Field-emission electron source and method of manufacturing the same
    9.
    发明授权
    Field-emission electron source and method of manufacturing the same 失效
    场发射电子源及其制造方法

    公开(公告)号:US5897790A

    公开(公告)日:1999-04-27

    申请号:US995839

    申请日:1997-12-22

    IPC分类号: H01J9/02 B44C1/22

    CPC分类号: H01J9/025 H01J2201/30426

    摘要: A withdrawn electrode is formed on a silicon substrate with intervention of upper and lower silicon oxide films each having circular openings corresponding to regions in which cathodes are to be formed. Tower-shaped cathodes are formed in the respective openings of the upper and lower silicon oxide films and of the withdrawn electrode. Each of the cathodes has a sharply tapered tip portion having a radius of 2 nm or less, which has been formed by crystal anisotropic etching and thermal oxidation process for silicon. The region of the silicon substrate exposed in the openings of the upper and lower silicon oxide films and the cathode have their surfaces coated with a thin surface coating film made of a material having a low work function.

    摘要翻译: 引出电极形成在硅衬底上,介于上和下氧化硅膜之间,每个氧化硅膜具有对应于其中将形成阴极的区域的圆形开口。 在上下氧化硅膜和引出电极的各个开口中形成塔状阴极。 每个阴极具有通过晶体各向异性蚀刻和硅的热氧化工艺形成的具有2nm或更小半径的尖锐尖端部分。 暴露在上,下氧化硅膜和阴极的开口中的硅衬底的区域的表面涂覆有由具有低功函数的材料制成的薄表面涂膜。

    Optical pickup head
    10.
    发明授权
    Optical pickup head 失效
    光学拾音头

    公开(公告)号:US5301182A

    公开(公告)日:1994-04-05

    申请号:US868939

    申请日:1992-04-16

    IPC分类号: G11B7/09 G11B7/135 G11B7/00

    CPC分类号: G11B7/1362 G11B7/1353

    摘要: An optical pickup head for operating on an information recording medium includes a light source for emitting a light beam. A transparent base plate has opposite surfaces formed with a semitransparent film and a hologram respectively. The semitransparent film is exposed to the light beam emitted from the light source, and reflects a portion of the light beam emitted from the light source. The portion of the light beam which is reflected by the semitransparent film forms a forward light beam. A condenser optical system serves to focus the forward light beam on the information recording medium. The forward light beam is reflected at the information recording medium, and forms a backward light beam. The backward light beam successively passes through the condenser optical system, the semitransparent film, and the transparent base plate, and then reaches the hologram. The hologram generates a backward +1-order diffraction light beam from the backward light beam. A plurality of photodetectors serve to receive the +1-order diffraction light beam and to convert the received +1-order diffraction light beam into corresponding electric signals respectively.

    摘要翻译: 用于在信息记录介质上操作的光学拾取头包括用于发射光束的光源。 透明基板分别具有形成半透明膜和全息图的相对表面。 半透明膜暴露于从光源发射的光束,并且反射从光源发射的光束的一部分。 由半透明膜反射的光束部分形成正向光束。 聚光器光学系统用于将前向光束聚焦在信息记录介质上。 正向光束在信息记录介质上被反射,形成反向光束。 后向光束依次通过聚光系统,半透明膜和透明基板,然后到达全息图。 全息图从后向光束产生反向+ 1级的衍射光束。 多个光电探测器用于接收+ 1级衍射光束并将接收到的+1级衍射光束分别转换为相应的电信号。