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公开(公告)号:US09678271B2
公开(公告)日:2017-06-13
申请号:US14605650
申请日:2015-01-26
IPC分类号: H04B10/00 , G02B6/12 , H01L25/16 , H01L23/498 , G02B6/30 , G02B6/32 , G02B6/42 , H04B10/80 , H04J14/00
CPC分类号: G02B6/12004 , G02B6/30 , G02B6/32 , G02B6/4219 , G02B6/4257 , G02B6/4274 , G02B2006/12061 , G02B2006/12142 , H01L23/49827 , H01L23/49838 , H01L23/49894 , H01L25/167 , H01L2224/16225 , H01L2924/0002 , H01L2924/15311 , H04B10/803 , H01L2924/00
摘要: A chip package includes an optical integrated circuit (such as a hybrid integrated circuit) and an integrated circuit that are proximate to each other in the chip package. The integrated circuit includes electrical circuits that modulate data, communicate data, and serialize/deserialize data, and the optical integrated circuit communicates optical signals with very high bandwidth. Moreover, a front surface of the integrated circuit is electrically coupled to a top surface of an interposer, and a top surface of the integrated circuit is electrically coupled to a front surface of the optical integrated circuit. Furthermore, a bottom surface of the optical integrated circuit faces the top surface of the interposer, and the front surface of the optical integrated circuit is optically coupled to an optical-fiber receptacle, which in turn is optically coupled to an optical-fiber connector.
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公开(公告)号:US09465169B2
公开(公告)日:2016-10-11
申请号:US14625023
申请日:2015-02-18
发明人: Stevan S. Djordjevic , Shiyun Lin , Ivan Shubin , Xuezhe Zheng , John E. Cunningham , Ashok V. Krishnamoorthy
CPC分类号: G02B6/29395 , G02B6/13 , G02B6/2934 , G02F1/2257
摘要: An optical device is described. This optical device includes optical components having resonance wavelengths that match target values with a predefined accuracy (such as 0.1 nm) and with a predefined time stability (such as permanent or an infinite time stability) without thermal tuning and/or electronic tuning. The stable, accurate resonance wavelengths may be achieved using a wafer-scale, single (sub-second) shot trimming technique that permanently corrects the phase errors induced by material variations and fabrication inaccuracies in the optical components (and, more generally, resonant silicon-photonic optical components). In particular, the trimming technique may use photolithographic exposure of the optical components on the wafer in parallel, with time-modulation for each individual optical component based on active-element control. Note that the physical mechanism in the trimming technique may involve superficial room-temperature oxidation of the silicon surface, which is induced by deep-ultraviolet radiation in the presence of oxygen.
摘要翻译: 描述光学装置。 该光学装置包括具有与预定精度(例如0.1nm)匹配的目标值的谐振波长的光学部件,并且具有预定的时间稳定性(例如永久或无限时间稳定性),而不需要热调谐和/或电子调谐。 稳定,准确的共振波长可以使用晶片级单次(亚秒级)拍摄微调技术来实现,该技术永久地校正由光学部件中的材料变化和制造不精确性引起的相位误差(以及更一般地,谐振硅 - 光子学组件)。 特别地,修剪技术可以使用基于有源元件控制的每个单独光学部件的时间调制来并行地对晶片上的光学部件进行光刻曝光。 注意,修整技术中的物理机制可能涉及在氧存在下由深紫外线辐射诱导的硅表面的室温室温氧化。
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公开(公告)号:US09411177B2
公开(公告)日:2016-08-09
申请号:US14742431
申请日:2015-06-17
发明人: John E. Cunningham , Jin Yao , Ivan Shubin , Guoliang Li , Xuezhe Zheng , Shiyun Lin , Hiren D. Thacker , Stevan S. Djordjevic , Ashok V. Krishnamoorthy
IPC分类号: G02F1/025 , G02B6/12 , H01L31/0232 , G02F1/00 , G02F1/015
CPC分类号: G02F1/025 , G02B6/12 , G02B2006/12107 , G02B2006/12142 , G02F1/0018 , G02F1/015 , G02F2001/0157 , H01L21/26513 , H01L31/02327 , Y02P70/521
摘要: An integrated optical device includes an electro-absorption modulator disposed on a top surface of an optical waveguide. The electro-absorption modulator includes germanium disposed in a cavity between an n-type doped silicon sidewall and a p-type doped silicon sidewall. By applying a voltage between the n-type doped silicon sidewall and the p-type doped silicon sidewall, an electric field can be generated in a plane of the optical waveguide, but perpendicular to a propagation direction of the optical signal. This electric field shifts a band gap of the germanium, thereby modulating the optical signal.
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公开(公告)号:US09297971B2
公开(公告)日:2016-03-29
申请号:US14047978
申请日:2013-10-07
发明人: Hiren D. Thacker , Ashok V. Krishnamoorthy , Robert David Hopkins, II , Jon Lexau , Xuezhe Zheng , Ronald Ho , Ivan Shubin , John E. Cunningham
IPC分类号: G02B6/42 , H01L25/065 , H01L23/00 , H01L23/498 , H05K3/36
CPC分类号: G02B6/4274 , H01L23/49827 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/32 , H01L24/72 , H01L24/73 , H01L24/81 , H01L24/92 , H01L25/0652 , H01L25/0655 , H01L2224/0401 , H01L2224/13147 , H01L2224/1403 , H01L2224/141 , H01L2224/16145 , H01L2224/16225 , H01L2224/1703 , H01L2224/32225 , H01L2224/72 , H01L2224/73204 , H01L2224/73253 , H01L2224/81203 , H01L2224/81815 , H01L2224/92125 , H01L2225/06513 , H01L2225/06517 , H01L2225/06534 , H01L2225/06589 , H01L2924/14 , H01L2924/15192 , H01L2924/15311 , H01L2924/157 , H01L2924/15787 , H01L2924/15788 , H01L2924/37001 , H05K3/36 , H05K2201/10484 , H01L2924/00
摘要: A chip package includes an optical integrated circuit (such as a hybrid integrated circuit) and an integrated circuit that are proximate to each other in the chip package. The integrated circuit includes electrical circuits, such as memory or a processor, and the optical integrated circuit communicates optical signals with very high bandwidth. Moreover, a front surface of the integrated circuit is electrically coupled to a top surface of an interposer, and this top surface is in turn electrically coupled to a front surface of an input/output (I/O) integrated circuit that faces the top surface. Furthermore, the front surface of the I/O integrated circuit is electrically coupled to a top surface of the optical integrated circuit, where the top surface of the optical integrated circuit faces the front surface of the I/O integrated circuit.
摘要翻译: 芯片封装包括在芯片封装中彼此靠近的光学集成电路(例如混合集成电路)和集成电路。 集成电路包括诸如存储器或处理器的电路,并且光学集成电路传送具有非常高带宽的光信号。 此外,集成电路的前表面电耦合到插入件的顶表面,并且该顶表面又电耦合到面向顶表面的输入/输出(I / O)集成电路的前表面 。 此外,I / O集成电路的前表面电耦合到光集成电路的顶表面,其中光集成电路的顶表面面向I / O集成电路的前表面。
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公开(公告)号:US09256026B2
公开(公告)日:2016-02-09
申请号:US14540651
申请日:2014-11-13
发明人: Hiren D. Thacker , Ashok V. Krishnamoorthy , Robert David Hopkins, II , Jon Lexau , Ronald Ho , John E. Cunningham
CPC分类号: G02B6/12 , G02B6/42 , G02B6/4274 , G02B6/428 , H01L24/16 , H01L24/17 , H01L25/0652 , H01L2224/0401 , H01L2224/16145 , H01L2224/16225 , H01L2224/16235 , H01L2224/1703 , H01L2225/06513 , H01L2225/06517 , H01L2225/06534 , H01L2225/06548 , H01L2225/06565 , H01L2924/15311 , H01L2924/157 , H01L2924/15787 , H01L2924/15788 , H05K1/141 , H05K2201/046 , H05K2201/10121
摘要: A chip package includes an optical integrated circuit (such as a hybrid integrated circuit) and an integrated circuit that are adjacent to each other on the same side of a substrate in the chip package. The integrated circuit includes electrical circuits, such as memory or a processor, and the optical integrated circuit communicates optical signals with very high bandwidth. In addition, an input/output (I/O) integrated circuit is coupled to the optical integrated circuit between the substrate and the optical integrated circuit. This I/O integrated circuit includes high-speed I/O circuits and energy-efficient driver and receiver circuits and communicates with optical devices on the optical integrated circuit. By integrating the optical integrated circuit, the integrated circuit and the I/O integrated circuit in close proximity, the chip package may facilitate improved performance compared to chip packages with electrical interconnects.
摘要翻译: 芯片封装包括在芯片封装中的基板的相同侧上彼此相邻的光学集成电路(例如混合集成电路)和集成电路。 集成电路包括诸如存储器或处理器的电路,并且光学集成电路传送具有非常高带宽的光信号。 此外,输入/输出(I / O)集成电路耦合到基板和光学集成电路之间的光学集成电路。 该I / O集成电路包括高速I / O电路和节能驱动器和接收器电路,并与光学集成电路上的光学器件进行通信。 通过将集成电路,集成电路和I / O集成电路集成在一起,与具有电互连的芯片封装相比,芯片封装可以有助于提高性能。
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公开(公告)号:US20150293383A1
公开(公告)日:2015-10-15
申请号:US14252607
申请日:2014-04-14
发明人: John E. Cunningham , Jin Yao , Ivan Shubin , Guoliang Li , Xuezhe Zheng , Shiyun Lin , Hiren D. Thacker , Stevan S. Djordjevic , Ashok V. Krishnamoorthy
CPC分类号: G02F1/025 , G02B6/12 , G02B2006/12107 , G02B2006/12142 , G02F1/0018 , G02F1/015 , G02F2001/0157 , H01L21/26513 , H01L31/02327 , Y02P70/521
摘要: An integrated optical device includes an electro-absorption modulator disposed on a top surface of an optical waveguide. The electro-absorption modulator includes germanium disposed in a cavity between an n-type doped silicon sidewall and a p-type doped silicon sidewall. By applying a voltage between the n-type doped silicon sidewall and the p-type doped silicon sidewall, an electric field can be generated in a plane of the optical waveguide, but perpendicular to a propagation direction of the optical signal. This electric field shifts a band gap of the germanium, thereby modulating the optical signal.
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公开(公告)号:US20150098677A1
公开(公告)日:2015-04-09
申请号:US14540651
申请日:2014-11-13
发明人: Hiren D. Thacker , Ashok V. Krishnamoorthy , Robert David Hopkins, II , Jon Lexau , Ronald Ho , John E. Cunningham
CPC分类号: G02B6/12 , G02B6/42 , G02B6/4274 , G02B6/428 , H01L24/16 , H01L24/17 , H01L25/0652 , H01L2224/0401 , H01L2224/16145 , H01L2224/16225 , H01L2224/16235 , H01L2224/1703 , H01L2225/06513 , H01L2225/06517 , H01L2225/06534 , H01L2225/06548 , H01L2225/06565 , H01L2924/15311 , H01L2924/157 , H01L2924/15787 , H01L2924/15788 , H05K1/141 , H05K2201/046 , H05K2201/10121
摘要: A chip package includes an optical integrated circuit (such as a hybrid integrated circuit) and an integrated circuit that are adjacent to each other on the same side of a substrate in the chip package. The integrated circuit includes electrical circuits, such as memory or a processor, and the optical integrated circuit communicates optical signals with very high bandwidth. In addition, an input/output (I/O) integrated circuit is coupled to the optical integrated circuit between the substrate and the optical integrated circuit. This I/O integrated circuit includes high-speed I/O circuits and energy-efficient driver and receiver circuits and communicates with optical devices on the optical integrated circuit. By integrating the optical integrated circuit, the integrated circuit and the I/O integrated circuit in close proximity, the chip package may facilitate improved performance compared to chip packages with electrical interconnects.
摘要翻译: 芯片封装包括在芯片封装中的基板的相同侧上彼此相邻的光学集成电路(例如混合集成电路)和集成电路。 集成电路包括诸如存储器或处理器的电路,并且光学集成电路传送具有非常高带宽的光信号。 此外,输入/输出(I / O)集成电路耦合到基板和光学集成电路之间的光学集成电路。 该I / O集成电路包括高速I / O电路和节能驱动器和接收器电路,并与光学集成电路上的光学器件进行通信。 通过将集成电路,集成电路和I / O集成电路集成在一起,与具有电互连的芯片封装相比,芯片封装可以有助于提高性能。
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公开(公告)号:US08988770B2
公开(公告)日:2015-03-24
申请号:US13831541
申请日:2013-03-14
发明人: Xuezhe Zheng , Ashok V. Krishnamoorthy , Ivan Shubin , John E. Cunningham , Guoliang Li , Ying L. Luo
CPC分类号: H01S5/1028 , H01S5/02252 , H01S5/1025 , H01S5/141 , H01S5/142 , H01S5/18 , H01S5/4087
摘要: A hybrid optical source that provides an optical signal having a wavelength is described. This hybrid optical source includes an edge-coupled optical amplifier (such as a III-V semiconductor optical amplifier) aligned to a semiconductor reflector (such as an etched silicon mirror). The semiconductor reflector efficiently couples (i.e., with low optical loss) light out of the optical amplifier in a direction approximately perpendicular to a plane of the optical amplifier. A corresponding optical coupler (such as a diffraction grating or a mirror) fabricated on a silicon-on-insulator chip efficiently couples the light into a sub-micron silicon-on-insulator optical waveguide. The silicon-on-insulator optical waveguide couples the light to additional photonic elements (including a reflector) to complete the hybrid optical source.
摘要翻译: 描述了提供具有波长的光信号的混合光源。 该混合光源包括与半导体反射器(例如蚀刻硅镜)对准的边缘耦合光放大器(例如III-V半导体光放大器)。 半导体反射器在大致垂直于光放大器的平面的方向上有效地耦合(即,具有低光损耗)的光从光放大器中出射。 制造在绝缘体上硅芯片上的对应的光耦合器(例如衍射光栅或反射镜)有效地将光耦合到亚微米上绝缘体上的光波导中。 绝缘体上的光波导将光耦合到附加的光子元件(包括反射器)以完成混合光源。
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公开(公告)号:US20140321803A1
公开(公告)日:2014-10-30
申请号:US14047910
申请日:2013-10-07
发明人: Hiren D. Thacker , Frankie Y. Liu , Robert David Hopkins, II , Jon Lexau , Xuezhe Zheng , Guoliang Li , Ivan Shubin , Ronald Ho , John E. Cunningham , Ashok V. Krishnamoorthy
IPC分类号: G02B6/12
CPC分类号: G02B6/4274 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/32 , H01L24/72 , H01L24/73 , H01L24/81 , H01L24/92 , H01L25/0652 , H01L25/0655 , H01L2224/0401 , H01L2224/13147 , H01L2224/1403 , H01L2224/16145 , H01L2224/16225 , H01L2224/32225 , H01L2224/72 , H01L2224/73204 , H01L2224/73253 , H01L2224/81203 , H01L2224/81815 , H01L2224/92125 , H01L2225/06513 , H01L2225/06517 , H01L2225/06534 , H01L2225/06589 , H01L2924/14 , H01L2924/15192 , H01L2924/15311 , H01L2924/157 , H01L2924/15787 , H01L2924/15788 , H01L2924/37001 , H05K3/36 , H05K2201/10484 , H01L2924/00
摘要: A chip package includes an optical integrated circuit (such as a hybrid integrated circuit) and an integrated circuit that are adjacent to each in the chip package. The integrated circuit includes electrical circuits, such as memory or a processor, and the optical integrated circuit communicates optical signals with very high bandwidth. Moreover, a front surface of the integrated circuit is electrically coupled to a front surface of the optical integrated circuit by a top surface of the interposer, where the top surface faces the front surface of the integrated circuit and the front surface of the optical integrated circuit. Furthermore, the integrated circuit and the optical integrated circuit may be on a same side of the interposer. By integrating the optical integrated circuit and the integrated circuit in close proximity, the chip package may facilitate improved performance compared to chip packages with electrical interconnects.
摘要翻译: 芯片封装包括与芯片封装中的每一个相邻的光学集成电路(例如混合集成电路)和集成电路。 集成电路包括诸如存储器或处理器的电路,并且光学集成电路传送具有非常高带宽的光信号。 此外,集成电路的前表面通过插入件的顶表面电耦合到光集成电路的前表面,其中顶表面面向集成电路的前表面和光集成电路的前表面 。 此外,集成电路和光集成电路可以在插入器的同一侧上。 通过将光集成电路和集成电路集成在一起,与具有电互连的芯片封装相比,芯片封装可以有助于提高性能。
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公开(公告)号:US20140225273A1
公开(公告)日:2014-08-14
申请号:US13764331
申请日:2013-02-11
IPC分类号: H01L23/538 , H01L21/02
CPC分类号: H01L23/5384 , H01L23/13 , H01L23/145 , H01L23/147 , H01L23/15 , H01L23/481 , H01L25/0652 , H01L25/0657 , H01L29/0657 , H01L2224/16225 , H01L2225/06517 , H01L2225/06548 , H01L2225/06562 , H01L2225/06572 , H01L2924/0002 , H01L2924/00
摘要: A chip package is described. This chip package includes a substrate having a side at an angle relative to the top and bottom surfaces of the substrate that is between that of a direction parallel to the top and bottom surfaces and that of a direction perpendicular to the top and bottom surfaces (i.e., between 0° and 90°). This side may be configured to couple to a stack of semiconductor dies in which the semiconductor dies are offset from each other in a direction parallel to the top and bottom surfaces so that one side of the stack defines a stepped terrace. For example, the side may include electrical pads. These electrical pads may be coupled to electrical pads on the top surface by through-substrate vias (TSVs) in the substrate. Moreover, the electrical pads on the top surface may be configured to couple to an integrated circuit.
摘要翻译: 描述了芯片封装。 该芯片封装包括具有相对于基板的顶表面和底表面成一定角度的侧面的基板,该基板位于平行于顶部和底部表面的方向与垂直于顶部和底部表面的方向(即 在0°和90°之间)。 这一侧可以被配置成耦合到半导体管芯的堆叠,其中半导体管芯在平行于顶部和底部表面的方向上彼此偏移,使得堆叠的一侧限定阶梯式台阶。 例如,侧面可以包括电垫。 这些电焊盘可以通过衬底中的通孔衬底(TSV)耦合到顶表面上的电焊盘。 此外,顶表面上的电焊盘可以被配置成耦合到集成电路。
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