公开(公告)号：US09941140B2

公开(公告)日：2018-04-10

申请号：US15437193

申请日：2017-02-20

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu-Feng Chen ,  Kai-Chiang Wu ,  Chun-Lin Lu ,  Hung-Jui Kou

IPC: H01L21/3205 ,  H01L23/00 ,  H01L23/544 ,  H01L21/78 ,  H01L21/3213 ,  H01L23/433 ,  H01L21/283 ,  H01L21/34

CPC classification number: H01L21/3205 ,  H01L21/283 ,  H01L21/3213 ,  H01L21/34 ,  H01L21/4853 ,  H01L21/486 ,  H01L21/56 ,  H01L21/561 ,  H01L21/563 ,  H01L21/76898 ,  H01L21/78 ,  H01L23/10 ,  H01L23/147 ,  H01L23/16 ,  H01L23/28 ,  H01L23/31 ,  H01L23/3157 ,  H01L23/4334 ,  H01L23/481 ,  H01L23/49805 ,  H01L23/49811 ,  H01L23/49816 ,  H01L23/49827 ,  H01L23/544 ,  H01L23/562 ,  H01L23/564 ,  H01L23/585 ,  H01L24/03 ,  H01L24/05 ,  H01L24/06 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/17 ,  H01L24/32 ,  H01L24/73 ,  H01L24/81 ,  H01L24/94 ,  H01L24/97 ,  H01L25/0652 ,  H01L25/0657 ,  H01L25/50 ,  H01L2021/6024 ,  H01L2223/5446 ,  H01L2224/02235 ,  H01L2224/02255 ,  H01L2224/0226 ,  H01L2224/03462 ,  H01L2224/03464 ,  H01L2224/03622 ,  H01L2224/0401 ,  H01L2224/05111 ,  H01L2224/05124 ,  H01L2224/05139 ,  H01L2224/05144 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/05572 ,  H01L2224/06181 ,  H01L2224/11318 ,  H01L2224/13026 ,  H01L2224/13109 ,  H01L2224/13111 ,  H01L2224/13116 ,  H01L2224/13139 ,  H01L2224/13147 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/16237 ,  H01L2224/1703 ,  H01L2224/17181 ,  H01L2224/17505 ,  H01L2224/17517 ,  H01L2224/32145 ,  H01L2224/73204 ,  H01L2224/81139 ,  H01L2224/92124 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2225/06513 ,  H01L2225/0652 ,  H01L2225/06541 ,  H01L2225/06568 ,  H01L2924/01029 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/06 ,  H01L2924/0665 ,  H01L2924/07025 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/181 ,  H01L2924/18161 ,  H01L2924/2064 ,  H01L2924/3511 ,  H01L2224/81 ,  H01L2924/00

Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In some embodiments, a semiconductor device includes a substrate, and a plurality of contact pads disposed over the substrate. The contact pads may be arranged in a ball grid array (BGA), and the may include a plurality of corners. A metal dam is disposed around each of the plurality of corners, such as corners of the BGA.