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公开(公告)号：US11214870B2
公开(公告)日：2022-01-04
申请号：US15990051
申请日：2018-05-25
Applicant: Samsung Display Co., Ltd.
Inventor： Jaihyuk Choi , Jong-hoon Park , Kyungjoo Min , Wonwoong Park , Sukwon Jung , Hyunwoo Joo , Myungsoo Huh
IPC: C23C16/458 , C23C16/44 , H01J37/32 , C23C16/50 , H01L21/687 , C23C16/509 , C23C16/455 , H01R9/16 , H01R9/00 , H01L21/02
Abstract: A chemical vapor deposition (CVD) system may include a chamber, a susceptor provided in the chamber to support a substrate, a gas distribution part provided over the susceptor, a first ground strap bar provided on a bottom inner surface of the chamber and electrically connected to the chamber, a second ground strap bar provided on a bottom surface of the susceptor and electrically connected to the susceptor, and a plurality of ground straps electrically connected to the first and second ground strap bars, each of the plurality of ground straps including two opposite portions that are fastened to the first and second ground strap bars, respectively.
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2.发明申请公开(公告)号：US20190019652A1
公开(公告)日：2019-01-17
申请号：US15994486
申请日：2018-05-31
Applicant: Samsung Display Co., Ltd.
Inventor： Jong-hoon Park , Sukwon Jung , Hyunwoo Joo , Jaihyuk Choi , Kyungjoo Min , Wonwoong Park
IPC: H01J37/32 , C23C16/44 , C23C16/505 , H01L51/56
Abstract: A chemical vapor deposition apparatus includes a chamber, a susceptor supporting a substrate, a backing plate to which power is applied, a diffuser providing a deposition gas, and a first insulator. The first insulator may include a first portion covering a top surface of the backing plate, and a second portion assembled with the first portion and covering a sidewall of the backing plate.
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公开(公告)号：US20160133873A1
公开(公告)日：2016-05-12
申请号：US14811729
申请日：2015-07-28
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Myungsoo Huh , Sunghun Key , Sungchul Kim , Cheollae Roh , Sukwon Jung , Hyunwoo Joo , Jaihyuk Choi
CPC classification number: H01L51/5256 , C23C16/042 , C23C16/345 , C23C16/45565 , C23C16/505 , H01J37/32091 , H01J37/3244
Abstract: A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.
Abstract translation: 公开了一种显示装置及其制造方法。 显示装置包括：基板; 形成在所述基板上的显示单元; 以及形成在所述显示单元上的无机层，其中所述无机层的水蒸气透过率（WVTR）为5×10 -5 g / m 2·天以下。 用于制造显示装置的装置包括：腔室; 用于将混合气体喷射到所述室中的淋浴头; 用于从所述混合气体形成等离子体的等离子体产生单元; 面向淋浴喷头的感受器，其上安置有基底; 以及电连接到所述等离子体产生单元的电源单元，其中从所述电源单元提供给所述等离子体产生单元的电流的频率在约27MHz至约42MHz之间。
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4.发明授权公开(公告)号：US11842883B2
公开(公告)日：2023-12-12
申请号：US17718047
申请日：2022-04-11
Applicant: Samsung Display Co., Ltd.
Inventor： Jong-hoon Park , Sukwon Jung , Hyunwoo Joo , Jaihyuk Choi , Kyungjoo Min , Wonwoong Park
IPC: H01J37/32 , C23C16/44 , C23C16/505 , C23C16/455 , C23C16/509 , H10K71/00 , C23C16/34 , H10K71/16
CPC classification number: H01J37/32082 , C23C16/4411 , C23C16/4412 , C23C16/45565 , C23C16/505 , C23C16/5096 , H01J37/3244 , H01J37/32091 , H01J37/32458 , H01J37/32467 , H01J37/32568 , H01J37/32577 , H10K71/00 , C23C16/345 , H01J2237/3321 , H10K71/164
Abstract: A chemical vapor deposition apparatus includes a chamber, a susceptor supporting a substrate, a backing plate to which power is applied, a diffuser providing a deposition gas, and a first insulator. The first insulator may include a first portion covering a top surface of the backing plate, and a second portion assembled with the first portion and covering a sidewall of the backing plate.
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公开(公告)号：US09722206B2
公开(公告)日：2017-08-01
申请号：US14811729
申请日：2015-07-28
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Myungsoo Huh , Sunghun Key , Sungchul Kim , Cheollae Roh , Sukwon Jung , Hyunwoo Joo , Jaihyuk Choi
IPC: H01L33/00 , H01L51/52 , H01J37/32 , C23C16/04 , C23C16/34 , C23C16/455 , C23C16/505
CPC classification number: H01L51/5256 , C23C16/042 , C23C16/345 , C23C16/45565 , C23C16/505 , H01J37/32091 , H01J37/3244
Abstract: A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.
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Patent Agency Ranking
6.发明申请公开(公告)号：US20160204364A1
公开(公告)日：2016-07-14
申请号：US14730126
申请日：2015-06-03
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Hyunwoo Joo , Sungwoo Ryu , Jaewon Shim , Whanchae Yong , Sukwon Jung , Myungsoo Huh
CPC classification number: H01L51/0096 , B05B7/00 , B05D1/02 , C23C4/134 , C25D5/08 , H01L27/3244 , H01L51/003 , H01L51/5237 , H01L51/56 , H01L2227/323 , H01L2227/326
Abstract: Provided are a display apparatus and an apparatus and method of manufacturing the display apparatus. The apparatus for manufacturing a display apparatus includes: a dry cleansing unit configured to remove impurities from a surface of a mother substrate; an electrolyte treatment unit connected to the dry cleansing unit and configured to treat the surface of the mother substrate with electrolytes; and an exfoliated layer forming unit connected to the electrolyte treatment unit and configured to form an exfoliated layer on the mother substrate.
Abstract translation: 提供一种显示装置及其制造方法。 用于制造显示装置的装置包括：干洗单元，其构造成从母基板的表面去除杂质; 电解质处理单元，连接到所述干洗单元并且被配置为用电解质处理所述母基板的表面; 以及剥离层形成单元，连接到所述电解质处理单元并且被配置为在所述母体基板上形成剥离层。
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7.发明授权公开(公告)号：US11302517B2
公开(公告)日：2022-04-12
申请号：US15994486
申请日：2018-05-31
Applicant: Samsung Display Co., Ltd.
Inventor： Jong-hoon Park , Sukwon Jung , Hyunwoo Joo , Jaihyuk Choi , Kyungjoo Min , Wonwoong Park
IPC: H01J37/32 , C23C16/44 , C23C16/505 , H01L51/00 , H01L51/56 , C23C16/455 , C23C16/509 , C23C16/34
Abstract: A chemical vapor deposition apparatus includes a chamber, a susceptor supporting a substrate, a backing plate to which power is applied, a diffuser providing a deposition gas, and a first insulator. The first insulator may include a first portion covering a top surface of the backing plate, and a second portion assembled with the first portion and covering a sidewall of the backing plate.
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公开(公告)号：US10796933B2
公开(公告)日：2020-10-06
申请号：US16173950
申请日：2018-10-29
Applicant: Samsung Display Co., Ltd.
Inventor： Haeyoung Yoo , Taejong Kim , Juhee Lee , Myungsoo Huh , Jaekyu Park , Hyunwoo Joo
IPC: H01L21/67 , H01J37/32 , H01L27/12 , H01L21/311 , H01L21/027 , H01L27/32
Abstract: Provided is a display device manufacturing apparatus and a manufacturing method of a display device. The display device manufacturing apparatus includes: a chamber; a supporter arranged in the chamber and supporting a substrate; an electrode arranged in the chamber so as to face the supporter; a gas supply arranged in the chamber and configured to supply process gas into the chamber; a first baffle arranged at a rim of the supporter and having at least one first through hole; and a second baffle arranged between the first baffle and the chamber and covering the at least one first through hole in a plan view to alter a path of by-products discharged from the chamber.
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公开(公告)号：US20170309864A1
公开(公告)日：2017-10-26
申请号：US15640945
申请日：2017-07-03
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Myungsoo Huh , Sunghun Key , Sungchul Kim , Cheollae Roh , Sukwon Jung , Hyunwoo Joo , Jaihyuk Choi
IPC: H01L51/52 , H01J37/32 , C23C16/505 , C23C16/455 , C23C16/34 , C23C16/04
CPC classification number: H01L51/5256 , C23C16/042 , C23C16/345 , C23C16/45565 , C23C16/505 , H01J37/32091 , H01J37/3244
Abstract: A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.
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公开(公告)号：US09735379B2
公开(公告)日：2017-08-15
申请号：US14730126
申请日：2015-06-03
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Hyunwoo Joo , Sungwoo Ryu , Jaewon Shim , Whanchae Yong , Sukwon Jung , Myungsoo Huh
CPC classification number: H01L51/0096 , B05B7/00 , B05D1/02 , C23C4/134 , C25D5/08 , H01L27/3244 , H01L51/003 , H01L51/5237 , H01L51/56 , H01L2227/323 , H01L2227/326
Abstract: Provided are a display apparatus and an apparatus and method of manufacturing the display apparatus. The apparatus for manufacturing a display apparatus includes: a dry cleansing unit configured to remove impurities from a surface of a mother substrate; an electrolyte treatment unit connected to the dry cleansing unit and configured to treat the surface of the mother substrate with electrolytes; and an exfoliated layer forming unit connected to the electrolyte treatment unit and configured to form an exfoliated layer on the mother substrate.
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