公开(公告)号：US20230314951A1

公开(公告)日：2023-10-05

申请号：US18117554

申请日：2023-03-06

Applicant: SEMES CO., LTD.

Inventor： Young Jun SON ,  Woo Sin JUNG ,  Youngun YUN ,  Jung Suk GOH

IPC: G03F7/00 ,  G03F7/30 ,  G03F7/09 ,  G03F7/039 ,  G03F7/20

CPC classification number: G03F7/2041 ,  G03F7/002 ,  G03F7/0392 ,  G03F7/09 ,  G03F7/3071

Abstract: A liquid chemical supply apparatus for supplying a liquid chemical to a plurality of substrate processing apparatuses disposed at different heights includes a pump for providing a hydraulic pressure for moving the liquid chemical to the substrate processing apparatuses, a plurality of liquid chemical supply lines having ends connected to the pump and other ends separately connected to the substrate processing apparatuses, to provide passages through which the liquid chemical moves, and a pump vent line connected to the pump to discharge some of the liquid chemical to outside, wherein flow rate calibration lines are connected between the liquid chemical supply lines and the pump vent line.

公开(公告)号：US20230173520A1

公开(公告)日：2023-06-08

申请号：US18059681

申请日：2022-11-29

Applicant: SEMES CO., LTD.

Inventor： Hae Kyung KIM ,  Dae Sung KIM ,  Woo Sin JUNG

IPC: B05B12/08 ,  G03F7/16

CPC classification number: B05B12/081 ,  G03F7/16

Abstract: Provided is a pressurizing apparatus that pressurizes a photoresist. In an embodiment, the pressurizing apparatus includes: a housing including a wall surface defining an internal space; a film separating the internal space into a first space and a second space; a first inlet which is in communication with the first space; a second outlet which is in communication with the first space; and a pressurization gas inlet which is in communication with the second space, and in the housing, a transverse section of the internal space has a large width of a first direction and a small width of a second direction perpendicular to the first direction, and the width of the internal space in the second direction includes a section which is narrowed toward a second side which is the other side from a first side which is one side in the first direction.

公开(公告)号：US20230131569A1

公开(公告)日：2023-04-27

申请号：US17967281

申请日：2022-10-17

Applicant: SEMES CO., LTD.

Inventor： Young Jun SON ,  Byoung Doo CHOI ,  Young Un YUN ,  Woo Ram LEE ,  Sung Chul JUNG ,  Woo Sin JUNG ,  Ki Sang EUM

IPC: F04B43/08 ,  B01D35/02

Abstract: An exemplary embodiment of the present invention provided a pump for supplying a liquid. The pump includes: a flexible tube body including a pump chamber; a first flange provided at one end of the tube body; and a second flange provided at the other end of the tube body; and a driving unit for transmitting rotational force to the tube body to twist the tube body, in which the tube body has a bent portion bent at a predetermined angle.

公开(公告)号：US20230311026A1

公开(公告)日：2023-10-05

申请号：US18152485

申请日：2023-01-10

Applicant: SEMES CO.,LTD.

Inventor： Arah CHO ,  Jung Suk GOH ,  Jae Hoon PARK ,  Hojin JANG ,  Jung Yul LEE ,  Kyungjin SEO ,  Woo Sin JUNG

IPC: B01D19/00 ,  H01L21/67

CPC classification number: B01D19/0042 ,  H01L21/67017

Abstract: The present invention relates to a liquid trap tank and a method for trapping liquid, the liquid trap tank may include a tank body configured to have an accommodation space formed therein capable of accommodating a liquid, have an inflow unit formed in one portion thereof, and have a discharge unit formed in the other portion thereof, a first accommodation portion formed inside the tank body and configured to primarily and temporarily accommodate the liquid so that air bubbles are separated from the liquid introduced through the inflow unit, and a second accommodation portion formed inside the tank body and configured to secondarily and temporarily accommodate the liquid moved from the first accommodation portion or to discharge the moved liquid to the outside through the discharge unit.

公开(公告)号：US20230073867A1

公开(公告)日：2023-03-09

申请号：US17940207

申请日：2022-09-08

Applicant: SEMES CO., LTD. ,  SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION

Inventor： Jung Suk GOH ,  A Rah CHO ,  Woo Sin JUNG ,  Dae Sung KIM ,  Hae Kyung KIM ,  Hyungmin PARK ,  Jungjin LEE ,  Linfeng PIAO ,  Jubeom LEE

IPC: G03F7/16

Abstract: Provided is a liquid supplying apparatus including: a trap tank for receiving a liquid from a storage bottle in which the liquid is stored and accommodating the received liquid; a pipe for connecting the storage bottle and the trap tank; and a valve installed on the pipe and for opening and closing a flow path of the pipe, in which the valve is installed closer to the storage bottle than the trap tank.

公开(公告)号：US20230060309A1

公开(公告)日：2023-03-02

申请号：US17896518

申请日：2022-08-26

Applicant: SEMES CO., LTD.

Inventor： Young Jun SON ,  Byoung Doo CHOI ,  Woo Sin JUNG ,  Sung Chul JUNG ,  Woo Ram LEE ,  Ki Sang EUM ,  Young Un YUN

IPC: F04B43/08 ,  G03F7/16

Abstract: Provided is a pump for supplying a liquid, the pump including: a flexible tube body including a pump chamber; first flange provided at one end of the tube body and including an inlet communicating with the pump chamber; a second flange provided at the other end of the tube body and including an outlet communicating with the pump chamber; and driving unit for transmitting rotational force to the tube body to twist the tube body.

公开(公告)号：US20210001357A1

公开(公告)日：2021-01-07

申请号：US16918341

申请日：2020-07-01

Applicant: SEMES CO., LTD.

Inventor： Chang Suk OH ,  Woo Sin JUNG ,  UnKyu KANG

IPC: B05B1/16 ,  B08B7/04 ,  B08B3/08 ,  B05B15/555 ,  G03F7/16

Abstract: An apparatus for performing liquid treatment for a substrate is provided. The apparatus for performing the liquid treatment for the substrate may include a housing having a treatment space, a substrate support unit to support and rotate the substrate in the treatment space, a liquid feeding unit including a nozzle device including a central exhaust port and multiple first outer exhaust ports, which are provided in a shape of a ring to form a concentric circle with the central exhaust port to feed mutually different treating liquids onto the substrate through respective exhaust ports, and a controller to control the liquid feeding unit.

公开(公告)号：US20230215745A1

公开(公告)日：2023-07-06

申请号：US17990819

申请日：2022-11-21

Applicant: SEMES CO., LTD.

Inventor： Woo Sin JUNG ,  Young CHOI ,  Dae Sung KIM ,  Hae Kyung KIM ,  Dongwoon PARK

IPC: H01L21/67

CPC classification number: H01L21/6715

Abstract: A liquid trap tank and a liquid supply unit for the liquid trap tank are provided. The liquid trap tank includes a tank body which has an accommodating space formed therein to accommodate a liquid and has an inlet portion formed on one side and an outlet portion formed on an opposite side; and a liquid supply unit coupled to the inlet of the tank body to supply the liquid from the outside of the tank body to the accommodating space, wherein the liquid supply unit comprises an inlet pipe portion coupled to the inlet portion to introduce the liquid into the accommodating space and a flow directing portion connected to the inlet pipe portion and configured to induce a flow of the liquid to suppress generation of air bubbles due to a drop of the liquid passing through the inlet pipe portion.

公开(公告)号：US20230201844A1

公开(公告)日：2023-06-29

申请号：US18145952

申请日：2022-12-23

Applicant: SEMES CO., LTD

Inventor： A Rah CHO ,  Woo Sin JUNG ,  Hae Kyung KIM ,  Dae Sung KIM

IPC: B05B1/00 ,  B05B12/08 ,  B05B15/20 ,  B05B15/50

CPC classification number: B05B1/005 ,  B05B12/088 ,  B05B15/20 ,  B05B15/50

Abstract: Provided is an equipment for treating a substrate. The substrate treating equipment may include: a nozzle supplying a chemical solution to a substrate; and a chemical solution supply apparatus supplying the chemical solution to the nozzle, and the chemical solution supply apparatus may include a pump member, an extraction nozzle provided on a flow path through which the chemical solution is introduced into the pump member and spraying the chemical solution by a spray scheme, and a control unit controlling an operation of the pump member.

公开(公告)号：US20230072779A1

公开(公告)日：2023-03-09

申请号：US17900761

申请日：2022-08-31

Applicant: SEMES CO., LTD.

Inventor： Young Jun SON ,  Byoung Doo CHOI ,  Sung Chul JUNG ,  Woo Sin JUNG ,  Young Un YUN ,  Woo Ram LEE ,  Ki Sang EUM

IPC: F04B45/06

Abstract: Provided is a pump for supplying a liquid. The pump includes: a tube including a pump chamber communicating with a chemical liquid inlet and a chemical liquid outlet, and configured to discharge a chemical liquid through a change in volume due to contraction and expansion; and a driving unit contracting or expanding the tube in a longitudinal direction, in which the tube includes: a flexible tube body including a pump chamber which has an increased internal volume when is contracted in a longitudinal direction and has a decreased internal volume when is expanded in the longitudinal direction, and which has a jar shape of which a radius is increased from the chemical liquid inlet to a center of the pump chamber, and the radius is decreased from the pump chamber to the chemical liquid outlet; a first flange provided at one end of the tube body and including the chemical liquid inlet; and a second flange provided at the other end of the tube body and including the chemical liquid outlet.