公开(公告)号：US20220199839A1

公开(公告)日：2022-06-23

申请号：US17133599

申请日：2020-12-23

Applicant: Intel Corporation

Inventor： Arnab SEN GUPTA ,  Urusa ALAAN ,  Justin WEBER ,  Charles C. KUO ,  Yu-Jin CHEN ,  Kaan OGUZ ,  Matthew V. METZ ,  Abhishek A. SHARMA ,  Prashant MAJHI ,  Brian S. DOYLE ,  Van H. LE

IPC: H01L29/872 ,  H01L27/07 ,  H01L29/47 ,  H01L29/22

Abstract: Embodiments disclosed herein include semiconductor devices with Schottky diodes in a back end of line stack. In an embodiment, a semiconductor device comprises a semiconductor layer, where transistor devices are provided in the semiconductor layer, and a back end stack over the semiconductor layer. In an embodiment, a diode is in the back end stack. In an embodiment, the diode comprises a first electrode, a semiconductor region over the first electrode, and a second electrode over the semiconductor region. In an embodiment, a first interface between the first electrode and the semiconductor region is an ohmic contact, and a second interface between the semiconductor region and the second electrode is a Schottky contact.

公开(公告)号：US20160043302A1

公开(公告)日：2016-02-11

申请号：US14887168

申请日：2015-10-19

Applicant: Intel Corporation

Inventor： Brian S. DOYLE ,  Charles C. KUO ,  David L. KENCKE ,  Roksana GOLIZADEH MOJARAD ,  Uday SHAH

IPC: H01L43/02 ,  H01L27/22 ,  H01L43/12 ,  H01L43/08 ,  H01L43/10

CPC classification number: H01L43/02 ,  G11C11/155 ,  G11C11/161 ,  G11C11/1675 ,  H01L27/228 ,  H01L43/08 ,  H01L43/10 ,  H01L43/12

Abstract: Spin transfer torque memory (STTM) devices incorporating a field plate for application of an electric field to reduce a critical current required for transfer torque induced magnetization switching. Embodiments utilize not only current-induced magnetic filed or spin transfer torque, but also electric field induced manipulation of magnetic dipole orientation to set states in a magnetic device element (e.g., to write to a memory element). An electric field generated by a voltage differential between an MTJ electrode and the field plate applies an electric field to a free magnetic layer of a magnetic tunneling junction (MTJ) to modulate one or more magnetic properties over at least a portion of the free magnetic layer.

Abstract translation: 具有用于施加电场的场板的旋转转矩存储器（STTM）装置，以减少传递转矩感应磁化切换所需的临界电流。 实施例不仅利用电流感应磁场或自旋转移转矩，还利用电场诱导的磁偶极取向的操纵来设置磁性器件元件中的状态（例如，写入存储元件）。 由MTJ电极和场板之间的电压差产生的电场向磁性隧道结（MTJ）的自由磁性层施加电场，以在至少一部分自由磁性层上调制一个或多个磁性能 。

公开(公告)号：US20180248116A1

公开(公告)日：2018-08-30

申请号：US15753468

申请日：2015-09-18

Applicant: Intel Corporation

Inventor： Mark L. DOCZY ,  Brian S. DOYLE ,  Charles C. KUO ,  Kaan OGUZ ,  Kevin P. O'BRIEN ,  Satyarth SURI ,  Tejaswi K. INDUKURI

IPC: H01L43/12 ,  H01F10/32 ,  H01L43/08 ,  G11C11/16 ,  H01F41/34 ,  H01L27/22 ,  H01L43/02 ,  H01L43/10

CPC classification number: H01L43/12 ,  G11C11/161 ,  H01F10/3254 ,  H01F10/3272 ,  H01F10/3286 ,  H01F10/329 ,  H01F41/34 ,  H01L27/222 ,  H01L43/02 ,  H01L43/08 ,  H01L43/10

Abstract: Technologies for manufacturing spin transfer torque memory (STTM) elements are disclosed. In some embodiments, the technologies include methods for removing a re-deposited layer and/or interrupting the electrical continuity of a re-deposited layer that may form on one or more sidewalls of an STTM element during its formation. Devices and systems including such STTM elements are also described.

公开(公告)号：US20170345476A1

公开(公告)日：2017-11-30

申请号：US15503359

申请日：2014-09-26

Applicant: Intel Corporation

Inventor： Mark L. DOCZY ,  Kaan OGUZ ,  Brian S. DOYLE ,  Charles C. KUO ,  Robert S. CHAU ,  Satyarth SURI

IPC: G11C11/16 ,  H01L43/10 ,  H01L27/22 ,  H01L43/12 ,  H01F10/32

CPC classification number: G11C11/161 ,  H01F10/3286 ,  H01L27/222 ,  H01L43/10 ,  H01L43/12

Abstract: A material layer stack for a magnetic tunneling junction, the material layer stack including a fixed magnetic layer; a dielectric layer; a free magnetic layer; and an amorphous electrically-conductive seed layer, wherein the fixed magnetic layer is disposed between the dielectric layer and the seed layer. A non-volatile memory device including a material stack including an amorphous electrically-conductive seed layer; and a fixed magnetic layer juxtaposed and in contact with the seed layer. A method including forming an amorphous seed layer on a first electrode of a memory device; forming a material layer stack on the amorphous seed layer, the material stack including a dielectric layer disposed between a fixed magnetic layer and a free magnetic layer, wherein the fixed magnetic layer.

公开(公告)号：US20220199801A1

公开(公告)日：2022-06-23

申请号：US17132996

申请日：2020-12-23

Applicant: Intel Corporation

Inventor： Prashant MAJHI ,  Abhishek A. SHARMA ,  Charles C. KUO ,  Brian S. DOYLE ,  Urusa ALAAN ,  Van H. LE ,  Elijah V. KARPOV ,  Kaan OGUZ ,  Arnab SEN GUPTA

IPC: H01L29/66 ,  H01L29/786 ,  H01L29/49 ,  H01L29/51 ,  H01L21/683 ,  H01L29/78

Abstract: Embodiments disclosed herein include a semiconductor devices with back end of line (BEOL) transistor devices. In an embodiment, a semiconductor device comprises a semiconductor substrate and a BEOL stack over the semiconductor substrate. In an embodiment, a field effect transistor (FET) is embedded in the BEOL stack. In an embodiment, the FET comprises a channel, a gate dielectric over the channel, where the gate dielectric is single crystalline, a gate electrode over the gate dielectric, and a source electrode and a drain electrode passing through the gate dielectric to contact the channel.

公开(公告)号：US20220199609A1

公开(公告)日：2022-06-23

申请号：US17133595

申请日：2020-12-23

Applicant: Intel Corporation

Inventor： Urusa ALAAN ,  Abhishek A. SHARMA ,  Charles C. KUO ,  Benjamin ORR ,  Nicholas THOMSON ,  Ayan KAR ,  Arnab SEN GUPTA ,  Kaan OGUZ ,  Brian S. DOYLE ,  Prashant MAJHI ,  Van H. LE ,  Elijah V. KARPOV

IPC: H01L27/02 ,  H02H9/04

Abstract: Embodiments disclosed herein include semiconductor devices with electrostatic discharge (ESD) protection of the transistor devices. In an embodiment, a semiconductor device comprises a semiconductor substrate, where a transistor device is provided on the semiconductor substrate. In an embodiment, the semiconductor device further comprises a stack of routing layers over the semiconductor substrate, and a diode in the stack of routing layers. In an embodiment, the diode is configured to provide electrostatic discharge (ESD) protection to the transistor device.

公开(公告)号：US20150072490A1

公开(公告)日：2015-03-12

申请号：US14534088

申请日：2014-11-05

Applicant: Intel Corporation

Inventor： Brian S. DOYLE ,  Roza KOTLYAR ,  Uday SHAH ,  Charles C. KUO

IPC: H01L29/66 ,  H01L21/02

CPC classification number: H01L29/7827 ,  B82Y10/00 ,  H01L21/0237 ,  H01L21/02636 ,  H01L29/0669 ,  H01L29/0676 ,  H01L29/16 ,  H01L29/165 ,  H01L29/42376 ,  H01L29/42392 ,  H01L29/66431 ,  H01L29/66439 ,  H01L29/66666 ,  H01L29/775 ,  Y10S977/762

Abstract: Vertically oriented nanowire transistors including semiconductor layers or gate electrodes having compositions that vary over a length of the transistor. In embodiments, transistor channel regions are compositionally graded, or layered along a length of the channel to induce strain, and/or include a high mobility injection layer. In embodiments, a gate electrode stack including a plurality of gate electrode materials is deposited to modulate the gate electrode work function along the gate length.

Abstract translation: 垂直取向的纳米线晶体管包括具有在晶体管的长度上变化的组成的半导体层或栅电极。 在实施例中，晶体管沟道区域沿着沟道的长度成分地分级或分层以诱导应变，和/或包括高迁移率注入层。 在实施例中，沉积包括多个栅电极材料的栅极电极堆叠以沿着栅极长度调制栅电极功函数。

公开(公告)号：US20190006417A1

公开(公告)日：2019-01-03

申请号：US16069122

申请日：2016-03-28

Applicant: Intel Corporation

Inventor： Charles C. KUO ,  Mark L. DOCZY ,  Kaan OGUZ ,  Kevin P. O'BRIEN ,  Brian S. DOYLE

IPC: H01L27/22 ,  G11C11/16

Abstract: Approaches and structures for unipolar current switching in perpendicular magnetic tunnel junction (pMTJ) devices through reduced bi-polar coercivity are described. In an example, a memory array includes a plurality of bitlines and a plurality of select lines. The memory array also includes a plurality of memory elements located among and coupled to the plurality of bitlines and the plurality of select lines. Each of the plurality of memory elements includes a unipolar switching magnetic tunnel junction (MTJ) device and a select device.

公开(公告)号：US20180165065A1

公开(公告)日：2018-06-14

申请号：US15575334

申请日：2015-06-17

Applicant: Intel Corporation

Inventor： Charles C. KUO ,  Justin S. BROCKMAN ,  Juan G. ALZATE VINASCO ,  Kaan OGUZ ,  Kevin P. O'BRIEN ,  Brian S. DOYLE ,  Mark L. DOCZY ,  Satyarth SURI ,  Robert S. CHAU ,  Prashant MAJHI ,  Ravi PILLARISETTY ,  Elijah V. KARPOV

IPC: G06F7/58 ,  H01L43/08 ,  H01L43/02

CPC classification number: G06F7/588 ,  H01L43/02 ,  H01L43/08

Abstract: Described is an apparatus which comprises: a magnetic tunneling junction (MTJ) device with out-of-plane magnetizations for its free and fixed magnetic layers, and configured to have a magnetization offset away from a center and closer to a switching threshold of the MTJ device; and logic for generating random numbers according to a resistive state of the MTJ device.

公开(公告)号：US20170200884A1

公开(公告)日：2017-07-13

申请号：US15324589

申请日：2014-08-05

Applicant: Intel Corporation

Inventor： Kaan OGUZ ,  Mark L. DOCZY ,  Brian S. DOYLE ,  Charles C. KUO ,  Anurag CHAUDHRY ,  Robert S. CHAU

IPC: H01L43/08 ,  H01L27/22 ,  H01L43/12 ,  G11C11/16 ,  H01L43/10

CPC classification number: H01L43/08 ,  G11C11/161 ,  H01L27/228 ,  H01L43/10 ,  H01L43/12

Abstract: Embodiments of the present disclosure describe configurations and techniques to increase interfacial anisotropy of magnetic tunnel junctions. In embodiments, a magnetic tunnel junction may include a cap layer, a tunnel barrier, and a magnetic layer disposed between the cap layer and the tunnel barrier. A buffer layer may, in some embodiments, be disposed between the magnetic layer and a selected one of the cap layer or the tunnel barrier. In such embodiments, the interfacial anisotropy of the buffer layer and the selected one of the cap layer or the tunnel barrier may be greater than an interfacial anisotropy of the magnetic layer and the selected one of the cap layer or the tunnel barrier. Other embodiments may be described and/or claimed.