion of the memory element isolated from the first electrode by a first portion of the memory element and isolated from the second electrode by a second portion of the memory element, Other embodiments are described.
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公开(公告)号:US20200279999A1
公开(公告)日:2020-09-03
申请号:US16876693
申请日:2020-05-18
发明人: Jun Liu , Kunal R. Parekh
IPC分类号: H01L45/00 , H01L27/24 , H01L21/033 , H01L21/768 , H01L43/02 , H01L43/08 , H01L43/12
摘要: Electrical contacts may be formed by forming dielectric liners along sidewalls of a dielectric structure, forming sacrificial liners over and transverse to the dielectric liners along sidewalls of a sacrificial structure, selectively removing portions of the dielectric liners at intersections of the dielectric liners and sacrificial liners to form pores, and at least partially filling the pores with a conductive material. Nano-scale pores may be formed by similar methods. Bottom electrodes may be formed and electrical contacts may be structurally and electrically coupled to the bottom electrodes to form memory devices. Nano-scale electrical contacts may have a rectangular cross-section of a first width and a second width, each width less than about 20 nm. Memory devices may include bottom electrodes, electrical contacts having a cross-sectional area less than about 150 nm2 over and electrically coupled to the bottom electrodes, and a cell material over the electrical contacts.
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5.
公开(公告)号:US10573812B2
公开(公告)日:2020-02-25
申请号:US16127984
申请日:2018-09-11
发明人: Jun Liu , Michael P. Violette
摘要: Variable-resistance material memories include a buried salicide word line disposed below a diode. Variable-resistance material memories include a metal spacer spaced apart and next to the diode. Processes include the formation of one of the buried salicide word line and the metal spacer. Devices include the variable-resistance material memories and one of the buried salicided word line and the spacer word line.
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6.
公开(公告)号:US20190244664A1
公开(公告)日:2019-08-08
申请号:US16384557
申请日:2019-04-15
发明人: Jun Liu
IPC分类号: G11C13/00
CPC分类号: G11C13/0069 , G11C13/003 , G11C13/004 , G11C2013/0073 , G11C2013/009 , G11C2213/72 , G11C2213/74
摘要: Embodiments disclosed include memory cell operating methods, memory cell programming methods, memory cell reading methods, memory cells, and memory devices. In one embodiment, a memory cell includes a wordline, a first bitline, a second bitline, and a memory element. The memory element is electrically connected to the wordline and selectively electrically connected to the first bitline and the second bitline. The memory element stores information via a resistive state of the memory element. The memory cell is configured to convey the resistive state of the memory element via either a first current flowing from the first bitline through the memory element to the wordline or a second current flowing from the wordline through the memory element to the second bitline.
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7.
公开(公告)号:US20190027684A1
公开(公告)日:2019-01-24
申请号:US16127984
申请日:2018-09-11
发明人: Jun Liu , Michael P. Violette
摘要: Variable-resistance material memories include a buried salicide word line disposed below a diode. Variable-resistance material memories include a metal spacer spaced apart and next to the diode. Processes include the formation of one of the buried salicide word line and the metal spacer. Devices include the variable-resistance material memories and one of the buried salicided word line and the spacer word line.
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公开(公告)号:US09875795B2
公开(公告)日:2018-01-23
申请号:US14277282
申请日:2014-05-14
发明人: Jun Liu
CPC分类号: G11C13/0004 , G11C11/16 , G11C11/161 , G11C11/1657 , G11C11/1659 , G11C13/0002 , G11C13/003 , G11C17/16 , G11C2213/74 , G11C2213/79 , H01L27/2436 , H01L27/2463 , H01L45/06 , H01L45/1233 , H01L45/144
摘要: Some embodiments include an improved memory array architecture and memory cell design. In one of such embodiments, a memory cell may comprise a memory element to store a logic state and two access transistors coupled to the memory element to access the logic state of the memory element. Other embodiments are described.
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公开(公告)号:US20170243921A1
公开(公告)日:2017-08-24
申请号:US15497032
申请日:2017-04-25
发明人: Jun Liu , Sanh D. Tang , David H. Wells
CPC分类号: H01L27/2454 , H01L21/823487 , H01L27/105 , H01L27/2463 , H01L29/45 , H01L29/665 , H01L29/66666 , H01L29/7827 , H01L45/06 , H01L45/1233 , H01L45/144 , H01L45/1683
摘要: Methods of forming a memory device having an array portion including a plurality of array transistors and a periphery region including peripheral circuit transistor structures of the memory device, where an upper surface of the periphery region and an upper surface of the array portion are planar (or nearly planar) after formation of the peripheral circuit transistor structures and a plurality of memory cells (formed over the array transistors). The method includes forming the peripheral circuit transistor structures in the periphery region, forming the plurality of array transistors in the array portion and forming a plurality of memory cells over respective vertical transistors. Structures formed by the method have planar upper surfaces of the periphery and array regions.
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公开(公告)号:US09722178B2
公开(公告)日:2017-08-01
申请号:US15206556
申请日:2016-07-11
发明人: Eugene P. Marsh , Jun Liu
IPC分类号: H01L45/00
CPC分类号: H01L45/085 , H01L45/08 , H01L45/1233 , H01L45/124 , H01L45/1246 , H01L45/1253 , H01L45/1266 , H01L45/14 , H01L45/143 , H01L45/146 , H01L45/147 , H01L45/16 , H01L45/1683
摘要: Resistive memory having confined filament formation is described herein. One or more method embodiments include forming an opening in a stack having a silicon material and an oxide material on the silicon material, and forming an oxide material in the opening adjacent the silicon material, wherein the oxide material formed in the opening confines filament formation in the resistive memory cell to an are enclosed by the oxide material formed in the opening.
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