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公开(公告)号：US20150372660A1
公开(公告)日：2015-12-24
申请号：US14840834
申请日：2015-08-31
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
CPC classification number: H03H3/007 , G06F17/5063 , H03H3/02 , H03H3/08 , H03H9/02007 , H03H9/02244 , H03H9/02992 , H03H9/1071 , H03H9/2447 , H03H9/2452 , H03H9/2457 , H03H9/2463 , H03H9/54 , H03H9/56 , H03H9/64 , H03H2003/022 , H03H2003/023 , H03H2003/027 , H03H2009/155 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.
Abstract translation: 本文公开了可切换和/或可调滤波器，制造方法和设计结构。 形成滤波器的方法包括形成至少一个压电滤波器结构，其包括形成为与至少一个压电基板接触的多个电极。 该方法还包括形成包括MEMS光束的微电子机械结构（MEMS），其中，在致动时，MEMS光束将通过交替与压电基板接触的电极或者将 电极之间的至少一个压电基板。
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公开(公告)号：US20150244345A1
公开(公告)日：2015-08-27
申请号：US14700744
申请日：2015-04-30
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Mark D. JAFFE , Robert K. LEIDY , Anthony K. STAMPER
CPC classification number: H03H9/545 , H03H9/0547 , H03H9/171 , H03H9/173 , H03H9/56 , H03H2009/02204 , Y10T29/42
Abstract: Tunable filter structures, methods of manufacture and design structures are disclosed. The method of forming a filter structure includes forming a piezoelectric resonance filter over a cavity structure. The forming of the piezoelectric resonance filter includes: forming an upper electrode on one side of a piezoelectric material; and forming a lower electrode on an opposing side of the piezoelectric material. The method further includes forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter.
Abstract translation: 公开了可调谐滤波器结构，制造方法和设计结构。 形成滤波器结构的方法包括在空腔结构上形成压电谐振滤波器。 压电谐振滤波器的形成包括：在压电材料的一侧上形成上电极; 以及在所述压电材料的相对侧上形成下电极。 该方法还包括在致动时与压电谐振滤波器接触的位置处形成微机电结构（MEMS）悬臂梁。
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公开(公告)号：US20180254761A1
公开(公告)日：2018-09-06
申请号：US15971257
申请日：2018-05-04
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
IPC: H03H3/007 , H03H9/54 , H03H9/56 , G06F17/50 , H03H3/02 , H03H3/08 , H03H9/02 , H03H9/24 , H03H9/10 , H03H9/64 , H03H9/15
CPC classification number: H03H3/007 , G06F17/5063 , H03H3/02 , H03H3/08 , H03H9/02007 , H03H9/02244 , H03H9/02992 , H03H9/1071 , H03H9/2447 , H03H9/2452 , H03H9/2457 , H03H9/2463 , H03H9/54 , H03H9/56 , H03H9/64 , H03H2003/022 , H03H2003/023 , H03H2003/027 , H03H2009/155 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.
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公开(公告)号：US20170366153A1
公开(公告)日：2017-12-21
申请号：US15691249
申请日：2017-08-30
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
IPC: H03H3/007 , H03H9/56 , G06F17/50 , H03H3/02 , H03H9/02 , H03H9/24 , H03H9/10 , H03H9/64 , H03H9/54 , H03H3/08 , H03H9/15
CPC classification number: H03H3/007 , G06F17/5063 , H03H3/02 , H03H3/08 , H03H9/02007 , H03H9/02244 , H03H9/02992 , H03H9/1071 , H03H9/2447 , H03H9/2452 , H03H9/2457 , H03H9/2463 , H03H9/54 , H03H9/56 , H03H9/64 , H03H2003/022 , H03H2003/023 , H03H2003/027 , H03H2009/155 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.
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公开(公告)号：US20160155661A1
公开(公告)日：2016-06-02
申请号：US14558037
申请日：2014-12-02
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： James W. ADKISSON , Anthony K. STAMPER
IPC: H01L21/768 , H01L23/522 , H01L29/73 , H01L29/66
CPC classification number: H01L21/76814 , H01L21/02063 , H01L21/8249 , H01L23/485 , H01L27/0623 , H01L29/0821 , H01L29/1004 , H01L29/42304 , H01L29/66272 , H01L29/66318 , H01L29/732 , H01L29/7371 , H01L2924/0002 , H01L2924/00
Abstract: An advanced contact module for optimizing emitter and contact resistance and methods of manufacture are disclosed. The method includes forming a first contact via to a first portion of a first device. The method further includes filling the first contact via with metal material to form a first metal contact to the first portion of the first device. The method further includes forming additional contact vias to other portions of the first device and contacts of a second device. The method further includes cleaning the additional contact vias while protecting the first metal contact of the first portion of the first device. The method further includes filling the additional contact vias with metal material to form additional metal contacts to the other portions of the first device and the second device.
Abstract translation: 公开了一种用于优化发射极和接触电阻的高级接触模块及其制造方法。 该方法包括形成第一接触通孔到第一器件的第一部分。 该方法还包括用金属材料填充第一接触通孔以形成与第一器件的第一部分的第一金属接触。 该方法还包括向第一装置的其他部分和第二装置的触点形成额外的接触通孔。 该方法还包括在保护第一装置的第一部分的第一金属接触的同时清洁附加接触孔。 该方法还包括用金属材料填充附加的接触孔，以形成与第一装置和第二装置的其它部分的额外的金属接触。
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Patent Agency Ranking
公开(公告)号：US20160072469A1
公开(公告)日：2016-03-10
申请号：US14940815
申请日：2015-11-13
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
IPC: H03H3/04
CPC classification number: H03H3/04 , B81B7/008 , B81B7/02 , G06F17/5045 , H01L41/094 , H01L41/0973 , H03H3/08 , H03H9/0542 , H03H9/0547 , H03H9/1064 , H03H9/1092 , H03H9/48 , H03H9/542 , H03H9/6403 , H03H9/6423 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49147 , Y10T29/49156
Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes.
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公开(公告)号：US20150042418A1
公开(公告)日：2015-02-12
申请号：US14522676
申请日：2014-10-24
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
CPC classification number: H03H3/04 , B81B7/008 , B81B7/02 , G06F17/5045 , H01L41/094 , H01L41/0973 , H03H3/08 , H03H9/0542 , H03H9/0547 , H03H9/1064 , H03H9/1092 , H03H9/48 , H03H9/542 , H03H9/6403 , H03H9/6423 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49147 , Y10T29/49156
Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes.
Abstract translation: 本文公开了可切换和/或可调滤波器，制造方法和设计结构。 形成滤波器的方法包括形成至少一个包括形成在压电基片上的多个电极的压电滤波器结构。 该方法还包括形成微电子机械结构（MEMS），该微机电结构（MEMS）包括形成在压电基板上方的MEMS光束，并且在致动时，MEMS光束通过使多个或多个之中的至少一个接触而使压电滤波器结构短路的位置 的电极。
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公开(公告)号：US20170366154A1
公开(公告)日：2017-12-21
申请号：US15691272
申请日：2017-08-30
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
IPC: H03H3/007 , H03H9/56 , G06F17/50 , H03H3/02 , H03H9/02 , H03H9/24 , H03H9/10 , H03H9/64 , H03H9/54 , H03H3/08 , H03H9/15
CPC classification number: H03H3/007 , G06F17/5063 , H03H3/02 , H03H3/08 , H03H9/02007 , H03H9/02244 , H03H9/02992 , H03H9/1071 , H03H9/2447 , H03H9/2452 , H03H9/2457 , H03H9/2463 , H03H9/54 , H03H9/56 , H03H9/64 , H03H2003/022 , H03H2003/023 , H03H2003/027 , H03H2009/155 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.
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公开(公告)号：US20150318839A1
公开(公告)日：2015-11-05
申请号：US14755522
申请日：2015-06-30
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
CPC classification number: H03H9/13 , G06F17/5081 , H01L41/08 , H03H3/08 , H03H9/02543 , H03H9/64 , H03H9/6403 , H03H9/6413 , H03H2003/0071 , H03H2009/02299 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49147 , Y10T29/49155
Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a fixed electrode with a plurality of fingers on the piezoelectric substrate. The method further includes forming a moveable electrode with a plurality of fingers over the piezoelectric substrate. The method further includes forming actuators aligned with one or more of the plurality of fingers of the moveable electrode.
Abstract translation: 本文公开了可切换和/或可调滤波器，制造方法和设计结构。 形成滤波器的方法包括形成至少一个包括形成在压电基片上的多个电极的压电滤波器结构。 该方法还包括在压电基片上形成多个指状物的固定电极。 该方法还包括在压电衬底上形成具有多个指状物的可移动电极。 该方法还包括形成与可移动电极的多个指状物中的一个或多个对准的致动器。
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10.发明申请PIXEL SENSOR CELL WITH HOLD NODE FOR LEAKAGE CANCELLATION AND METHODS OF MANUFACTURE AND DESIGN STRUCTURE 有权用于泄漏消除的带有保持节点的像素传感器单元及其制造和设计结构的方法公开(公告)号：US20140340548A1
公开(公告)日：2014-11-20
申请号：US14449557
申请日：2014-08-01
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： James W. ADKISSON , John J. ELLIS-MONAGHAN , Richard J. RASSEL
CPC classification number: H04N5/3595 , H01L27/14603 , H01L27/14609 , H04N5/3532 , H04N5/359 , H04N5/3745 , H04N5/378
Abstract: A reference pixel sensor cell (e.g., global shutter) with hold node for leakage cancellation, methods of manufacture and design structure is provided. A pixel array includes one or more reference pixel sensor cells dispersed locally throughout active light sensing regions. The one or more reference pixel sensor cells provides a reference signal used to correct for photon generated leakage signals which vary by locality within the active light sensing regions.
Abstract translation: 提供了具有用于泄漏消除的保持节点的参考像素传感器单元（例如，全局快门），制造方法和设计结构。 像素阵列包括在有源光感测区域局部分散的一个或多个参考像素传感器单元。 一个或多个参考像素传感器单元提供用于校正由于有源光感测区域内的局部性而变化的光子产生的泄漏信号的参考信号。
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