公开(公告)号：US07709951B2

公开(公告)日：2010-05-04

申请号：US11687037

申请日：2007-03-16

申请人： William L. Brodsky ,  Peter J. Brofman ,  James A. Busby ,  Bruce J. Chamberlin ,  Scott A. Cummings ,  David L. Edwards ,  Thomas J. Fleischman ,  Michael J. Griffin, IV ,  Sushumna Iruvanti ,  David C. Long ,  Jennifer V. Muncy ,  Robin A. Susko

发明人： William L. Brodsky ,  Peter J. Brofman ,  James A. Busby ,  Bruce J. Chamberlin ,  Scott A. Cummings ,  David L. Edwards ,  Thomas J. Fleischman ,  Michael J. Griffin, IV ,  Sushumna Iruvanti ,  David C. Long ,  Jennifer V. Muncy ,  Robin A. Susko

IPC分类号： H01L23/34 ,  H01L23/495 ,  H01L23/48

CPC分类号： H01L23/42 ,  H01L23/433 ,  H01L2224/16 ,  H01L2224/73253 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01079 ,  H01L2924/16152 ,  H01L2924/3511 ,  H01L2224/0401

摘要： Methods, apparatus and assemblies for enhancing heat transfer in electronic components using a flexible thermal pillow. The flexible thermal pillow has a thermally conductive material sealed between top and bottom conductive layers, with the bottom layer having a flexible reservoir residing on opposing sides of a central portion of the pillow that has a gap. The pillow may have roughened internal surfaces to increase an internal surface area within the pillow for enhanced heat dissipation. In an electronic assembly, the central portion of the pillow resides between a heat sink and heat-generating component for the thermal coupling there-between. During thermal cycling, the flexible reservoir of the pillow expands to retain thermally conductive material extruded from the gap, and then contracts to force such extruded material back into the gap. An external pressure source may contact the pillow for further forcing the extruded thermally conductive material back into the gap.

摘要翻译： 使用柔性热枕头增强电子部件传热的方法，装置和组件。 柔性热枕头具有密封在顶部和底部导电层之间的导热材料，底层具有位于枕头的中心部分的具有间隙的相对侧上的柔性容器。 枕头可能具有粗糙的内表面以增加枕头内的内表面积，以增强散热。 在电子组件中，枕头的中心部分位于散热器和用于其之间的热耦合的发热部件之间。 在热循环期间，枕头的柔性储存器膨胀以保持从间隙挤出的导热材料，然后收缩以迫使这种挤出的材料回到间隙中。 外部压力源可以接触枕头，以进一步迫使挤出的导热材料回到间隙中。

公开(公告)号：US20080225484A1

公开(公告)日：2008-09-18

申请号：US11687037

申请日：2007-03-16

申请人： William L. Brodsky ,  Peter J. Brofman ,  James A. Busby ,  Bruce J. Chamberlin ,  Scott A. Cummings ,  David L. Edwards ,  Thomas J. Fleischman ,  Michael J. Griffin ,  Sushumna Iruvanti ,  David C. Long ,  Jennifer V. Muncy ,  Robin A. Susko

发明人： William L. Brodsky ,  Peter J. Brofman ,  James A. Busby ,  Bruce J. Chamberlin ,  Scott A. Cummings ,  David L. Edwards ,  Thomas J. Fleischman ,  Michael J. Griffin ,  Sushumna Iruvanti ,  David C. Long ,  Jennifer V. Muncy ,  Robin A. Susko

IPC分类号： H05K7/20

CPC分类号： H01L23/42 ,  H01L23/433 ,  H01L2224/16 ,  H01L2224/73253 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01079 ,  H01L2924/16152 ,  H01L2924/3511 ,  H01L2224/0401

摘要： Methods, apparatus and assemblies for enhancing heat transfer in electronic components using a flexible thermal pillow. The flexible thermal pillow has a thermally conductive material sealed between top and bottom conductive layers, with the bottom layer having a flexible reservoir residing on opposing sides of a central portion of the pillow that has a gap. The pillow may have roughened internal surfaces to increase an internal surface area within the pillow for enhanced heat dissipation. In an electronic assembly, the central portion of the pillow resides between a heat sink and heat-generating component for the thermal coupling there-between. During thermal cycling, the flexible reservoir of the pillow expands to retain thermally conductive material extruded from the gap, and then contracts to force such extruded material back into the gap. An external pressure source may contact the pillow for further forcing the extruded thermally conductive material back into the gap.

摘要翻译： 使用柔性热枕头增强电子部件传热的方法，装置和组件。 柔性热枕头具有密封在顶部和底部导电层之间的导热材料，底层具有位于枕头的中心部分的具有间隙的相对侧上的柔性容器。 枕头可能具有粗糙的内表面以增加枕头内的内表面积，以增强散热。 在电子组件中，枕头的中心部分位于散热器和用于其之间的热耦合的发热部件之间。 在热循环期间，枕头的柔性储存器膨胀以保持从间隙挤出的导热材料，然后收缩以迫使这种挤出的材料回到间隙中。 外部压力源可以接触枕头，以进一步迫使挤出的导热材料回到间隙中。

公开(公告)号：US07239516B2

公开(公告)日：2007-07-03

申请号：US10939230

申请日：2004-09-10

申请人： David C. Long ,  Glenn G. Daves ,  David L. Edwards ,  Ronald L. Hering ,  Sushumna Iruvanti ,  Kenneth C. Marston ,  Jason S. Miller

发明人： David C. Long ,  Glenn G. Daves ,  David L. Edwards ,  Ronald L. Hering ,  Sushumna Iruvanti ,  Kenneth C. Marston ,  Jason S. Miller

IPC分类号： H05K7/20

CPC分类号： H01L23/4006 ,  H01L2924/0002 ,  H01L2924/00

摘要： A flexible plate for securing a microchip surface to the surface of a cooling device. The flexible plate allows for z-directional movement between the microchip subassembly having a circuit board and a semiconductor substrate, and the cooling device. The flexible plate is a compact, single piece design that provides constraints in alignment in the x-, y-, and theta-directions, while allowing for z-direction compliance and tilt compliance. The flexible plate has tabs for mounting the microchip subassembly and tabs for mounting the cooling device. The microchip tabs are opposite one another and the cooling device mounting tabs are opposite one another. The flexible plate is a one-piece construction made from sheet metal, plastic, or metal castings. The flexible plate has a band with all the tabs mounted on the inside of the band, or one set of tabs mounted on the outside of the band.

摘要翻译： 用于将微芯片表面固定到冷却装置的表面的柔性板。 柔性板允许具有电路板的微芯片组件和半导体衬底之间的z方向运动以及冷却装置。 柔性板是一种紧凑的单件设计，可在x轴，y轴和θ轴方向上对齐，同时允许z方向顺应性和倾斜顺应性。 柔性板具有用于安装用于安装冷却装置的微芯片组件和突出部的突片。 微芯片接头彼此相对，并且冷却装置安装接头彼此相对。 柔性板是由金属板，塑料或金属铸件制成的一体式结构。 柔性板具有带子，其中所有突片安装在带的内部，或者一组安装在带的外侧上的突片。

公开(公告)号：US07268428B2

公开(公告)日：2007-09-11

申请号：US11160997

申请日：2005-07-19

申请人： David L. Edwards ,  Sushumna Iruvanti ,  Hilton T. Toy ,  Wei Zou

发明人： David L. Edwards ,  Sushumna Iruvanti ,  Hilton T. Toy ,  Wei Zou

IPC分类号： H01L23/34

CPC分类号： H01L23/04 ,  H01L23/10 ,  H01L23/3675 ,  H01L23/42 ,  H01L24/32 ,  H01L2224/16225 ,  H01L2224/26175 ,  H01L2224/27013 ,  H01L2224/32245 ,  H01L2224/73253 ,  H01L2224/83051 ,  H01L2224/83385 ,  H01L2924/01005 ,  H01L2924/01013 ,  H01L2924/01033 ,  H01L2924/16152 ,  H01L2924/16153 ,  H01L2924/1616 ,  Y10S257/924

摘要： A semiconductor module structure and a method of forming the semiconductor module structure are disclosed. The structure incorporates a die mounted on a substrate and covered by a lid. A thermal compound is disposed within a thermal gap between the die and the lid. A barrier around the periphery of the die extends between the lid and the substrate, contains the thermal compound, and flexes in response to expansion and contraction of both the substrate and the lid during cycling of the semiconductor module. More particularly, either the barrier is formed of a flexible material or has a flexible connection to the substrate and/or to the lid. The barrier effectively contains the thermal compound between the die and the lid and, thereby, provides acceptable and controlled coverage of the thermal compound over the die for heat removal.

摘要翻译： 公开了半导体模块结构和形成半导体模块结构的方法。 该结构包括安装在基板上并被盖子覆盖的模具。 热化合物设置在模具和盖子之间的热间隙内。 围绕模具周边的屏障在盖和基板之间延伸，包含热化合物，并且在半导体模块循环期间响应于基板和盖的膨胀和收缩而弯曲。 更具体地，屏障由柔性材料形成或具有与基底和/或盖的柔性连接。 屏障有效地包含了模具和盖子之间的热化合物，从而提供可靠和可控的覆盖模具上的热化合物以进行散热。

公开(公告)号：US06444496B1

公开(公告)日：2002-09-03

申请号：US09619886

申请日：2000-07-20

申请人： David L. Edwards ,  Glenn G. Daves ,  Shaji Farooq ,  Sushumna Iruvanti ,  Frank L. Pompeo

发明人： David L. Edwards ,  Glenn G. Daves ,  Shaji Farooq ,  Sushumna Iruvanti ,  Frank L. Pompeo

IPC分类号： H01L2144

CPC分类号： H05K7/20454 ,  H01L23/42 ,  H01L2224/16225 ,  H01L2224/73253 ,  H01L2924/16152

摘要： The present invention relates generally to a new apparatus and method for introducing thermal paste into semiconductor packages. More particularly, the invention encompasses an apparatus and a method that uses at least one preform of thermal paste for the cooling of at least one chip in a sealed semiconductor package. The thermal paste preform is subcooled, and is transferred onto a module component from a separable transfer sheet, or is placed onto the module component using an attached and/or imbedded mesh. The preform of thermal paste may be of simple or complex shape, and enables cooling of one or more chips in a module.

摘要翻译： 本发明一般涉及将热膏引入半导体封装的新设备和方法。 更具体地说，本发明包括使用至少一个热糊状物预制件来冷却密封半导体封装中的至少一个芯片的装置和方法。 将热糊预制件过冷，并从可分离转印片材转移到模块组件上，或者使用附接和/或嵌入的网格放置在模块部件上。 热糊状物的预制件可以是简单或复杂的形状，并且能够冷却模块中的一个或多个芯片。

公开(公告)号：US06214647B1

公开(公告)日：2001-04-10

申请号：US09159239

申请日：1998-09-23

申请人： Giulio Di Giacomo ,  Stephen S. Drofitz, Jr. ,  David L. Edwards ,  Sushumna Iruvanti ,  David J. Womac

发明人： Giulio Di Giacomo ,  Stephen S. Drofitz, Jr. ,  David L. Edwards ,  Sushumna Iruvanti ,  David J. Womac

IPC分类号： H01L2144

CPC分类号： H01L23/4338 ,  H01L2224/16 ,  H01L2224/73253 ,  H01L2924/09701

摘要： A method and structure for thermally connecting a thermal conductor to at least one chip, the thermal conductor including a lower surface and at least one piston extending from the lower surface corresponding to each of the chips, each of the chips having an upper surface opposing each of the pistons, the chips being mounted on a substrate, the method comprising steps of metalizing the lower surface of the thermal conductor and the pistons, applying a solder to the lower surface of the thermal conductor, applying a thermal paste between the upper surface of the chips and the pistons, positioning the substrate and the thermal conductor such that the substrate is aligned with the thermal conductor, biasing the thermal conductor toward the substrate, biasing the pistons toward the chips such that the thermal paste has a consistent thickness between each of the chips and the pistons, reflowing the solder, such that the solder bonds the substrate to the thermal conductor and the pistons form a metallurgical bond with the thermal conductor, wherein after the reflowing step, the pistons and the thermal conductor form a unitary structure for maintaining the consistent thickness of the thermal paste between each of the chips and the pistons which achieves a considerably thinner thermal paste layer and greater thermal conduction.

摘要翻译： 一种用于将热导体热连接到至少一个芯片的方法和结构，所述热导体包括下表面和从与每个芯片对应的下表面延伸的至少一个活塞，每个芯片具有与每个芯片相对的上表面 的活塞，所述芯片安装在基板上，所述方法包括以下步骤：使所述导热体和所述活塞的下表面金属化，向所述导热体的下表面施加焊料，在所述导热体的上表面 芯片和活塞，定位衬底和热导体，使得衬底与热导体对准，将热导体偏压朝向衬底，将活塞偏压到芯片，使得热膏在每个之间具有一致的厚度 芯片和活塞，回流焊料，使得焊料将基板粘合到热导体和活塞上 与热导体进行冶金结合，其中在回流步骤之后，活塞和热导体形成整体结构，用于保持每个芯片和活塞之间的热粘合剂的厚度一致，其实现相当薄的热糊层，并且 更大的热传导。

公开(公告)号：US5604978A

公开(公告)日：1997-02-25

申请号：US455463

申请日：1995-05-31

申请人： Raed A. Sherif ,  Mark G. Courtney ,  David L. Edwards ,  Albert J. Fahey ,  Gregory S. Hopper ,  Sushumna Iruvanti ,  Charles F. Jones ,  Gaetano P. Messina

发明人： Raed A. Sherif ,  Mark G. Courtney ,  David L. Edwards ,  Albert J. Fahey ,  Gregory S. Hopper ,  Sushumna Iruvanti ,  Charles F. Jones ,  Gaetano P. Messina

IPC分类号： H01L23/373 ,  H01L23/42 ,  H01L23/64 ,  H01L25/065 ,  H05K3/34

CPC分类号： H01L24/32 ,  H01L23/3737 ,  H01L23/42 ,  H01L23/642 ,  H01L25/0655 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/27013 ,  H01L2224/32245 ,  H01L2224/73253 ,  H01L2224/73257 ,  H01L2224/83051 ,  H01L2224/83385 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01033 ,  H01L2924/01075 ,  H01L2924/14 ,  H01L2924/16152 ,  H01L2924/19041 ,  Y10T29/49144

摘要： The present invention relates generally to a new apparatus and method for customized cooling of chips using a plurality of thermally conductive materials. More particularly, the invention encompasses an apparatus and a method that provides customized cooling of a MCM (Multi-Chip Module) by using a plurality of thermally conductive materials.

摘要翻译： 本发明一般涉及使用多种导热材料定制冷却芯片的新设备和方法。 更具体地，本发明包括通过使用多种导热材料提供MCM（多芯片模块）的定制冷却的装置和方法。

公开(公告)号：US08531025B2

公开(公告)日：2013-09-10

申请号：US11755019

申请日：2007-05-30

申请人： David L. Edwards ,  Sushumna Iruvanti ,  Hilton T. Toy ,  Wei Zou

发明人： David L. Edwards ,  Sushumna Iruvanti ,  Hilton T. Toy ,  Wei Zou

IPC分类号： H01L23/34

CPC分类号： H01L23/04 ,  H01L23/10 ,  H01L23/3675 ,  H01L23/42 ,  H01L24/32 ,  H01L2224/16225 ,  H01L2224/26175 ,  H01L2224/27013 ,  H01L2224/32245 ,  H01L2224/73253 ,  H01L2224/83051 ,  H01L2224/83385 ,  H01L2924/01005 ,  H01L2924/01013 ,  H01L2924/01033 ,  H01L2924/16152 ,  H01L2924/16153 ,  H01L2924/1616 ,  Y10S257/924

摘要： A semiconductor module structure and a method of forming the semiconductor module structure are disclosed. The structure incorporates a die mounted on a substrate and covered by a lid. A thermal compound is disposed within a thermal gap between the die and the lid. A barrier around the periphery of the die extends between the lid and the substrate, contains the thermal compound, and flexes in response to expansion and contraction of both the substrate and the lid during cycling of the semiconductor module. More particularly, either the barrier is formed of a flexible material or has a flexible connection to the substrate and/or to the lid. The barrier effectively contains the thermal compound between the die and the lid and, thereby, provides acceptable and controlled coverage of the thermal compound over the die for heat removal.

摘要翻译： 公开了半导体模块结构和形成半导体模块结构的方法。 该结构包括安装在基板上并被盖子覆盖的模具。 热化合物设置在模具和盖子之间的热间隙内。 围绕模具周边的屏障在盖和基板之间延伸，包含热化合物，并且在半导体模块循环期间响应于基板和盖的膨胀和收缩而弯曲。 更具体地，屏障由柔性材料形成或具有与基底和/或盖的柔性连接。 屏障有效地包含了模具和盖子之间的热化合物，从而提供可靠和可控的覆盖模具上的热化合物以进行散热。

公开(公告)号：US5981310A

公开(公告)日：1999-11-09

申请号：US12071

申请日：1998-01-22

申请人： Giulio DiGiacomo ,  Stephen S. Drofitz, Jr. ,  David L. Edwards ,  Larry D. Gross ,  Sushumna Iruvanti ,  Raed A. Sherif ,  Subhash L. Shinde ,  David J. Womac ,  David B. Goland ,  Lester W. Herron

发明人： Giulio DiGiacomo ,  Stephen S. Drofitz, Jr. ,  David L. Edwards ,  Larry D. Gross ,  Sushumna Iruvanti ,  Raed A. Sherif ,  Subhash L. Shinde ,  David J. Womac ,  David B. Goland ,  Lester W. Herron

IPC分类号： H01L23/433 ,  H01L25/065 ,  H01L21/44 ,  H01L21/48 ,  H01L21/50

CPC分类号： H01L23/433 ,  H01L24/83 ,  H01L25/0655 ,  H01L2224/16225 ,  H01L2224/29111 ,  H01L2224/32245 ,  H01L2224/73253 ,  H01L2224/83193 ,  H01L2224/83801 ,  H01L2924/01004 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/0132 ,  H01L2924/01322 ,  H01L2924/01327 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/157 ,  H01L2924/15724 ,  H01L2924/15788 ,  H01L2924/16152 ,  H01L2924/16251

摘要： A multi-chip module and heat-sink cap assembly and method of fabrication, which provides sufficient cooling for higher power density chips. The heat-sink cap has heat-sink columns disposed over each chip on a substrate. The heat-sink columns are interconnected by flexible members to provide a unitary cover. Thin film metallization of at least a portion of the mating surfaces of the substrate, chips and heat-sink column permits soldering of the cap to the chips and substrate to form the package which is a mechanically stable structure with no degradation of interconnection fatigue life due to thermal cycling of the assembly when in use.

摘要翻译： 一种多芯片模块和散热帽组件及其制造方法，为更高功率密度的芯片提供足够的冷却。 散热器盖具有设置在基板上的每个芯片上的散热柱。 散热柱通过柔性构件相互连接，以提供整体盖。 衬底，芯片和散热柱的配合表面的至少一部分的薄膜金属化允许将帽焊接到芯片和衬底以形成封装，其是机械稳定的结构，而不会降低互连疲劳寿命 在使用时对组件进行热循环。

公开(公告)号：US5881944A

公开(公告)日：1999-03-16

申请号：US846929

申请日：1997-04-30

申请人： David L. Edwards ,  Armando S. Cammarano ,  Jeffrey T. Coffin ,  Mark G. Courtney ,  Stephen S. Drofitz, Jr. ,  Michael J. Ellsworth, Jr. ,  Lewis S. Goldmann ,  Sushumna Iruvanti ,  Frank L. Pompeo ,  William E. Sablinski ,  Raed A. Sherif ,  Hilton T. Toy

发明人： David L. Edwards ,  Armando S. Cammarano ,  Jeffrey T. Coffin ,  Mark G. Courtney ,  Stephen S. Drofitz, Jr. ,  Michael J. Ellsworth, Jr. ,  Lewis S. Goldmann ,  Sushumna Iruvanti ,  Frank L. Pompeo ,  William E. Sablinski ,  Raed A. Sherif ,  Hilton T. Toy

IPC分类号： B23K35/02 ,  B23K35/26 ,  H01L23/10 ,  B23K31/02 ,  B23K35/22

CPC分类号： H01L23/10 ,  B23K35/0238 ,  B23K35/26 ,  B23K2201/40 ,  H01L2224/16 ,  H01L2224/73253 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/09701 ,  H01L2924/15312 ,  H01L2924/16152 ,  H01L2924/163 ,  Y10T428/12361

摘要： The present invention relates generally to a new scheme of providing a seal band for semi-conductor substrates and chip carriers. More particularly, the invention encompasses a structure and a method that uses a multi-layer metallic seal to provide protection to chips on a chip carrier. This multi-layer metal seal provides both enhanced hermeticity lifetime and environmental protection. For the preferred embodiment the multi-layer metallic seal band is a three layer, solder sandwich structure which is used to create a low cost, high reliability, hermetic seal for the module. This solder sandwich has a high melting temperature thick solder inner core, and lower melting point thin interconnecting solder layers, where the thin interconnecting solder layers may have similar or different melting points.

摘要翻译： 本发明一般涉及为半导体衬底和芯片载体提供密封带的新方案。 更具体地，本发明包括使用多层金属密封件来为芯片载体上的芯片提供保护的结构和方法。 这种多层金属密封提供增强的气密寿命和环境保护。 对于优选实施例，多层金属密封带是用于为模块产生低成本，高可靠性气密密封的三层焊料夹层结构。 该焊料夹层具有较高的熔化温度较厚的焊料内芯和较低熔点的薄互连焊料层，其中薄的互连焊料层可具有相似或不同的熔点。