Semiconductor device having fine contact hole with high aspect ratio
    1.
    发明授权
    Semiconductor device having fine contact hole with high aspect ratio 失效
    具有高纵横比的细小接触孔的半导体装置

    公开(公告)号:US5691571A

    公开(公告)日:1997-11-25

    申请号:US578318

    申请日:1995-12-26

    摘要: A semiconductor device includes at least one hole formed on a semiconductor substrate. A barrier metal is formed on at least one portion in contact with the semiconductor substrate in the hole. A metal interconnection is constituted by two layers including a first Al-containing metal film formed on the barrier metal, and a second Al-containing metal film formed on the first Al-containing metal film and having a melting point lower than the melting point of the first Al-containing metal film.

    摘要翻译: 半导体器件包括形成在半导体衬底上的至少一个孔。 在与孔中的半导体衬底接触的至少一个部分上形成阻挡金属。 金属互连由两层构成,包括形成在阻挡金属上的第一含Al金属膜和形成在第一含Al金属膜上的第二含Al金属膜,其熔点低于 第一含Al金属膜。

    Semiconductor electron emission element
    4.
    发明授权
    Semiconductor electron emission element 失效
    半导体电子发射元件

    公开(公告)号:US5414272A

    公开(公告)日:1995-05-09

    申请号:US224192

    申请日:1994-04-07

    CPC分类号: H01J1/308 H01J9/022

    摘要: A semiconductor element emission element having a Schottky junction in a surface region of a semiconductor, comprises a first region having a first carrier concentration, a second region having a second carrier concentration, and a third region having a third carrier concentration. All of the regions are located below an electrode forming the Schottky junction. The first, second, and third carrier concentrations satisfy a condition that the first carrier concentration of the first region is higher than the second carrier concentration of the second region and that the second carrier concentration of the second region is higher than the third carrier concentration of the third region. The first, second, and third regions have a structure that at least one second region having the second carrier concentration is located inside the third region of the third carrier concentration, and that at lease one first region having the first carrier concentration is located inside said second region having the second carrier concentration.

    摘要翻译: 在半导体的表面区域中具有肖特基结的半导体元件发光元件包括具有第一载流子浓度的第一区域,具有第二载流子浓度的第二区域和具有第三载流子浓度的第三区域。 所有区域都位于形成肖特基结的电极之下。 第一,第二和第三载流子浓度满足第一区域的第一载流子浓度高于第二区域的第二载流子浓度,并且第二区域的第二载流子浓度高于第二区域的第三载流子浓度的条件 第三个地区。 第一,第二和第三区域具有以下结构:具有第二载流子浓度的至少一个第二区域位于第三载流子浓度的第三区域内,并且至少具有第一载流子浓度的第一区域位于所述 第二区域具有第二载流子浓度。