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公开(公告)号:CN101392159A
公开(公告)日:2009-03-25
申请号:CN200810165822.X
申请日:2004-06-04
Applicant: 日立化成工业株式会社
IPC: C09J7/02 , C09J133/04 , C09J163/00 , H01L21/00 , H01L21/58 , H01L21/78 , H01L21/301
CPC classification number: H01L24/27 , H01L2221/68336 , H01L2224/274 , H01L2224/2919 , H01L2224/83191 , H01L2224/94 , H01L2924/01005 , H01L2924/01012 , H01L2924/01029 , H01L2924/01079 , H01L2924/3512 , H01L2924/00 , H01L2224/27
Abstract: 本发明提供一种粘合片,使其能在100℃或以下的低温下粘贴到晶片上、具有能在室温下进行处理的柔韧度、而且能在通常的切断条件下与晶片同时切断;本发明还提供所述粘合片与切割胶带层压形成的与切割胶带一体化的粘合片,以及使用这些粘合片的半导体装置的制造方法。为此,所述粘合片的特征为,其断裂强度、断裂延伸率、弹性模量分别为所规定的特定数值范围内。
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公开(公告)号:CN102543809A
公开(公告)日:2012-07-04
申请号:CN201210003464.9
申请日:2008-11-07
Applicant: 日立化成工业株式会社
CPC classification number: C09J11/04 , C08K3/013 , C08L9/00 , C08L13/00 , C08L2666/04 , C09J7/00 , C09J7/10 , C09J133/08 , C09J2203/326 , C09J2205/102 , C09J2409/00 , H01L21/67132 , H01L21/6836 , H01L24/27 , H01L24/29 , H01L24/83 , H01L2221/68327 , H01L2224/27436 , H01L2224/2919 , H01L2224/2929 , H01L2224/29386 , H01L2224/83191 , H01L2224/8385 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01015 , H01L2924/0102 , H01L2924/01027 , H01L2924/01032 , H01L2924/01033 , H01L2924/01045 , H01L2924/01047 , H01L2924/01051 , H01L2924/01082 , H01L2924/0665 , H01L2924/07802 , H01L2924/12042 , H01L2924/181 , H01L2924/351 , Y10T428/2852 , H01L2924/00 , H01L2924/3512 , H01L2924/00014 , H01L2924/0532 , H01L2924/05432 , H01L2924/05032 , H01L2924/0503 , H01L2924/05442 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299
Abstract: 本发明提供通过扩张而可以切割性良好地单片化,且模制时对线路板的凹凸的填充性优良的半导体用粘接片及切割带一体型半导体用粘接片及使用其的半导体芯片搭载方法。该半导体用粘接片由含有高分子量成分及填料的树脂组合物构成,其特征在于,固化前的粘接片的0℃时的断裂伸长率为40%以下,固化后的粘接片的175℃时的弹性模量为0.1~10MPa。
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公开(公告)号:CN102174298A
公开(公告)日:2011-09-07
申请号:CN201110060460.X
申请日:2005-09-30
Applicant: 日立化成工业株式会社
IPC: C09J7/02
CPC classification number: H01L24/28 , C09J7/20 , C09J2201/28 , C09J2203/326 , H01L21/67132 , H01L21/6835 , H01L21/6836 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/73 , H01L24/83 , H01L25/0657 , H01L25/50 , H01L2221/68327 , H01L2221/6839 , H01L2224/26175 , H01L2224/274 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/48472 , H01L2224/73265 , H01L2224/7565 , H01L2224/83191 , H01L2224/83856 , H01L2225/0651 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01047 , H01L2924/01061 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/07802 , H01L2924/10253 , H01L2924/15311 , H01L2924/181 , Y10T156/1082 , Y10T156/1093 , Y10T428/1476 , Y10T428/24562 , Y10T428/2839 , H01L2924/00014 , H01L2924/00 , H01L2924/3512 , H01L2924/00012
Abstract: 本发明是粘接片及其制造方法、以及半导体装置的制造方法及半导体装置。本发明的卷是将按照剥离基材、粘接层、粘着层及基材薄膜的顺序层叠所构成的粘接片卷绕而成的卷,其特征为,所述粘接层具有规定的第1平面形状,且部分性地形成于所述剥离基材上;所述粘着层层叠为其覆盖所述粘接层,且于所述粘接层的周围与所述剥离基材接触。
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公开(公告)号:CN101714513A
公开(公告)日:2010-05-26
申请号:CN200910254219.3
申请日:2005-04-20
Applicant: 日立化成工业株式会社
IPC: H01L21/50 , H01L21/58 , H01L21/68 , C09J7/00 , C09J163/00
CPC classification number: H01L24/29 , C08K3/36 , C08L2666/02 , C09J7/10 , C09J163/00 , C09J2205/102 , C09J2463/00 , H01L21/67132 , H01L21/6836 , H01L23/3128 , H01L24/27 , H01L24/73 , H01L24/83 , H01L25/0657 , H01L2221/68327 , H01L2224/274 , H01L2224/29 , H01L2224/29101 , H01L2224/2919 , H01L2224/2929 , H01L2224/29386 , H01L2224/32145 , H01L2224/32225 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48235 , H01L2224/73265 , H01L2224/83191 , H01L2224/83855 , H01L2224/83856 , H01L2224/92247 , H01L2224/94 , H01L2225/0651 , H01L2225/06575 , H01L2924/00013 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01047 , H01L2924/01051 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/07802 , H01L2924/10329 , H01L2924/15311 , Y10T428/25 , Y10T428/28 , Y10T428/287 , H01L2924/00014 , H01L2924/00012 , H01L2924/00 , H01L2924/3512 , H01L2924/0532 , H01L2924/05432 , H01L2924/05032 , H01L2924/0503 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299 , H01L2924/20752 , H01L2224/27 , H01L2224/32245 , H01L2224/48247
Abstract: 本发明的目的在于提供一种粘着片,能够填充衬底的配线、或在半导体芯片附设的金属丝形成的凹凸,又在切割时不发生树脂飞边,而且能满足耐热性或耐湿性。本发明的粘着片的特征在于,含有:树脂100重量份,其包含含有交联性官能团的重均分子量为10万以上,且Tg为-50~50℃的高分子量成分15~40重量%、及以环氧树脂为主成分的热固化性成分60~85重量%;及填料40~180重量份,该粘着片的厚度为10~250μm。
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公开(公告)号:CN101447413A
公开(公告)日:2009-06-03
申请号:CN200810186927.3
申请日:2004-06-04
Applicant: 日立化成工业株式会社
CPC classification number: H01L24/27 , H01L2221/68336 , H01L2224/274 , H01L2224/2919 , H01L2224/83191 , H01L2224/94 , H01L2924/01005 , H01L2924/01012 , H01L2924/01029 , H01L2924/01079 , H01L2924/3512 , H01L2924/00 , H01L2224/27
Abstract: 本发明涉及粘合片、与切割胶带一体化粘合片以及半导体的制造方法。本发明提供半导体装置的制造方法,其特征在于,包括以下工序:通过在室温以下将半导体晶片、粘合片及切割胶带的层叠物进行扩张,切割半导体晶片及粘合片,形成带有多个单片化了的粘合片的半导体芯片。
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公开(公告)号:CN101040023A
公开(公告)日:2007-09-19
申请号:CN200580034993.3
申请日:2005-09-30
Applicant: 日立化成工业株式会社
IPC: C09J7/00 , C09J201/00 , H01L21/301
CPC classification number: H01L24/28 , C09J7/20 , C09J2201/28 , C09J2203/326 , H01L21/67132 , H01L21/6835 , H01L21/6836 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/73 , H01L24/83 , H01L25/0657 , H01L25/50 , H01L2221/68327 , H01L2221/6839 , H01L2224/26175 , H01L2224/274 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/48472 , H01L2224/73265 , H01L2224/7565 , H01L2224/83191 , H01L2224/83856 , H01L2225/0651 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01047 , H01L2924/01061 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/07802 , H01L2924/10253 , H01L2924/15311 , H01L2924/181 , Y10T156/1082 , Y10T156/1093 , Y10T428/1476 , Y10T428/24562 , Y10T428/2839 , H01L2924/00014 , H01L2924/00 , H01L2924/3512 , H01L2924/00012
Abstract: 本发明提供一种粘接片,其为具备剥离基材10、基材薄膜14、及配置于剥离基材10与基材薄膜14之间的第1粘接着层12的粘接片;剥离基材10上,由第1粘接着层12侧的面形成环状的切入部分D,第1粘接着层12为按覆盖剥离基材10的所述切入部分D的内侧面整体而层叠,所述切入部分D的切入深度d为小于剥离基材10的厚度,且为25μm以下。
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公开(公告)号:CN101392159B
公开(公告)日:2012-10-03
申请号:CN200810165822.X
申请日:2004-06-04
Applicant: 日立化成工业株式会社
IPC: C09J7/02 , C09J133/04 , C09J163/00 , H01L21/00 , H01L21/58 , H01L21/78 , H01L21/301
CPC classification number: H01L24/27 , H01L2221/68336 , H01L2224/274 , H01L2224/2919 , H01L2224/83191 , H01L2224/94 , H01L2924/01005 , H01L2924/01012 , H01L2924/01029 , H01L2924/01079 , H01L2924/3512 , H01L2924/00 , H01L2224/27
Abstract: 本发明提供一种粘合片,使其能在100℃或以下的低温下粘贴到晶片上、具有能在室温下进行处理的柔韧度、而且能在通常的切断条件下与晶片同时切断;本发明还提供所述粘合片与切割胶带层压形成的与切割胶带一体化的粘合片,以及使用这些粘合片的半导体装置的制造方法。为此,所述粘合片的特征为,其断裂强度、断裂延伸率、弹性模量分别为所规定的特定数值范围内。
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公开(公告)号:CN101714513B
公开(公告)日:2012-05-30
申请号:CN200910254219.3
申请日:2005-04-20
Applicant: 日立化成工业株式会社
IPC: H01L21/50 , H01L21/58 , H01L21/68 , C09J7/00 , C09J163/00
CPC classification number: H01L24/29 , C08K3/36 , C08L2666/02 , C09J7/10 , C09J163/00 , C09J2205/102 , C09J2463/00 , H01L21/67132 , H01L21/6836 , H01L23/3128 , H01L24/27 , H01L24/73 , H01L24/83 , H01L25/0657 , H01L2221/68327 , H01L2224/274 , H01L2224/29 , H01L2224/29101 , H01L2224/2919 , H01L2224/2929 , H01L2224/29386 , H01L2224/32145 , H01L2224/32225 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48235 , H01L2224/73265 , H01L2224/83191 , H01L2224/83855 , H01L2224/83856 , H01L2224/92247 , H01L2224/94 , H01L2225/0651 , H01L2225/06575 , H01L2924/00013 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01047 , H01L2924/01051 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/07802 , H01L2924/10329 , H01L2924/15311 , Y10T428/25 , Y10T428/28 , Y10T428/287 , H01L2924/00014 , H01L2924/00012 , H01L2924/00 , H01L2924/3512 , H01L2924/0532 , H01L2924/05432 , H01L2924/05032 , H01L2924/0503 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299 , H01L2924/20752 , H01L2224/27 , H01L2224/32245 , H01L2224/48247
Abstract: 本发明的目的在于提供一种粘着片,能够填充衬底的配线、或在半导体芯片附设的金属丝形成的凹凸,又在切割时不发生树脂飞边,而且能满足耐热性或耐湿性。本发明的粘着片的特征在于,含有:树脂100重量份,其包含含有交联性官能团的重均分子量为10万以上,且Tg为-50~50℃的高分子量成分15~40重量%、及以环氧树脂为主成分的热固化性成分60~85重量%;及填料40~180重量份,该粘着片的厚度为10~250μm。
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公开(公告)号:CN101471240B
公开(公告)日:2011-07-20
申请号:CN200810186926.9
申请日:2004-06-04
Applicant: 日立化成工业株式会社
CPC classification number: H01L24/27 , H01L2221/68336 , H01L2224/274 , H01L2224/2919 , H01L2224/83191 , H01L2224/94 , H01L2924/01005 , H01L2924/01012 , H01L2924/01029 , H01L2924/01079 , H01L2924/3512 , H01L2924/00 , H01L2224/27
Abstract: 本发明提供一种粘合片的切割方法,是通过扩张进行粘贴在半导体晶片上的粘合片的切割,其包括特定工序I)至III)以及IV)或者包括特定工序I’)至II)以及IV),并且,所述粘合片包括高分子量成分、热硬化性成分以及填料;其中,所述高分子量成分是,其玻璃化温度为-30℃~50℃,其重均分子量为5万~100万,其含量为粘合片总重量除去填料重量后的50重量%以下,所述填料其含量为粘合片总重量的5~70重量%。本发明提供的切割方法能在通常的切断条件同时切断晶片与粘合片,因此可以高效率地进行切割过程。
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公开(公告)号:CN101040023B
公开(公告)日:2011-05-04
申请号:CN200580034993.3
申请日:2005-09-30
Applicant: 日立化成工业株式会社
IPC: C09J7/00 , C09J201/00 , H01L21/301
CPC classification number: H01L24/28 , C09J7/20 , C09J2201/28 , C09J2203/326 , H01L21/67132 , H01L21/6835 , H01L21/6836 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/73 , H01L24/83 , H01L25/0657 , H01L25/50 , H01L2221/68327 , H01L2221/6839 , H01L2224/26175 , H01L2224/274 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/48472 , H01L2224/73265 , H01L2224/7565 , H01L2224/83191 , H01L2224/83856 , H01L2225/0651 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01047 , H01L2924/01061 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/07802 , H01L2924/10253 , H01L2924/15311 , H01L2924/181 , Y10T156/1082 , Y10T156/1093 , Y10T428/1476 , Y10T428/24562 , Y10T428/2839 , H01L2924/00014 , H01L2924/00 , H01L2924/3512 , H01L2924/00012
Abstract: 本发明提供一种粘接片,其为具备剥离基材10、基材薄膜14、及配置于剥离基材10与基材薄膜14之间的第1粘接着层12的粘接片;剥离基材10上,由第1粘接着层12侧的面形成环状的切入部分D,第1粘接着层12为按覆盖剥离基材10的所述切入部分D的内侧面整体而层叠,所述切入部分D的切入深度d为小于剥离基材10的厚度,且为25μm以下。
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