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公开(公告)号：US08062964B2
公开(公告)日：2011-11-22
申请号：US12853232
申请日：2010-08-09
申请人： Wen-Fa Tsai , Jyong-Fong Liao , Yen-Yu Chen , Chee Wee Liu , Chi-Fong Ai
发明人： Wen-Fa Tsai , Jyong-Fong Liao , Yen-Yu Chen , Chee Wee Liu , Chi-Fong Ai
IPC分类号： H01L21/26
CPC分类号： H01L31/1868 , Y02E10/50 , Y02P70/521
摘要： The present disclosure passivates solar cell defects. Plasma immersion ion implantation (PIII) is used to repair the defects during or after making the solar cell. Hydrogen ion is implanted into absorption layer with different sums of energy to fill gaps of defects or surface recombination centers. Thus, solar cell defects are diminished and carriers are transferred with improved photovoltaic conversion efficiency.
摘要翻译： 本公开钝化太阳能电池缺陷。 在制造太阳能电池期间或之后，使用等离子体浸没离子注入（PIII）来修复缺陷。 将氢离子注入到具有不同的能量之和的吸收层中以填充缺陷或表面复合中心的间隙。 因此，太阳能电池缺陷减少，并且载流子随着光伏转换效率的提高而被转移。
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公开(公告)号：US20110053351A1
公开(公告)日：2011-03-03
申请号：US12853232
申请日：2010-08-09
申请人： Wen-Fa Tsai , Jyong-Fong Liao , Yen-Yu Chen , Chee Wee Liu , Chi-Fong Ai
发明人： Wen-Fa Tsai , Jyong-Fong Liao , Yen-Yu Chen , Chee Wee Liu , Chi-Fong Ai
IPC分类号： H01L21/30
CPC分类号： H01L31/1868 , Y02E10/50 , Y02P70/521
摘要： The present disclosure passivates solar cell defects. Plasma immersion ion implantation (PIII) is used to repair the defects during or after making the solar cell. Hydrogen ion is implanted into absorption layer with different sums of energy to fill gaps of defects or surface recombination centers. Thus, solar cell defects are diminished and carriers are transferred with improved photovoltaic conversion efficiency.
摘要翻译： 本公开钝化太阳能电池缺陷。 在制造太阳能电池期间或之后，使用等离子体浸没离子注入（PIII）来修复缺陷。 将氢离子注入到具有不同的能量之和的吸收层中以填充缺陷或表面复合中心的间隙。 因此，太阳能电池缺陷减少，并且载流子随着光伏转换效率的提高而被转移。
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3.发明授权Method for hydrophobic and oleophobic modification of polymeric materials with atmospheric plasmas 失效具有大气等离子体的聚合材料疏水和疏油改性的方法公开(公告)号：US08414980B2
公开(公告)日：2013-04-09
申请号：US12545664
申请日：2009-08-21
申请人： Tien-Hsiang Hsueh , Mien-Win Wu , Chi-Fong Ai
发明人： Tien-Hsiang Hsueh , Mien-Win Wu , Chi-Fong Ai
IPC分类号： C08J7/18
CPC分类号： B05D3/142 , C08J7/18 , C08J2427/12 , D06M10/025 , D06M14/18 , D06M14/22 , D06M14/26 , D06M14/28 , D06M14/32 , D06M14/34 , D06M2200/11 , D06M2200/12
摘要： A method of fabricating hydrophobic and oleophobic polymer fabric through two stages of modification using atmospheric plasmas including (a) moving a substrate into an atmospheric plasma area, generating an atmospheric filamentary discharge plasma with a first plasma working gas to obtain a first rough surface of said substrate, (b) exposing plasma treated substrate to air to obtain highly active peroxide on said first rough surface of said substrate, (c) immersing said substrate in a solution of fluorocarbon compound and processing a first stage of graft of a fluorocarbon monomer or oligomer on said substrate to obtain a grafted fluorocarbon monomer or oligomer layer on said first rough surface of said substrate, (d) processing a second stage of graft a fluorocarbon functional group to said grafted fluorocarbon monomer or oligomer layer by generating a carbon tetrafluoride plasma from a second plasma working gas and irradiating said carbon tetrafluoride plasma on said grafted fluorocarbon monomer or oligomer layer; and (e) curing and drying said substrate.
摘要翻译： 一种通过使用大气等离子体的两个阶段的修饰制造疏水和疏油聚合物织物的方法，包括：（a）将基底移动到大气等离子体区域，用第一等离子体工作气体产生大气丝状放电等离子体，以获得所述 （b）将等离子体处理的基板暴露于空气中以在所述基板的所述第一粗糙表面上获得高活性过氧化物，（c）将所述基材浸入氟碳化合物溶液中，并处理氟碳单体或低聚物的第一接枝段 在所述基板上在所述基板的所述第一粗糙表面上获得接枝的碳氟单体或低聚物层，（d）通过从所述基板上生成碳氟化合物单体或低聚物层， 第二等离子体工作气体，并且在所述接枝的氟碳上照射所述四氟化碳等离子体 单体或低聚物层; 和（e）固化和干燥所述基材。
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4.发明申请Method and apparatus for glow discharge plasma treatment of flexible material at atmospheric pressure 审中-公开用于在大气压力下对柔性材料进行辉光放电等离子体处理的方法和装置公开(公告)号：US20070154650A1
公开(公告)日：2007-07-05
申请号：US11320609
申请日：2005-12-30
CPC分类号： H01J37/32825 , B29C59/14 , H01J37/32348 , H01J37/3244 , H01J37/3277 , H05H1/2406 , H05H2001/2412 , H05H2240/10
摘要： Abstract of the disclosure The present invention provides a method and an apparatus for a glow discharge plasma surface treatment of flexible sheet materials under atmospheric pressure. The apparatus comprises electrodes, a single plasma-gas flow channel, uniform gas inlet-and-outlet devices, gas-seal devices for the horizontal movements of sheet materials and reel devices, so as to attain an uniform distribution of plasma gases in the gap between electrodes. As a result, not only a great amount of expensive plasma gas is saved, but also an uniform glow discharge plasma is generated at the lowest input power to obtain a good quality of uniform plasma treatment with continuous processing and high production.
摘要翻译： 发明内容本发明提供一种用于在大气压下对柔性片材进行辉光放电等离子体表面处理的方法和装置。 该装置包括电极，单个等离子体气体流动通道，均匀的气体入口和出口装置，用于片材和卷轴装置的水平运动的气体密封装置，以便获得等离子体气体在间隙中的均匀分布 电极之间。 结果，不仅节省了大量昂贵的等离子体气体，而且在最低输入功率下产生均匀的辉光放电等离子体，以通过连续加工和高产量获得均匀等离子体处理的良好质量。
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公开(公告)号：US20100075510A1
公开(公告)日：2010-03-25
申请号：US12237902
申请日：2008-09-25
申请人： Der-Jun JAN , Chi-Fong Ai
发明人： Der-Jun JAN , Chi-Fong Ai
IPC分类号： H01L21/31
CPC分类号： H01L21/31604 , C23C16/405 , C23C16/515 , H01L21/02186 , H01L21/0228 , H01L21/3141
摘要： A method for pulsed plasma deposition of titanium dioxide film is revealed. The method includes the steps of: (1) set a substrate into a chamber and the chamber is pumped down to a certain vacuum level. (2) Introduce titanium tetraisopropoxide gas and gas containing oxygen into the chamber and a RF (radio frequency) pulse power supply is turned on to create a glow discharge for generating pulsed plasma. (3) A layer of titanium dioxide film is deposited on the substrate by the pulsed plasma. The TiO2 film is deposited on a substrate such as plastic substrate at low temperature according to the method so that the heat-resistant and conductive requirements of conventional substrates are removed.
摘要翻译： 揭示了二氧化钛膜脉冲等离子体沉积的方法。 该方法包括以下步骤：（1）将衬底设置到腔室中，并将腔室泵送到一定的真空度。 （2）将四异丙醇钛气体和含氧气体引入室内，接通RF（射频）脉冲电源，产生用于产生脉冲等离子体的辉光放电。 （3）通过脉冲等离子体在基板上沉积一层二氧化钛膜。 根据该方法，TiO 2膜在低温下沉积在诸如塑料基板的基板上，从而去除常规基板的耐热和导电要求。
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6.发明申请Protective coating method of pervoskite structure for SOFC interconnection 审中-公开用于SOFC互连的渗碳体结构的保护涂层方法公开(公告)号：US20080047826A1
公开(公告)日：2008-02-28
申请号：US11508236
申请日：2006-08-23
申请人： Chi-Ting Lin , Der-Jun Jan , Chi-Fong Ai
发明人： Chi-Ting Lin , Der-Jun Jan , Chi-Fong Ai
IPC分类号： C23C14/00
CPC分类号： C23C14/0036 , C23C14/088 , H01M8/0217 , H01M2008/1293
摘要： A protective coating is formed on a stainless interconnecting plate used in solid oxide fuel cell (SOFC). With the protective coating, a contact resistance of the plate is effectively lowered. Anode and cathode of SOFC are also prevented from being poisoned by chromium diffusion from the plate. Therefore, after a long time of use under a high temperature, a degradation rate for power generating of SOFC is reduced; and, thus, a working hour is prolonged. Hence, the SOFC can be mass-produced and large-scaled.
摘要翻译： 在固体氧化物燃料电池（SOFC）中使用的不锈钢互连板上形成保护涂层。 通过保护涂层，板的接触电阻被有效地降低。 还防止了SOFC的阳极和阴极被来自板的铬扩散而中毒。 因此，在高温下长时间使用后，SOFC发电的降解率降低; 因此，工作时间延长。 因此，SOFC可以批量生产和大规模生产。
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公开(公告)号：US20110192348A1
公开(公告)日：2011-08-11
申请号：US12701035
申请日：2010-02-05
CPC分类号： C23C16/509 , H01J37/3244 , H01J37/32596
摘要： An RF hollow cathode plasma source consists of a vacuum chamber, a pipe, a hollow cathode, at least two compartments, a conduit and input electrodes. The pipe is inserted into the chamber for introducing working gas into the chamber. The hollow cathode is disposed in the chamber and formed with a large number of apertures. At least two compartments are located below the hollow cathode. Each of the compartments includes small apertures for uniformly spreading the working gas into the apertures of the hollow cathode. The conduit is disposed along two sides of the hollow cathode to circulate cooling water around the hollow cathode. The plural input power leads are arranged near the hollow cathode. The input power leads, the pipe and the conduits are connected to the hollow cathode though the electrically-insulated walls of the grounded vacuum chamber.
摘要翻译： RF空心阴极等离子体源由真空室，管，中空阴极，至少两个隔室，导管和输入电极组成。 将管插入腔室中以将工作气体引入腔室。 中空阴极设置在室中并形成有大量孔。 至少两个隔室位于空心阴极的下面。 每个隔室包括用于将工作气体均匀地分散到中空阴极的孔中的小孔。 导管沿空心阴极的两侧设置，以将冷却水循环在中空阴极周围。 多个输入电源引线设置在中空阴极附近。 输入功率引线，管道和导管通过接地真空室的电绝缘壁连接到空心阴极。
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公开(公告)号：US20110088766A1
公开(公告)日：2011-04-21
申请号：US12726930
申请日：2010-03-18
申请人： Min-Chuan Wang , Yong-Zhi Chen , Der-Jun Jan , Chi-Fong Ai
发明人： Min-Chuan Wang , Yong-Zhi Chen , Der-Jun Jan , Chi-Fong Ai
IPC分类号： H01L31/0224 , H01L31/18
CPC分类号： H01L31/07 , H01L31/056 , Y02E10/52
摘要： A thin-film photovoltaic device comprising at least: a substrate, a transparent electrode layer, a p-type semiconductor as the ohmic contact layer, an intrinsic semiconductor as the light absorption layer, and a magnesium alloy substituted for the n-type semiconductor as the other ohmic contact layer. A method for manufacturing the thin-film photovoltaic device is also provided in the present invention.
摘要翻译： 一种薄膜光伏器件，至少包括：基板，透明电极层，作为欧姆接触层的p型半导体，作为光吸收层的本征半导体，以及代替n型半导体的镁合金 另一个欧姆接触层。 本发明还提供了薄膜光伏器件的制造方法。
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公开(公告)号：US20110041766A1
公开(公告)日：2011-02-24
申请号：US12732753
申请日：2010-03-26
IPC分类号： C23C16/513
CPC分类号： H01J37/3266 , H01J37/3211 , H01J37/32174 , H01J37/32357
摘要： A plasma source comprises a vacuum chamber, a plurality of discharge tubes, a plurality of permanent magnets, a plurality of RF antennas, and an RF power distribution circuit. The RF power distribution circuit is electrically coupled to an RF power supply and each of the plurality of RF antennas. The lengths of the transmission paths between each of the plurality of RF antennas and the RF power supply are the same, so that the RF power supply can provide each of discharge tubes with the same RF power.
摘要翻译： 等离子体源包括真空室，多个放电管，多个永磁体，多个RF天线和RF功率分配电路。 RF功率分配电路电耦合到RF电源和多个RF天线中的每一个。 多个RF天线中的每一个和RF电源之间的传输路径的长度相同，使得RF电源可以为每个放电管提供相同的RF功率。
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公开(公告)号：US20080105657A1
公开(公告)日：2008-05-08
申请号：US11592237
申请日：2006-11-03
申请人： Jin-Yu Wu , Ming-Ruesy Tsai , Shang-Feng Huang , Ding-Guey Tsai , Shin-Wu Wei , Chi-Fong Ai
发明人： Jin-Yu Wu , Ming-Ruesy Tsai , Shang-Feng Huang , Ding-Guey Tsai , Shin-Wu Wei , Chi-Fong Ai
IPC分类号： C25D17/16
CPC分类号： H01J37/32871 , H01J37/32055 , H01J37/32623 , H01J2237/022
摘要： A plasma source is designed with a starting rod to reduce target vapor shielding. A curve ion duct has reverse thorns on its inner wall to filter macroparticles in plasma. The curve ion duct has duct segments and each duct segment has an individual electricity. The present invention increases ion amount, acquires a film through high energy ions, and obtains enhanced film adhesion and film quality.
摘要翻译： 等离子体源设计有起始杆以减少目标蒸气屏蔽。 曲线离子管在其内壁上具有反向刺，以在等离子体中过滤大颗粒。 曲线离子管道具有管道段，每个管道段具有单独的电力。 本发明增加离子量，通过高能离子获得膜，并且获得增强的膜附着力和膜质量。
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