Piezoelectric film element and manufacturing method thereof, and ink jet
recording head
    8.
    发明授权
    Piezoelectric film element and manufacturing method thereof, and ink jet recording head 失效
    压电膜元件及其制造方法以及喷墨记录头

    公开(公告)号:US06147438A

    公开(公告)日:2000-11-14

    申请号:US100882

    申请日:1998-06-22

    摘要: The present invention provides a piezoelectric film element with improved adhesion between a first protective film and a substrate. This invention also provides a method of manufacturing a piezoelectric film element, which makes it possible to selectively form, by a hydrothermal synthesis, a piezoelectric film with excellent piezoelectric properties in a specified area. This piezoelectric element comprises, over a substrate 12: a piezoelectric film; a common electrode and an individual electrode located to hold the piezoelectric film in between; a first protective film 14 which is formed over almost the entire surface of the substrate 12 and which protects the substrate 12 to avoid the formation of the piezoelectric film directly over the substrate 12; and a base film 16 which is formed over the first protective film 14 in the area for forming the piezoelectric film, and which functions as a base when the piezoelectric film is caused to grow to be formed. The piezoelectric film is formed over the base film 16.

    摘要翻译: 本发明提供一种具有改善的第一保护膜和基底之间的粘附性的压电膜元件。 本发明还提供一种制造压电膜元件的方法,其使得可以通过水热合成在特定区域中选择性地形成具有优异的压电性能的压电膜。 该压电元件包括​​:衬底12上的压电膜; 公共电极和位于将压电膜保持在其间的单独电极; 第一保护膜14,其形成在基板12的几乎整个表面上,并且保护基板12以避免直接在基板12上形成压电膜; 以及形成在用于形成压电膜的区域中的第一保护膜14上的基膜16,并且当使压电膜生长形成时用作基底。 压电膜形成在基膜16上。