Selective titanium nitride removal
    98.
    发明授权

    公开(公告)号:US09607856B2

    公开(公告)日:2017-03-28

    申请号:US14720183

    申请日:2015-05-22

    Abstract: Methods are described herein for selectively etching titanium nitride relative to dielectric films, which may include, for example, alternative metals and metal oxides lacking in titanium and/or silicon-containing films (e.g. silicon oxide, silicon carbon nitride and low-K dielectric films). The methods include a remote plasma etch formed from a chlorine-containing precursor. Plasma effluents from the remote plasma are flowed into a substrate processing region where the plasma effluents react with the titanium nitride. The plasma effluents react with exposed surfaces and selectively remove titanium nitride while very slowly removing the other exposed materials. The substrate processing region may also contain a plasma to facilitate breaking through any titanium oxide layer present on the titanium nitride. The plasma in the substrate processing region may be gently biased relative to the substrate to enhance removal rate of the titanium oxide layer.

    LOW TEMPERATURE CHUCK FOR PLASMA PROCESSING SYSTEMS
    100.
    发明申请
    LOW TEMPERATURE CHUCK FOR PLASMA PROCESSING SYSTEMS 审中-公开
    等离子体加工系统的低温冲击

    公开(公告)号:US20160225652A1

    公开(公告)日:2016-08-04

    申请号:US14612857

    申请日:2015-02-03

    Abstract: A wafer chuck assembly includes a puck, a shaft and a base. The puck includes an electrically insulating material that defines a top surface of the puck; a plurality of electrodes are embedded within the electrically insulating material. The puck also includes an inner puck element that forms one or more channels for a heat exchange fluid, the inner puck element being in thermal communication with the electrically insulating material, and an electrically conductive plate disposed proximate to the inner puck element. The shaft includes an electrically conductive shaft housing that is electrically coupled with the plate, and a plurality of connectors, including electrical connectors for the electrodes. The base includes an electrically conductive base housing that is electrically coupled with the shaft housing, and an electrically insulating terminal block disposed within the base housing, the plurality of connectors passing through the terminal block.

    Abstract translation: 晶片卡盘组件包括圆盘,轴和基座。 圆盘包括限定冰球顶表面的电绝缘材料; 多个电极嵌入电绝缘材料内。 该圆盘还包括内部圆盘元件,其形成用于热交换流体的一个或多个通道,内部圆盘元件与电绝缘材料热连通,以及设置在靠近内部圆锥元件的导电板。 所述轴包括与所述板电耦合的导电轴壳体,以及包括用于所述电极的电连接器的多个连接器。 基座包括与轴壳体电耦合的导电基座壳体,以及设置在基座壳体内的电绝缘接线块,多个连接器穿过接线端子。

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