와이어 본딩 검사 시스템 및 그 방법
    15.
    发明授权
    와이어 본딩 검사 시스템 및 그 방법 有权
    WIRE BONDING检查系统和方法

    公开(公告)号:KR101181942B1

    公开(公告)日:2012-09-11

    申请号:KR1020110068566

    申请日:2011-07-11

    发明人: 김종원 양상규

    IPC分类号: H01L21/60 H01L21/66

    摘要: PURPOSE: A wire bonding inspection system and method are provided to improve accuracy of wire bonding inspection by determining whether a wire is normally connected or not by using a two-dimensional image of a wire region connected to a substrate. CONSTITUTION: A photographing unit(105) takes a photograph of a substrate in which a semiconductor chip is mounted. A lighting device(100) radiates light to the substrate so that the photographing unit takes a photograph of an accurate image. An image processing unit(115) performs image-processing for both ends of a wire interlinking the semiconductor chip and the substrate. A normality determination unit(125) determines whether the wire is bonded or not. A storing unit(120) stores determination standard data for determining normal connection of the wire.

    摘要翻译: 目的:提供一种引线接合检查系统和方法,通过使用连接到基板的导线区域的二维图像来确定线是否正常连接来提高引线接合检查的精度。 构成:拍摄单元(105)拍摄安装有半导体芯片的基板的照片。 照明装置(100)将光照射到基板,使得拍摄单元拍摄精确图像的照片。 图像处理单元(115)对半导体芯片和基板进行互连的线的两端进行图像处理。 正常度确定单元(125)确定线是否结合。 存储单元(120)存储用于确定线的正常连接的确定标准数据。

    와이어 본딩 장비에 탈부착이 가능한 먼지 제거 장치
    16.
    发明授权
    와이어 본딩 장비에 탈부착이 가능한 먼지 제거 장치 有权
    除尘装置可连接到导线接合设备

    公开(公告)号:KR101174479B1

    公开(公告)日:2012-08-16

    申请号:KR1020110068981

    申请日:2011-07-12

    发明人: 임은재 주용훈

    IPC分类号: H01L21/60

    摘要: 본발명에따른와이어본딩장비에탈부착이가능한먼지제거장치는, 와이어본딩장비에탈부착이가능한마운팅부; 상기마운팅부로부터직선적으로연장되게배치된제1가이드부재; 상기제1가이드부재에슬라이딩가능하게결합된제1이동부재; 상기제1이동부재에슬라이딩가능하게결합되며상기제1가이드부재에수직인방향으로배치된제2가이드부재; 상기제2가이드부재에슬라이딩가능하게결합된제2이동부재; 상기제2이동부재에슬라이딩가능하게결합되며상기제1가이드부재및 상기제2가이드부재에수직인방향으로배치된제3가이드부재; 및상기제3가이드부재의일단부에결합되며상기와이어본딩장비에로딩되는칩패드의표면에대해경사진방향으로공기를분사하도록배치된공기분사노즐과상기공기분사노즐로부터분사된공기의일부를흡입하여외부로배출하도록배치된공기배출부를구비한먼지제거모듈;을포함한것을특징으로한다.

    摘要翻译: 目的:为了有效地改变空气喷射位置,能够有效地除去装入引线接合装置的芯片焊盘的灰尘,能够与引线接合装置连接/分离的除尘装置。 构成:安装单元(20)可以与引线接合装置连接/分离。 第一引导构件(30)从安装单元膨胀。 第一移动构件(40)可以在第一引导构件上滑动。 第二引导构件(50)可以在第一移动构件上滑动。 第二移动构件(60)可以在第二引导构件上滑动。

    Capilary cleaning method of wire bonding process
    17.
    发明公开
    Capilary cleaning method of wire bonding process 无效
    电线连接工艺的尺寸清洁方法

    公开(公告)号:KR20120020289A

    公开(公告)日:2012-03-08

    申请号:KR20100083816

    申请日:2010-08-30

    申请人: SEMITECH CO LTD

    发明人: LEE GWANG JEONG

    IPC分类号: H01L21/60

    摘要: PURPOSE: A capillary cleaning method of a wire bonding process is provided to reduce manufacturing costs by omitting the installation of a separate cleaning chip in wire bonding process line equipment. CONSTITUTION: A lead frame(L) for cleaning comprises an abrasive sheet(10). The abrasive sheet comprises two or more polishing regions(11,12,13) with different surface roughness. A tip of a capillary is cleaned by successively touching the polishing regions with different surface roughness. The tip of the capillary is linearly transferred and generates frictional force on the surface of the abrasive sheet.

    摘要翻译: 目的:提供引线接合工艺的毛细管清洁方法,以通过省略在引线接合工艺线设备中安装单独的清洁芯片来降低制造成本。 构成:用于清洁的引线框架(L)包括研磨片(10)。 研磨片包括具有不同表面粗糙度的两个或更多个抛光区域(11,12,13)。 通过连续地接触具有不同表面粗糙度的抛光区域来清洁毛细管尖端。 毛细管的尖端被线性传递,并在研磨片的表面产生摩擦力。