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    VERFAHREN ZUR HERSTELLUNG EINES QUARZGLASBAUTEILS MIT HOHER THERMISCHER STABILITÄT
    23.
    发明申请
    VERFAHREN ZUR HERSTELLUNG EINES QUARZGLASBAUTEILS MIT HOHER THERMISCHER STABILITÄT 审中-公开
    用于生产石英玻璃建筑供应带热稳定性高

    公开(公告)号：WO2004111315A1

    公开(公告)日：2004-12-23

    申请号：PCT/EP2004/006105

    申请日：2004-06-07

    Applicant: HERAEUS QUARZGLAS GMBH & CO. KG ,  FRISCHAT, Günther, Heinz ,  WILM, Kirsten ,  ARNDT, Martin ,  KORUS, Gabriele

    Inventor： FRISCHAT, Günther, Heinz ,  WILM, Kirsten ,  ARNDT, Martin ,  KORUS, Gabriele

    IPC: C30B15/10

    CPC classification number: C03C1/008 ,  C03C3/06 ,  C03C10/0009 ,  C03C17/007 ,  C03C17/02 ,  C03C2201/54 ,  C03C2203/26 ,  C03C2203/27 ,  C03C2203/30 ,  C30B15/10 ,  C30B35/002

    Abstract: Ein bekanntes Verfahren zur Herstellung eines Quarzglasbauteils mit hoher thermischer Stabilität umfasst das Bereitstellen eines Basiskörpers, dessen Oberflache mindestens teilweise mit einer Schicht versehen wird, die ein Kristallisationspromotor-lon in einer Silicatverbindung enthält, wobei durch Erhitzen beim bestimmungsgemassen Einsatz des Quarzglasbauteils von der Schicht eine Cristobalitbildung ausgeht. Um dieses Verfahren hinsichtlich seiner Reproduzierbarkeit and Wirtschaftlichkeit zu verbessern, wird erfindungsgemäss vorgeschlagen, class durch Hydrolyse einer das Kristallisationspromotor-Ion and eine hydrolysierbare Siliciumverbindung enthaltenden Lösung ein Sol gebildet wird, in weichem kolloidale Teilchen der hydrolysierten Siliciumverbindung and des Kristallisationspromotor-Ions vorliegen, dass das Sol unter Bildung der Schicht auf der Basiskörper-Oberfläche aufgetragen wird, and class anschliessend durch Kondensation der hydrolysierten Siliciumverbindung unter Vernetzung der kolloidalen Teilchen eine Silicatbildung in der Schicht erfolgt.

    Abstract translation: 用于生产具有高的热稳定性的石英玻璃元件，一种已知的方法包括：提供其表面至少部分地通过加热在bestimmungsgemassen使用层方石英的石英玻璃元件的设置有基体，其中包含在硅酸盐化合物结晶促进离子的层 发出。 为了提高其重现性和效率方面该方法中，根据本发明提出了通过在结晶化促进离子和水解性硅化合物的水解该类溶液，溶胶形成，是在水解的硅化合物和结晶促进离子的软胶体颗粒 溶胶被施加到形成在基体表面上的层，并随后用胶体颗粒的交联的水解性硅化合物的缩合在硅酸盐形成层的类。

    DEVICE FOR APPLYING ELECTROMAGNETIC MICROWAVE RADIATION IN A PLASMA CAVITY
    26.
    发明申请
    DEVICE FOR APPLYING ELECTROMAGNETIC MICROWAVE RADIATION IN A PLASMA CAVITY 审中-公开
    用于在等离子体空间中应用电磁微波辐射的装置

    公开(公告)号：WO2003049141A2

    公开(公告)日：2003-06-12

    申请号：PCT/NL2002/000785

    申请日：2002-12-03

    Applicant: DRAKA FIBRE TECHNOLOGY B.V. ,  VAN STRALEN, Mattheus, Jacobus, Nicolaas ,  SIMONS, Dennis, Robert

    Inventor： VAN STRALEN, Mattheus, Jacobus, Nicolaas ,  SIMONS, Dennis, Robert

    IPC: H01J37/32

    CPC classification number: H01J37/32192 ,  C03C17/02 ,  C23C16/045 ,  C23C16/511

    Abstract: The invention relates to a device for applying, in use, electromagnetic microwave radiation in a plasma cavity, which plasma cavity is present within a housing, being substantially cylindrically symmetric about a first axis, and which comprises a cylindrical wall provided with a circumferential slit, said plasma cavity being in communication, via said slit, with a first end of an elongated microwave guide having a longitudinally extending second axis, said device being in communication in use with microwave generating means via the other end of said microwave guide, in which the electromagnetic microwave radiation being generated may comprise several modes. The object of the invention is to provide a microwave applicator as referred to in the introduction, by means of which a stable plasma having the aforesaid advantageous geometric properties can be generated and maintained on the one hand and which furthermore does not have any restrictions as regards its constructional dimensions. In order to accomplish that objective, the microwave applicator is characterized in that the device comprises means which, in use, generate microwave radiation in the slit, which microwave radiation has only one electromagnetic field distribution at least in one direction perpendicularly to the propagation direction. Since the properties of the electromagnetic microwave radiation no longer constitute an unknown and unpredictable factor, a more stable and geometrically homogeneous plasma is generated in the plasma cavity.

    Abstract translation: 本发明涉及一种用于在等离子体空腔中施加电磁微波辐射的装置，该等离子体空腔存在于壳体内，围绕第一轴线大致圆柱形对称，并且包括设置有周向狭缝的圆柱形壁， 所述等离子体空腔经由所述狭缝连通，具有纵向延伸的第二轴的细长微波引导件的第一端，所述装置通过所述微波引导件的另一端与微波发生装置一起使用，其中， 产生的电磁微波辐射可以包括几种模式。 本发明的目的是提供一种在引言中提到的微波施加器，通过该微波施加器，可以产生和维持具有上述有利的几何特性的稳定等离子体，并且对于另一方面也没有任何限制 其结构尺寸。 为了实现该目的，微波施加器的特征在于，该装置包括在使用中在狭缝中产生微波辐射的装置，该微波辐射至少在垂直于传播方向的一个方向上仅具有一个电磁场分布。 由于电磁微波辐射的性质不再构成未知且不可预知的因素，所以在等离子体腔中产生更稳定和几何均匀的等离子体。

    FILM COATED OPTICAL LITHOGRAPHY ELEMENTS AND METHOD OF MAKING
    27.
    发明申请
    FILM COATED OPTICAL LITHOGRAPHY ELEMENTS AND METHOD OF MAKING 审中-公开
    电影涂层光学光刻元件及其制作方法

    公开(公告)号：WO01077719A1

    公开(公告)日：2001-10-18

    申请号：PCT/US2001/006152

    申请日：2001-02-27

    IPC: G02B5/20 ,  G02B5/28 ,  G03F7/20 ,  G02B3/00

    CPC classification number: C03C17/02 ,  C03B19/1453 ,  C03B19/1461 ,  C03B2201/075 ,  C03B2201/12 ,  C03C3/06 ,  C03C17/3452 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2203/46 ,  G02B1/105 ,  G02B1/14 ,  G02B5/208 ,  G03F7/70958

    Abstract: The invention provides coated optical lithography elements and method of coating optical elements, and particularly optical photolithography elements for use in below 240 nm optical photolithography systems utilizing vacuum ultraviolet light, VUV, lithography wavelengths no greater than about 193 nm, such as VUV projection lithography systems utilizing wavelengths in the 193 nm or 157 nm region. The optical devices (42) manipulate vacuum ultraviolet lithography light less than 250 nm, utilizing a deposited silicon oxyfluoride film (26). The deposited silicon oxyfluoride optical coating assists in the manipulation of incident light and protects the underlying optical materials, layers, and surfaces.

    Abstract translation: 本发明提供涂覆光学光刻元件和涂覆光学元件的方法，特别是用于使用真空紫外光，VUV，不大于约193nm的光刻波长的低于240nm光学光刻系统的光学光刻元件，例如VUV投影光刻系统 利用193nm或157nm区域中的波长。 光学器件（42）利用淀积的氟氧化硅膜（26）来操作小于250nm的真空紫外光刻光。 沉积的氟氧化硅光学涂层有助于对入射光的操纵并保护底层的光学材料，层和表面。

    MONOLITHIC GLASS LIGHT SHAPING DIFFUSER AND METHOD FOR ITS PRODUCTION
    28.
    发明申请
    MONOLITHIC GLASS LIGHT SHAPING DIFFUSER AND METHOD FOR ITS PRODUCTION 审中-公开
    单晶玻璃光成型机及其生产方法

    公开(公告)号：WO9906873A3

    公开(公告)日：1999-08-05

    申请号：PCT/US9816067

    申请日：1998-07-28

    Applicant: PHYSICAL OPTICS CORP

    Inventor： LIEBERMAN ROBERT A ,  MENDOZA EDGAR A ,  MINTZER DAVID

    IPC: C03B8/02 ,  C03B19/12 ,  C03C17/02 ,  G02B5/02 ,  G02B5/32 ,  G03H1/00 ,  G03H1/02 ,  C03B32/00

    CPC classification number: G02B5/0247 ,  C03B19/12 ,  C03C1/006 ,  C03C1/008 ,  C03C4/00 ,  C03C17/007 ,  C03C17/02 ,  C03C2204/08 ,  C03C2217/213 ,  C03C2218/113 ,  C03C2218/32 ,  G02B5/0252 ,  G02B5/0268 ,  G02B5/0278 ,  G02B5/32

    Abstract: A holographic light shaping diffuser (LSD) is formed from a monolithic glass material by recording light shaping structures (sometimes collectively known as "speckle", particularly when the structures extend into the interior of the diffuser) in the glass material during its formation. A volume LSD may be produced by the photolithographic writting or other imaging of light shaping structures in a photosentitive glass material, including the steps of providing a sol-gel solution (30), mixing (32) casting (34), gelling/aging (36), exposing (38), heating (40), and consolidating (42). Alternatively, a surface LSD may be produced by this imaging process or by embossing light shaping structures onto a high quality optical glass or by embossing a light shaping structures on a glass film layer coated onto a substrate. Both types of diffusers control the angular spread of transmitted light while homogenizing otherwise spatially noisy light sources such as LCDs and filamented light sources and while maintaining damage thresholds consistent with any glass optical element. The LSD has a transmission efficiency of over 90 % from the ultraviolet wavelengths through the physical spectrum and into the near-infrared. Moreover, because the LSD is a true glass, it is capable of withstanding temperatures well beyond glass transition temperatures of plastic LSDs, can be formed in convex or concave surfaces through conventional molding, grinding, or polishing techniques, and can be coated by hot-coating techniques. The LSD also has a very high laser power threshold.

    Abstract translation: 通过记录光形成结构（有时统称为“斑点”，特别是当结构延伸到扩散器的内部时），通过记录光成形结构（玻璃材料）形成全息光成形扩散器（LSD）。 可以通过在光敏玻璃材料中的光成形结构的光刻写入或其它成像来产生体积LSD，包括以下步骤：提供溶胶 - 凝胶溶液（30），混合（32）铸造（34），胶凝/老化（ 36），曝光（38），加热（40）和合并（42）。 或者，可以通过该成像处理或通过将光成形结构压印到高质量光学玻璃上或通过在涂覆在基板上的玻璃膜层上压花光成形结构来制造表面LSD。 两种类型的扩散器控制透射光的角度扩展，同时均匀化否则空间有噪声的光源，例如LCD和光纤光源，同时保持与任何玻璃光学元件一致的损伤阈值。 LSD透过物理光谱的紫外线波长和近红外线的传输效率超过90％。 此外，由于LSD是真正的玻璃，它能够承受远远超过塑料LSD的玻璃化转变温度的温度，可以通过常规的成型，研磨或抛光技术在凸面或凹面中形成，并且可以通过热 - 涂层技术。 LSD还具有非常高的激光功率阈值。

    WATER-BASED PAINT INCLUDING GLASS PARTICULATE
    29.
    发明申请
    WATER-BASED PAINT INCLUDING GLASS PARTICULATE 审中-公开
    水基涂料，包括玻璃颗粒

    公开(公告)号：WO1998028370A1

    公开(公告)日：1998-07-02

    申请号：PCT/GB1997003424

    申请日：1997-12-11

    Applicant: FORD MOTOR COMPANY ,  FORD MOTOR COMPANY LIMITED

    Inventor： FORD MOTOR COMPANY ,  FORD MOTOR COMPANY LIMITED ,  BOAZ, Premakaran, Tucker

    IPC: C09D01/02

    CPC classification number: C03C17/007 ,  C03C8/14 ,  C03C17/008 ,  C03C17/02 ,  C03C17/04 ,  C03C2217/45 ,  C03C2217/475 ,  C04B28/26 ,  C04B2111/00482 ,  C09D1/02 ,  C04B14/22 ,  C04B14/309 ,  C04B20/008 ,  C04B22/062 ,  C04B2103/40 ,  C04B14/24 ,  C04B2103/54 ,  C04B14/30

    Abstract: A water-based paint composition, which has excellent adhesion to glass, comprising: (i) water-soluble sodium silicate forming 20 to 45 weight percent of said composition; (ii) water forming 5 to 25 weight percent of said composition; (iii) water-soluble base in an amount sufficient to provide said composition with a pH of at least 10.5; (iv) finely divided metal oxide powder selected from the group consisting of oxides of copper, iron, nickel, cobalt and mixtures thereof forming 20 to 45 weight percent of said composition and having a particle size, on average, less than 7 microns; (v) particles of soda-lime-silica glass forming 10 to 55 weight percent of the composition and having a diameter, on average, less than 20 microns and having a melting point of at least about 1700 DEG F; and at least one material selected from the group consisting of: (vi) low-melting glass frit powder melting below 1300 DEG F forming up to 10 weight percent of said composition and having a particle size, on average, less than 10 microns; and (vii) zinc oxide forming up to 10 weight percent of said composition.

    Abstract translation: 具有优异的玻璃粘合性的水性涂料组合物，其包含：（i）形成所述组合物20〜45重量％的水溶性硅酸钠; （ii）水形成所述组合物的5至25重量％; （iii）水溶性碱，其量足以使所述组合物的pH至少为10.5; （iv）选自铜，铁，镍，钴的氧化物和其混合物的细碎金属氧化物粉末，其形成20至45重量％的所述组合物，并且具有平均小于7微米的粒度; （v）钠钙二氧化硅玻璃颗粒，其组成为10至55重量％，平均直径小于20微米，熔点至少约1700℉; 和至少一种选自以下的材料：（vi）低于1300°F熔融的低熔点玻璃料粉末，其形成至多10重量％的所述组合物，并且具有平均小于10微米的粒度; 和（vii）形成至多10重量％所述组合物的氧化锌。

    MOULDED BODY MADE OF QUARTZ GLASS AND PROCESS FOR THE MANUFACTURE THEREOF
    30.
    发明申请
    MOULDED BODY MADE OF QUARTZ GLASS AND PROCESS FOR THE MANUFACTURE THEREOF 审中-公开
    状体由石英玻璃及其制造方法成型体由石英玻璃

    公开(公告)号：WO1995013248A1

    公开(公告)日：1995-05-18

    申请号：PCT/EP1994003722

    申请日：1994-11-10

    Applicant: HERAEUS QUARZGLAS GMBH ,  ENGLISCH, Wolfgang ,  MORITZ, Stephan ,  HELLMANN, Dietmar

    Inventor： HERAEUS QUARZGLAS GMBH

    IPC: C03B19/06

    CPC classification number: C03C17/02 ,  B22C9/12 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03B2201/23 ,  C03C3/06 ,  C03C11/00 ,  C03C2201/02 ,  C03C2201/80 ,  C03C2203/52 ,  C30B35/002 ,  G01J1/429 ,  Y10T428/131 ,  Y10T428/1317

    Abstract: Moulded bodies made of quartz glass with at least one surface region of tranparent quartz glass, whose free surfaces are smooth and which have a superficial microroughness of less than 8 mu m, are already known. To facilitate production of such a body having a simple structure, cost-effectively and without the need for the stocking or separate production of auxiliary components, it will consist of a core body, the base material of which is at least 99.9 % chemically pure and has a cristobalite content of no more than 1 %; is impermeable to gases, opaque, and porous, has a virtually constant direct spectral transmission in the wavelength range lambda = 190 nm - lambda = 2.650 nm of below 10 % for 1 mm of thickness, and has a density of at least 2.15 g/cm . The transparent surface region is formed from the base material which is heat treated at a temperature in excess of 1.650 DEG C, is at least 0.5 mm thick and has a direct spectral transmission of at least 60 % in the wavelength range lambda = 600 nm - lambda = 2.650 nm for 1 mm of thickness. The invention also relates to process for manufacturing a moulded body of this type from quartz glass.

    Abstract translation: 有由石英玻璃制成的模制品，其具有由透明的石英玻璃的至少一个表面部分，所述自由表面是平滑的并具有小于8微米一个Oberflächenmikrorauhigkeit，是已知的。 为了提供这种类型的，其具有简单的结构和它的生产是便宜的，并且避免了存储或独立的生产附加部件的成型体，它包括一个基体，其基体材料具有至少99.9％的化学纯度和至多一个方石英含量的 1％已，是不透气的和不透明的，包含孔，其特征在于，壁厚为1mm，在10％以下几乎恒定躺在的波长范围内的λ= 190nm至拉姆达的直接光谱透射=具有2650纳米，至少2.15的密度 克/厘米<3>，和所述透明表面部分的波长范围内的λ的热处理在高于1650℃的基底材料的温度时，它的厚度为至少0.5毫米，它的直接光谱透射在1mm的层厚度形成 = 600nm至2650纳米的λ=具有至少60％的值。 此外，本发明涉及一种用于制造石英玻璃这样的模塑制品的方法。

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