Plasma processing method
    3.
    发明授权
    Plasma processing method 失效
    等离子体处理方法

    公开(公告)号:US08486291B2

    公开(公告)日:2013-07-16

    申请号:US13011070

    申请日:2011-01-21

    IPC分类号: C03C15/00

    摘要: In the present invention, provided is a plasma processing method which reduces or eliminates the emission of contaminating matters caused by a quality-altered layer on the surface of yttria of a processing chamber's inner wall and parts inside the processing chamber. It is the plasma processing method including an etching step of setting a sample inside the processing chamber, and etching the sample, a deposition-product removing step of removing a deposition product by using a plasma, the deposition product being deposited inside the processing chamber by the etching step, the plasma being generated using a gas which contains fluorine or chlorine, and a step of exposing, to a rare-gas-based plasma, the inside of the processing chamber after the deposition-product removing step.

    摘要翻译: 在本发明中,提供了一种等离子体处理方法,其减少或消除由处理室的内壁和处理室内的部件的氧化钇的表面上的质量变化层引起的污染物质的排放。 等离子体处理方法包括在处理室内设置样品并蚀刻样品的蚀刻步骤,通过使用等离子体去除沉积产物的沉积产物去除步骤,沉积产物通过 蚀刻步骤,使用含有氟或氯的气体产生等离子体,以及在沉积物除去步骤之后将稀释气体等离子体暴露于处理室内部的步骤。

    IMAGE PROCESSING CIRCUIT
    4.
    发明申请
    IMAGE PROCESSING CIRCUIT 审中-公开
    图像处理电路

    公开(公告)号:US20110242091A1

    公开(公告)日:2011-10-06

    申请号:US12879937

    申请日:2010-09-10

    IPC分类号: G06T15/00

    摘要: An image processing circuit includes a first memory, a second memory, a write unit and a read unit. The first and second memories alternately store sub pixels of an input image including a plurality of parallax images corresponding to different view point directions. The write unit writes the sub pixels to one of the first and second memories. The read unit reads the sub pixels as an output image from the other of the first and second memories. Each of the first and second memories stores sub pixels for a plurality of successive lines. While the write unit writes the sub pixels of the input image to one of the first and second memories, the read unit reads the sub pixels of the output image from the other of the first and second memories. The first and the second memories are alternately changed.

    摘要翻译: 图像处理电路包括第一存储器,第二存储器,写入单元和读取单元。 第一和第二存储器交替地存储包括对应于不同视点方向的多个视差图像的输入图像的子像素。 写单元将子像素写入第一和第二存储器之一。 读取单元从第一和第二存储器中的另一个读取作为输出图像的子像素。 第一和第二存储器中的每一个存储多个连续行的子像素。 当写入单元将输入图像的子像素写入第一和第二存储器之一时,读取单元从第一和第二存储器中的另一个读取输出图像的子像素。 第一和第二存储器交替地改变。

    Delta sigma modulation D/A converting system
    5.
    发明授权
    Delta sigma modulation D/A converting system 失效
    三角Σ调制D / A转换系统

    公开(公告)号:US07439893B2

    公开(公告)日:2008-10-21

    申请号:US11776748

    申请日:2007-07-12

    IPC分类号: H03M3/00

    摘要: By using a selector, an output of a delta sigma modulator having a quantizer for quantizing a signal is selectively supplied to one of a first D/A converter having a linear amplifier and a second D/A converter having a digital amplifier. Further, the number of quantization levels of the quantizer, the sampling frequency, or the order of a transfer function of the delta sigma modulator is selected by a control signal selector in conjunction with the selector. An output of the first D/A converter is supplied to a line terminal, while an output of the second D/A converter is supplied to a headphone terminal.

    摘要翻译: 通过使用选择器,具有用于量化信号的量化器的Δ-Σ调制器的输出被选择性地提供给具有线性放大器的第一D / A转换器和具有数字放大器的第二D / A转换器之一。 此外,控制信号选择器与选择器一起选择量化器的量化级数,采样频率或ΔΣ调制器的传递函数的阶数。 第一D / A转换器的输出被提供给线路终端,而第二D / A转换器的输出被提供给耳机终端。

    Brake Control System
    7.
    发明申请
    Brake Control System 有权
    制动控制系统

    公开(公告)号:US20080054718A1

    公开(公告)日:2008-03-06

    申请号:US11837177

    申请日:2007-08-10

    IPC分类号: B60T8/60 G06F17/00

    摘要: Even in the case that at least one braking force generating function fails, it is possible to secure a maximum braking force as well as suppressing a yaw moment generated on the basis of the failure as much as possible even at a time when whatever braking force is requested, A target braking force to a normal brake apparatus is calculated on the basis of a result of detection by a malfunction detecting portion, in such a manner that a total of braking forces generated in the brake apparatuses in respective wheels becomes as equal as possible to a requested braking force, at a time when a malfunction is generated in the brake apparatus or a braking force control portion.

    摘要翻译: 即使在至少一个制动力产生功能失效的情况下,也可以确保最大的制动力,并且能够尽可能地抑制基于故障而产生的横摆力矩,即使在任何制动力为 根据故障检测部的检测结果,对各个车轮中的制动装置中产生的制动力的总和变得相等,来计算向正常制动装置的目标制动力 在制动装置或制动力控制部分中产生故障时,要求制动力。

    Cascade-type variable-order delta-sigma modulator
    8.
    发明授权
    Cascade-type variable-order delta-sigma modulator 有权
    级联型可变阶Δ-Σ调制器

    公开(公告)号:US07319420B2

    公开(公告)日:2008-01-15

    申请号:US11338651

    申请日:2006-01-25

    IPC分类号: H03M3/00

    CPC分类号: H03M3/394 H03M3/414

    摘要: A cascade-type variable-order delta-sigma modulator with low power consumption that can change the number of stages of the quantization loops, which are connected in a cascade configuration, to an optimum number depending on peripheral circuitries in a configuration as simple as possible. The present invention includes first to nth stages of delta-sigma modulating type quantization loops (n is an integer equal to or more than 2) connected in a cascade configuration, and a noise rejecting circuit. Each quantization loop quantizes an input signal, outputs the quantization result, and feeds back the quantization result to itself. The noise rejecting circuit rejects a quantization noise of the first stage of quantization loop, and comprises (n−1) selectors for activating and de-activating the respective output signals of the second and succeeding stages of the quantization loops in compliance with the control signal.

    摘要翻译: 具有低功耗的级联型可变阶Δ-Σ调制器,其可以将串联配置中连接的量化循环的级数改变为最佳数量,这取决于尽可能简单的配置中的外设电路 。 本发明包括以级联配置连接的Δ-Σ调制型量化环(n为等于或大于2的整数)的第一至第N级,以及噪声抑制电路。 每个量化环对输入信号进行量化,输出量化结果,并将量化结果反馈给自身。 噪声抑制电路拒绝量化环路的第一级的量化噪声,并且包括用于根据控制信号激活和去激活量化环路的第二级和后级的各个输出信号的(n-1)个选择器 。

    Vaporizer, film forming apparatus including the same, method of vaporization and method of forming film
    9.
    发明申请
    Vaporizer, film forming apparatus including the same, method of vaporization and method of forming film 审中-公开
    蒸发器,包括其的成膜装置,蒸发方法和形成膜的方法

    公开(公告)号:US20070166457A1

    公开(公告)日:2007-07-19

    申请号:US10548202

    申请日:2004-03-08

    IPC分类号: C23C16/00

    CPC分类号: C23C16/448

    摘要: It is aimed at providing a vaporization apparatus and a vaporization method capable of keeping track of a progressive condition of clogging of the apparatus. It is also aimed at providing a vaporization apparatus and a vaporization method capable of eliminating clogging prior to occurrence of complete clogging, without disassembling the apparatus. It provides a vaporization apparatus for introducing a carrier gas from one end of a gas passage and for feeding, the carrier gas including a material solution, from the other end of the gas passage to a vaporization part to thereby vaporize the material solution, characterized in that a mass flow controller (MFC) is provided at the one end of the gas passage, and means for detecting a pressure within the gas passage is provided. The vaporization apparatus is characterized in that the same is provided with means for introducing a chemical solution capable of dissolving therein matters deposited or sticked to the inside of the gas passage, into the gas passage.

    摘要翻译: 其目的在于提供能够跟踪装置堵塞的进行状态的蒸发装置和蒸发方法。 还旨在提供一种能够在没有完全堵塞的情况下消除堵塞而不拆卸设备的蒸发装置和蒸发方法。 它提供了一种用于从气体通道的一端引入载气并用于将包括材料溶液的载气从气体通道的另一端引入蒸发部分从而汽化该材料溶液的蒸发装置,其特征在于, 在气体通道的一端设置质量流量控制器(MFC),并且提供用于检测气体通道内的压力的装置。 蒸发装置的特征在于,其具有用于将能够溶解在气体通道内部的物质中的化学溶液引入气体通道的装置。

    Semiconductor device and method for manufacturing the same
    10.
    发明申请
    Semiconductor device and method for manufacturing the same 失效
    半导体装置及其制造方法

    公开(公告)号:US20060108600A1

    公开(公告)日:2006-05-25

    申请号:US11265208

    申请日:2005-11-03

    IPC分类号: H01L29/423

    摘要: The present application provides a semiconductor device including a first-conductivity type semiconductor substrate, a pillar structure portion formed on the first-conductivity type semiconductor substrate and formed of five semiconductor pillar layers arranged in one direction parallel to a main surface of the first-conductivity type semiconductor substrate, and isolation insulating portions formed on the first-conductivity type semiconductor substrate and sandwiching the pillar structure portion between the isolation insulating portions, wherein the pillar structure portion is formed of a first first-conductivity type pillar layer, a second first-conductivity type pillar layer and a third first-conductivity type pillar layer which sandwich the first first-conductivity type pillar layer, a first second-conductivity type pillar layer provided between the first first-conductivity type pillar layer and the second first-conductivity type pillar layer, and a second second-conductivity type pillar layer provided between the first first-conductivity type pillar layer and the third first-conductivity type pillar layer.

    摘要翻译: 本申请提供了一种半导体器件,其包括第一导电型半导体衬底,形成在第一导电型半导体衬底上的柱结构部分,并且由平行于第一导电型主要表面的一个方向排列的五个半导体柱层 以及形成在第一导电型半导体基板上并将柱结构部分夹在隔离绝缘部分之间的隔离绝缘部分,其中柱结构部分由第一第一导电型柱层,第二第一导电型支柱层, 导电型柱层和夹着第一第一导电型柱层的第三第一导电型柱层,设置在第一第一导电型柱层和第二第一导电型柱之间的第一第二导电型柱层 层和第二第二导电类型 柱层,设置在第一第一导电型柱层和第三第一导电型柱层之间。