DIE STITCHING AND HARVESTING OF ARRAYED STRUCTURES

    公开(公告)号:US20220199517A1

    公开(公告)日:2022-06-23

    申请号:US17133096

    申请日:2020-12-23

    Applicant: Apple Inc.

    Abstract: Multi-die structures with die-to-die routing are described. In an embodiment, each die is patterned into the same semiconductor substrate, and the dies may be interconnected with die-to-die routing during back-end wafer processing. Partial metallic seals may be formed to accommodate the die-to-die routing, programmable dicing, and various combinations of full metallic seals and partial metallic seals can be formed. This may also be extended to three dimensional structures formed using wafer-on-wafer or chip-on-wafer techniques.

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