SINGLE CRYSTAL PULLING APPARATUS AND LOW HEAT CONDUCTIVE MEMBER USED FOR SINGLE CRYSTAL PULLING APPARATUS
    10.
    发明申请
    SINGLE CRYSTAL PULLING APPARATUS AND LOW HEAT CONDUCTIVE MEMBER USED FOR SINGLE CRYSTAL PULLING APPARATUS 有权
    单晶拉丝装置和低温导热部件用于单晶拉丝装置

    公开(公告)号:US20130233241A1

    公开(公告)日:2013-09-12

    申请号:US13881074

    申请日:2011-11-21

    IPC分类号: C30B15/14 C30B15/30 C30B15/10

    摘要: A single crystal pulling apparatus (1) has a quartz crucible (2) for accommodating silicon melt (3), a graphite crucible (4) for retaining the quartz crucible (2), a tray (5) for securing and holding the graphite crucible (4) from below, and a crucible rotating shaft (6) for supporting the tray (5) from below and for elevating and lowering the tray (5) and the crucibles (2), (4) while rotating them. A low heat conductive member (10) is interposed on a joint surface between the tray (5) and the crucible rotating shaft (6). The low heat conductive member (10) is formed in a substantially tubular shape, and is interposed in such a manner that a protruding portion of the crucible rotating shaft (6) is inserted through a center hole of the low heat conductive member (10). Thereby, a gap portion (11) is formed below a bottom portion of the tray (5).

    摘要翻译: 单晶拉制装置(1)具有用于容纳硅熔体(3)的石英坩埚(2),用于保持石英坩埚(2)的石墨坩埚(4),用于固定和保持石墨坩埚的托盘(5) (4),以及用于从下方支撑托盘(5)并用于在旋转托盘(5)和坩埚(2),(4)时升降的坩埚旋转轴(6)。 低导热构件(10)插入在托盘(5)和坩埚旋转轴(6)之间的接合表面上。 低导热构件(10)形成为大致筒状,并且以坩埚旋转轴(6)的突出部穿过低导热构件(10)的中心孔插入的方式插入, 。 由此,在托盘(5)的底部下方形成有间隙部(11)。