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1.发明授权公开(公告)号：US06447636B1
公开(公告)日：2002-09-10
申请号：US09505578
申请日：2000-02-16
申请人： Xue-Yu Qian , Zhi-Wen Sun , Maocheng Li , John Holland , Arthur H. Sato , Valentin N. Todorov , Patrick L. Leahey , Robert E. Ryan
发明人： Xue-Yu Qian , Zhi-Wen Sun , Maocheng Li , John Holland , Arthur H. Sato , Valentin N. Todorov , Patrick L. Leahey , Robert E. Ryan
IPC分类号： H05H100
CPC分类号： H01J37/32009 , H01J37/32082 , H01J37/3299 , H05H1/46
摘要： The invention provides a system and a method for dynamic RF inductive and capacitive coupling control to improve plasma substrate processing, as well as for achieving contamination and defect reduction. A plasma reactor includes a substrate support disposed in a chamber. An RF coil is disposed adjacent the chamber for inductively coupling RF energy into the chamber. An electrode is disposed adjacent the chamber and has a voltage for capacitively coupling energy into the chamber. The electrode is spaced from the substrate support and the RF coil. An electrode adjusting member is coupled with the electrode for dynamically adjusting the voltage in the electrode to vary the capacitive coupling for improved plasma ignition and plasma stability. A Faraday shield may be placed between the RF coil and the plasma process region in the chamber to suppress capacitive coupling of the RF coil. Sensors may be provided to monitor the amounts of inductive coupling and capacitive coupling to provide feedback to a controller which is used to adjust the inductive coupling and capacitive coupling in real time to stabilize the plasma and achieve improved processing.
摘要翻译： 本发明提供了用于动态RF感应和电容耦合控制以改善等离子体基板处理以及实现污染和缺陷减少的系统和方法。 等离子体反应器包括设置在室中的基板支撑件。 射频线圈邻近该腔室设置，用于将射频能量感应耦合到腔室中。 电极邻近该腔室设置并且具有用于将能量电容耦合到腔室中的电压。 电极与衬底支架和RF线圈间隔开。 电极调节构件与电极耦合以动态地调节电极中的电压，以改变电容耦合以改善等离子体点火和等离子体稳定性。 法拉第屏蔽可以放置在RF线圈和腔室中的等离子体处理区域之间，以抑制RF线圈的电容耦合。 可以提供传感器来监测电感耦合和电容耦合的量以向控制器提供反馈，该控制器用于实时调整电感耦合和电容耦合以稳定等离子体并实现改进的处理。
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公开(公告)号：US06447637B1
公开(公告)日：2002-09-10
申请号：US09602652
申请日：2000-06-22
申请人： Valentin N. Todorov , Robert E. Ryan , Arthur Sato , Jin-Yuan Chen , Xueyu Qian , Zhiwen Sun
发明人： Valentin N. Todorov , Robert E. Ryan , Arthur Sato , Jin-Yuan Chen , Xueyu Qian , Zhiwen Sun
IPC分类号： C23F100
CPC分类号： H01J37/321
摘要： The present invention provides a process chamber and voltage distributive electrode (VDE) which distributes capacitive coupling between an inductive source and a plasma in a process chamber. The VDE is preferably slotted defining energy opaque and energy transparent portions which enable inductive coupling into the chamber while distributing capacitive coupling uniformly over the dielectric window.
摘要翻译： 本发明提供一种在处理室中分布感应源和等离子体之间的电容耦合的处理室和分压电极（VDE）。 VDE优选是开槽的，其限定能量不透明和能量透明部分，其能够在电容耦合均匀地分布在电介质窗口上的同时使电感耦合到腔室中。
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公开(公告)号：US5883778A
公开(公告)日：1999-03-16
申请号：US503790
申请日：1995-07-18
申请人： Semyon Sherstinsky , John F. Cameron , Shamouil Shamouilian , Manoocher Birang , Alfred Mak , Simon W. Tam , Robert E. Ryan
发明人： Semyon Sherstinsky , John F. Cameron , Shamouil Shamouilian , Manoocher Birang , Alfred Mak , Simon W. Tam , Robert E. Ryan
IPC分类号： B23Q3/15 , C23C16/458 , H01L21/00 , H01L21/683 , H02N13/00
CPC分类号： H02N13/00 , C23C16/4586 , H01L21/67109 , H01L21/6831 , H01L21/6833 , Y10T279/23
摘要： An electrostatic chuck 20 of the present invention is capable of maintaining substantially uniform temperatures across a substrate 30. The chuck 20 comprises an electrostatic member 35 that includes (i) an insulator 45 covering an electrode 40, (ii) a substantially planar and conformal contact surface 50 capable of conforming to a substrate 30, and (iii) conduits 105 terminating at the contact surface 50 for providing heat transfer fluid to the contact surface 50. Application of a voltage to the electrode 40 of the electrostatic member 35 electrostatically holds the substrate 30 on the conformal contact surface 50 to define an outer periphery 110 having (1) leaking portions 115 where heat transfer fluid leaks out, and (2) sealed portions 130 where heat transfer fluid substantially does not leak out. A fluid flow regulator 135 is provided for flowing heat transfer fluid at different flow rates through the conduits 105 in the electrostatic member 35 to provide (i) first flow rates of heat transfer fluid through the conduits 105 adjacent to the sealed portions 130 of the outer periphery 110 of the electrostatic member 35, and (ii) second flow rates of heat transfer fluid through the conduits 105 adjacent to the leaking portions 115, the second flow rates being higher than the first flow rates, to maintain substantially uniform temperatures across the substrate 30 held on the chuck 20.
摘要翻译： 本发明的静电卡盘20能够在基板30上保持基本均匀的温度。卡盘20包括静电部件35，静电部件35包括（i）覆盖电极40的绝缘体45，（ii）基本上平面和保形接触 能够与衬底30相符的表面50，以及（iii）终止于接触表面50处的导管105，用于将热传递流体提供给接触表面50.施加电压到静电构件35的电极40，静电地保持衬底 30，以形成具有（1）泄漏部分115（其中传热流体泄漏）的外周110，以及（2）传热流体基本上不会泄漏的密封部分130。 提供流体流量调节器135，用于使不同流速的传热流体流过静电构件35中的管道105，以提供（i）传热流体通过与外部的密封部分130相邻的导管105的第一流量 静电构件35的周边110，以及（ii）通过与泄漏部分115相邻的导管105的传热流体的第二流量，第二流速高于第一流速，以保持基本上均匀的温度 30夹在卡盘20上。
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公开(公告)号：US5479015A
公开(公告)日：1995-12-26
申请号：US292381
申请日：1994-08-18
申请人： Stanley Rudman , John Cox , Richard Oman , Robert E. Ryan
发明人： Stanley Rudman , John Cox , Richard Oman , Robert E. Ryan
IPC分类号： G01J1/02 , G01J1/04 , G01J3/51 , G01J5/48 , G01J5/60 , H01L27/144 , H01L31/0216 , H01L31/0232 , G01J5/08
CPC分类号： H01L31/0232 , G01J3/51 , G01J3/513 , H01L27/1446 , H01L31/02162 , G01J3/0224
摘要： A multi-image detector assembly has an array of detector elements formed upon a single focal plane and a plurality of focusing members, each focusing member focusing a substantially identical scene upon a corresponding one of a plurality of sections of the array. An optical element such as a spectral or polarizing filter is disposed within a plurality of the optical paths of the focusing members, preferably proximate the focal plane. Image detection occurs continuously and simultaneously so as to provide a spatially and temporally correlated set of separate images utilizing the single focal plane.
摘要翻译： 多图像检测器组件具有形成在单个焦平面和多个聚焦构件上的检测器元件的阵列，每个聚焦构件将基本相同的场景聚焦在阵列的多个部分中的对应的一个部分上。 诸如光谱或偏振滤光器的光学元件设置在聚焦构件的多个光路内，优选地靠近焦平面。 图像检测连续且同时发生，以便利用单焦点平面提供空间和时间相关的分离图像集合。
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公开(公告)号：US07617057B2
公开(公告)日：2009-11-10
申请号：US11312464
申请日：2005-12-21
IPC分类号： G06F15/00
CPC分类号： A01G7/00 , A01G9/16 , Y02A40/254 , Y10S47/06
摘要： In a system for optimizing crop growth, vegetation is cultivated in a contained environment, such as a greenhouse, an underground cavern or other enclosed space. Imaging equipment is positioned within or about the contained environment, to acquire spatially distributed crop growth information, and environmental sensors are provided to acquire data regarding multiple environmental conditions that can affect crop development. Illumination within the contained environment, and the addition of essential nutrients and chemicals are in turn controlled in response to data acquired by the imaging apparatus and environmental sensors, by an “expert system” which is trained to analyze and evaluate crop conditions. The expert system controls the spatial and temporal lighting pattern within the contained area, and the timing and allocation of nutrients and chemicals to achieve optimized crop development. A user can access the “expert system” remotely, to assess activity within the growth chamber, and can override the “expert system”.
摘要翻译： 在优化作物生长的系统中，植被在包围的环境中栽培，如温室，地下洞穴或其他封闭空间。 成像设备位于所包含的环境内或附近，以获取空间分布的作物生长信息，并且提供环境传感器以获取关于影响作物发育的多种环境条件的数据。 受控环境中的照明以及添加必需的营养物质和化学物质也是通过受到培训以分析和评估作物条件的“专家系统”响应于成像设备和环境传感器所获得的数据而被控制的。 专家系统控制所含区域内的空间和时间照明模式，以及营养物和化学品的时间和分配，以实现优化作物开发。 用户可以远程访问“专家系统”，以评估成长室内的活动，并可以覆盖“专家系统”。
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6.发明授权Method and apparatus for production of spin-polarized medical-grade xenon .sup.129 gas by laser optical pumping 失效通过激光光泵浦生产自旋极化医用级氙129气体的方法和装置
公开(公告)号：US5934103A
公开(公告)日：1999-08-10
申请号：US841437
申请日：1997-04-22
CPC分类号： G01R33/28 , A61K49/1815 , F25J3/0685 , F25J2205/20 , F25J2215/36 , G01R33/5601 , Y10S62/919 , Y10S62/925
摘要： Spin-polarized xenon gas is provided in medical-grade purity for use as a contrast medium in MRI studies by use of collision-induced transfer of spin energy to the xenon gas from laser-pumped spin-polarized Rb gas. The Rb gas is provided by thermally vaporizing solid Rb at low pressure in a container having an inside surface coated with a siliconizing agent and exposed to the Rb gas. The combined xenon and Rb gases are separated after transfer of the spin energy in order to provide a sufficient purity of the xenon gas by use of a cryogenic separation process. The Rb gas is removed from the xenon gas and is returned cryogenically to a solid stated to an acceptable level of purity for the xenon gas. The gas may be analyzed optically to measure the remaining Rb concentration.
摘要翻译： 旋转极化氙气以医学级纯度提供，用于MRI研究中的造影剂，通过使用碰撞诱导的自旋能量转移到来自激光泵浦的自旋极化Rb气体的氙气。 通过在具有涂覆有硅化剂的内表面并暴露于Rb气体的容器中将低压固体Rb热汽化来提供Rb气体。 在转移自旋能量之后分离出氙气和铑气体，以便通过使用低温分离方法提供足够的纯度的氙气。 将Rb气体从氙气中除去，并将其低温回收成为氙气的可接受的纯度水平。 可以光学分析气体以测量剩余的Rb浓度。
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公开(公告)号：US4034463A
公开(公告)日：1977-07-12
申请号：US686055
申请日：1976-05-13
申请人： Robert E. Ryan
发明人： Robert E. Ryan
CPC分类号： E04B2/7425 , Y10T29/49863 , Y10T29/49893 , Y10T29/49904 , Y10T29/49964
摘要： The present method for display of wall paneling includes the steps of securing two back-to-back panel samples within a perimeter and then in turn securing several of such perimeters within variously configured pre-formed angle channels in order to obtain a desired floor display pattern.
摘要翻译： 本发明的墙板显示方法包括以下步骤：将两个背靠背面板样品固定在周边内，然后又将多个这样的周边固定在各种预先形成的角度通道内，以获得所需的底板显示图案 。
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公开(公告)号：US07987632B2
公开(公告)日：2011-08-02
申请号：US12581579
申请日：2009-10-19
IPC分类号： A01G9/14
CPC分类号： A01G7/00 , A01G9/16 , Y02A40/254 , Y10S47/06
摘要： In a system for optimizing crop growth, vegetation is cultivated in a contained environment, such as a greenhouse, an underground cavern or other enclosed space. Imaging equipment is positioned within or about the contained environment, to acquire spatially distributed crop growth information, and environmental sensors are provided to acquire data regarding multiple environmental conditions that can affect crop development. Illumination within the contained environment, and the addition of essential nutrients and chemicals are in turn controlled in response to data acquired by the imaging apparatus and environmental sensors, by an “expert system” which is trained to analyze and evaluate crop conditions. The expert system controls the spatial and temporal lighting pattern within the contained area, and the timing and allocation of nutrients and chemicals to achieve optimized crop development. A user can access the “expert system” remotely, to assess activity within the growth chamber, and can override the “expert system”.
摘要翻译： 在优化作物生长的系统中，植被在包围的环境中栽培，如温室，地下洞穴或其他封闭空间。 成像设备位于所包含的环境内或附近，以获取空间分布的作物生长信息，并且提供环境传感器以获取关于影响作物发育的多种环境条件的数据。 受控环境中的照明以及添加必需的营养物质和化学物质也是通过受到培训以分析和评估作物条件的“专家系统”响应于成像设备和环境传感器所获得的数据而被控制的。 专家系统控制所含区域内的空间和时间照明模式，以及营养物和化学品的时间和分配，以实现优化作物开发。 用户可以远程访问“专家系统”，以评估成长室内的活动，并可以覆盖“专家系统”。
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公开(公告)号：US20100042234A1
公开(公告)日：2010-02-18
申请号：US12581579
申请日：2009-10-19
CPC分类号： A01G7/00 , A01G9/16 , Y02A40/254 , Y10S47/06
摘要： In a system for optimizing crop growth, vegetation is cultivated in a contained environment, such as a greenhouse, an underground cavern or other enclosed space. Imaging equipment is positioned within or about the contained environment, to acquire spatially distributed crop growth information, and environmental sensors are provided to acquire data regarding multiple environmental conditions that can affect crop development. Illumination within the contained environment, and the addition of essential nutrients and chemicals are in turn controlled in response to data acquired by the imaging apparatus and environmental sensors, by an “expert system” which is trained to analyze and evaluate crop conditions. The expert system controls the spatial and temporal lighting pattern within the contained area, and the timing and allocation of nutrients and chemicals to achieve optimized crop development. A user can access the “expert system” remotely, to assess activity within the growth chamber, and can override the “expert system”.
摘要翻译： 在优化作物生长的系统中，植被在包围的环境中栽培，如温室，地下洞穴或其他封闭空间。 成像设备位于所包含的环境内或附近，以获取空间分布的作物生长信息，并且提供环境传感器以获取关于影响作物发育的多种环境条件的数据。 受控环境中的照明以及添加必需的营养物质和化学物质也是通过受到培训以分析和评估作物条件的“专家系统”响应于成像设备和环境传感器所获得的数据而被控制的。 专家系统控制所含区域内的空间和时间照明模式，以及营养物和化学品的时间和分配，以实现优化作物开发。 用户可以远程访问“专家系统”，以评估成长室内的活动，并可以覆盖“专家系统”。
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公开(公告)号：US4803439A
公开(公告)日：1989-02-07
申请号：US94116
申请日：1987-09-08
申请人： Robert E. Ryan
发明人： Robert E. Ryan
CPC分类号： H01S3/0602 , H01S3/042 , H01S3/10076 , H01S3/2333 , H01S3/0404 , H01S3/0407 , H01S3/17 , H01S3/20
摘要： A glass bead laser amplifier which is designed to operate efficiently at relatively high optical power outputs, and which is designed to be easily manufactured and scaled up in size to produce high power laser beams. The laser amplifier cavity if filled with doped glass lasing beads or elements which are packed therein to be in contiguous contact with each other. The shape of each glass element preferably provides a relatively large ratio of the external area to volume of the glass lasing element, to provide for efficient cooling thereof. A cooling system is provided for the laser amplifier cavity in which a coolant fluid circulates through the laser cavity around and between the contiguous glass lasing elements for cooling thereof. The cooling fluid is selected to have an index of refraction substantially matching that of the glass lasing elements to substantially reduce scattering of light passing through the glass/cooling fluid interfaces in the laser amplifier cavity. Moreover, a conjugate mirror is placed adjacent to one end of the laser amplifier cavity for reflecting the laser light which has passed once through the laser amplifier cavity back therethrough, to cancel the initial optical distortions introduced into the light beam as it initially passed through the laser amplifier cavity and the glass/cooling fluid interfaces therein. This results in the production of an output laser beam substantially unaffected by optical distortions which would otherwise be introduced by the laser amplifier.
摘要翻译： 一种玻璃珠激光放大器，其设计用于在相对较高的光功率输出下有效地工作，并且被设计成容易地制造和尺寸放大以产生高功率激光束。 激光放大器腔如果填充有掺杂的玻璃激光珠或被包装在其中以彼此连续接触的元件。 每个玻璃元件的形状优选地提供玻璃激光元件的外部面积与体积的相对大的比例，以提供其有效的冷却。 为激光放大器腔提供冷却系统，其中冷却剂流体在相邻的玻璃激光元件周围和相邻的玻璃激光元件之间循环通过激光腔，用于冷却。 选择冷却流体以使折射率基本上与玻璃激光元件的折射率相匹配，以大大减少穿过激光放大器腔中的玻璃/冷却流体界面的光的散射。 此外，共轭反射镜邻近激光放大器腔的一端放置，用于将已经通过激光放大器空腔的激光反射回穿过激光放大器空腔，以消除其最初通过光束时引入到光束中的初始光学失真 激光放大器腔和其中的玻璃/冷却流体接口。 这导致产生基本不受光学失真影响的输出激光束，否则光学失真将由激光放大器引入。
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