摘要:
The interferometer 10 according to this disclosure includes: a first optical component 12 that splits each of the P polarization component and the S polarization component of the light to be measured into the first optical path R1 and the second optical path R2 and combines the light to be measured; a second optical component 13 placed in the first optical path; a third optical component 14 that splits the light to be measured into the P polarization component and the S polarization component; and a P polarization detector 11a and an S polarization detector 11b that respectively detect the P polarization component and the S polarization component split by the third optical component, wherein the second optical component has an optical surface that changes the propagation direction of the light to be measured and gives a phase difference between the P polarization component and the S polarization component.
摘要:
A position measurement system configured to measure a position of an object. The system includes an optical system to obtain a first measurement wave and a second measurement wave from a radiation source, and to allow the first and second measurement wave to at least partially interfere with each other after interaction of at least one of the first and second measurement wave with the object to form a first detection beam. The system further includes a first detector to receive the first detection beam. The system also has a processing unit configured to receive an output from the first detector and to determine a signal representative for the position of the object from the output, wherein the optical system includes a phase modulator configured to modulate a phase difference between the first measurement wave and the second measurement wave.
摘要:
Apparatus, systems, and methods are used for detecting the alignment of a feature on a substrate using a polarization independent interferometer. The apparatus, system, and methods include optical elements that receive light that has diffracted or scattered from a mark on a substrate. The optical elements may split the diffracted light into multiple subbeams of light which are detected by one or more detectors. The diffracted light may be combined optically or during processing after detection. The system may determine alignment and/or overlay based on the received diffracted light having any polarization angle or state.
摘要:
The embodiments of the present disclosure relate to a Fabry-Perot cavity, a manufacturing method thereof, an interferometer and a measuring method for wavelength of light. The Fabry-Perot cavity includes two parallel substrates and a liquid crystal layer between the two parallel substrates, and a sealed cavity is defined between the two substrates; wherein the two substrates comprise a first substrate and a second substrate, light could enter through the first substrate and run out from the second substrate via the liquid crystal layer, and a deflection angle of the liquid crystal layer could be changed by applying various voltage between the two substrates.
摘要:
The present invention provides a sample inspection and quantitative imaging system and method for performing off-axis interferometric imaging while enabling to record off-axis holograms in an extended field of view (FOV) than possible using a given camera and imaging setup, and thus to enlarge (e.g. double, triple, or even more than this) the interferometric FOV, without changing the imaging parameters, such as the magnification and the resolution.
摘要:
An imaging apparatus adjusts the polarization directions of irradiation beams (to a diffraction grating) corresponding to first and second beams respectively which have different polarization directions (for example, by adjusting a relative angle formed between light-emitting ends of respective polarization maintaining fibers) so that the spectral characteristics of the irradiation beams at the diffraction grating coincide with each other. Then, the imaging apparatus acquires a tomographic image indicating polarization information for a object based on beams (that come from the diffraction grating for splitting and diffracting a beam from the adjustment unit) corresponding to the first and second beams respectively which have different polarization directions.
摘要:
Preferred embodiments of the present invention are directed to systems for phase measurement which address the problem of phase noise using combinations of a number of strategies including, but not limited to, common-path interferometry, phase referencing, active stabilization and differential measurement. Embodiment are directed to optical devices for imaging small biological objects with light. These embodiments can be applied to the fields of, for example, cellular physiology and neuroscience. These preferred embodiments are based on principles of phase measurements and imaging technologies. The scientific motivation for using phase measurements and imaging technologies is derived from, for example, cellular biology at the sub-micron level which can include, without limitation, imaging origins of dysplasia, cellular communication, neuronal transmission and implementation of the genetic code. The structure and dynamics of sub-cellular constituents cannot be currently studied in their native state using the existing methods and technologies including, for example, x-ray and neutron scattering. In contrast, light based techniques with nanometer resolution enable the cellular machinery to be studied in its native state. Thus, preferred embodiments of the present invention include systems based on principles of interferometry and/or phase measurements and are used to study cellular physiology. These systems include principles of low coherence interferometry (LCI) using optical interferometers to measure phase, or light scattering spectroscopy (LSS) wherein interference within the cellular components themselves is used, or in the alternative the principles of LCI and LSS can be combined to result in systems of the present invention.
摘要:
A system, process and software arrangement are provided to determine at least one position of at least one portion of a sample. In particular, information associated with the portion of the sample is obtained. Such portion may be associated with an interference signal that includes a first electromagnetic radiation received from the sample and a second electro-magnetic radiation received from a reference. In addition, depth information and/or lateral information of the portion of the sample, may be obtained. At least one weight function can be applied to the depth information and/or the lateral information so as to generate resulting information. Further, a surface position, a lateral position and/or a depth position of the portion of the sample may be ascertained based on the resulting information.
摘要:
A method and apparatus for extracting the vector optical properties of biological samples with micron-scale resolution in three dimensions, using polarization-sensitive optical coherence tomography (PS-OCT). The method measures net retardance, net fast axis, and reflectivity. Polarization sensing is accomplished by illuminating the sample with at least three separate polarization states, using consecutive acquisitions of the same pixel, A-scan, or B-scan. The method can be implemented using non-polarization-maintaining fiber and a single detector. This PS-OCT method reported measures fast axis explicitly. In a calibration test of the system, net retardance was measured with an average error of 7.5° (standard deviation 2.2°) over the retardance range 0° to 180°, and fast axis with average error of 4.8° over the range 0° to 180°.
摘要:
A method and device for optical determination of physical properties of features, not much larger than the optical wavelength used, on a test sample are described. A beam is split into reference and illuminating beams having known polarization. The test sample is exposed to the illuminating beam and recombined to form an image. The image is detected using at least one sensor, which may be cameras. A point-to-point map of polarization, phase and power is extracted from data representing the image. Optionally, the sensor may be a camera. The sensor may detect at least three optical parameters, such as a Stokes vector, a Jones vector, a Jones matrix, a Mueller matrix or a coherency matrix.