公开(公告)号：US06846750B1

公开(公告)日：2005-01-25

申请号：US09604724

申请日：2000-06-28

申请人： Tokuhisa Ohiwa ,  Shoji Seta ,  Nobuo Hayasaka ,  Katsuya Okumura ,  Akihiro Kojima ,  Junko Ohuchi ,  Tsukasa Azuma ,  Hideo Ichinose ,  Ichiro Mizushima

发明人： Tokuhisa Ohiwa ,  Shoji Seta ,  Nobuo Hayasaka ,  Katsuya Okumura ,  Akihiro Kojima ,  Junko Ohuchi ,  Tsukasa Azuma ,  Hideo Ichinose ,  Ichiro Mizushima

IPC分类号： H01L21/302 ,  H01L21/033 ,  H01L21/30 ,  H01L21/306 ,  H01L21/3065 ,  H01L21/311 ,  H01L21/316 ,  H01L21/768 ,  H01L21/461

CPC分类号： H01L21/76802 ,  H01L21/0331 ,  H01L21/31111 ,  H01L21/31116 ,  H01L21/31604 ,  H01L21/31616 ,  H01L21/76816 ,  H01L21/7682

摘要： According to the present invention, there is provided a method of manufacturing a semiconductor device, where a soluble thin film which is soluble in a dissolving liquid is used. According to the method of the present invention, when a soluble thin film is formed between a film to be processed which should be patterned and a mask pattern, it becomes possible to remove the mask pattern by lifting-off. On the other hand, when the thin film is used for a dummy layer for forming an air wiring structure, the dummy layer can be removed without performing ashing using oxygen plasma.

摘要翻译： 根据本发明，提供一种制造半导体器件的方法，其中使用可溶于溶解液的可溶性薄膜。 根据本发明的方法，当在要被图案化的被处理膜和掩模图案之间形成可溶性薄膜时，可以通过剥离来去除掩模图案。 另一方面，当薄膜用于形成空气布线结构的虚拟层时，可以去除虚拟层而不用氧等离子体进行灰化。

公开(公告)号：US06607986B2

公开(公告)日：2003-08-19

申请号：US09739905

申请日：2000-12-20

申请人： Shoji Seta ,  Hideo Ichinose

发明人： Shoji Seta ,  Hideo Ichinose

IPC分类号： H01L21302

CPC分类号： H01L21/76802 ,  H01L21/31116 ,  H01L21/31138 ,  H01L21/7682 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/00

摘要： In a method for dry-etching a coating by use of reactive gas which is activated, a second insulating layer containing carbon atoms which is formed on a first insulating layer containing carbon atoms is ashed by use of a gas containing carbon atoms and at least one of oxygen atoms, nitrogen atoms and hydrogen atoms. By using the above gas, the second insulating layer containing carbon atoms which is formed on the first insulating layer which is an underlying layer can be efficiently ashed and removed without removing carbon atoms in the side surface of the grooves formed in the first insulating layer and etching the side surface thereof. Thus, the side surface of the groove formed in the first insulating layer will not be modified or deformed.

摘要翻译： 在通过使用被活化的反应性气体干蚀刻涂层的方法中，通过使用含有碳原子的气体和至少一个含有碳原子的气体将形成在含有碳原子的第一绝缘层上的含有碳原子的第二绝缘层灰化 的氧原子，氮原子和氢原子。 通过使用上述气体，能够有效地除去形成在作为下层的第一绝缘层上的含有碳原子的第二绝缘层，而不除去在第一绝缘层中形成的槽的侧面中的碳原子， 蚀刻其侧表面。 因此，形成在第一绝缘层中的槽的侧表面将不会改变或变形。

公开(公告)号：US06987066B2

公开(公告)日：2006-01-17

申请号：US10602072

申请日：2003-06-24

申请人： Shoji Seta ,  Hideo Ichinose

发明人： Shoji Seta ,  Hideo Ichinose

IPC分类号： H01L21/426

CPC分类号： H01L21/76802 ,  H01L21/31116 ,  H01L21/31138 ,  H01L21/7682 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/00

摘要： A dry etching method comprises sequentially laminating a first insulating layer containing carbon and a second insulating layer containing carbon on a substrate, patterning the second insulating layer to form a mask; forming grooves in the first insulating layer by etching the first insulating layer with the second insulating layer used as a mask such that each of the grooves has a side surface and a bottom surface in the first insulating layer; and removing the second insulating layer by use of a reactive gas containing carbon atoms and at least one of oxygen atoms, hydrogen atoms and nitrogen atoms.

摘要翻译： 干蚀刻方法包括在基板上依次层压包含碳的第一绝缘层和含有碳的第二绝缘层，图案化第二绝缘层以形成掩模; 通过用作为掩模的第二绝缘层蚀刻第一绝缘层，使得每个沟槽在第一绝缘层中具有侧表面和底表面，在第一绝缘层中形成沟槽; 以及通过使用含有碳原子和氧原子，氢原子和氮原子中的至少一个的反应气体除去第二绝缘层。

公开(公告)号：US08269346B2

公开(公告)日：2012-09-18

申请号：US13047057

申请日：2011-03-14

申请人： Shoji Seta ,  Hideaki Ikuma ,  Yukihito Oowaki

发明人： Shoji Seta ,  Hideaki Ikuma ,  Yukihito Oowaki

IPC分类号： H01L23/48

CPC分类号： H01L24/05 ,  H01L23/3114 ,  H01L23/525 ,  H01L24/13 ,  H01L2224/02375 ,  H01L2224/02381 ,  H01L2224/0401 ,  H01L2224/05548 ,  H01L2224/05553 ,  H01L2224/05572 ,  H01L2924/00014 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01077 ,  H01L2924/14 ,  H01L2224/05552 ,  H01L2924/00

摘要： A semiconductor device has an LSI chip including a semiconductor substrate, an LSI core section provided at a center portion of the semiconductor substrate and serving as a multilayered wiring layer of the semiconductor substrate, a first rewiring layer provided adjacent to an outer periphery of the LSI core section on the semiconductor substrate and including a plurality of wiring layers, a first pad electrode disposed at an outer periphery of the first rewiring layer, and an insulation layer covering the first pad electrode. The semiconductor device includes a second rewiring layer provided on the LSI chip and including a rewiring connected to the first pad electrode. The semiconductor device includes a plurality of ball electrodes provided on the second rewiring layer. The first rewiring layer is electrically connected to the LSI core section and the first pad electrode.

摘要翻译： 半导体器件具有包括半导体衬底的LSI芯片，设置在半导体衬底的中心部分并用作半导体衬底的多层布线层的LSI芯部，与LSI的外周相邻设置的第一重新布线层 芯部，并且包括多个布线层，设置在第一重新布线层的外周的第一焊盘电极和覆盖第一焊盘电极的绝缘层。 半导体器件包括设置在LSI芯片上并包括连接到第一焊盘电极的重新布线的第二重新布线层。 半导体器件包括设置在第二重新布线层上的多个球电极。 第一再布线层与LSI芯部和第一焊盘电极电连接。

公开(公告)号：US08450855B2

公开(公告)日：2013-05-28

申请号：US13047042

申请日：2011-03-14

申请人： Shoji Seta ,  Hideaki Ikuma

发明人： Shoji Seta ,  Hideaki Ikuma

IPC分类号： H01L23/48 ,  H01L23/52

CPC分类号： H01L23/49816 ,  H01L23/3114 ,  H01L23/3192 ,  H01L23/525 ,  H01L23/5286 ,  H01L24/04 ,  H01L24/05 ,  H01L24/13 ,  H01L2224/02373 ,  H01L2224/02375 ,  H01L2224/02381 ,  H01L2224/0401 ,  H01L2224/05548 ,  H01L2224/05572 ,  H01L2224/13006 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01075 ,  H01L2924/01077 ,  H01L2924/14 ,  H01L2224/05552 ,  H01L2924/00

摘要： A semiconductor device has a semiconductor substrate which has a plurality of pad electrodes provided on a top surface thereof and has an approximately rectangular shape; a rewiring layer which is provided with a plurality of contact wiring lines connected to the plurality of pad electrodes, is disposed on the semiconductor substrate through an insulating film, and has an approximately rectangular shape; and a plurality of ball electrodes which are provided on the rewiring layer. A plurality of first pad electrodes among the plurality of pad electrodes are arranged on an outer circumference of the semiconductor substrate to be along a first side of the semiconductor substrate, a plurality of first ball electrodes among the plurality of ball electrodes are arranged on an outer circumference of the rewiring layer to be along the first side, and any one of the plurality of first ball electrodes is connected to the first pad electrode positioned below the corresponding ball electrode through the contact wiring lines, and the first pad electrodes are not disposed on the lower side of the first ball electrodes positioned at an end of the first side.

摘要翻译： 半导体器件具有半导体衬底，其具有设置在其顶表面上的大致矩形形状的多个焊盘电极; 配置有与多个焊盘电极连接的多个接触布线的再布线层通过绝缘膜设置在半导体基板上，并且具有大致矩形形状; 以及设置在再布线层上的多个球电极。 多个焊盘电极中的多个第一焊盘电极布置在半导体衬底的外周上，沿着半导体衬底的第一侧，多个球电极中的多个第一球电极被布置在外部 再布线层的周边沿着第一侧，并且多个第一球电极中的任一个通过接触布线连接到位于相应球电极下方的第一焊盘电极，并且第一焊盘电极不设置在 第一球电极的下侧位于第一侧的端部。

公开(公告)号：US06492278B2

公开(公告)日：2002-12-10

申请号：US09742116

申请日：2000-12-22

申请人： Hideo Shinomiya ,  Shoji Seta

发明人： Hideo Shinomiya ,  Shoji Seta

IPC分类号： H01L21302

CPC分类号： H01L21/31144

摘要： A second resist film is formed on a first resist film and then patterned. Thereafter, an SOG film is formed on the entire surface of the resultant structure to cover the second resist film. Subsequently, the SOG film and the second resist film and the first resist film are removed to pattern the SOG film and the first resist film. After that, using the patterned the first resist film as a mask, a trench is formed.

摘要翻译： 在第一抗蚀剂膜上形成第二抗蚀剂膜，然后将其图案化。 此后，在所得结构的整个表面上形成SOG膜以覆盖第二抗蚀剂膜。 随后，除去SOG膜和第二抗蚀剂膜和第一抗蚀剂膜以图案化SOG膜和第一抗蚀剂膜。 之后，使用图案化的第一抗蚀剂膜作为掩模，形成沟槽。

公开(公告)号：US08653629B2

公开(公告)日：2014-02-18

申请号：US13236353

申请日：2011-09-19

申请人： Shoji Seta ,  Yojiro Hamasaki

发明人： Shoji Seta ,  Yojiro Hamasaki

IPC分类号： H01L23/544

CPC分类号： H01L22/32 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device has a semiconductor substrate. The semiconductor device has a plurality of LSI regions that are formed on the semiconductor substrate and are provided with a first power supply wiring layer including a first power supply wire. The semiconductor device has a first power supply terminal formed on the semiconductor substrate. The semiconductor device has a second power supply wiring layer including a second power supply wire that electrically connects the first power supply wire and the first power supply terminal, the second power supply wiring layer is formed in a dicing region between the LSI regions along a dicing line that separates the LSI regions and the dicing line region. A first barrier metal film is formed at least in the LSI regions at a boundary between the first power supply wire and the second power supply wire.

摘要翻译： 半导体器件具有半导体衬底。 半导体器件具有形成在半导体衬底上的多个LSI区域，并且设置有包括第一电源线的第一电源布线层。 半导体器件具有形成在半导体衬底上的第一电源端子。 半导体器件具有包括电连接第一电源线和第一电源端子的第二电源线的第二电源布线层，第二电源布线层沿着切割形成在LSI区域之间的切割区域中 该线分离LSI区域和切割线区域。 至少在LSI区域中在第一电源线和第二电源线之间的边界处形成第一阻挡金属膜。

公开(公告)号：US20110205257A1

公开(公告)日：2011-08-25

申请号：US13102194

申请日：2011-05-06

申请人： Shoji Seta

发明人： Shoji Seta

IPC分类号： G09G5/10 ,  G09G5/00

CPC分类号： G09G3/3611 ,  G09G2310/08 ,  G09G2370/08

摘要： A semiconductor device includes: an LCD controller configured to output a plurality of image signals in parallel; a plurality of signal lines respectively corresponding to the plurality of image signals to be outputted in parallel; a plurality of terminal portions respectively connected to the plurality of signal lines; and delay circuits configured to delay a plurality of image signals, which are divided into a plurality of groups to the extent that the sum of each value of a current flowing through each signal line does not exceed a predetermined current value and outputted from a plurality of terminal portions, by a predetermined delay time from each other among the plurality of groups.

摘要翻译： 半导体器件包括：LCD控制器，被配置为并行地输出多个图像信号; 分别对应于要平行输出的多个图像信号的多个信号线; 分别连接到所述多条信号线的多个端子部分; 以及延迟电路，被配置为延迟被分成多个组的多个图像信号，使得流过每个信号线的电流的每个值的和不超过预定电流值，并从多个 终端部分在多个组中彼此预定的延迟时间。

公开(公告)号：US07652920B2

公开(公告)日：2010-01-26

申请号：US11444537

申请日：2006-06-01

申请人： Shoji Seta ,  Takeshi Yoshimoto

发明人： Shoji Seta ,  Takeshi Yoshimoto

IPC分类号： G11C16/06

CPC分类号： H03K19/1776 ,  H03K19/17764

摘要： A programmable logic device unit, a non-volatile memory unit which stores data for programming the programmable logic device unit in a part of data storage area thereof and a control circuit which controls the non-volatile memory unit to allow the data stored in a part of the data storage area to be read at power-on time and supplied to the programmable logic device unit are integrally provided on a semiconductor chip. Based on the program data, the programmable logic device unit forms an interface for allowing the non-volatile memory unit to operate as at least one of a register, a flash memory, a random access memory, and a read-only memory.

摘要翻译： 一种可编程逻辑器件单元，一种非易失性存储器单元，其存储用于将可编程逻辑器件单元编程在其数据存储区域的一部分中的数据;以及控制电路，其控制非易失性存储器单元以允许存储在部件中的数据 在电源接通时被读取并提供给可编程逻辑器件单元的数据存储区域被一体地设置在半导体芯片上。 基于程序数据，可编程逻辑器件单元形成用于允许非易失性存储器单元作为寄存器，闪速存储器，随机存取存储器和只读存储器中的至少一个来操作的接口。

公开(公告)号：US07370307B2

公开(公告)日：2008-05-06

申请号：US11249388

申请日：2005-10-14

申请人： Shoji Seta

发明人： Shoji Seta

IPC分类号： G06F17/50 ,  H01L29/40

CPC分类号： G06F17/5077 ,  H01L23/5222 ,  H01L23/528 ,  H01L2924/0002 ,  H01L2924/00

摘要： A computer automated design system includes a subject routing module configured to set a first grid area and a first diagonal grid area and route a first wire in the first grid area and a first diagonal wire extending diagonally to a longitudinal direction of the first wire and a next routing module configured to set a second grid area and a second diagonal grid area and route a second wire in the second grid area and a second diagonal wire extending diagonally to a longitudinal direction of the second wire.

摘要翻译： 计算机自动化设计系统包括被配置为设置第一网格区域和第一对角网格区域并且将第一网格布置在第一网格区域中的对象路线模块以及沿第一线材的纵向方向对角延伸的第一对角线材，以及 下一路由模块，被配置为设置第二网格区域和第二对角线网格区域，并且将所述第二网格区域中的第二线路布置，并且沿着所述第二线材的纵向方向对角地延伸的第二对角线材。