METHOD AND APPARATUS FOR CONTROLLED BROADBAND MICROWAVE HEATING
    1.
    发明申请
    METHOD AND APPARATUS FOR CONTROLLED BROADBAND MICROWAVE HEATING 审中-公开
    控制宽带微波加热的方法和装置

    公开(公告)号:WO2014172104A1

    公开(公告)日:2014-10-23

    申请号:PCT/US2014/032741

    申请日:2014-04-03

    CPC classification number: H05B6/686 H01L21/67115 H05B6/705 H05B6/80

    Abstract: A materials processing system comprises a thermal processing chamber and a broadband microwave power source. The power source includes an ovenized small-signal RF circuit, a high power microwave amplifier, and forward and reflected power detectors separated from one another by an isolator. The power detectors are also preferably ovenized. A control system provides control signals to the thermally stabilized VCO and VCA in the small-signal circuit to control output power based on detected forward power compared to demanded forward power. The system may be run in either open-loop or closed-loop modes.

    Abstract translation: 材料处理系统包括热处理室和宽带微波电源。 电源包括加热的小信号RF电路,高功率微波放大器以及通过隔离器彼此分离的前向和反射功率检测器。 功率检测器也优选地被加热。 控制系统向小信号电路中的热稳定化VCO和VCA提供控制信号,以根据所需的正向功率来检测正向功率来控制输出功率。 系统可以以开环或闭环模式运行。

    APPARATUS AND METHOD FOR HEAT TREATMENT OF COATINGS ON SUBSTRATES
    2.
    发明申请
    APPARATUS AND METHOD FOR HEAT TREATMENT OF COATINGS ON SUBSTRATES 审中-公开
    用于处理基材上涂层的装置和方法

    公开(公告)号:WO2014062619A1

    公开(公告)日:2014-04-24

    申请号:PCT/US2013/064944

    申请日:2013-10-15

    CPC classification number: H05B6/6482 H05B6/806 H05B2206/046

    Abstract: An apparatus for thermal treatment of coatings on substrates includes a microwave applicator cavity; a microwave power supply to deliver power to the cavity; a thermally insulated microwave-transparent compartment within the cavity, large enough to contain the coated substrate while occupying no more than 50% of the total volume of the cavity; a means of supporting the coated substrate within the compartment; an adjustable IR heating source in the compartment and facing the substrate so that a selected amount of IR heating may be applied to the substrate; and, a non-contacting temperature measurement device to measure the temperature of the coating. Related methods for using the apparatus to process different kinds of films are also disclosed.

    Abstract translation: 用于基材上涂层热处理的装置包括微波加热腔; 微波电源,用于向腔体输送功率; 在空腔内的绝热微波透明隔室,足够大以容纳涂覆的基材,同时占据不超过空腔总体积的50%; 支撑所述隔室内的涂覆基材的方法; 在隔室中的可调节的IR加热源并面向衬底,使得可以将选择量的IR加热施加到衬底; 以及用于测量涂层温度的非接触式温度测量装置。 还公开了使用该装置处理不同种类的薄膜的相关方法。

    CONTACT LENS
    4.
    发明申请
    CONTACT LENS 审中-公开

    公开(公告)号:WO2005050260A3

    公开(公告)日:2005-06-02

    申请号:PCT/US2004/036649

    申请日:2004-11-03

    Abstract: The present invention provides a contact lens (10) comprising a central portion including an optical zone (15), a peripheral portion surrounding the central portion (20) and at least two areas of unequal size (25, 30) located on the peripheral portion, wherein the areas of unequal size have a thickness that is less than a thickness of the peripheral portion. According to some embodiments, the contact lens comprises a hybrid contact lens having a substantially rigid center portion and a substantially flexible peripheral portion.

    METHOD OF CURING THERMOPLASTICS WITH MICROWAVE ENERGY
    6.
    发明申请
    METHOD OF CURING THERMOPLASTICS WITH MICROWAVE ENERGY 审中-公开
    用微波能量固化热塑性弹性体的方法

    公开(公告)号:WO2014153336A1

    公开(公告)日:2014-09-25

    申请号:PCT/US2014/031015

    申请日:2014-03-18

    CPC classification number: H01L23/293 H01L2924/0002 H01L2924/00

    Abstract: A method for densifying thermoplastics, particularly polyimides, for use in conjunction with electronic circuits while producing improved physical properties and a high degree of crystallinity, involves variable frequency microwave (VFM) processing at temperatures typically 100°C below the glass transition temperature or lower, for times of about 50 to 100 minutes. It is particularly applicable to polymers based on BPDA-PPD, but may also be generally applied to other intentionally designed polyimide structures with the same features. The invention enables the creation of layered structures involving integrated circuits with small feature sizes and overcoatings of polymers with high T g and other desirable properties.

    Abstract translation: 用于致密化热塑性塑料,特别是聚酰亚胺的方法,用于与电子电路结合使用,同时产生改善的物理性能和高结晶度,涉及在通常低于玻璃化转变温度或低于100℃的温度下进行可变频率微波(VFM)处理, 时间约50至100分钟。 它特别适用于基于BPDA-PPD的聚合物,但也可以通常应用于具有相同特征的其它有意设计的聚酰亚胺结构。 本发明能够创建涉及具有小特征尺寸的集成电路和具有高Tg和其它所需特性的聚合物的外涂层的层状结构。

    SYSTEMS AND METHODS FOR MONITORING MATERIAL PROPERTIES USING MICROWAVE ENERGY
    7.
    发明申请
    SYSTEMS AND METHODS FOR MONITORING MATERIAL PROPERTIES USING MICROWAVE ENERGY 审中-公开
    使用微波能量监测材料特性的系统和方法

    公开(公告)号:WO1997011357A1

    公开(公告)日:1997-03-27

    申请号:PCT/US1996014532

    申请日:1996-09-11

    CPC classification number: H05B6/705 G01N22/00

    Abstract: Systems and methods for monitoring workpiece and workpiece material characteristics using microwave energy are disclosed. A system comprises a chamber (40), including means for generating variable frequency microwave energy (20); means for positioning a workpiece (45) within the chamber; means for subjecting the workpiece to a plurality of different microwave frequencies; and means for monitoring characteristics of the workpiece. One or more characteristics of a workpiece, or workpiece material, may be monitored by positioning the workpiece within a chamber having means for generating variable frequency microwave energy; subjecting the workpiece to microwave irradiation at a plurality of frequencies; detecting power reflection for each one of the plurality of microwave frequencies to provide power reflection data; and comparing the power reflection data to a predetermined set of power reflection data. The result of signature analysis can be coupled with a product process controller to achieve a real-time feedback control on monitoring and adjusting of process parameters.

    Abstract translation: 公开了使用微波能量监测工件和工件材料特性的系统和方法。 一种系统包括一个室(40),包括用于产生可变频率微波能量(20)的装置; 用于将工件(45)定位在所述腔室内的装置; 用于使所述工件经受多个不同微波频率的装置; 以及用于监测工件特性的装置。 可以通过将工件定位在具有用于产生可变频率微波能量的装置的腔室内来监测工件或工件材料的一个或多个特性; 以多个频率对工件进行微波照射; 检测所述多个微波频率中的每一个的功率反射以提供功率反射数据; 以及将功率反射数据与预定的功率反射数据集进行比较。 签名分析的结果可以与产品过程控制器相结合,以实现对过程参数的监控和调整的实时反馈控制。

    HYBRID CONTACT LENS SYSTEM AND METHOD
    9.
    发明申请
    HYBRID CONTACT LENS SYSTEM AND METHOD 审中-公开
    混合接触镜系统和方法

    公开(公告)号:WO2004023374A1

    公开(公告)日:2004-03-18

    申请号:PCT/US2003/027741

    申请日:2003-09-05

    CPC classification number: G02C7/021 G02B1/043 G02C7/04 G02C7/049

    Abstract: In this embodiment of the present invention, increasing the surface area between the rigid and soft leans components increases bonding strength between the two materials and minimizes leans breakage, or failure. Another advantage of this embodiment is that it provides a smooth transition between the rigid or hard, and soft materials. An interface, or junction (75) between the hard, or substantially rigid lens material (65), and the soft lens material (70) is illustrated.

    Abstract translation: 在本发明的这个实施例中,增加刚性和软质倾斜部件之间的表面积增加了两种材料之间的结合强度并且使倾斜破损或故障最小化。 该实施例的另一个优点是它提供了刚性或硬质和软质材料之间的平滑过渡。 示出了硬或基本上刚性的透镜材料(65)与软透镜材料(70)之间的界面或结(75)。

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