Method of Forming Split Gate Memory Cells

    公开(公告)号:US20210005725A1

    公开(公告)日:2021-01-07

    申请号:US16868143

    申请日:2020-05-06

    Abstract: A method of forming a memory device includes forming a second insulation layer on a first conductive layer formed on a first insulation layer formed on semiconductor substrate. A trench is formed into the second insulation layer extending down and exposing a portion of the first conductive layer, which is etched or oxidized to have a concave upper surface. Two insulation spacers are formed along sidewalls of the trench, having inner surfaces facing each other and outer surfaces facing away from each other. A source region is formed in the substrate between the insulation spacers. The second insulation layer and portions of the first conductive layer are removed to form floating gates under the insulation spacers. A third insulation layer is formed on side surfaces of the floating gates. Two conductive spacers are formed along the outer surfaces. Drain regions are formed in the substrate adjacent the conductive spacers.

    Programming Methods For Neural Network Using Non-volatile Memory Array

    公开(公告)号:US20200151543A1

    公开(公告)日:2020-05-14

    申请号:US16746852

    申请日:2020-01-18

    Abstract: An artificial neural network device that utilizes one or more non-volatile memory arrays as the synapses. The synapses are configured to receive inputs and to generate therefrom outputs. Neurons are configured to receive the outputs. The synapses include a plurality of memory cells, wherein each of the memory cells includes spaced apart source and drain regions formed in a semiconductor substrate with a channel region extending there between, a floating gate disposed over and insulated from a first portion of the channel region and a non-floating gate disposed over and insulated from a second portion of the channel region. Each of the plurality of memory cells is configured to store a weight value corresponding to a number of electrons on the floating gate. The plurality of memory cells are configured to multiply the inputs by the stored weight values to generate the outputs. Various algorithms for tuning the memory cells to contain the correct weight values are disclosed.

    OUTPUT CIRCUIT
    6.
    发明公开
    OUTPUT CIRCUIT 审中-公开

    公开(公告)号:US20240095511A1

    公开(公告)日:2024-03-21

    申请号:US18522153

    申请日:2023-11-28

    CPC classification number: G06N3/065 G06F3/0688 G06F17/16 G06N3/08 G11C27/02

    Abstract: In one example, a circuit comprises an input transistor comprising a first terminal, a second terminal coupled to ground, and a gate; a capacitor comprising a first terminal and a second terminal; an output transistor comprising a first terminal providing an output current, a second terminal coupled to ground, and a gate; a first switch; and a second switch; wherein in a first mode, the first switch is closed and couples an input current to the first terminal of the input transistor and the gate of the input transistor and the second switch is closed and couples the first terminal of the input transistor to the first terminal of the capacitor and the gate of the output transistor, and in a second mode, the first switch is open and the second switch is open and the capacitor discharges into the gate of the output transistor.

    Method Of Forming Self-Aligned Split-Gate Memory Cell Array With Metal Gates And Logic Devices
    7.
    发明申请
    Method Of Forming Self-Aligned Split-Gate Memory Cell Array With Metal Gates And Logic Devices 有权
    用金属门和逻辑器件形成自对准分离栅极存储单元阵列的方法

    公开(公告)号:US20160218110A1

    公开(公告)日:2016-07-28

    申请号:US15003659

    申请日:2016-01-21

    Abstract: A method of forming a memory device by forming spaced apart first and second regions with a channel region therebetween, forming a floating gate over and insulated from a first portion of the channel region, forming a control gate over and insulated from the floating gate, forming an erase gate over and insulated from the first region, and forming a select gate over and insulated from a second portion of the channel region. Forming of the floating gate includes forming a first insulation layer on the substrate, forming a first conductive layer on the first insulation layer, and performing two separate etches to form first and second trenches through the first conductive layer. A sidewall of the first conductive layer at the first trench has a negative slope and a sidewall of the first conductive layer at the second trench is vertical.

    Abstract translation: 一种通过形成间隔开的第一和第二区域形成存储器件的方法,其间具有通道区域,在沟道区域的第一部分上方形成浮栅,并与沟道区域的第一部分绝缘,形成控制栅极并与浮栅绝缘,形成 擦除栅极,并与第一区域绝缘,并且形成选通栅极,并与沟道区域的第二部分绝缘。 浮置栅极的形成包括在衬底上形成第一绝缘层,在第一绝缘层上形成第一导电层,并执行两个单独的蚀刻以形成通过第一导电层的第一和第二沟槽。 第一沟槽处的第一导电层的侧壁具有负斜率,第二沟槽处的第一导电层的侧壁是垂直的。

Patent Agency Ranking