Thermal processing for three dimensional circuits
    7.
    发明授权
    Thermal processing for three dimensional circuits 有权
    三维电路热处理

    公开(公告)号:US06770939B2

    公开(公告)日:2004-08-03

    申请号:US10256116

    申请日:2002-09-26

    IPC分类号: H01L2976

    摘要: An apparatus including a circuit of n circuit levels formed over a substrate from a first level to a nth level, wherein n is greater than one, and each of the n circuit levels has a material parameter change that is at least in part caused by a thermal processing operation that is applied to more than one of the n circuit levels simultaneously. An apparatus including a circuit of a plurality of circuit levels, each of the plurality of circuit levels having substantially similar material parameters.

    摘要翻译: 一种包括在从第一电平到第n电平的衬底上形成的n个电路电平的电路的装置,其中n大于1,并且n个电路电平中的每一个具有材料参数变化,其至少部分地由 热处理操作同时应用于n个电路级中的一个以上。 一种包括多个电路电平的电路的装置,所述多个电路电平中的每一个具有基本相似的材料参数。