Systems and methods to retard copper diffusion and improve film adhesion for a dielectric barrier on copper
    91.
    发明授权
    Systems and methods to retard copper diffusion and improve film adhesion for a dielectric barrier on copper 有权
    阻止铜扩散的系统和方法,并改善铜上介质阻挡层的膜粘附性

    公开(公告)号:US06764952B1

    公开(公告)日:2004-07-20

    申请号:US10099232

    申请日:2002-03-13

    IPC分类号: H01L2144

    摘要: Two sequential treatments within a chemical vapor deposition chamber, or within sequential chambers without a vacuum break, are performed on a copper layer to clean and passivate the copper surface prior to deposition of a copper diffusion barrier layer or a dielectric layer. The first treatment includes an ammonia, a hydrogen, or a hydrocarbon plasma cleaning of the copper surface followed by a short initiation of an organosilane precursor or a thin silicon nitride layer. A copper diffusion barrier layer may then be formed over the pretreated copper surface using an organosilane plasma, with or without a carbon dioxide or a carbon monoxide, or a silane with a nitrogen gas and an ammonia gas. Copper diffusion is retarded and film adhesion is improved for a dielectric layer or a copper diffusion barrier layer on the copper surface.

    摘要翻译: 化学气相沉积室内或在没有真空断裂的连续室内的两个连续处理在铜层上进行,以在沉积铜扩散阻挡层或介电层之前对铜表面进行清洁和钝化。 第一种处理包括氨,氢或铜表面的烃等离子体清洗,随后有机硅烷前体或薄氮化硅层的短时间启动。 然后可以使用具有或不具有二氧化碳或一氧化碳的有机硅烷等离子体或具有氮气和氨气的硅烷在预处理的铜表面上形成铜扩散阻挡层。 对于铜表面上的电介质层或铜扩散阻挡层,延伸铜扩散并改善膜粘附。

    Method and apparatus for quantizing and run length encoding transform coefficients in a video coder
    93.
    发明授权
    Method and apparatus for quantizing and run length encoding transform coefficients in a video coder 失效
    用于在视频编码器中量化和运行长度编码变换系数的方法和装置

    公开(公告)号:US06339614B1

    公开(公告)日:2002-01-15

    申请号:US08772219

    申请日:1996-12-20

    申请人: Atul Gupta

    发明人: Atul Gupta

    IPC分类号: H04N712

    CPC分类号: H04N19/93 H04N19/42 H04N19/61

    摘要: A method and apparatus for run length encoding video data for transform based coders. The video data is separated into blocks of pixels. The pixel values are transformed to another set of values which can be represented with less data. The transformed values are quantized by generating a quantized magnitude and sign for multiple transformed values at a time, while removing branch misprediction errors during the quanitizing process. The quantized values are run length encoded by removing branch misprediction errors during the encoding process.

    摘要翻译: 一种用于基于变换的编码器的视频数据的游程长度编码方法和装置。 视频数据被分成像素块。 将像素值转换为可以用较少数据表示的另一组值。 变换后的值通过产生一次量化幅度和多次变换值的符号进行量化,同时消除在量化过程中的分支错误预测误差。 通过在编码过程中消除分支错误预测错误,量化值被编码。

    Self-aligned ion implantation for IBC solar cells
    94.
    发明授权
    Self-aligned ion implantation for IBC solar cells 有权
    IBC太阳能电池的自对准离子注入

    公开(公告)号:US08735234B2

    公开(公告)日:2014-05-27

    申请号:US13028562

    申请日:2011-02-16

    摘要: An improved method of doping a substrate is disclosed. The method is particularly beneficial to the creation of interdigitated back contact (IBC) solar cells. A paste having a dopant of a first conductivity is applied to the surface of the substrate. This paste serves as a mask for a subsequent ion implantation step, allowing ions of a dopant having an opposite conductivity to be introduced to the portions of the substrate which are exposed. After the ions are implanted, the mask can be removed and the dopants may be activated. Methods of using an aluminum-based and phosphorus-based paste are disclosed.

    摘要翻译: 公开了改进的掺杂衬底的方法。 该方法特别有利于产生叉指式背接触(IBC)太阳能电池。 将具有第一导电性的掺杂剂的糊剂施加到基板的表面。 该糊剂用作随后的离子注入步骤的掩模,允许具有相反电导率的掺杂剂的离子被引入到暴露的衬底的部分。 离子注入后,可以去除掩模,并且可以激活掺杂剂。 公开了使用铝基和磷基糊的方法。

    Manufacturing high efficiency solar cell with directional doping
    95.
    发明授权
    Manufacturing high efficiency solar cell with directional doping 失效
    制造具有定向掺杂的高效太阳能电池

    公开(公告)号:US08664100B2

    公开(公告)日:2014-03-04

    申请号:US13175298

    申请日:2011-07-01

    申请人: Atul Gupta

    发明人: Atul Gupta

    IPC分类号: H01L21/425 H01L31/18

    摘要: A first facet of each of a plurality of pyramids on a surface of a workpiece is doped to a first dose while a second facet and a third facet of each of the plurality of pyramids is simultaneously doped to a second dose different than the first dose. The first facets may enable low resistance contacts and the second and third facets may enable higher current generation and an improved blue response. Ion implantation may be used to perform the doping.

    摘要翻译: 将工件表面上的多个金字塔中的每一个的第一小面掺杂到第一剂量,同时将多个金字塔中的每一个的第二面和第三面同时掺杂到与第一剂量不同的第二剂量。 第一面可以实现低电阻触点,并且第二和第三面可以实现更高的电流产生和改善的蓝色响应。 离子注入可用于进行掺杂。

    Masked ion implant with fast-slow scan
    96.
    发明授权
    Masked ion implant with fast-slow scan 失效
    具有快速扫描的掩蔽离子植入物

    公开(公告)号:US08461553B2

    公开(公告)日:2013-06-11

    申请号:US13188837

    申请日:2011-07-22

    摘要: An improved method of producing solar cells utilizes a mask which is fixed relative to an ion beam in an ion implanter. The ion beam is directed through a plurality of apertures in the mask toward a substrate. The substrate is moved at different speeds such that the substrate is exposed to an ion dose rate when the substrate is moved at a first scan rate and to a second ion dose rate when the substrate is moved at a second scan rate. By modifying the scan rate, various dose rates may be implanted on the substrate at corresponding substrate locations. This allows ion implantation to be used to provide precise doping profiles advantageous for manufacturing solar cells.

    摘要翻译: 制造太阳能电池的改进方法利用在离子注入机中相对于离子束固定的掩模。 离子束被引导通过掩模中的多个孔朝向衬底。 衬底以不同的速度移动,使得当衬底以第一扫描速率移动时衬底暴露于离子剂量率,而当衬底以第二扫描速率移动时,衬底暴露于离子剂量率。 通过修改扫描速率,可以在相应的衬底位置的衬底上植入各种剂量率。 这允许离子注入用于提供有利于制造太阳能电池的精确掺杂分布。

    Bifacial solar cell using ion implantation
    98.
    发明授权
    Bifacial solar cell using ion implantation 有权
    双极太阳能电池使用离子注入

    公开(公告)号:US08153456B2

    公开(公告)日:2012-04-10

    申请号:US13010303

    申请日:2011-01-20

    IPC分类号: H01L21/00

    摘要: An improved bifacial solar cell is disclosed. In some embodiments, the front side includes an n-type field surface field, while the back side includes a p-type emitter. In other embodiments, the p-type emitter is on the front side. To maximize the diffusion of majority carriers and lower the series resistance between the contact and the substrate, the regions beneath the metal contacts are more heavily doped. Thus, regions of higher dopant concentration are created in at least one of the FSF or the emitter. These regions are created through the use of selective implants, which can be performed on one or two sides of the bifacial solar cell to improve efficiency.

    摘要翻译: 公开了一种改进的双面太阳能电池。 在一些实施例中,前侧包括n型场表面场,而后侧包括p型发射器。 在其他实施例中,p型发射器在前侧。 为了使多数载流子的扩散最大化并降低接触和衬底之间的串联电阻,金属接触点下方的区域更加重掺杂。 因此,在至少一个FSF或发射极中产生较高掺杂浓度的区域。 这些区域是通过使用选择性植入物产生的,这可以在双面太阳能电池的一侧或两侧进行,以提高效率。

    CONTINUOUSLY OPTIMIZED SOLAR CELL METALLIZATION DESIGN THROUGH FEED-FORWARD PROCESS
    99.
    发明申请
    CONTINUOUSLY OPTIMIZED SOLAR CELL METALLIZATION DESIGN THROUGH FEED-FORWARD PROCESS 审中-公开
    通过进给前进过程连续优化的太阳能电池金属化设计

    公开(公告)号:US20120064661A1

    公开(公告)日:2012-03-15

    申请号:US13300075

    申请日:2011-11-18

    IPC分类号: H01L31/18

    摘要: An improved, lower cost method of processing substrates, such as to create solar cells, is disclosed. The doped regions are created on the substrate, using a mask or without the use of lithography or masks. After the implantation is complete, visual recognition is used to determine the exact region that was implanted. This information can then be used by subsequent process steps to crate a suitable metallization layer and provide alignment information. These techniques can also be used in other ion implanter applications. In another aspect, a dot pattern selective emitter is created, and imaging is used to determine the appropriate metallization layer.

    摘要翻译: 公开了一种改进的,低成本的处理衬底的方法,例如制造太阳能电池。 使用掩模或不使用光刻或掩模在衬底上产生掺杂区域。 植入完成后,使用视觉识别来确定植入的确切区域。 然后可以通过随后的工艺步骤来使用该信息来对合适的金属化层进行包装并提供对准信息。 这些技术也可用于其他离子注入机应用。 在另一方面,创建点图案选择性发射器,并且使用成像来确定合适的金属化层。