MASK, MASK ASSEMBLY HAVING THE SAME, AND METHOD OF REPAIRING THE MASK

    公开(公告)号:US20230407461A1

    公开(公告)日:2023-12-21

    申请号:US18296093

    申请日:2023-04-05

    IPC分类号: C23C16/04

    CPC分类号: C23C16/042 H10K59/10

    摘要: A method of repairing a mask includes providing a mask including a mother member, a plurality of first openings, and an over-processed opening adjacent to one of the plurality of first openings and having a size different from a size of each of the plurality of first openings, each of the plurality of first openings and the over-processed opening defined on the mother member, forming a supplement portion in at least a portion of the over-processed opening by irradiating a first laser beam to an area surrounding the over-processed opening of the mother member, and forming a plurality of second openings spaced apart from each other on the mother member by irradiating a second laser beam to the supplement portion.