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公开(公告)号：US07359032B2
公开(公告)日：2008-04-15
申请号：US10925148
申请日：2004-08-25
申请人： Michel Pieter Dansberg , Sebastiaan Maria Johannes Cornelissen , Henrikus Herman Marie Cox , Robert Johannes Petrus Van Diesen , Nicolaas Rudolf Kemper , Robert-Han Munnig Schmidt , Harmen Klaas Van Der Schoot , Rob Jansen
发明人： Michel Pieter Dansberg , Sebastiaan Maria Johannes Cornelissen , Henrikus Herman Marie Cox , Robert Johannes Petrus Van Diesen , Nicolaas Rudolf Kemper , Robert-Han Munnig Schmidt , Harmen Klaas Van Der Schoot , Rob Jansen
CPC分类号： G03F7/70933 , G03F7/70716 , G03F7/70775 , G03F7/7095
摘要： A lithographic projection apparatus is disclosed. The apparatus includes a radiation system for providing a beam of radiation, a first support structure for supporting a patterning device, a second support structure for supporting a substrate, and a projection system. At least one of the first and second support structures includes a planar base, a movable stage that can be moved over the planar base, and an actuator for moving the stage. The apparatus also includes a contactless position measuring device for measuring a position of the stage, and a first pump for generating a conditioned gas flow in a volume between the measuring device and the stage. The base includes a plurality of gas channels that provide a path for the conditioned gas to flow through the base.
摘要翻译： 公开了一种光刻投影装置。 该装置包括用于提供辐射束的辐射系统，用于支撑图案形成装置的第一支撑结构，用于支撑衬底的第二支撑结构和投影系统。 第一和第二支撑结构中的至少一个包括平面基座，可在平面基座上移动的可移动平台以及用于移动平台的致动器。 该装置还包括用于测量载物台的位置的非接触位置测量装置和用于在测量装置和载物台之间产生体积的调节气流的第一泵。 底座包括多个气体通道，其提供用于经调节的气体流过基座的路径。
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2.发明授权Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless 有权具有用于控制非接触式图案形成装置的平面位置的气体压力装置的平版印刷装置公开(公告)号：US08368868B2
公开(公告)日：2013-02-05
申请号：US12627087
申请日：2009-11-30
申请人： Johannes Petrus Martinus Bernardus Vermeulen , Marcel Koenraad Marie Baggen , Hans Butler , Henrikus Herman Marie Cox , Jan Van Eijk , Andre Bernardus Jeunink , Nicolaas Rudolf Kemper , Robert-Han Munnig Schmidt , Engelbertus Antonius Fransiscus Van Der Pasch , Marc Wilhelmus Maria Van Der Wijst , Theodorus Petrus Maria Cadee , Fransiscus Mathijs Jacobs , Christiaan Louis Valentin
发明人： Johannes Petrus Martinus Bernardus Vermeulen , Marcel Koenraad Marie Baggen , Hans Butler , Henrikus Herman Marie Cox , Jan Van Eijk , Andre Bernardus Jeunink , Nicolaas Rudolf Kemper , Robert-Han Munnig Schmidt , Engelbertus Antonius Fransiscus Van Der Pasch , Marc Wilhelmus Maria Van Der Wijst , Theodorus Petrus Maria Cadee , Fransiscus Mathijs Jacobs , Christiaan Louis Valentin
IPC分类号： G03B27/42
CPC分类号： G03B27/42 , G03F7/707 , G03F7/70775 , G03F7/70816 , G03F7/70866
摘要： A lithographic apparatus includes a position controller configured to control a position of a patterning device in its planar direction by selectively pressing at least one of the side faces of the patterning device. The position controller includes a gas pressure supply and one or more outflow openings directed towards at least one side face of the patterning device so as to exert pressurized gas on this side face in order to control the position of the patterning device in its planar direction in a contactless manner.
摘要翻译： 光刻设备包括位置控制器，其被配置为通过选择性地按压图案形成装置的侧面中的至少一个来控制图案形成装置在其平面方向上的位置。 位置控制器包括气体压力供给器和朝向图案形成装置的至少一个侧面的一个或多个流出开口，以在该侧面上施加加压气体，以便控制图案形成装置在其平面方向上的位置 一个非接触的方式。
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3.发明申请LITHOGRAPHIC APPARATUS WITH GAS PRESSURE MEANS FOR CONTROLLING A PLANAR POSITION OF A PATTERNING DEVICE CONTACTLESS 有权用于控制连续装置的平面位置的气体压力装置的平面设备公开(公告)号：US20100159399A1
公开(公告)日：2010-06-24
申请号：US12627087
申请日：2009-11-30
申请人： Johannes Petrus Martinus Bernardus VERMEULEN , Marcel Koenraad Marie Baggen , Hans Butler , Henrikus Herman Marie Cox , Jan Van Eijk , Andre Bernardus Jeunink , Nicolaas Rudolf Kemper , Robert-Han Munnig Schmidt , Engelbertus Antonius Fransiscus Van Der Pasch , Marc Wilhelmus Maria Van Der Wijst , Theodorus Petrus Maria Cadee , Fransiscus Mathijs Jacobs , Christiaan Louis Valentin
发明人： Johannes Petrus Martinus Bernardus VERMEULEN , Marcel Koenraad Marie Baggen , Hans Butler , Henrikus Herman Marie Cox , Jan Van Eijk , Andre Bernardus Jeunink , Nicolaas Rudolf Kemper , Robert-Han Munnig Schmidt , Engelbertus Antonius Fransiscus Van Der Pasch , Marc Wilhelmus Maria Van Der Wijst , Theodorus Petrus Maria Cadee , Fransiscus Mathijs Jacobs , Christiaan Louis Valentin
CPC分类号： G03B27/42 , G03F7/707 , G03F7/70775 , G03F7/70816 , G03F7/70866
摘要： A lithographic apparatus includes a position controller configured to control a position of a patterning device in its planar direction by selectively pressing at least one of the side faces of the patterning device. The position controller includes a gas pressure supply and one or more outflow openings directed towards at least one side face of the patterning device so as to exert pressurized gas on this side face in order to control the position of the patterning device in its planar direction in a contactless manner.
摘要翻译： 光刻设备包括位置控制器，其被配置为通过选择性地按压图案形成装置的侧面中的至少一个来控制图案形成装置在其平面方向上的位置。 位置控制器包括气体压力供给器和朝向图案形成装置的至少一个侧面的一个或多个流出开口，以在该侧面上施加加压气体，以便控制图案形成装置在其平面方向上的位置 一个非接触的方式。
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公开(公告)号：US09696633B2
公开(公告)日：2017-07-04
申请号：US13582725
申请日：2011-03-14
CPC分类号： G03F7/70258 , B65H23/245 , B65H2406/311 , G03F7/70275 , G03F7/70283 , G03F7/70391 , G03F7/70525 , G03F7/70583 , G03F7/707 , G03F7/70775 , G03F7/70816
摘要： A substrate handling apparatus for handling a substrate is disclosed. The substrate handling apparatus includes a substrate feeding device to feed the substrate towards an exposure area, a substrate receiving device to receive the substrate from the exposure area, and a substrate stabilization device to maintain, at least in the exposure area, the substrate substantially flat at an exposure height and/or tilt, the substrate stabilization device configured for contactless stabilization of the flexible substrate.
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公开(公告)号：US07016020B2
公开(公告)日：2006-03-21
申请号：US10846832
申请日：2004-05-17
CPC分类号： G03F7/70758 , H02K41/0356 , H02K2201/18
摘要： A positioning device for positioning an object is presented. The positioning device includes a first drive unit and a second drive unit for positioning the object. The first drive unit has a first part connected to the object and a second part connected to a first part of the second drive unit. The positioning device further includes a permanent magnet system constructed and arranged to provide at least part of the force for accelerating or decelerating the object.
摘要翻译： 提出了一种用于定位物体的定位装置。 定位装置包括用于定位物体的第一驱动单元和第二驱动单元。 第一驱动单元具有连接到物体的第一部分和连接到第二驱动单元的第一部分的第二部分。 该定位装置还包括永磁体系统，其构造和布置成提供用于加速或减速物体的至少一部分力。
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6.发明授权公开(公告)号：US06498350B2
公开(公告)日：2002-12-24
申请号：US09739106
申请日：2000-12-19
申请人： Yim Bun P. Kwan , Engelbertus A. F. van de Pasch , Andreas B. G. Ariens , Edwin J. Buis , Jan F. Hoogkamp , Robert-Han Munnig Schmidt
发明人： Yim Bun P. Kwan , Engelbertus A. F. van de Pasch , Andreas B. G. Ariens , Edwin J. Buis , Jan F. Hoogkamp , Robert-Han Munnig Schmidt
IPC分类号： H01J3713
CPC分类号： G03F7/70733 , G03F7/70716
摘要： In a multi-table lithographic apparatus in which substrate tables may be exchanged between a first working zone where substrates are loaded onto and removed from the table and a second working zones where wafers are exposed, collision prevention means are provided to prevent collisions between tables in the exchange process. The collision prevention means may be formed of a labyrinth or a revolving door. The exchange process may be controlled by shuttles, optionally including drive means, that are interlinked so that the tables can only be exchanged between zones together.
摘要翻译： 在其中衬底台可以在其中将基板装载到桌子上并从桌子上移除的第一工作区域和其中晶片暴露的第二工作区域之间进行交换的多工位平版印刷设备中，提供了防止碰撞的装置， 交流过程。 碰撞防止装置可以由迷宫式或旋转门形成。 交换过程可以通过彼此连接的梭子（可选地包括驱动装置）来控制，使得表只能在区域之间交换。
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公开(公告)号：US20080057440A1
公开(公告)日：2008-03-06
申请号：US11512434
申请日：2006-08-30
CPC分类号： G03F7/70341
摘要： An immersion lithographic apparatus is disclosed in which at least a part of the liquid supply system (which provides liquid between the projection system and the substrate) is moveable in a plane substantially parallel to a top surface of the substrate during scanning. The part is moved to reduce the relative velocity between that part and the substrate so that the speed at which the substrate may be moved relative to the projection system may be increased.
摘要翻译： 公开了一种浸没式光刻设备，其中液体供应系统（其在投影系统和基板之间提供液体）的至少一部分可在扫描期间在基本上平行于基板的顶表面的平面中移动。 移动部件以减小该部件与基板之间的相对速度，使得可以相对于投影系统移动基板的速度。
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公开(公告)号：US20070242246A1
公开(公告)日：2007-10-18
申请号：US11733327
申请日：2007-04-10
CPC分类号： G03F7/70291 , G03F7/70275 , G03F7/70308
摘要： A lithographic apparatus comprises an illumination system for supplying a beam of radiation, a patterning arrangement incorporating an array of individually controllable elements for imparting a pattern to the beam cross-section, a substrate table for supporting a substrate, and a projection system incorporating a microlens array for projecting the beam onto a target portion of the substrate. An error compensator is provided for supplying error correction values for compensating for the effect of positional errors in the microlens array, and a grey scale modulator is provided for supplying drive signals to controllable elements of the patterning arrangement in dependence on the error correction values in order to compensate for the effect of positional errors in the microlens array by varying the intensity of some parts of the pattern relative to other parts of the pattern.
摘要翻译： 光刻设备包括用于提供辐射束的照明系统，包括用于将光束横截面赋予图案的独立可控元件阵列的图案化装置，用于支撑衬底的衬底台以及包含微透镜的投影系统 阵列，用于将光束投影到基板的目标部分上。 提供误差补偿器，用于提供用于补偿微透镜阵列中的位置误差的影响的误差校正值，并且提供灰度调制器，用于根据纠错值按顺序将驱动信号提供给图案化装置的可控元件 以通过相对于图案的其它部分改变图案的一些部分的强度来补偿微透镜阵列中位置误差的影响。
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9.发明申请Lithographic apparatus and device manufacturing method using laser trimming of a multiple mirror contrast device 审中-公开平版印刷装置和使用多镜面对比装置的激光修整的装置制造方法公开(公告)号：US20070133007A1
公开(公告)日：2007-06-14
申请号：US11302489
申请日：2005-12-14
IPC分类号： G01B11/02
CPC分类号： G03F7/70291 , G03F7/70425 , G03F7/70591
摘要： A lithographic apparatus comprises a topography measurement device, a patterning device, and a corrective device. The topography measurement device measures a topography of at least one mechanical element of a patterning device. The patterning device comprises an array of individually controllable mechanical elements that are arranged to impart a pattern to a radiation beam. The corrective device corrects a mechanical property of the at least one mechanical element on the basis of information obtained by the topography measurement device.
摘要翻译： 光刻设备包括地形测量装置，图案形成装置和校正装置。 地形测量装置测量图案形成装置的至少一个机械元件的形貌。 图案形成装置包括被布置成赋予辐射束图案的独立可控的机械元件的阵列。 校正装置基于由地形测量装置获得的信息来校正至少一个机械元件的机械性能。
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公开(公告)号：US20050041233A1
公开(公告)日：2005-02-24
申请号：US10880606
申请日：2004-07-01
申请人： Gerard Van Schothorst , Jan Van Eijk , Erik Loopstra , Robert-Han Munnig Schmidt , Felix Godfried Peeters
发明人： Gerard Van Schothorst , Jan Van Eijk , Erik Loopstra , Robert-Han Munnig Schmidt , Felix Godfried Peeters
IPC分类号： F16F15/02 , G03B27/42 , G03F7/20 , H01L21/027
CPC分类号： F16F7/1005 , G03F7/709
摘要： A lithographic apparatus is presented in which vibrations induced by reaction forces exerted on a base frame BF by accelerations within the apparatus are eliminated without the need for complex positioning systems and several balance masses. This is achieved by using feed-forward control to apply a compensating force using actuators to the base frame, based on knowledge of the movements and accelerations of the substrate table and other parts within the apparatus.
摘要翻译： 提出了一种光刻设备，其中消除了由设备内的加速度施加在基架BF上的反作用力引起的振动，而不需要复杂的定位系统和几个平衡块。 这是通过使用前馈控制来实现的，其基于对基板台和设备内的其它部件的运动和加速度的了解，将使用致动器的补偿力施加到基架上。
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