公开(公告)号：US08278566B2

公开(公告)日：2012-10-02

申请号：US12364084

申请日：2009-02-02

申请人： Hajime Kobayashi ,  Yasuyuki Yanase ,  Tetsuya Yamamoto ,  Yoshio Okayama

发明人： Hajime Kobayashi ,  Yasuyuki Yanase ,  Tetsuya Yamamoto ,  Yoshio Okayama

IPC分类号： H05K1/11

摘要： A device mounting board includes: an insulating resin layer; a wiring layer disposed on one main surface of the insulating resin layer; and a bump electrode connected electrically to the wiring layer and protruding on a side of the insulating resin layer from the wiring layer. A side surface of the bump electrode is curved inwardly toward the center axis of the bump electrode as viewed in a cross section including the center axis of the bump electrode, and the radius of curvature of the side surface changes continuously from a wiring layer end to a head end of the bump electrode.

公开(公告)号：US20080203557A1

公开(公告)日：2008-08-28

申请号：US12022487

申请日：2008-01-30

申请人： Tetsuya Yamamoto ,  Yoshio Okayama ,  Yasuyuki Yanase ,  Tetsuro Sawai

发明人： Tetsuya Yamamoto ,  Yoshio Okayama ,  Yasuyuki Yanase ,  Tetsuro Sawai

IPC分类号： H01L23/12 ,  H01L21/44

CPC分类号： H01L21/481 ,  H01L21/4832 ,  H01L21/6835 ,  H01L23/4334 ,  H01L23/49833 ,  H01L23/5389 ,  H01L24/11 ,  H01L24/12 ,  H01L24/27 ,  H01L24/94 ,  H01L2221/68377 ,  H01L2224/05001 ,  H01L2224/05022 ,  H01L2224/05548 ,  H01L2224/05647 ,  H01L2224/114 ,  H01L2224/116 ,  H01L2224/13099 ,  H01L2224/14051 ,  H01L2224/274 ,  H01L2224/83101 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01022 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01047 ,  H01L2924/01078 ,  H01L2924/014 ,  H01L2924/3512 ,  H01L2924/00 ,  H01L2224/05099

摘要： Warp of a circuit device manufactured by the wafer level packaging technology is reduced. A semiconductor substrate used in a circuit device is provided with a circuit device and electrodes connected to the circuit device. A wiring layer having bumps connected to the electrodes is provided on a major surface of the semiconductor substrate. A metal layer is provided on a surface opposite to the major surface of the semiconductor substrate.

摘要翻译： 通过晶片级封装技术制造的电路器件的翘曲减少。 在电路器件中使用的半导体衬底设置有电路器件和连接到电路器件的电极。 在半导体基板的主表面上设置具有与电极连接的突起的布线层。 在与半导体基板的主表面相对的表面上设置有金属层。

公开(公告)号：US08338946B2

公开(公告)日：2012-12-25

申请号：US12961171

申请日：2010-12-06

申请人： Yasuyuki Yanase ,  Yoshio Okayama ,  Kiyoshi Shibata ,  Yasunori Inoue ,  Hideki Mizuhara ,  Ryosuke Usui ,  Tetsuya Yamamoto ,  Masurao Yoshii

发明人： Yasuyuki Yanase ,  Yoshio Okayama ,  Kiyoshi Shibata ,  Yasunori Inoue ,  Hideki Mizuhara ,  Ryosuke Usui ,  Tetsuya Yamamoto ,  Masurao Yoshii

IPC分类号： H01L23/48 ,  H01L29/40

CPC分类号： H01L24/11 ,  H01L23/3114 ,  H01L23/525 ,  H01L24/94 ,  H01L2221/6834 ,  H01L2221/68359 ,  H01L2224/0231 ,  H01L2224/02319 ,  H01L2224/0401 ,  H01L2224/05124 ,  H01L2224/05147 ,  H01L2224/05166 ,  H01L2224/05181 ,  H01L2224/05647 ,  H01L2224/1132 ,  H01L2224/114 ,  H01L2224/116 ,  H01L2224/131 ,  H01L2224/13147 ,  H01L2224/274 ,  H01L2924/00013 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01057 ,  H01L2924/01059 ,  H01L2924/01073 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/14 ,  H01L2924/351 ,  H01L2224/13099 ,  H01L2924/00 ,  H01L2924/00014

摘要： An electrode for a semiconductor device is formed on the mounting surface (particularly, the outer periphery thereof) of a semiconductor substrate in a semiconductor module. In order to secure a large gap between the electrodes, an insulating layer is formed on the electrode. Also formed are a plurality of bumps penetrating the insulating layer and connected to the electrode, and a rewiring pattern integrally formed with the bumps. The rewiring pattern includes a bump area and a wiring area extending contiguously with the bump area. The insulating layer is formed to have a concave upper surface in an interval between the bumps, and the wiring area of the rewiring pattern is formed to fit that upper surface. The wiring area of the rewiring pattern is formed to be depressed toward the semiconductor substrate in relation to the bump area of the rewiring pattern.

摘要翻译： 在半导体模块中的半导体衬底的安装表面（特别是其外周）上形成用于半导体器件的电极。 为了确保电极之间的大间隙，在电极上形成绝缘层。 还形成有穿过绝缘层并连接到电极的多个凸块，以及与凸块一体形成的重新布线图案。 重新布线图案包括凸起区域和与凸起区域相邻延伸的布线区域。 绝缘层形成为具有在凸起之间的间隔中的凹的上表面，并且重新布线图案的布线区域形成为适合该上表面。 重布线图案的布线区域相对于重新布线图案的凸起区域形成为朝向半导体基板压下。

公开(公告)号：US08309864B2

公开(公告)日：2012-11-13

申请号：US12364084

申请日：2009-02-02

申请人： Hajime Kobayashi ,  Yasuyuki Yanase ,  Tetsuya Yamamoto ,  Yoshio Okayama

发明人： Hajime Kobayashi ,  Yasuyuki Yanase ,  Tetsuya Yamamoto ,  Yoshio Okayama

IPC分类号： H05K1/11

CPC分类号： H01L23/49816 ,  H01L23/3114 ,  H01L24/03 ,  H01L24/06 ,  H01L24/13 ,  H01L2224/0231 ,  H01L2224/02313 ,  H01L2224/02319 ,  H01L2224/0233 ,  H01L2224/02351 ,  H01L2224/02377 ,  H01L2224/0401 ,  H01L2224/05548 ,  H01L2224/05567 ,  H01L2224/06051 ,  H01L2224/061 ,  H01L2224/13022 ,  H01L2224/16 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/14 ,  H01L2924/351 ,  H01L2924/00 ,  H01L2924/00012

摘要： A device mounting board includes: an insulating resin layer; a wiring layer disposed on one main surface of the insulating resin layer; and a bump electrode connected electrically to the wiring layer and protruding on a side of the insulating resin layer from the wiring layer. A side surface of the bump electrode is curved inwardly toward the center axis of the bump electrode as viewed in a cross section including the center axis of the bump electrode, and the radius of curvature of the side surface changes continuously from a wiring layer end to a head end of the bump electrode.

摘要翻译： 装置安装板包括：绝缘树脂层; 布置在所述绝缘树脂层的一个主表面上的布线层; 以及与布线层电连接并且在绝缘树脂层的与布线层一侧突出的突起电极。 凸起电极的侧表面在包括突起电极的中心轴的横截面中观察时朝向突起电极的中心轴线弯曲，并且侧表面的曲率半径从布线层端部连续变化到 凸起电极的头端。

公开(公告)号：US20080217769A1

公开(公告)日：2008-09-11

申请号：US12022865

申请日：2008-01-30

申请人： Yasuyuki Yanase ,  Yoshio Okayama ,  Kiyoshi Shibata ,  Yasunori Inoue ,  Hideki Mizuhara ,  Ryosuke Usui ,  Tetsuya Yamamoto ,  Masurao Yoshii

发明人： Yasuyuki Yanase ,  Yoshio Okayama ,  Kiyoshi Shibata ,  Yasunori Inoue ,  Hideki Mizuhara ,  Ryosuke Usui ,  Tetsuya Yamamoto ,  Masurao Yoshii

IPC分类号： H01L23/48 ,  H01L21/44

CPC分类号： H01L24/11 ,  H01L23/3114 ,  H01L23/525 ,  H01L24/94 ,  H01L2221/6834 ,  H01L2221/68359 ,  H01L2224/0231 ,  H01L2224/02319 ,  H01L2224/0401 ,  H01L2224/05124 ,  H01L2224/05147 ,  H01L2224/05166 ,  H01L2224/05181 ,  H01L2224/05647 ,  H01L2224/1132 ,  H01L2224/114 ,  H01L2224/116 ,  H01L2224/131 ,  H01L2224/13147 ,  H01L2224/274 ,  H01L2924/00013 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01057 ,  H01L2924/01059 ,  H01L2924/01073 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/14 ,  H01L2924/351 ,  H01L2224/13099 ,  H01L2924/00 ,  H01L2924/00014

摘要： An electrode for a semiconductor device is formed on the mounting surface (particularly, the outer periphery thereof) of a semiconductor substrate in a semiconductor module. In order to secure a large gap between the electrodes, an insulating layer is formed on the electrode. Also formed are a plurality of bumps penetrating the insulating layer and connected to the electrode, and a rewiring pattern integrally formed with the bumps. The rewiring pattern includes a bump area and a wiring area extending contiguously with the bump area.The insulating layer is formed to have a concave upper surface in an interval between the bumps, and the wiring area of the rewiring pattern is formed to fit that upper surface. The wiring area of the rewiring pattern is formed to be depressed toward the semiconductor substrate in relation to the bump area of the rewiring pattern.

摘要翻译： 在半导体模块中的半导体衬底的安装表面（特别是其外周）上形成用于半导体器件的电极。 为了确保电极之间的大间隙，在电极上形成绝缘层。 还形成有穿过绝缘层并连接到电极的多个凸块，以及与凸块一体形成的重新布线图案。 重新布线图案包括凸起区域和与凸起区域相邻延伸的布线区域。 绝缘层形成为具有在凸起之间的间隔中的凹的上表面，并且重新布线图案的布线区域形成为适合该上表面。 重布线图案的布线区域相对于重新布线图案的凸起区域形成为朝向半导体基板压下。

公开(公告)号：US07855452B2

公开(公告)日：2010-12-21

申请号：US12022865

申请日：2008-01-30

申请人： Yasuyuki Yanase ,  Yoshio Okayama ,  Kiyoshi Shibata ,  Yasunori Inoue ,  Hideki Mizuhara ,  Ryosuke Usui ,  Tetsuya Yamamoto ,  Masurao Yoshii

发明人： Yasuyuki Yanase ,  Yoshio Okayama ,  Kiyoshi Shibata ,  Yasunori Inoue ,  Hideki Mizuhara ,  Ryosuke Usui ,  Tetsuya Yamamoto ,  Masurao Yoshii

IPC分类号： H01L23/48 ,  H01L29/40

CPC分类号： H01L24/11 ,  H01L23/3114 ,  H01L23/525 ,  H01L24/94 ,  H01L2221/6834 ,  H01L2221/68359 ,  H01L2224/0231 ,  H01L2224/02319 ,  H01L2224/0401 ,  H01L2224/05124 ,  H01L2224/05147 ,  H01L2224/05166 ,  H01L2224/05181 ,  H01L2224/05647 ,  H01L2224/1132 ,  H01L2224/114 ,  H01L2224/116 ,  H01L2224/131 ,  H01L2224/13147 ,  H01L2224/274 ,  H01L2924/00013 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01057 ,  H01L2924/01059 ,  H01L2924/01073 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/14 ,  H01L2924/351 ,  H01L2224/13099 ,  H01L2924/00 ,  H01L2924/00014

摘要： An electrode for a semiconductor device is formed on the mounting surface (particularly, the outer periphery thereof) of a semiconductor substrate in a semiconductor module. In order to secure a large gap between the electrodes, an insulating layer is formed on the electrode. Also formed are a plurality of bumps penetrating the insulating layer and connected to the electrode, and a rewiring pattern integrally formed with the bumps. The rewiring pattern includes a bump area and a wiring area extending contiguously with the bump area.The insulating layer is formed to have a concave upper surface in an interval between the bumps, and the wiring area of the rewiring pattern is formed to fit that upper surface. The wiring area of the rewiring pattern is formed to be depressed toward the semiconductor substrate in relation to the bump area of the rewiring pattern.

摘要翻译： 在半导体模块中的半导体衬底的安装表面（特别是其外周）上形成用于半导体器件的电极。 为了确保电极之间的大间隙，在电极上形成绝缘层。 还形成有穿过绝缘层并连接到电极的多个凸块，以及与凸块一体形成的重新布线图案。 重新布线图案包括凸起区域和与凸起区域相邻延伸的布线区域。 绝缘层形成为具有在凸起之间的间隔中的凹的上表面，并且重新布线图案的布线区域形成为适合该上表面。 重布线图案的布线区域相对于重新布线图案的凸起区域形成为朝向半导体基板压下。

公开(公告)号：US08129846B2

公开(公告)日：2012-03-06

申请号：US12266907

申请日：2008-11-07

申请人： Tetsuya Yamamoto ,  Yoshio Okayama ,  Yasuyuki Yanase

发明人： Tetsuya Yamamoto ,  Yoshio Okayama ,  Yasuyuki Yanase

IPC分类号： H01L23/48 ,  H01L23/52 ,  H01L29/40

CPC分类号： H01L23/525 ,  H01L23/3114 ,  H01L24/11 ,  H01L24/12 ,  H01L2224/02311 ,  H01L2224/02319 ,  H01L2224/02351 ,  H01L2224/0401 ,  H01L2224/13022 ,  H01L2224/13099 ,  H01L2224/16 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01051 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/00

摘要： A board adapted to mount an electronic device includes an insulating resin layer, a wiring layer of a predetermined pattern provided on one surface of the insulating resin layer, a bump electrode provided on an insulating-resin-layer-side surface of the wiring layer, and a covering, formed of a metal layer, which covers a top surface of the bump electrode and a region, at a side surface of the bump electrode, continuous with the top surface excluding a region in contact with the wiring layer.

摘要翻译： 适于安装电子装置的板包括绝缘树脂层，设置在绝缘树脂层的一个表面上的预定图案的布线层，设置在布线层的绝缘树脂层侧表面上的凸块电极， 以及覆盖突起电极的顶面的金属层的覆盖物和突起电极的侧面的除了与布线层接触的区域之外的与顶面连续的区域。

公开(公告)号：US20110074025A1

公开(公告)日：2011-03-31

申请号：US12961171

申请日：2010-12-06

申请人： Yasuyuki Yanase ,  Yoshio Okayama ,  Kiyoshi Shibata ,  Yasunori Inoue ,  Hideki Mizuhara ,  Ryosuke Usui ,  Tetsuya Yamamoto ,  Masurao Yoshii

发明人： Yasuyuki Yanase ,  Yoshio Okayama ,  Kiyoshi Shibata ,  Yasunori Inoue ,  Hideki Mizuhara ,  Ryosuke Usui ,  Tetsuya Yamamoto ,  Masurao Yoshii

IPC分类号： H01L23/482 ,  H01L23/52

CPC分类号： H01L24/11 ,  H01L23/3114 ,  H01L23/525 ,  H01L24/94 ,  H01L2221/6834 ,  H01L2221/68359 ,  H01L2224/0231 ,  H01L2224/02319 ,  H01L2224/0401 ,  H01L2224/05124 ,  H01L2224/05147 ,  H01L2224/05166 ,  H01L2224/05181 ,  H01L2224/05647 ,  H01L2224/1132 ,  H01L2224/114 ,  H01L2224/116 ,  H01L2224/131 ,  H01L2224/13147 ,  H01L2224/274 ,  H01L2924/00013 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01057 ,  H01L2924/01059 ,  H01L2924/01073 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/14 ,  H01L2924/351 ,  H01L2224/13099 ,  H01L2924/00 ,  H01L2924/00014

摘要： An electrode for a semiconductor device is formed on the mounting surface (particularly, the outer periphery thereof) of a semiconductor substrate in a semiconductor module. In order to secure a large gap between the electrodes, an insulating layer is formed on the electrode. Also formed are a plurality of bumps penetrating the insulating layer and connected to the electrode, and a rewiring pattern integrally formed with the bumps. The rewiring pattern includes a bump area and a wiring area extending contiguously with the bump area. The insulating layer is formed to have a concave upper surface in an interval between the bumps, and the wiring area of the rewiring pattern is formed to fit that upper surface. The wiring area of the rewiring pattern is formed to be depressed toward the semiconductor substrate in relation to the bump area of the rewiring pattern.

摘要翻译： 在半导体模块中的半导体衬底的安装表面（特别是其外周）上形成用于半导体器件的电极。 为了确保电极之间的大间隙，在电极上形成绝缘层。 还形成有穿过绝缘层并连接到电极的多个凸块，以及与凸块一体形成的重新布线图案。 重新布线图案包括凸起区域和与凸起区域相邻延伸的布线区域。 绝缘层形成为具有在凸起之间的间隔中的凹的上表面，并且重新布线图案的布线区域形成为适合该上表面。 重布线图案的布线区域相对于重新布线图案的凸起区域形成为朝向半导体基板压下。

公开(公告)号：US20090196011A1

公开(公告)日：2009-08-06

申请号：US12364084

申请日：2009-02-02

申请人： Hajime KOBAYASHI ,  Yasuyuki Yanase ,  Tetsuya Yamamoto ,  Yoshio Okayama

发明人： Hajime KOBAYASHI ,  Yasuyuki Yanase ,  Tetsuya Yamamoto ,  Yoshio Okayama

IPC分类号： H05K7/00 ,  H05K1/11 ,  H01L21/306

CPC分类号： H01L23/49816 ,  H01L23/3114 ,  H01L24/03 ,  H01L24/06 ,  H01L24/13 ,  H01L2224/0231 ,  H01L2224/02313 ,  H01L2224/02319 ,  H01L2224/0233 ,  H01L2224/02351 ,  H01L2224/02377 ,  H01L2224/0401 ,  H01L2224/05548 ,  H01L2224/05567 ,  H01L2224/06051 ,  H01L2224/061 ,  H01L2224/13022 ,  H01L2224/16 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/14 ,  H01L2924/351 ,  H01L2924/00 ,  H01L2924/00012

摘要： A device mounting board includes: an insulating resin layer; a wiring layer disposed on one main surface of the insulating resin layer; and a bump electrode connected electrically to the wiring layer and protruding on a side of the insulating resin layer from the wiring layer. A side surface of the bump electrode is curved inwardly toward the center axis of the bump electrode as viewed in a cross section including the center axis of the bump electrode, and the radius of curvature of the side surface changes continuously from a wiring layer end to a head end of the bump electrode.

摘要翻译： 装置安装板包括：绝缘树脂层; 布置在所述绝缘树脂层的一个主表面上的布线层; 以及与布线层电连接并且在绝缘树脂层的与布线层一侧突出的突起电极。 凸起电极的侧表面在包括突起电极的中心轴的横截面中观察时朝向突起电极的中心轴线弯曲，并且侧表面的曲率半径从布线层端部连续变化到 凸起电极的头端。

公开(公告)号：US08362611B2

公开(公告)日：2013-01-29

申请号：US12679595

申请日：2008-09-25

申请人： Yasuyuki Yanase ,  Yoshio Okayama ,  Ryosuke Usui

发明人： Yasuyuki Yanase ,  Yoshio Okayama ,  Ryosuke Usui

IPC分类号： H01L23/488

CPC分类号： H01L24/11 ,  H01L2224/0231 ,  H01L2224/02313 ,  H01L2224/02319 ,  H01L2224/02333 ,  H01L2224/0236 ,  H01L2224/024 ,  H01L2224/0401 ,  H01L2224/13099 ,  H01L2224/16 ,  H01L2924/00013 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2224/29099 ,  H01L2924/00

摘要： A semiconductor module is of a structure such that a wiring layer, an insulating resin layer and a semiconductor device are stacked in this order by bonding them together with compression. In the wiring layer, bump electrodes each having a base and a tip portion are provided in positions corresponding respectively to device electrodes of the semiconductor device. The bump electrodes penetrate the insulating resin layer and are electrically coupled to the corresponding device electrodes.

摘要翻译： 半导体模块具有这样的结构，使得布线层，绝缘树脂层和半导体器件通过将它们压缩在一起而依次堆叠。 在布线层中，各自具有基底和尖端部分的凸起电极设置在分别对应于半导体器件的器件电极的位置。 凸块电极穿透绝缘树脂层并电耦合到相应的器件电极。