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公开(公告)号：US20070024800A1
公开(公告)日：2007-02-01
申请号：US10558934
申请日：2004-06-01
IPC分类号： G02F1/1333
CPC分类号： H05K3/107 , H05K3/0023 , H05K3/143 , H05K2201/0108
摘要： A photosensitive transparent resin film, provided selectively with a groove reaching a transparent substrate is formed on the transparent substrate, and a wiring portion is provided in the groove substantially in flush with the photosensitive transparent resin film. The wiring portion can be formed quickly while controlling the thickness easily by preprocessing the surface of the photosensitive transparent resin film or the bottom face of the groove before the wiring portion is set in the groove.
摘要翻译： 选择性地设置到达透明基板的槽的光敏透明树脂膜形成在透明基板上，并且布线部分设置在基本上与感光透明树脂膜齐平的槽中。 在将布线部分设置在槽中之前，可以通过预处理感光性透明树脂膜的表面或槽的底面来容易地控制厚度，同时可以快速形成布线部分。
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公开(公告)号：US20100184289A1
公开(公告)日：2010-07-22
申请号：US12749143
申请日：2010-03-29
IPC分类号： H01L21/768
CPC分类号： H05K3/107 , H05K3/0023 , H05K3/143 , H05K2201/0108
摘要： A photosensitive transparent resin film, provided selectively with a groove reaching a transparent substrate is formed on the transparent substrate, and a wiring portion is provided in the groove substantially in flush with the photosensitive transparent resin film. The wiring portion can be formed quickly while controlling the thickness easily by preprocessing the surface of the photosensitive transparent resin film or the bottom face of the groove before the wiring portion is set in the groove.
摘要翻译： 选择性地设置到达透明基板的槽的光敏透明树脂膜形成在透明基板上，并且布线部分设置在基本上与感光透明树脂膜齐平的槽中。 在将布线部分设置在槽中之前，可以通过预处理感光性透明树脂膜的表面或槽的底面来容易地控制厚度，同时可以快速形成布线部分。
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3.发明授权Thin film transistor integrated circuit device, active matrix display device, and manufacturing methods of the same 失效薄膜晶体管集成电路器件，有源矩阵显示器件及其制造方法公开(公告)号：US08064003B2
公开(公告)日：2011-11-22
申请号：US10581035
申请日：2004-11-26
IPC分类号： G02F1/136
CPC分类号： G02F1/1368 , G02F2001/133357 , H01L27/12 , H01L27/124 , H01L27/1248 , H01L27/1285 , H01L27/1292 , H01L29/41733 , H01L29/66742 , H01L29/78636
摘要： There is provided an active matrix display device including a flattening layer formed so as to surround a source electrode wiring, a drain electrode wiring, and a signal line, so that the source electrode wiring, the drain electrode wiring, and the signal line form substantially the same surface with the flattening layer.
摘要翻译： 提供了一种有源矩阵显示装置，包括形成为围绕源电极布线，漏电极布线和信号线形成的平坦化层，使得源极电极布线，漏电极布线和信号线基本上形成 与平整层相同的表面。
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4.发明申请Circuit Board, Method Of Manufacturing Circuit Board, And Display Device Having Circuit Board 审中-公开电路板，制造电路板的方法和具有电路板的显示装置公开(公告)号：US20070209200A1
公开(公告)日：2007-09-13
申请号：US10594596
申请日：2005-03-30
申请人： Tadahiro Ohmi , Keiichi Nii , Teruhiko Suzuki , Takeyoshi Kato
发明人： Tadahiro Ohmi , Keiichi Nii , Teruhiko Suzuki , Takeyoshi Kato
IPC分类号： H05K3/10
CPC分类号： H05K3/1258 , G02F2001/136295 , G03F7/40 , H01L21/481 , H05K3/0023 , H05K3/0073 , H05K3/1241 , H05K3/184 , H05K2203/0568 , H05K2203/087 , H05K2203/095 , Y10T29/49155
摘要： A circuit board manufacturing method includes formation of a thermosetting photosensitive resin film on an insulating board by a spin coat method and the like, exposure of the photosensitive resin film to radiation rays such as ultraviolet rays, development with a developer or by etching, heat-hardening of the photosensitive resin film, oxygen plasma treatment or ultraviolet treatment if required, adjustment of a water quantity in the photosensitive resin film by drying the resin film, exposure in a fluorine gas atmosphere, anneal treatment, and then immersion of the resin film in a fluorinated acid chemical.
摘要翻译： 电路板的制造方法包括通过旋涂法等在绝缘基板上形成热固性感光性树脂膜，将感光性树脂膜照射到紫外线等照射线，用显影剂显影或通过蚀刻， 感光性树脂膜的硬化，如果需要，进行氧等离子体处理或紫外线处理，通过干燥树脂膜来调整感光性树脂膜中的水分量，在氟气氛中曝光，退火处理，然后将树脂膜浸渍在 氟化酸化学品。
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5.发明申请Apparatus for Producing Electronic Device Such as Display Device, Method of Producing Electronic Device Such as Display Device, and Electronic Device Such as Display Device 审中-公开用于制造诸如显示装置的电子装置的装置，诸如显示装置的电子装置的制造方法以及诸如显示装置的电子装置公开(公告)号：US20080315201A1
公开(公告)日：2008-12-25
申请号：US11992046
申请日：2005-09-16
申请人： Tadahiro Ohmi , Akihiro Morimoto , Takeyoshi Kato
发明人： Tadahiro Ohmi , Akihiro Morimoto , Takeyoshi Kato
IPC分类号： H01L29/04 , C23C16/513 , H01L21/263
CPC分类号： H01L27/1288 , H01L27/1292 , H01L29/66765
摘要： An object of the present invention is to reduce an adverse effect of an atmosphere in a heat treatment device used in production of an electronic device, imparted on characteristics of the produced electronic device. To attain the object, an inner surface of the heat treatment device is covered with an oxide passive-state film and bringing the surface roughness of the inner surface to 1 μm or less in terms of a central mean roughness Ra. According to this type of heat treatment device, in curing a heat curable resin, deterioration in the heat curable resin caused by decomposition or dissociation of the heat curable resin, can be reduced.
摘要翻译： 本发明的一个目的是减少赋予所生产的电子设备的特性的用于生产电子设备的热处理装置中的气氛的不良影响。 为了实现该目的，热处理装置的内表面被氧化物被动状态膜覆盖，并且以中心平均粗糙度Ra为基准使内表面的表面粗糙度为1μm以下。 根据这种类型的热处理装置，在固化热固性树脂时，可以降低由热固性树脂的分解或解离引起的热固性树脂的劣化。
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6.发明申请Circuit board, electronic device employing circuit board, and mehtod of producing circuit board 审中-公开电路板，采用电路板的电子设备，以及电路板生产线公开(公告)号：US20060158865A1
公开(公告)日：2006-07-20
申请号：US10525329
申请日：2003-08-25
CPC分类号： H05K1/024 , H05K3/4676 , H05K3/4688
摘要： A circuit board (100) having an insulator layer and a conductor (104) buried in the insulator layer, wherein the insulator layer has a first insulator (101) satisfying a relation μr≧εr, assuming εr is the dielectric constant and μr is the relative permeability, and the conductor is substantially surrounded by the first insulator.
摘要翻译： 一种电路板（100），具有绝缘体层和埋在所述绝缘体层中的导体（104），其中所述绝缘体层具有第一绝缘体（101），所述第一绝缘体（101）满足关系式，其中，ε=介电常数， 相对导磁率和导体基本上被第一绝缘体包围。
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公开(公告)号：US20080029476A1
公开(公告)日：2008-02-07
申请号：US10594599
申请日：2005-02-24
IPC分类号： H01B13/00
CPC分类号： H05K1/024 , H05K1/0216 , H05K1/0242 , H05K3/389
摘要： A circuit board having high adhessiveness contact between electrically insulating layers and having a low interlayer electric resistance is provided. A circuit board is provided with a first conductive layer formed on a core (1) and a first electrically insulating layer formed thereon. In the circuit board, a first conductor layer has a surface roughness Ra of 0.1 nm or more but less than 100 nm, and a first primer layer having a thiol compound as a main material is provided between the first conductive layer and the first electrically insulating layer. Thus, the circuit board which has excellent adhesiveness between the first conductor layer and the first electrically insulating layer and is also applicable to high frequency signal is provided.
摘要翻译： 提供一种电绝缘层之间具有高粘合性接触并具有低层间电阻的电路板。 电路板设置有形成在芯部（1）上的第一导电层和形成在其上的第一电绝缘层。 在电路板中，第一导体层的表面粗糙度Ra为0.1nm以上且小于100nm，在第一导电层和第一电绝缘层之间设置具有硫醇化合物作为主要材料的第一底漆层 层。 因此，提供了在第一导体层和第一电绝缘层之间具有优异的粘合性并且也适用于高频信号的电路板。
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8.发明申请Gas production facility, gas supply container, and gas for manufacture of electronic devices 审中-公开天然气生产设备，气体供应容器和用于制造电子设备的气体公开(公告)号：US20110124928A1
公开(公告)日：2011-05-26
申请号：US12929271
申请日：2011-01-12
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Takeyoshi Kato , Kimiaki Tanaka , Masahiro Nakamura , Katsutomo Tanaka
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Takeyoshi Kato , Kimiaki Tanaka , Masahiro Nakamura , Katsutomo Tanaka
摘要： An apparatus for producing a gas using a raw material gas having high reactivity, in particular, a fluorinated hydrocarbon, or a vessel for supplying the gas, characterized in that the surface of a portion thereof contacting with the gas has an average roughness of 1 μm or less in terms of a center line average roughness Ra. It is preferred that an oxide-based passivated film such as a film based on chromium oxide, aluminum oxide, yttrium oxide, magnesium oxide or the like is formed on the surface having a roughness controlled as above. The above apparatus and vessel can be suitably used for preventing the contamination of a raw material gas originated from a gas production apparatus or a vessel for supplying the gas.
摘要翻译： 使用反应性高的原料气体，特别是氟化烃或用于供给气体的容器来制造气体的装置，其特征在于，与气体接触的部分的表面的平均粗糙度为1μm 或更小的中心线平均粗糙度Ra。 优选在具有如上控制的粗糙度的表面上形成氧化物基钝化膜，例如基于氧化铬，氧化铝，氧化钇，氧化镁等的膜。 上述设备和容器可适用于防止源自气体生产设备或用于供应气体的容器的原料气体的污染。
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9.发明申请Gas Production Facility, Gas Supply Container, And Gas For Manufacture Of Electronic Devices 审中-公开气体生产设备，气体供应集装箱和气体制造电子设备公开(公告)号：US20070282142A1
公开(公告)日：2007-12-06
申请号：US10592278
申请日：2005-02-16
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Takeyoshi Kato , Kimiaki Tanaka , Masahiro Nakamura , Katsutomo Tanaka
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Takeyoshi Kato , Kimiaki Tanaka , Masahiro Nakamura , Katsutomo Tanaka
摘要： An apparatus for producing a gas using a raw material gas having high reactivity, in particular, a fluorinated hydrocarbon, or a vessel for supplying the gas, characterized in that the surface of a portion thereof contacting with the gas has an average roughness of 1 μm or less in terms of a center line average roughness Ra. It is preferred that an oxide-based passivated film such as a film based on chromium oxide, aluminum oxide, yttrium oxide, magnesium oxide or the like is formed on the surface having a roughness controlled as above. The above apparatus and vessel can be suitably used for preventing the contamination of a raw material gas originated from a gas production apparatus or a vessel for supplying the gas.
摘要翻译： 使用高反应性的原料气体，特别是氟化烃或用于供给气体的容器来生产气体的装置，其特征在于，与气体接触的部分的表面的平均粗糙度为1μm 或更小的中心线平均粗糙度Ra。 优选在具有如上控制的粗糙度的表面上形成氧化物基钝化膜，例如基于氧化铬，氧化铝，氧化钇，氧化镁等的膜。 上述设备和容器可适用于防止源自气体生产设备或用于供应气体的容器的原料气体的污染。
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公开(公告)号：US6013407A
公开(公告)日：2000-01-11
申请号：US875045
申请日：1997-07-08
CPC分类号： G03F7/0236 , G03F7/0226 , G03F7/0233
摘要： A positive resist composition is excellent in sensitivity, film loss after development, resolution, thermal-flow resistance, storage stability, exposure margin and focus margin and comprises in combination (A) an alkali-soluble phenol resin, (B) a quinonediazide sulfonate type photosensitive agent and (C) a phenolic compound, wherein the phenolic compound (C) is at least one phenolic compound selected from the group consisting of phenolic compounds (CX) having a structural unit represented by the following formula (I) and phenolic compounds (CD) having a structural unit represented by the following formula (II): ##STR1## wherein R.sup.1 to R.sup.3 are, independently of one another, a hydrogen atom, a hydroxyl group, a halogen atom, an alkyl group which may be substituted, a cycloalkyl group which may be substituted, an alkenyl group which may be substituted, an alkoxy group which may be substituted, or an aryl group which may be substituted, R.sup.4 to R.sup.11 are, independently of one another, a hydrogen atom, an alkyl group which may be substituted, a cycloalkyl group which may be substituted, an alkenyl group which may be substituted, an aryl group which may be substituted, or an alkoxy group which may be substituted, and n is a positive integer; and ##STR2## wherein R.sup.12 to R.sup.15 are, independently of one another, a hydrogen atom, a hydroxyl group, a halogen atom, an alkyl group which may be substituted, a cycloalkyl group which may be substituted, an alkenyl group which may be substituted, an alkoxy group which may be substituted, or an aryl group which may be substituted, with the proviso that at least one of R.sup.12 to R.sup.15 is a hydroxyl group, and m is a positive integer.
摘要翻译： PCT No.PCT / JP96 / 00061 Sec。 371日期1997年7月8日 102（e）日期1997年7月8日PCT 1996年1月17日PCT PCT。 公开号WO96 / 22563 日期：1996年7月25日正性抗蚀剂组合物具有优异的敏感性，显影后的膜损耗，分辨率，耐热流动性，储存稳定性，曝光余量和聚焦余量，并且包括（A）碱溶性酚醛树脂（B ）醌二叠氮化物型光敏剂和（C）酚类化合物，其中所述酚类化合物（C）为选自具有由下式（I）表示的结构单元的酚类化合物（CX））组成的组中的至少一种酚类化合物 ）和具有由下式（II）表示的结构单元的酚类化合物（CD）：其中R 1至R 3彼此独立地为氢原子，羟基，卤素原子，可被取代的烷基 可被取代的环烷基，可被取代的链烯基，可被取代的烷氧基或可被取代的芳基R4至R11彼此独立地是 氢原子，可以被取代的烷基，可被取代的环烷基，可被取代的烯基，可被取代的芳基或可被取代的烷氧基，n是正的 整数; 并且其中R12至R15彼此独立地为氢原子，羟基，卤素原子，可被取代的烷基，可被取代的环烷基，可被取代的烯基，烷氧基 可以被取代的基团，或可以被取代的芳基，条件是R12至R15中的至少一个是羟基，m是正整数。
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