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公开(公告)号：US06235186B1
公开(公告)日：2001-05-22
申请号：US09315945
申请日：1999-05-21
IPC分类号： C25B146
CPC分类号： C02F1/46109 , C02F1/42 , C02F1/4618 , C02F1/4674 , C02F9/00 , C02F2001/46142 , C02F2001/46161 , C02F2201/46115 , C02F2201/46195 , C02F2209/04
摘要： An apparatus for producing electrolytic water in which the yielded electrolytic water does not suffer quality deterioration caused by chemical species, e.g., hydrogen ions, moving to the counter-electrode chamber. A diaphragm 4 of a two-chamber type electrolytic cell comprises two or more ion-exchange membranes 3, and a noble-metal layer 2 or another layer may be formed in the diaphragm. Use of the ion-exchange membranes produces an enhanced physical screening effect, while formation of the noble-metal layer produces catalytic effect to decompose chemical species. Both the ion-exchange membranes and the anode-metal layer are effective in diminishing the movement of chemical species to the counter-electrode chamber.
摘要翻译： 一种生产电解水的设备，其中产生的电解水不会由于移动到对电极室的化学物质例如氢离子而引起质量劣化。 两室式电解池的隔膜4包括两个或更多个离子交换膜3，并且可以在隔膜中形成贵金属层2或另一层。 使用离子交换膜产生增强的物理筛选效果，而贵金属层的形成产生催化作用以分解化学物质。 离子交换膜和阳极 - 金属层都有效地减少化学物质向对电极室的移动。
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公开(公告)号：US06143163A
公开(公告)日：2000-11-07
申请号：US115268
申请日：1998-07-14
申请人： Isao Sawamoto , Kuniaki Yamada , Yoshinori Nishiki , Masashi Tanaka , Naoaki Sakurai , Naoya Hayamizu
发明人： Isao Sawamoto , Kuniaki Yamada , Yoshinori Nishiki , Masashi Tanaka , Naoaki Sakurai , Naoya Hayamizu
CPC分类号： C02F1/4618 , C02F1/42 , C02F1/4674 , C02F2001/425 , C02F2001/46133 , C02F2001/46161 , C02F2201/46115 , C02F2201/4616 , C02F2201/46195 , C02F9/00
摘要： A method of water electrolysis for producing acidic water and alkaline water is disclosed, which is effective in preventing the dissolution of electrode material in the acidic water, etc. attributable to a reverse current flowing in a power supply cutoff state and also in preventing electrode deactivation caused by the electrode material dissolution. This enables the electrolytic cell to be operated stably over a long period of time to yield high-purity acidic and alkaline waters. An electrolytic cell 1 partitioned into an anode chamber and a cathode chamber with a cation-exchange membrane 2 as a solid electrolyte is used to electrolytically produce acidic water and alkaline water. A voltage of 1.2 V or higher and/or a current of 20 mA/dm.sup.2 or higher is applied between the anode 7 and the cathode 8 when the electrolytic cell is in a power supply cutoff state.
摘要翻译： 公开了一种用于生产酸性水和碱性水的水电解方法，其有效地防止由于在电源切断状态下流动的反向电流引起的酸性水等中的电极材料的溶解以及防止电极失活 引起电极材料溶解。 这使得电解槽能够在长时间内稳定地运行，从而产生高纯度的酸性和碱性水。 使用分隔为阳极室的电解池1和具有作为固体电解质的阳离子交换膜2的阴极室来电解生成酸性水和碱性水。 当电解槽处于电源切断状态时，在阳极7和阴极8之间施加1.2V以上的电压和/或20mA / dm 2以上的电流。
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公开(公告)号：US5980703A
公开(公告)日：1999-11-09
申请号：US53781
申请日：1998-04-02
申请人： Kuniaki Yamada , Seiichi Anzai , Masashi Tanaka , Takayuki Shimamune , Yoshinori Nishiki , Naoaki Sakurai , Naoya Hayamizu , Hiroshi Fujita
发明人： Kuniaki Yamada , Seiichi Anzai , Masashi Tanaka , Takayuki Shimamune , Yoshinori Nishiki , Naoaki Sakurai , Naoya Hayamizu , Hiroshi Fujita
CPC分类号： C02F1/469 , C02F1/4618 , C02F1/42 , C02F2001/46133 , C02F2001/46142 , C02F2001/46161 , C02F2103/04 , C02F2201/46115 , C02F2201/46125 , C02F2201/46195 , C02F9/00
摘要： An electrolytic cell for producing acidic water and alkaline water is disclosed. High-purity acidic water and high-purity alkaline water can be produced in a well balanced proportion from ultrapure water which is supplied in the minimum amount necessary for producing the desired acidic and alkaline waters using the minimum amount of electricity. The electrolytic cell includes an electrolytic acidic-water production unit 3 comprising an anode chamber 6 and an auxiliary cathode chamber 7 separated therefrom by a first ion-exchange membrane 5, and an electrolytic alkaline-water production unit 4 comprising a cathode chamber 10 and an auxiliary anode chamber 9 separated therefrom by a second ion-exchange membrane 8. Separately controllable power supplies are also provided for supplying power to each of the two units. The supply amount of pure water and the amount of electricity used can be fixed according to the desired amounts of acidic and alkaline waters. Thus, wasteful use of ultrapure water and electric power can be avoided.
摘要翻译： 公开了一种用于生产酸性水和碱性水的电解池。 高纯度酸性水和高纯度碱性水可以以超纯水的平衡比例生产，以最少的电量生产所需的酸性和碱性水所需的最小量。 电解池包括电解酸性水生产单元3，其包括由第一离子交换膜5与其隔开的阳极室6和辅助阴极室7;以及电解碱水生产单元4，其包括阴极室10和 辅助阳极室9由第二离子交换膜8分离。也提供了单独可控的电源，用于向两个单元中的每一个供电。 纯水的供给量和使用的电量可以根据所需量的酸性和碱性水而固定。 因此，可以避免浪费使用超纯水和电力。
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公开(公告)号：US07226513B2
公开(公告)日：2007-06-05
申请号：US10645911
申请日：2003-08-22
申请人： Hisatsugu Kurita , Manabu Hirasawa , Hiromi Nagahama , Koji Izumome , Takao Ino , Jyunsei Yamabe , Naoya Hayamizu , Naoaki Sakurai
发明人： Hisatsugu Kurita , Manabu Hirasawa , Hiromi Nagahama , Koji Izumome , Takao Ino , Jyunsei Yamabe , Naoya Hayamizu , Naoaki Sakurai
IPC分类号： B08B3/00
CPC分类号： H01L21/02052 , B08B3/08 , B08B2203/005 , C11D7/02 , C11D7/08 , C11D11/0047 , Y10S438/906
摘要： This invention provides a cleaning method of silicon wafer for obtaining a silicon wafer in which micro roughness thereof under spatial frequency of 20/μm is 0.3 to 1.5 nm3 in terms of power spectrum density, by passing a process of oxidizing the silicon wafer with ozonized water and a process of cleaning said oxidized silicon wafer with hydrofluoric acid. Consequently, it is possible to remove surface adhering pollutant such as particles and metallic foreign matter with the surface structure of silicon wafer flattened up to atomic level by annealing maintained.
摘要翻译： 本发明提供了一种用于获得硅晶片的硅晶片的清洁方法，其中，在功率谱密度方面，其空间频率为20 /μm的微观粗糙度为0.3至1.5nm 3，通过将工艺 用臭氧化水氧化硅晶片和用氢氟酸清洗所述氧化硅晶片的工艺。 因此，通过退火维持，将硅晶片的表面结构平坦化为原子级，可以除去表面附着污染物如颗粒和金属异物。
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公开(公告)号：US06210748B1
公开(公告)日：2001-04-03
申请号：US09098984
申请日：1998-06-17
申请人： Yoshiyuki Nagahara , Naoya Hayamizu , Naoaki Sakurai , Noriko Okoshi , Toshitaka Nonaka , Hiroaki Furuya
发明人： Yoshiyuki Nagahara , Naoya Hayamizu , Naoaki Sakurai , Noriko Okoshi , Toshitaka Nonaka , Hiroaki Furuya
IPC分类号： B05D512
CPC分类号： H01L21/02052
摘要： An electrode substrate is brush cleaned with a hydrogen gas dissolved water, which has an oxidation-reduction potential of −860 mV to −400 mV and a pH of 8 to 12, before applying an alignment layer material on the electrode substrate. Thus, it is possible to decrease the manufacturing costs without decreasing the detergency.
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公开(公告)号：US06444255B1
公开(公告)日：2002-09-03
申请号：US09781399
申请日：2001-02-13
申请人： Yoshiyuki Nagahara , Naoya Hayamizu , Naoaki Sakurai , Noriko Okoshi , Toshitaka Nonaka , Hiroaki Furuya
发明人： Yoshiyuki Nagahara , Naoya Hayamizu , Naoaki Sakurai , Noriko Okoshi , Toshitaka Nonaka , Hiroaki Furuya
IPC分类号： B05D512
摘要： An electrode substrate is brush cleaned with a hydrogen gas dissolved water, which has an oxidation-reduction potential of −860 mV to −400 mV and a pH of 8 to 12, before applying an alignment layer material on the electrode substrate. Thus, it is possible to decrease the manufacturing costs without decreasing the detergency.
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公开(公告)号：US6082373A
公开(公告)日：2000-07-04
申请号：US109066
申请日：1998-07-02
IPC分类号： B08B3/10 , B08B3/12 , C02F1/46 , C11D7/00 , H01L21/00 , H01L21/02 , H01L21/304 , B08B3/00 , B08B5/00 , B03C23/00
CPC分类号： H01L21/02074 , B08B3/12 , H01L21/67051
摘要： Provided is a cleaning method for effectively removing particles on the surface of an object to be cleaned. This cleaning method includes dissolving oxygen into deaerated pure water to prepare a cleaning fluid, and cleaning an object to be cleaned by bringing the object into contact with the cleaning fluid to which ultrasonic vibration is being applied.
摘要翻译： 提供了一种有效去除待清洁物体表面上的微粒的清洗方法。 这种清洁方法包括将氧气溶解在脱气的纯水中以制备清洁液，并且通过使物体与被施加超声波振动的清洁流体接触来清洁待清洁的物体。
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8.发明授权公开(公告)号：US08236161B2
公开(公告)日：2012-08-07
申请号：US12274681
申请日：2008-11-20
CPC分类号： C25B1/285 , H01L21/67051
摘要： An apparatus for electrolyzing sulfuric acid, the apparatus comprising an electrolytic cell comprising a cathode chamber having a cathode and an anode chamber having an anode, the cathode chamber and the anode chamber being separated by a diaphragm, a sulfuric acid tank configured to store the sulfuric acid, a supply pipe connecting the sulfuric acid tank to an inlet port of the anode chamber, a connection pipe connecting an outlet port of the cathode chamber to the inlet port of the anode chamber, a first supply pump provided on the supply pipe and configured to supply the sulfuric acid from the sulfuric acid tank to the cathode chamber through the supply pipe, and a drain pipe connected to an outlet port of the anode chamber and configured to supply to a solution tank a solution containing an oxidizing agent generated by electrolysis in the anode chamber.
摘要翻译： 一种用于电解硫酸的设备，该设备包括电解池，该电解池包括具有阴极的阴极室和具有阳极的阳极室，阴极室和阳极室由隔膜隔开;硫酸罐，其构造成储存硫酸 酸，将硫酸罐连接到阳极室的入口的供给管，将阴极室的出口与阳极室的入口连接的连接管，设置在供给管上的第一供给泵， 通过供给管将硫酸从硫酸罐供给到阴极室，以及排水管，其连接到阳极室的出口，并配置成向溶液罐供给含有通过电解产生的氧化剂的溶液 阳极室。
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公开(公告)号：US08141567B2
公开(公告)日：2012-03-27
申请号：US11625081
申请日：2007-01-19
申请人： Takahiko Wakatsuki , Naoya Hayamizu , Hiroshi Fujita , Akiko Saito , Toshihide Hayashi , Yukinobu Nishibe , Tsutomu Makino
发明人： Takahiko Wakatsuki , Naoya Hayamizu , Hiroshi Fujita , Akiko Saito , Toshihide Hayashi , Yukinobu Nishibe , Tsutomu Makino
IPC分类号： B08B3/04
CPC分类号： B08B3/00 , B08B7/00 , B08B2230/01 , G03F7/427
摘要： A processing apparatus includes: a tank configured to store water; vapor generating unit configured to turn the water supplied from the tank into vapor; a processing chamber in which vapor supplied from the vapor generating unit is used to remove residues from a workpiece; cooling unit; and filtering unit. The cooling unit cools waste liquid ejected from the processing chamber. The filtering unit is provided between the cooling unit and the tank, and the filtering unit filters the waste liquid cooled in the cooling unit. A processing method includes: supplying vapor into a processing chamber; removing residues from a workpiece using the vapor; cooling waste liquid containing the removed residues to precipitate the residues as solids; and filtering the waste liquid containing the precipitates.
摘要翻译： 一种处理装置，包括：储存器，用于储存水; 蒸汽发生单元，其构造成将从所述罐供给的水转化为蒸气; 处理室，其中从蒸汽发生单元供应的蒸汽用于从工件中除去残余物; 冷却单元 和过滤单元。 冷却单元冷却从处理室喷出的废液。 过滤单元设置在冷却单元和水箱之间，过滤单元对冷却单元中冷却的废液进行过滤。 一种处理方法包括：将蒸气供应到处理室中; 使用蒸气从工件去除残留物; 冷却含有去除的残余物的废液以将残留物沉淀为固体; 并过滤含有沉淀物的废液。
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10.发明申请CLEANING METHOD, CLEANING SYSTEM, AND METHOD FOR MANUFACTURING MICROSTRUCTURE 审中-公开清洁方法，清洁系统和制造微结构的方法公开(公告)号：US20110073490A1
公开(公告)日：2011-03-31
申请号：US12880549
申请日：2010-09-13
申请人： Naoya Hayamizu , Makiko Tange , Masaaki Kato , Hiroki Domon , Yusuke Ogawa , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Naoya Hayamizu , Makiko Tange , Masaaki Kato , Hiroki Domon , Yusuke Ogawa , Yoshiaki Kurokawa , Nobuo Kobayashi
摘要： According to one embodiment, a cleaning method is disclosed. The method can produce an oxidizing solution including an oxidizing substance by electrolyzing a dilute sulfuric acid solution. In addition, the method can supply a highly concentrated inorganic acid solution individually, sequentially, or substantially simultaneously with the oxidizing solution to a surface of an object to be cleaned.
摘要翻译： 根据一个实施例，公开了一种清洁方法。 该方法可以通过电解稀硫酸溶液来产生包含氧化物质的氧化溶液。 此外，该方法可以将高度浓缩的无机酸溶液与氧化溶液单独，依次或基本上同时地供给到待清洁物体的表面。
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